| 19064208 |
OVERLAY METROLOGY TARGET |
RAHMAN, MOHAMMAD J |
2487 |
§103 |
Non-Final OA |
— |
Pending |
Feb 26, 2025 |
| 19062941 |
OPTICAL METHOD TO ENHANCE DETECTION VISIBILITY USING BRIGHT EMISSIVE PROBE |
GUNBERG, EDWIN C |
2884 |
§103 |
Non-Final OA |
— |
Pending |
Feb 25, 2025 |
| 19062979 |
SYSTEM AND METHOD FOR ENHANCING PHOTOLUMINESCENCE |
GUNBERG, EDWIN C |
2884 |
§103 |
Non-Final OA |
— |
Pending |
Feb 25, 2025 |
| 19051999 |
VISION FOUNDATION MODEL FOR MULTIMODE IMAGING |
NAH, JONGBONG |
2674 |
§103 |
Final Rejection |
— |
Pending |
Feb 12, 2025 |
| 19040176 |
CALIBRATED MEASUREMENT OF OVERLAY ERROR USING SMALL TARGETS |
SCHNASE, PAUL DANIEL |
2877 |
§103 |
Non-Final OA |
— |
Pending |
Jan 29, 2025 |
| 19018943 |
SYSTEM AND METHOD FOR DETERMINING POST BONDING OVERLAY |
STOCK JR, GORDON J |
2877 |
§101§112Other |
Non-Final OA |
— |
Pending |
Jan 13, 2025 |
| 19012641 |
DYNAMIC RANGE EXTENSION OF OPTICAL SYSTEMS WITH MULTIPLE LOW INTENSITY BEAMS |
YAZBACK, MAHER |
2877 |
§102§103§112 |
Non-Final OA |
— |
Pending |
Jan 07, 2025 |
| 18999512 |
ULTRA-HIGH SENSITIVITY HYBRID INSPECTION WITH FULL WAFER COVERAGE CAPABILITY WITH STEP AND SETTLE STAGE |
LYONS, MICHAEL A |
2877 |
§103§112 |
Non-Final OA |
— |
Pending |
Dec 23, 2024 |
| 18977795 |
Methods And Systems For Reflectometry Based Measurements Of Deep, Large Pitch Semiconductor Structures |
TRAN, JUDY DAO |
2877 |
§103§112 |
Non-Final OA |
— |
Pending |
Dec 11, 2024 |
| 18974372 |
SYSTEM AND METHOD FOR MITIGATING OVERLAY DISTORTION PATTERNS CAUSED BY A WAFER BONDING TOOL |
HARTMAN JR, RONALD D |
2119 |
§103 |
Non-Final OA |
— |
Pending |
Dec 09, 2024 |
| 18972428 |
Measurements Of Complex Semiconductor Structures Based On Component Measurement Signals |
HANSEN, JONATHAN M |
2877 |
§102 |
Non-Final OA |
— |
Pending |
Dec 06, 2024 |
| 18970542 |
REDUCED FLUCTUATIONS AND INCREASED BRIGHTNESS UNIFORMITY OF LASER SUSTAINED PLASMA SOURCES |
LUU, THANH X |
2878 |
§103 |
Non-Final OA |
— |
Pending |
Dec 05, 2024 |
| 18959278 |
ENCODING DESIGN INFORMATION FOR A SPECIMEN FOR RUNTIME USE IN INSPECTION AND OTHER PROCESSES |
ISLAM, PROMOTTO TAJRIAN |
2669 |
§102§112 |
Non-Final OA |
— |
Pending |
Nov 25, 2024 |
| 18936993 |
TRANSISTOR CHANNEL STRESS AND MOBILITY METROLOGY USING MULTIPASS SPECTROSCOPIC ELLIPSOMETRY AND RAMAN JOINT MEASUREMENT |
HUANG, DAVID Z |
2855 |
§103 |
Non-Final OA |
— |
Pending |
Nov 04, 2024 |
| 18909820 |
ULTRA-HIGH SENSITIVITY HYBRID INSPECTION WITH FULL WAFER COVERAGE CAPABILITY |
KALISZEWSKI, ALINA ROSE |
2881 |
§102§103§112 |
Non-Final OA |
— |
Pending |
Oct 08, 2024 |
| 18907563 |
SEGMENTATION-BASED CARE AREA SETUP FOR INSPECTION OF A SPECIMEN USING EDGE DETECTION |
SILVA-AVINA, EMMANUEL |
2673 |
§103§112 |
Non-Final OA |
— |
Pending |
Oct 06, 2024 |
| 18896205 |
FEATURE PLACEMENT ERROR (FPE) METROLOGY AND CORRECTION |
TRAN, VINCENT HUY |
2115 |
§103 |
Non-Final OA |
— |
Pending |
Sep 25, 2024 |
| 18887461 |
Electrical Performance Prediction Based On Structural Measurements Of Partially Fabricated Semiconductor Devices |
MENDOZA, ALEXANDRIA ARELLANO |
2877 |
§102§103 |
Non-Final OA |
— |
Pending |
Sep 17, 2024 |
| 18827828 |
CONCENTRICITY OFFSET MEASUREMENT FOR HYBRID BONDING |
LEE, BENEDICT E |
2665 |
§103 |
Non-Final OA |
— |
Pending |
Sep 08, 2024 |
| 18796860 |
METROLOGY MEASUREMENTS ON SMALL TARGETS WITH CONTROL OF ZERO-ORDER SIDE LOBES |
CHILTON, CLARA GRACE |
3645 |
§103§112 |
Non-Final OA |
— |
Pending |
Aug 07, 2024 |
| 18756439 |
METROLOGY METHOD OF CALIBRATING AND MONITORING RADIATION IN EUV LITHOGRAPHIC SYSTEMS |
MALEVIC, DJURA |
2884 |
§103 |
Non-Final OA |
— |
Pending |
Jun 27, 2024 |
| 18755644 |
WAVEPLATE COMPENSATOR DESIGN |
UNDERWOOD, JARREAS C |
2877 |
§103 |
Final Rejection |
60d overdue |
Pending |
Jun 26, 2024 |
| 18752650 |
GROWTH OF STRONTIUM TETRABORATE CRYSTALS |
KUNEMUND, ROBERT M |
1714 |
§103 |
Final Rejection |
— |
Pending |
Jun 24, 2024 |
| 18743048 |
Measurements Of Semiconductor Structures Based On Data Collected At Prior Process Steps |
QUIGLEY, KYLE ROBERT |
2857 |
§101§102§103§112 |
Non-Final OA |
— |
Pending |
Jun 13, 2024 |
| 18738393 |
SYSTEMS AND METHODS OF SEM INSPECTION USING SELECTIVE SCAN APPROACH |
NGUYEN, KIET TUAN |
2881 |
§102 |
Non-Final OA |
— |
Pending |
Jun 10, 2024 |
| 18671172 |
Back-Illuminated Sensor With Boron Layer Deposited Using Plasma Atomic Layer Deposition |
AMER, MOUNIR S |
2818 |
§102Other |
Non-Final OA |
— |
Pending |
May 22, 2024 |
| 18652438 |
DYNAMIC FREEFORM OPTICS FOR LITHOGRAPHY ILLUMINATION BEAM SHAPING |
KIM, PETER B |
2882 |
§103§112 |
Non-Final OA |
— |
Pending |
May 01, 2024 |
| 18630417 |
FOCUS POSITION MEASUREMENT WHILE SCANNING |
HANEY, NOAH JAMES |
2877 |
§102§103 |
Non-Final OA |
— |
Pending |
Apr 09, 2024 |
| 18612383 |
SYSTEM AND METHOD FOR DEVICE-LIKE OVERLAY TARGETS MEASUREMENT |
STOCK JR, GORDON J |
2877 |
§112 |
Final Rejection |
— |
Pending |
Mar 21, 2024 |
| 18611299 |
FLUORESCENCE MODE FOR WORKPIECE INSPECTION |
COOK, JONATHON |
2877 |
§103 |
Final Rejection |
44d overdue |
Pending |
Mar 20, 2024 |
| 18597581 |
METHOD AND SYSTEM FOR AUTOMATIC RETRAINING OF MACHINE LEARNING MODELS FOR METROLOGY METRIC ESTIMATION |
MOORE, URIAH VENDELL |
2142 |
§103§112 |
Non-Final OA |
— |
Pending |
Mar 06, 2024 |
| 18594991 |
METHOD AND SYSTEM FOR BONDING HIGH FLUENCE OPTICS TO OPTOMECHANICAL ASSEMBLIES |
STONER, KILEY SHAWN |
1735 |
§103 |
Final Rejection |
16d overdue |
Pending |
Mar 04, 2024 |
| 18587703 |
SIDE-BY-SIDE OFF-CENTER DIE OVERLAY TARGET |
LAPAGE, MICHAEL P |
2877 |
§102§103 |
Final Rejection |
58d overdue |
Pending |
Feb 26, 2024 |
| 18438165 |
VUV LASER-SUSTAINED PLASMA LIGHT SOURCE WITH LONG-PASS FILTERING |
EINHORN, MICA JILLIAN |
2881 |
§102§103§112DP |
Non-Final OA |
— |
Pending |
Feb 09, 2024 |
| 18438122 |
METROLOGY WITH PARALLEL SUBSYSTEMS AND MUELLER SIGNALS TRAINING |
BYCER, ERIC J |
2141 |
§103 |
Non-Final OA |
— |
Pending |
Feb 09, 2024 |
| 18421454 |
OVERLAY METROLOGY TARGET FOR DIE-TO-WAFER OVERLAY METROLOGY |
WHITESELL, STEVEN H |
1759 |
§102§103 |
Non-Final OA |
13d |
Pending |
Jan 24, 2024 |
| 18416113 |
X-Ray Scatterometry Based Measurements Of Memory Array Structures Stacked With Complex Logic Structures |
LU, ZHIYU |
2665 |
§103 |
Non-Final OA |
— |
Pending |
Jan 18, 2024 |
| 18404530 |
IMAGE SENSORS WITH A TUNABLE FLOATING DIFFUSION STRUCTURE |
TRICE III, WILLIAM CLARENCE |
2893 |
§102§103 |
Final Rejection |
— |
Pending |
Jan 04, 2024 |
| 18401569 |
CALIBRATION FOR IN-PLANE DISTORTION TOOL-TO-TOOL MATCHING |
SCHNASE, PAUL DANIEL |
2877 |
§101§102§103 |
Final Rejection |
154d overdue |
Pending |
Dec 31, 2023 |
| 18535159 |
SYSTEM AND METHOD OF FINDING PIXEL-TO-DESIGN TARGET FOR DRAM INSPECTION |
CONNER, SEAN M |
2663 |
§103 |
Final Rejection |
49d overdue |
Pending |
Dec 11, 2023 |
| 18387015 |
Methods And Systems For Measurement Of Semiconductor Structures With Active Tilt Correction |
FABIAN JR, ROBERTO |
2877 |
§101 |
Non-Final OA |
1d overdue |
Pending |
Nov 04, 2023 |
| 18375512 |
IMAGING THOUSANDS OF ELECTRON BEAMS DURING WORKPIECE INSPECTION |
KALISZEWSKI, ALINA ROSE |
2881 |
§103§112 |
Final Rejection |
70d overdue |
Pending |
Sep 30, 2023 |
| 18374106 |
INSPECTION OF ADAPTIVE PATTERNED WORKPIECES WITH DYNAMIC DESIGN AND DEEP LEARNING-BASED RENDERING |
MORSE, GREGORY ALLAN |
2663 |
§103§112 |
Non-Final OA |
— |
Pending |
Sep 28, 2023 |
| 18467371 |
ANGLE RESOLVED REFLECTOMETRY FOR THICK FILMS AND HIGH ASPECT RATIO STRUCTURES |
STOCK JR, GORDON J |
2877 |
§102§103 |
Non-Final OA |
72d overdue |
Pending |
Sep 14, 2023 |
| 18368242 |
FRICTIONLESS DESIGN OF HIGH-PRESSURE RECIRCULATION THERMO-PUMP |
BRANDT, DAVID NELSON |
3783 |
§112 |
Non-Final OA |
— |
Pending |
Sep 14, 2023 |
| 18234773 |
MULTI-PITCH GRID OVERLAY TARGET FOR SCANNING OVERLAY METROLOGY |
XING, CHRISTINA ILONA |
2877 |
§103 |
Non-Final OA |
10d overdue |
Pending |
Aug 16, 2023 |
| 18229606 |
Methods And Systems For Systematic Error Compensation Across A Fleet Of Metrology Systems Based On A Trained Error Evaluation Model |
GAVIA, NYLA EMANI ANN |
2857 |
§101 |
Non-Final OA |
35d |
Pending |
Aug 02, 2023 |
| 18228643 |
PUPIL FILTER WITH SPATIALLY-VARYING TRANSMISSION |
ARTMAN, THOMAS R |
2884 |
§103 |
Non-Final OA |
34d |
Pending |
Jul 31, 2023 |
| 18358841 |
PHOTOLUMINESCENCE FOR SEMICONDUCTOR YIELD RELATED APPLICATIONS |
TANINGCO, MARCUS H |
2884 |
§103 |
Non-Final OA |
— |
Pending |
Jul 25, 2023 |
| 18343390 |
EUV In-Situ Linearity Calibration for TDI Image Sensors Using Test Photomasks |
FABIAN JR, ROBERTO |
2877 |
§102§103 |
Final Rejection |
57d |
Pending |
Jun 28, 2023 |
| 18334357 |
PROTECTING DATA SOURCES FROM DIFFERENT ENTITIES FOR SEMICONDUCTOR YIELD RELATED APPLICATIONS |
LU, QIANG |
2187 |
§101§103 |
Non-Final OA |
— |
Pending |
Jun 13, 2023 |
| 18128125 |
MULTI-MODE OPTICAL INSPECTION |
DULANEY, KATHLEEN YUAN |
2666 |
§103§112 |
Final Rejection |
10d overdue |
Pending |
Mar 29, 2023 |
| 18116187 |
INTERFACE-BASED THIN FILM METROLOGY USING SECOND HARMONIC GENERATION |
GARBER, ERIN R |
2878 |
§103 |
Final Rejection |
140d overdue |
Pending |
Mar 01, 2023 |
| 18090447 |
PATTERN SEGMENTATION FOR NUISANCE SUPPRESSION |
SUMMERS, GEOFFREY E |
2669 |
§103 |
Final Rejection |
— |
Pending |
Dec 28, 2022 |
| 17982472 |
PLASMA HYPERMODEL INTEGRATED WITH FEATURE-SCALE PROFILE MODEL FOR ACCELERATED ETCH PROCESS DEVELOPMENT |
KIM, EUNHEE |
2188 |
§103 |
Final Rejection |
37d overdue |
Pending |
Nov 07, 2022 |
| 17978844 |
Methods And Systems For Monitoring Metrology Fleet Productivity |
ERDMAN, CHAD G |
2116 |
§103§112 |
Non-Final OA |
— |
Pending |
Nov 01, 2022 |
| 17887078 |
SYSTEM AND METHOD FOR FEATURE SIGNAL ENHANCEMENT USING A SELECTIVELY BONDED PHOTOLUMINESCENT MATERIAL |
PHILLIPS, RUFUS L |
2877 |
§103§112 |
Non-Final OA |
4d overdue |
Pending |
Aug 12, 2022 |
| 17713017 |
METHOD AND SYSTEM FOR MIXED MODE WAFER INSPECTION |
BALI, VIKKRAM |
2663 |
§103 |
Non-Final OA |
19d |
Pending |
Apr 04, 2022 |
| 17762030 |
CALIBRATED MEASUREMENT OF OVERLAY ERROR USING SMALL TARGETS |
SCHNASE, PAUL DANIEL |
2877 |
§102§112 |
Final Rejection |
97d overdue |
Pending |
Mar 18, 2022 |
| 17696636 |
SYSTEM AND METHOD FOR ION-ASSISTED DEPOSITION OF OPTICAL COATINGS |
OTT, PATRICK S |
1794 |
§103 |
Final Rejection |
44d overdue |
Pending |
Mar 16, 2022 |
| 17591569 |
COMBINING FOCUSED ION BEAM MILLING AND SCANNING ELECTRON MICROSCOPE IMAGING |
GOURLIE, LAURA ELOISE |
2881 |
§103 |
Final Rejection |
85d overdue |
Pending |
Feb 02, 2022 |
| 17590116 |
Methods And Systems For Accurate Measurement Of Deep Structures Having Distorted Geometry |
JEFFERSON, QUOVAUNDA |
2899 |
§103 |
Final Rejection |
— |
Pending |
Feb 01, 2022 |
| 17099476 |
MULTI-COLUMN SCANNING ELECTRON MICROSCOPY SYSTEM |
LOGIE, MICHAEL J |
2881 |
§103 |
Non-Final OA |
— |
Pending |
Nov 16, 2020 |
| 16935432 |
Systems and Methods for MOKE Metrology with Consistent MRAM Die Orientation |
SCHINDLER, DAVID M |
2858 |
§102§103§112 |
Non-Final OA |
24d overdue |
Pending |
Jul 22, 2020 |
| 17554454 |
Machine Learning in Metrology Measurements |
STANDKE, ADAM C |
2129 |
§103 |
Non-Final OA |
141d overdue |
Pending |
Dec 17, 2021 |
Prosecution Insights