2 pending office actions
| App # | Title | Examiner | Art Unit | Status | Filed |
|---|---|---|---|---|---|
| 18369939 | Method for Monitoring Ghost Image of Illumination Unit of Lithography Machine | CHOWDHURY, TARIFUR RASHID | 2877 | Non-Final OA | Sep 19, 2023 |
| 17896286 | Method for Improving Stability of Etching Rate of Etching Chamber | KIM, JAHAE | 2897 | Final Rejection | Aug 26, 2022 |
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