8 pending office actions
| App # | Title | Examiner | Art Unit | Status | Filed |
|---|---|---|---|---|---|
| 18607498 | Substrate Processing System | LOWE, MICHAEL S | 3652 | Non-Final OA | Mar 17, 2024 |
| 18396397 | SUPPORT | BENNETT, CHARLEE | 1718 | Non-Final OA | Dec 26, 2023 |
| 18387697 | ANTI-STICTION LAYER DEPOSITION | BRASFIELD, QUINTON A | 2814 | Non-Final OA | Nov 07, 2023 |
| 18375009 | Method of Plasma Etching | AHMED, SHAMIM | 1713 | Non-Final OA | Sep 29, 2023 |
| 18375238 | Method and Apparatus for Plasma Etching Dielectric Substrates | KACKAR, RAM N | 1716 | Non-Final OA | Sep 29, 2023 |
| 18213865 | Control of Trench Profile Angle in SiC Semiconductors | DUCLAIR, STEPHANIE P. | 1713 | Non-Final OA | Jun 25, 2023 |
| 17976798 | PVD Method and Apparatus | BRAYTON, JOHN JOSEPH | 1794 | Non-Final OA | Oct 29, 2022 |
| 17461928 | Deposition Method | OTT, PATRICK S | 1794 | Non-Final OA | Aug 30, 2021 |
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