| 19188275 |
METHOD FOR SIMULATING ILLUMINATION AND IMAGING PROPERTIES OF AN OPTICAL PRODUCTION SYSTEM WHEN AN OBJECT IS ILLUMINATED AND IMAGED BY MEANS OF AN OPTICAL MEASUREMENT SYSTEM |
RIDDLE, CHRISTINA A |
2882 |
§101§102§103§112 |
Non-Final OA |
— |
Pending |
Apr 24, 2025 |
| 19170372 |
METHOD FOR COATING A SUBSTRATE |
BERMAN, JASON |
1794 |
§102§103 |
Final Rejection |
34d |
Pending |
Apr 04, 2025 |
| 19171128 |
METHOD FOR OPERATING AN OPTICAL COMPONENT, AND OPTICAL COMPONENT |
RIDDLE, CHRISTINA A |
2882 |
§102§103§112 |
Non-Final OA |
— |
Pending |
Apr 04, 2025 |
| 19170404 |
MIRROR, IN PARTICULAR FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS, AND METHOD OF PROCESSING A MIRROR |
RIDDLE, CHRISTINA A |
2882 |
§103§112 |
Non-Final OA |
— |
Pending |
Apr 04, 2025 |
| 19095316 |
COMPUTER IMPLEMENTED METHOD, COMPUTER-READABLE MEDIUM, COMPUTER PROGRAM PRODUCT AND CORRESPONDING SYSTEMS FOR THE PREDICTION OF DEFECTS IN WAFERS AND FOR OFFLINE WAFER-LESS PROCESS WINDOW QUALIFICATION |
TSWEI, YU-JANG |
2614 |
§101§103 |
Non-Final OA |
— |
Pending |
Mar 31, 2025 |
| 19082444 |
METHOD FOR OPERATING A PROJECTION EXPOSURE SYSTEM |
WHITESELL, STEVEN H |
1759 |
§102§103 |
Non-Final OA |
— |
Pending |
Mar 18, 2025 |
| 19082944 |
OPTICAL ELEMENT FOR A PROJECTION EXPOSURE SYSTEM, OPTICAL SYSTEM COMPRISING SAME AND PROJECTION EXPOSURE SYSTEM COMPRISING THE OPTICAL ELEMENT AND/OR THE OPTICAL SYSTEM |
RIDDLE, CHRISTINA A |
2882 |
§103§112 |
Non-Final OA |
— |
Pending |
Mar 18, 2025 |
| 19074961 |
BIPOD, OPTICAL SYSTEM AND PROJECTION EXPOSURE APPARATUS |
ASFAW, MESFIN T |
2882 |
§102§103 |
Non-Final OA |
— |
Pending |
Mar 10, 2025 |
| 19073220 |
MICROELECTROMECHANICAL DEVICE |
WHITESELL, STEVEN H |
1759 |
§103 |
Non-Final OA |
— |
Pending |
Mar 07, 2025 |
| 19068695 |
ILLUMINATION SYSTEM, RADIATION SOURCE APPARATUS, METHOD FOR ILLUMINATING A RETICLE, AND LITHOGRAPHY SYSTEM |
ASFAW, MESFIN T |
2882 |
§102§103 |
Non-Final OA |
— |
Pending |
Mar 03, 2025 |
| 19063773 |
INDIVIDUAL MIRROR OF A PUPIL FACET MIRROR AND PUPIL FACET MIRROR FOR AN ILLUMINATION OPTICAL UNIT OF A PROJECTION EXPOSURE APPARATUS |
ASFAW, MESFIN T |
2882 |
§103 |
Non-Final OA |
— |
Pending |
Feb 26, 2025 |
| 19059808 |
INTERMEDIATE PRODUCT FOR PRODUCING AN OPTICAL ELEMENT FOR A PROJECTION EXPOSURE APPARATUS, OPTICAL ELEMENT FOR A PROJECTION EXPOSURE APPARATUS, METHOD FOR PRODUCING AN INTERMEDIATE PRODUCT, AND METHOD FOR PRODUCING AN OPTICAL ELEMENT |
NGUYEN, HUNG |
2882 |
§102§103 |
Non-Final OA |
— |
Pending |
Feb 21, 2025 |
| 19018304 |
LENS ELEMENT FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS DESIGNED FOR OPERATION IN THE DUV, AND METHOD AND ARRANGEMENT FOR FORMING AN ANTIREFLECTION LAYER |
WHITESELL, STEVEN H |
1759 |
§103 |
Non-Final OA |
— |
Pending |
Jan 13, 2025 |
| 19015842 |
X-RAY IMAGING SYSTEM |
HO, ALLEN C |
2884 |
§102 |
Non-Final OA |
— |
Pending |
Jan 10, 2025 |
| 19008383 |
APPARATUS AND METHOD FOR PROVIDING SENSOR DATA OF AN OPTICAL SYSTEM, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS HAVING AN OPTICAL SYSTEM |
PERSAUD, DEORAM |
2882 |
§102§103 |
Non-Final OA |
— |
Pending |
Jan 02, 2025 |
| 19000922 |
MEASURING ASSEMBLY FOR DETECTING A DISTANCE BETWEEN TWO ELEMENTS, DISTANCE MEASURING DEVICE, OPTICAL MEASURING SYSTEM AND METHOD |
NGUYEN, SANG H |
2877 |
§102§103 |
Non-Final OA |
— |
Pending |
Dec 24, 2024 |
| 18971089 |
COMPUTER IMPLEMENTED METHOD FOR GENERATING AN AERIAL IMAGE OF A PHOTOLITHOGRAPHY MASK USING A MACHINE LEARNING MODEL |
BAYAT, ALI |
2677 |
§101§103§112 |
Non-Final OA |
— |
Pending |
Dec 06, 2024 |
| 18935796 |
METHOD FOR MEASURING AN EFFECT OF A WAVELENGTH-DEPENDENT MEASURING LIGHT REFLECTIVITY AND AN EFFECT OF A POLARIZATION OF MEASURING LIGHT ON A MEASURING LIGHT IMPINGEMENT ON A LITHOGRAPHY MASK |
AYUB, HINA F |
2877 |
§112 |
Final Rejection |
— |
Pending |
Nov 04, 2024 |
| 18920238 |
METHOD FOR MEASURING THE ILLUMINATION PUPIL IN A SCANNER TAKING INTO ACCOUNT A MEASUREMENT RETICLE |
KIM, PETER B |
2882 |
§102§112 |
Final Rejection |
— |
Pending |
Oct 18, 2024 |
| 18901513 |
DEVICE AND METHOD FOR ALIGNING TWO COMPONENTS |
WHITESELL, STEVEN H |
1759 |
§102§103§112 |
Non-Final OA |
— |
Pending |
Sep 30, 2024 |
| 18897888 |
BEAM ANGLE ROTATION AND SAMPLE ROTATION |
KALISZEWSKI, ALINA ROSE |
2881 |
§102§103§112 |
Non-Final OA |
— |
Pending |
Sep 26, 2024 |
| 18895292 |
DRIVE DEVICE, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS |
WHITESELL, STEVEN H |
1759 |
§112 |
Final Rejection |
5d overdue |
Pending |
Sep 24, 2024 |
| 18830054 |
COMPUTER IMPLEMENTED METHOD FOR THE DETECTION OF ANOMALIES IN AN IMAGING DATASET OF A WAFER, AND SYSTEMS MAKING USE OF SUCH METHODS |
HARPER, ELIYAH STONE |
2166 |
§102 |
Non-Final OA |
— |
Pending |
Sep 10, 2024 |
| 18807439 |
METHOD FOR MACHINING A WORKPIECE |
GATES, BRADFORD M |
1713 |
§102§103§112 |
Non-Final OA |
— |
Pending |
Aug 16, 2024 |
| 18802211 |
OPTICAL SYSTEM COMPRISING AN EUV MIRROR AND METHOD FOR OPERATING AN OPTICAL SYSTEM |
BOOHER, ADAM W |
— |
§102§103 |
Final Rejection |
— |
Pending |
Aug 13, 2024 |
| 18792737 |
COMPUTER IMPLEMENTED METHOD FOR DEFECT DETECTION IN AN OBJECT COMPRISING INTEGRATED CIRCUIT PATTERNS AND CORRESPONDING COMPUTER-READABLE MEDIUM, COMPUTER PROGRAM AND SYSTEM |
PHAM, ANNIE |
2662 |
§101§102§103§112 |
Non-Final OA |
— |
Pending |
Aug 02, 2024 |
| 18792755 |
COMPUTER IMPLEMENTED METHOD FOR DEFECT DETECTION IN AN IMAGING DATASET OF AN OBJECT COMPRISING INTEGRATED CIRCUIT PATTERNS |
HSIEH, PING Y |
2664 |
§102§103 |
Final Rejection |
— |
Pending |
Aug 02, 2024 |
| 18781256 |
COMPUTER IMPLEMENTED METHOD FOR THE DETECTION AND CLASSIFICATION OF ANOMALIES IN AN IMAGING DATASET OF A WAFER, AND SYSTEMS MAKING USE OF SUCH METHODS |
EL-BATHY, IBRAHIM N |
3626 |
§101 |
Non-Final OA |
— |
Pending |
Jul 23, 2024 |
| 18778483 |
INFEROMETRIC MEASURING APPARATUS |
SCHNASE, PAUL DANIEL |
2877 |
§103 |
Final Rejection |
12d |
Pending |
Jul 19, 2024 |
| 18746596 |
METHOD AND DRYING DEVICE |
TREMARCHE, CONNOR J. |
— |
§103 |
Non-Final OA |
— |
Pending |
Jun 18, 2024 |
| 18741925 |
METHOD AND APPARATUS FOR PRODUCING AT LEAST ONE HOLLOW STRUCTURE, MIRROR, EUV LITHOGRAPHY SYSTEM, FLUID FEED APPARATUS AND METHOD FOR FEEDING A FLUID |
KIM, PETER B |
2882 |
§102§103§112 |
Final Rejection |
— |
Pending |
Jun 13, 2024 |
| 18674144 |
COMPENSATION RASTER SCANNING |
MCCORMACK, JASON L |
2881 |
§102§103§112 |
Non-Final OA |
— |
Pending |
May 24, 2024 |
| 18666211 |
METHOD, OPTICAL SYSTEM, TEST DEVICE AND ARRANGEMENT |
MILLER, DANIEL R |
2858 |
§103§112 |
Non-Final OA |
— |
Pending |
May 16, 2024 |
| 18648644 |
OPTICAL SYSTEM FOR A METROLOGY SYSTEM AND METROLOGY SYSTEM WITH SUCH AN OPTICAL SYSTEM |
MENDOZA, ALEXANDRIA ARELLANO |
2877 |
§103 |
Non-Final OA |
12d |
Pending |
Apr 29, 2024 |
| 18639028 |
MEASUREMENT APPARATUS AND METHOD FOR INSPECTING PHOTOMASKS INTENDED FOR EUV MICROLITHOGRAPHY |
WANG, JING |
2881 |
§103 |
Final Rejection |
— |
Pending |
Apr 18, 2024 |
| 18631733 |
HIGH RESOLUTION, LOW ENERGY ELECTRON MICROSCOPE FOR PROVIDING TOPOGRAPHY INFORMATION AND METHOD OF MASK INSPECTION |
SMYTH, ANDREW P |
2878 |
§103§112 |
Non-Final OA |
— |
Pending |
Apr 10, 2024 |
| 18612515 |
APPARATUS AND METHOD FOR ANALYZING AN ELEMENT OF A PHOTOLITHOGRAPHY PROCESS WITH THE AID OF A TRANSFORMATION MODEL |
DINH, LYNDA |
2857 |
§101§103§112 |
Non-Final OA |
— |
Pending |
Mar 21, 2024 |
| 18587228 |
METHOD AND MEASURING DEVICE FOR INSPECTING PHOTOMASKS, AND EUV CAMERA |
CARLSON, JOSHUA MICHAEL |
2877 |
§103Other |
Final Rejection |
24d overdue |
Pending |
Feb 26, 2024 |
| 18422302 |
METHOD FOR EXAMINING SAMPLES PERTAINING TO MICROLITHOGRAPHY |
NGUYEN, LEON VIET Q |
2663 |
§103 |
Non-Final OA |
— |
Pending |
Jan 25, 2024 |
| 18419940 |
APPARATUS FOR ANALYSING AND/OR PROCESSING A SAMPLE WITH A PARTICLE BEAM AND METHOD |
MCCORMACK, JASON L |
2881 |
§102§103 |
Non-Final OA |
20d |
Pending |
Jan 23, 2024 |
| 18419167 |
METHOD FOR OPERATING AN OPTICAL SYSTEM |
RIVERA VARGAS, MANUEL A |
2857 |
§101 |
Final Rejection |
— |
Pending |
Jan 22, 2024 |
| 18519993 |
METHODS, SYSTEMS, COMPUTER PROGRAMS AND COMPUTER-READABLE MEDIA FOR AUTOMATICALLY DESIGNING A WORKFLOW TO PERFORM A SEMICONDUCTOR INSPECTION TASK |
WALTON, CHESIREE A |
3624 |
§101§103 |
Non-Final OA |
— |
Pending |
Nov 27, 2023 |
| 18387905 |
METHOD AND APPARATUS FOR PARTICLE BEAM-INDUCED PROCESSING OF A DEFECT OF A MICROLITHOGRAPHIC PHOTOMASK |
GARBOWSKI, LEIGH M |
2851 |
§102 |
Non-Final OA |
— |
Pending |
Nov 08, 2023 |
| 18480263 |
ACTUATOR-SENSOR DEVICE AND LITHOGRAPHY APPARATUS |
RIDDLE, CHRISTINA A |
2882 |
§102§103 |
Non-Final OA |
— |
Pending |
Oct 03, 2023 |
| 18367208 |
Mesh Integrity Check |
CARLSON, JOSHUA MICHAEL |
2877 |
§103 |
Non-Final OA |
23d overdue |
Pending |
Sep 12, 2023 |
| 18460760 |
Support Device for One or More MEMS Components |
MCDONALD, JASON ANDREW |
2898 |
§103§112 |
Final Rejection |
— |
Pending |
Sep 05, 2023 |
| 18456309 |
ION BEAM INSPECTION AND REPAIR WITH INCREASED SECONDARY ELECTRON YIELD |
GHYKA, ALEXANDER G |
2812 |
§103§112 |
Non-Final OA |
— |
Pending |
Aug 25, 2023 |
| 18362630 |
METHOD FOR PRODUCING A MULTI-PART MIRROR OF A PROJECTION ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY |
WHITESELL, STEVEN H |
1759 |
§103 |
Final Rejection |
29d |
Pending |
Jul 31, 2023 |
| 18350522 |
OPTICAL ELEMENT FOR REFLECTING RADIATION, AND OPTICAL ASSEMBLY |
GASSEN, CHRISTOPHER J |
2881 |
§103 |
Non-Final OA |
12d |
Pending |
Jul 11, 2023 |
| 18319617 |
METHOD FOR PRODUCING A MAIN BODY OF AN OPTICAL ELEMENT FOR SEMICONDUCTOR LITHOGRAPHY, AND MAIN BODY OF AN OPTICAL ELEMENT FOR SEMICONDUCTOR LITHOGRAPHY |
CARRUTH, JENNIFER DOAK |
2871 |
§102§103 |
Final Rejection |
58d overdue |
Pending |
May 18, 2023 |
| 18124171 |
METHOD AND APPARATUS FOR MASK REPAIR |
ANGEBRANNDT, MARTIN J |
1737 |
§102§103§112 |
Final Rejection |
— |
Pending |
Mar 21, 2023 |
| 18121722 |
APPARATUS FOR ANALYZING AND/OR PROCESSING A SAMPLE WITH A PARTICLE BEAM AND METHOD |
LOGIE, MICHAEL J |
2881 |
§102 |
Final Rejection |
— |
Pending |
Mar 15, 2023 |
| 18098215 |
METHOD AND DEVICE FOR DETERMINING AN ALIGNMENT OF A PHOTOMASK ON A SAMPLE STAGE WHICH IS DISPLACEABLE ALONG AT LEAST ONE AXIS AND ROTATABLE ABOUT AT LEAST ONE AXIS |
OSENBAUGH-STEWART, ELIZA W |
2881 |
§102§103 |
Non-Final OA |
— |
Pending |
Jan 18, 2023 |
| 18090067 |
OPTICAL ELEMENT FOR THE VUV WAVELENGTH RANGE, OPTICAL ARRANGEMENT, AND METHOD FOR MANUFACTURING AN OPTICAL ELEMENT |
AHVAZI, BIJAN |
1763 |
§103 |
Final Rejection |
— |
Pending |
Dec 28, 2022 |
| 17742733 |
METHOD FOR DETERMINING A REGISTRATION ERROR |
RODGERS, ALEXANDER JOHN |
2661 |
§102§103§112 |
Non-Final OA |
— |
Pending |
May 12, 2022 |
| 17162439 |
SUBSTRATE FOR AN EUV-LITHOGRAPHY MIRROR |
CARRUTH, JENNIFER DOAK |
2871 |
§103 |
Final Rejection |
— |
Pending |
Jan 29, 2021 |
