Prosecution Insights
Last updated: April 19, 2026

Spano Law Group (Kla)

10 pending office actions • 1 client

Portfolio Summary

10
Total Pending OAs
0
Final Rejections
10
Non-Final OAs

Client Portfolio (1 client)

Client (Assignee)Pending OAs
Kla Corporation 10

Pending Office Actions

App #TitleClientExaminerArt UnitStatusFiled
18743118 Multiple Pass Optical Measurements Of Semiconductor Structures Kla Corporation KIM, PETER B 2882 Non-Final OA Jun 14, 2024
18387015 Methods And Systems For Measurement Of Semiconductor Structures With Active Tilt Correction Kla Corporation FABIAN JR, ROBERTO 2877 Non-Final OA Nov 04, 2023
18375920 Magnetically Opposed, Iron Core Linear Motor Based Motion Stages For Semiconductor Wafer Positioning Kla Corporation DESAI, NAISHADH N 2834 Non-Final OA Oct 02, 2023
18231688 Methods And Systems For Scatterometry Based Metrology Of Structures Fabricated On Transparent Substrates Kla Corporation GRAY, SUNGHEE Y 2877 Non-Final OA Aug 08, 2023
18229606 Methods And Systems For Systematic Error Compensation Across A Fleet Of Metrology Systems Based On A Trained Error Evaluation Model Kla Corporation GAVIA, NYLA EMANI ANN 2857 Non-Final OA Aug 02, 2023
18136747 Full Wafer Measurement Based On A Trained Full Wafer Measurement Model Kla Corporation HENSON, MISCHITA L 2857 Non-Final OA Apr 19, 2023
18136772 Combined Spectroscopic Reflectometry And Pattern Recognition Based Measurements Of Semiconductor Structures Kla Corporation UNDERWOOD, JARREAS C 2877 Non-Final OA Apr 19, 2023
17993565 Methods And Systems For Data Driven Parameterization And Measurement Of Semiconductor Structures Kla Corporation DINH, PAUL 2851 Non-Final OA Nov 23, 2022
17956643 Spectroscopic Reflectometry And Ellipsometry Measurements With Electroreflectance Modulation Kla Corporation YAZBACK, MAHER 2877 Non-Final OA Sep 29, 2022
17590116 Methods And Systems For Accurate Measurement Of Deep Structures Having Distorted Geometry Kla Corporation JEFFERSON, QUOVAUNDA 2899 Non-Final OA Feb 01, 2022

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