Prosecution Insights
Last updated: April 19, 2026

Mks Inc.

16 pending office actions • 8 clients

Portfolio Summary

16
Total Pending OAs
3
Final Rejections
13
Non-Final OAs

Client Portfolio (8 clients)

Client (Assignee)Pending OAs
Electro Scientific Industries, Inc. 5
Mks Inc. 3
Mks Instruments, Inc. 2
Photon Control, Inc. 2
Atotech Deutschland GmbH & Co. KG 1
Photon Control, Inc. 1
Electro Scientific Industries, Inc. 1
Newport Corporation 1

Pending Office Actions

App #TitleClientExaminerArt UnitStatusFiled
18862399 METHOD FOR DEPOSITING A ZINC-NICKEL ALLOY ON A SUBSTRATE, AN AQUEOUS ZINC-NICKEL DEPOSITION BATH, A BRIGHTENING AGENT AND USE THEREOF Atotech Deutschland GmbH & Co. KG HASKE, WOJCIECH 1794 Non-Final OA Nov 01, 2024
18729604 GERMANIUM AOD SYSTEM WITH PARALLEL AND PERPENDICULAR ORIENTATIONS Electro Scientific Industries, Inc. LEIBY, CHRISTOPHER E 2621 Non-Final OA Jul 17, 2024
18663649 LASER-PROCESSING APPARATUS, METHODS OF OPERATING THE SAME, AND METHODS OF PROCESSING WORKPIECES USING THE SAME Electro Scientific Industries, Inc. CHOU, JIMMY 3761 Final Rejection May 14, 2024
18631119 INVERTED PLASMA SOURCE Mks Inc. SATHIRAJU, SRINIVAS 2844 Non-Final OA Apr 10, 2024
18606120 OFF-AXIS FIBER OPTIC SENSOR Photon Control, Inc. GREEN, TAJANAE NICOLE 2874 Non-Final OA Mar 15, 2024
18253997 APPARATUS AND METHOD FOR OPERATING ACOUSTO- OPTICAL DEFLECTORS Electro Scientific Industries, Inc. TALLMAN, ROBERT E 2872 Non-Final OA May 23, 2023
18253838 LASER PROCESSING APPARATUS, METHODS OF OPERATING THE SAME, AND METHODS OF PROCESSING WORKPIECES USING THE SAME Electro Scientific Industries, Inc. TRAN, TIFFANY T 3761 Non-Final OA May 22, 2023
18252059 OPTICAL RELAY SYSTEM AND METHODS OF USE AND MANUFACTURE Electro Scientific Industries, Inc. WEN, KEVIN GUANHUA 3761 Non-Final OA May 08, 2023
18251616 LASER-PROCESSING APPARATUS WITH DEBRIS REMOVAL SYSTEM AND INTEGRATED BEAM DUMP AND METHODS OF OPERATING THE SAME Electro Scientific Industries, Inc. BACHNER, ROBERT G 2898 Non-Final OA May 03, 2023
18134087 COATINGS FOR USE IN REMOTE PLASMA SOURCE APPLICATIONS AND METHOD OF THEIR MANUFACTURE Mks Instruments, Inc. VAN, LUAN V 1795 Non-Final OA Apr 13, 2023
18095881 Robust Ion Source Mks Inc. ENGLISH, PETER C 3993 Non-Final OA Jan 11, 2023
18079338 DISSOLVED AMMONIA DELIVERY SYSTEM AND METHODS OF USE Mks Instruments, Inc. PEO, JONATHAN M 1779 Final Rejection Dec 12, 2022
18049379 Fiber Optic Temperature Probe for Temperature Limiting Applications Photon Control, Inc. GIBSON, RANDY W 2855 Non-Final OA Oct 25, 2022
17830232 Light-Enhanced Ozone Wafer Processing System and Method of Use Mks Inc. CHAUDHRI, OMAIR 1711 Non-Final OA Jun 01, 2022
17726725 Flexible Temperature Probe Photon Control, Inc. TRAN, HOANG Q 2874 Non-Final OA Apr 22, 2022
17721834 Vibration Isolation Apparatus with Thermally Conductive Pneumatic Chamber, and Method of Manufacture Newport Corporation KING, BRADLEY T 3616 Final Rejection Apr 15, 2022

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