47 pending office actions • 4 clients
| Client (Assignee) | Pending OAs |
|---|---|
| Lam Research Corporation | 40 |
| Lam Research Corporation | 4 |
| Lam Research AG | 2 |
| Metryx Ltd. | 1 |
| App # | Title | Client | Examiner | Art Unit | Status | Filed |
|---|---|---|---|---|---|---|
| 18881084 | MULTI-PLENUM GAS MANIFOLDS FOR SUBSTRATE PROCESSING SYSTEMS | Lam Research Corporation | LUONG, HENRY T | 2844 | Non-Final OA | Jan 03, 2025 |
| 18865913 | THROTTLE VALVE FOR SUBSTRATE PROCESSING SYSTEMS | Lam Research Corporation | JELLETT, MATTHEW WILLIAM | 3753 | Non-Final OA | Nov 14, 2024 |
| 18854754 | HEAT GUARD | Lam Research Corporation | WANG, XIAOBEI | 1784 | Non-Final OA | Oct 07, 2024 |
| 18767915 | RF POWER COMPENSATION TO REDUCE DEPOSITION OR ETCH RATE CHANGES IN RESPONSE TO SUBSTRATE BULK RESISTIVITY VARIATIONS | Lam Research Corporation | BENNETT, CHARLEE | 1718 | Non-Final OA | Jul 09, 2024 |
| 18725961 | COMPOSITION MIXTURE CONTROL OF EFEM ENVIRONMENT | Lam Research Corporation | GRAY, PAUL J | 3753 | Non-Final OA | Jul 01, 2024 |
| 18707790 | SYSTEM FOR MONITORING PERFORMANCE OF ELECTROSTATIC CHUCKS IN SUBSTRATE PROCESSING SYSTEMS | Lam Research Corporation | AL-TAWEEL, MUAAMAR QAHTAN | 2838 | Non-Final OA | May 06, 2024 |
| 18701808 | MICROCHANNEL ASSEMBLY COOLED POWER CIRCUITS FOR POWER BOXES OF SUBSTRATE PROCESSING SYSTEMS | Lam Research Corporation | VORTMAN, ANATOLY | 2835 | Non-Final OA | Apr 16, 2024 |
| 18701458 | VALVE FOR SEMICONDUCTOR EQUIPMENT | Lam Research Corporation | PRICE, CRAIG JAMES | 3753 | Non-Final OA | Apr 15, 2024 |
| 18683605 | COMPACT GAS SEPARATOR DEVICES CO-LOCATED ON SUBSTRATE PROCESSING SYSTEMS | Lam Research Corporation | CLEMENTE, ROBERT ARTHUR | 1773 | Non-Final OA | Feb 14, 2024 |
| 18291444 | SUBSTRATE SUPPORTS WITH MESOCHANNEL ASSEMBLIES | Lam Research Corporation | NIEVES, NELSON J | 3763 | Non-Final OA | Jan 23, 2024 |
| 18572355 | DEVICE FOR HOLDING A WAFER-SHAPED ARTICLE | Lam Research AG | ZAWORSKI, JONATHAN R | 3723 | Non-Final OA | Dec 20, 2023 |
| 18566766 | APPARATUS COMPRISING A WEIGHING DEVICE | Metryx Ltd. | HULS, NATALIE F | 2855 | Non-Final OA | Dec 04, 2023 |
| 18287372 | BACKSIDE DEPOSITION PREVENTION ON SUBSTRATES | Lam Research Corporation | PENCE, JETHRO M | 1717 | Non-Final OA | Oct 18, 2023 |
| 18287131 | SHADOW RING ALIGNMENT FOR SUBSTRATE SUPPORT | Lam Research Corporation | REYES, JOSHUA NATHANIEL PI | 1718 | Non-Final OA | Oct 16, 2023 |
| 18550664 | ADJUSTABLE DIELECTRIC CONSTANT CERAMIC WINDOW | Lam Research Corporation | SWEELY, KURT D | 1718 | Non-Final OA | Sep 14, 2023 |
| 18282021 | CONDUCTIVE COOLING OF A LOW TEMPERATURE PEDESTAL OPERATING IN A HIGH TEMPERATURE DEPOSITION SEQUENCE | Lam Research Corporation | BERMAN, JASON | 1794 | Non-Final OA | Sep 14, 2023 |
| 18265825 | ATOMIC LAYER DEPOSITION WITH MULTIPLE UNIFORMLY HEATED CHARGE VOLUMES | Lam Research Corporation | THOMAS, BINU | 1717 | Non-Final OA | Jun 07, 2023 |
| 18035200 | PEDESTAL INCLUDING SEAL | Lam Research Corporation | CHEN, KEATH T | 1716 | Non-Final OA | May 03, 2023 |
| 18034834 | SUBSTRATE PROCESSING SYSTEM TOOLS FOR MONITORING, ASSESSING AND RESPONDING BASED ON HEALTH INCLUDING SENSOR MAPPING AND TRIGGERED DATALOGGING | Lam Research Corporation | BAHLS, JENNIFER E. S. | 2853 | Non-Final OA | May 01, 2023 |
| 18250740 | Wear Compensating Confinement Ring | Lam Research Corporation | KACKAR, RAM N | 1716 | Non-Final OA | Apr 26, 2023 |
| 18032154 | COLD EDGE LOW TEMPERATURE ELECTROSTATIC CHUCK | Lam Research Corporation | CHAN, LAUREEN | 1716 | Final Rejection | Apr 14, 2023 |
| 18026431 | AXIALLY COOLED METAL SHOWERHEADS FOR HIGH TEMPERATURE PROCESSES | Lam Research Corporation | LEE, AIDEN Y | 1718 | Non-Final OA | Mar 15, 2023 |
| 18025197 | HYBRID SHOWERHEAD WITH SEPARATE FACEPLATE FOR HIGH TEMPERATURE PROCESS | Lam Research Corporation | LUND, JEFFRIE ROBERT | 1716 | Non-Final OA | Mar 08, 2023 |
| 18017208 | THIN SHADOW RING FOR LOW-TILT TRENCH ETCHING | Lam Research Corporation | FORD, NATHAN K | 1716 | Non-Final OA | Jan 20, 2023 |
| 18013768 | SUBSTRATE SUPPORT WITH UNIFORM TEMPERATURE ACROSS A SUBSTRATE | Lam Research Corporation | FREY, KIMBERLY NEWMAN | 2817 | Non-Final OA | Dec 29, 2022 |
| 18013429 | MOVABLE DISK WITH APERTURE FOR ETCH CONTROL | Lam Research Corporation | KENDALL, BENJAMIN R | 2896 | Non-Final OA | Dec 28, 2022 |
| 18013445 | SUBSTRATE SUPPORTS WITH MULTILAYER STRUCTURE INCLUDING COUPLED HEATER ZONES WITH LOCAL THERMAL CONTROL | Lam Research Corporation | LEE JR, WOODY A | 3761 | Non-Final OA | Dec 28, 2022 |
| 18010990 | INTERMITTENT STAGNANT FLOW | Lam Research Corporation | MARKOFF, ALEXANDER | 1711 | Non-Final OA | Dec 16, 2022 |
| 17928747 | MONOBLOC PEDESTAL FOR EFFICIENT HEAT TRANSFER | Lam Research Corporation | WEN, KEVIN GUANHUA | 3761 | Non-Final OA | Nov 30, 2022 |
| 17928426 | PHOTOELECTRON ASSISTED PLASMA IGNITION | Lam Research Corporation | YU, YUECHUAN | 1718 | Final Rejection | Nov 29, 2022 |
| 17927328 | DISTRIBUTED PLASMA SOURCE ARRAY | Lam Research Corporation | ALEJANDRO MULERO, LUZ L | 1716 | Non-Final OA | Nov 22, 2022 |
| 17924618 | EVAPORATIVE COOLING OF ELECTROSTATIC CHUCKS | Lam Research Corporation | NUCKOLS, TIFFANY Z | 1716 | Non-Final OA | Nov 10, 2022 |
| 17921930 | BLENDED CONTACT FINGERS FOR PREVENTING CRACKS DURING THIN SUBSTRATE HANDLING | Lam Research Corporation | CONTRERAS, CIEL P | 1794 | Non-Final OA | Oct 27, 2022 |
| 17920111 | FLOATING PCB DESIGN FOR SUBSTRATE SUPPORT ASSEMBLY | Lam Research Corporation | NUCKOLS, TIFFANY Z | 1716 | Non-Final OA | Oct 20, 2022 |
| 17916852 | SLIDE AND PIVOT ASSEMBLIES FOR PROCESS MODULE BIAS ASSEMBLIES OF SUBSTRATE PROCESSING SYSTEMS | Lam Research Corporation | BURKMAN, JESSICA LYNN | 3653 | Non-Final OA | Oct 04, 2022 |
| 17915573 | EDGE RING FOR LOCALIZED DELIVERY OF TUNING GAS | Lam Research Corporation | REYES, JOSHUA NATHANIEL PI | 1718 | Final Rejection | Sep 29, 2022 |
| 17914499 | SUBSTRATE SUPPORT TEMPERATURE PROBE DIAGNOSTICS AND MANAGEMENT | Lam Research Corporation | LIN, ERICA S Y | 2853 | Non-Final OA | Sep 26, 2022 |
| 17908587 | METHOD FOR ARRANGING A SEMICONDUCTOR PROCESSING TOOL ON A PEDESTAL | Lam Research Corporation | KIM, PAUL D | 3729 | Final Rejection | Sep 01, 2022 |
| 17802170 | APPARATUS FOR PROCESSING A WAFER | Lam Research AG | WILSON, LEE D | 3723 | Non-Final OA | Aug 25, 2022 |
| 17800168 | PLANAR MULTI-LAYER RADIO FREQUENCY FILTERS INCLUDING STACKED COILS WITH STRUCTURAL CAPACITANCE | Lam Research Corporation | ALEJANDRO MULERO, LUZ L | 1716 | Non-Final OA | Aug 16, 2022 |
| 17799866 | HIGH TEMPERATURE SUBSTRATE SUPPORT WITH HEAT SPREADER | Lam Research Corporation | LEE, AIDEN Y | 1718 | Non-Final OA | Aug 15, 2022 |
| 17795188 | SEGMENTED GAS DISTRIBUTION PLATE FOR HIGH-POWER, HIGH-PRESSURE PROCESSES | Lam Research Corporation | ZERVIGON, RUDY | 1716 | Non-Final OA | Jul 25, 2022 |
| 17790009 | MIXED METAL BASEPLATES FOR IMPROVED THERMAL EXPANSION MATCHING WITH THERMAL OXIDE SPRAYCOAT | Lam Research Corporation | MACARTHUR, SYLVIA | 1716 | Non-Final OA | Jun 29, 2022 |
| 17781447 | PRESSURE BATCH COMPENSATION TO STABILIZE CD VARIATION FOR TRIM AND DEPOSITION PROCESSES | Lam Research Corporation | ZERVIGON, RUDY | 1716 | Non-Final OA | Jun 01, 2022 |
| 17671211 | MOVEABLE EDGE RINGS WITH REDUCED CAPACITANCE VARIATION FOR SUBSTRATE PROCESSING SYSTEMS | Lam Research Corporation | MCCONNELL, AARON R | 3723 | Non-Final OA | Feb 14, 2022 |
| 17631984 | EDGE RING SYSTEMS FOR SUBSTRATE PROCESSING SYSTEMS | Lam Research Corporation | MOORE, KARLA A | 1716 | Non-Final OA | Feb 01, 2022 |
| 17605264 | HIGH TEMPERATURE HEATING OF A SUBSTRATE IN A PROCESSING CHAMBER | Lam Research Corporation | MOORE, KARLA A | 1716 | Final Rejection | Oct 21, 2021 |
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