Prosecution Insights
Prosecution Insights
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| App # | Title | Examiner | Art Unit | Statutes | Status | Due in | AI | Filed |
|---|---|---|---|---|---|---|---|---|
| 19258510 | FLOW RATE CONTROLLER, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM | HICKS, ANGELISA | 3753 | §103§112 | Non-Final OA | — | Pending | Jul 02, 2025 |
| 19093433 | SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM | WIECZOREK, MICHAEL P | 1712 | §103§112 | Non-Final OA | — | Pending | Mar 28, 2025 |
| 19090854 | SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM | SAAD, ERIN BARRY | 1735 | §102§103 | Final Rejection | — | Pending | Mar 26, 2025 |
| 19090675 | METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, RECORDING MEDIUM, AND SUBSTRATE PROCESSING APPARATUS | BARR, MICHAEL E | 1711 | §102§103§112 | Non-Final OA | — | Pending | Mar 26, 2025 |
| 19086798 | PROCESSING APPARATUS, PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM | CHEN, BRET P | 1718 | §102§103 | Non-Final OA | — | Pending | Mar 21, 2025 |
| 19087044 | PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, PROCESSING APPARATUS, AND RECORDING MEDIUM | TALBOT, BRIAN K | 1712 | §102§103 | Non-Final OA | — | Pending | Mar 21, 2025 |
| 19084941 | SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS | RODRIGUEZ, MICHAEL P | 1712 | §102§103 | Final Rejection | — | Pending | Mar 20, 2025 |
| 19082746 | SUBSTRATE PROCESSING APPARATUS, NOZZLE, METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM | KLUNK, MARGARET D | 1759 | §102§103 | Non-Final OA | — | Pending | Mar 18, 2025 |
| 19058670 | METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM | ROLLAND, ALEX A | 1759 | §102§103 | Non-Final OA | — | Pending | Feb 20, 2025 |
| 19033687 | SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE | VETERE, ROBERT A | 1712 | §103 | Non-Final OA | — | Pending | Jan 22, 2025 |
| 18989224 | SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM | ROLLAND, ALEX A | 1759 | §101§103§112 | Final Rejection | 25d overdue | Pending | Dec 20, 2024 |
| 18972674 | METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM | WEDDLE, ALEXANDER MARION | 1712 | §102§103§112 | Non-Final OA | — | Pending | Dec 06, 2024 |
| 18932057 | METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM | TUROCY, DAVID P | 1718 | §103 | Final Rejection | — | Pending | Oct 30, 2024 |
| 18927145 | METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, RECORDING MEDIUM, AND SUBSTRATE PROCESSING APPARATUS | TUROCY, DAVID P | 1718 | §102§103 | Final Rejection | — | Pending | Oct 25, 2024 |
| 18905713 | Substrate Processing Method, Method of Manufacturing Semiconductor Device, Non-transitory Computer-readable Recording Medium and Substrate Processing Apparatus | MCCLURE, CHRISTINA D | 1718 | §103 | Final Rejection | 2d overdue | Pending | Oct 03, 2024 |
| 18901357 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM | LEBENTRITT, MICHAEL | 2893 | Other | Non-Final OA | — | Pending | Sep 30, 2024 |
| 18894486 | SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM | MOJADDEDI, OMAR F | 2898 | §103 | Non-Final OA | — | Pending | Sep 24, 2024 |
| 18891772 | SUBSTRATE PROCESSING APPARATUS, PROCESSING VESSEL, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE | NUCKOLS, TIFFANY Z | 1716 | §112 | Non-Final OA | — | Pending | Sep 20, 2024 |
| 18890180 | Substrate Processing Apparatus, Substrate Processing Method, Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medium | RODRIGUEZ, MICHAEL P | 1712 | §103 | Non-Final OA | — | Pending | Sep 19, 2024 |
| 18884724 | SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM | VU, JIMMY T | 2844 | §103 | Final Rejection | 43d | Pending | Sep 13, 2024 |
| 18882306 | PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, PROCESSING APPARATUS, AND RECORDING MEDIUM | LU, JIONG-PING | 1713 | §102§103§112 | Non-Final OA | — | Pending | Sep 11, 2024 |
| 18821037 | PROCESSING APPARATUS, SUBSTRATE PROCESSING APPARATUS, DISPLAY METHOD, SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM | ZUBERI, MOHAMMED H | 2178 | §102§103 | Non-Final OA | — | Pending | Aug 30, 2024 |
| 18819422 | SUBSTRATE PROCESSING APPARATUS, ROTATION STATE DETECTION METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM | CHEN, KEATH T | 1716 | §102§103§112 | Non-Final OA | — | Pending | Aug 29, 2024 |
| 18808738 | SUBSTRATE PROCESSING APPARATUS, PLURALITY OF ELECTRODES AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE | YU, YUECHUAN | 1718 | §102§103DPOther | Non-Final OA | — | Pending | Aug 19, 2024 |
| 18790300 | HEATER, TEMPERATURE CONTROL SYSTEM, AND PROCESSING APPARATUS | DULKA, JOHN P | 2817 | §102§103§112Other | Non-Final OA | — | Pending | Jul 31, 2024 |
| 18787539 | RECIPE CREATION METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SUBSTRATE PROCESSING APPARATUS, AND COMPUTER-READABLE RECORDING MEDIUM STORING RECIPE CREATION PROGRAM | SURYAWANSHI, SURESH | 2116 | §103Other | Non-Final OA | — | Pending | Jul 29, 2024 |
| 18758061 | SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS | MOJADDEDI, OMAR F | 2898 | §102 | Non-Final OA | — | Pending | Jun 28, 2024 |
| 18746499 | SUBSTRATE PROCESSING APPARATUS, PROCESS VESSEL, METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND RECORDING MEDIUM | LUND, JEFFRIE ROBERT | 1716 | §102§103§112 | Non-Final OA | — | Pending | Jun 18, 2024 |
| 18720116 | FILM FORMING METHOD | RAHMAN, KHATIB A | 2818 | §102§103 | Non-Final OA | — | Pending | Jun 14, 2024 |
| 18732442 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM | MCCLURE, CHRISTINA D | 1718 | §102§103 | Non-Final OA | — | Pending | Jun 03, 2024 |
| 18624655 | PLASMA GENERATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE | LIU, XIAOMING | 2812 | §102§103 | Final Rejection | 343d overdue | Pending | Apr 02, 2024 |
| 18621292 | METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM | NIELSEN, DEREK LANG | — | §102§103 | Non-Final OA | — | Pending | Mar 29, 2024 |
| 18618179 | METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM | DODDS, SCOTT | 1746 | §102§103§112 | Non-Final OA | — | Pending | Mar 27, 2024 |
| 18613747 | SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM | MILLER, JR, JOSEPH ALBERT | 1712 | §102§103 | Non-Final OA | — | Pending | Mar 22, 2024 |
| 18612425 | SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM | MCDONALD, RODNEY GLENN | 1794 | §102§112 | Non-Final OA | — | Pending | Mar 21, 2024 |
| 18611093 | METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM | DAGENAIS, KRISTEN A | 1717 | §103 | Non-Final OA | 42d overdue | Pending | Mar 20, 2024 |
| 18609345 | METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, RECORDING MEDIUM, AND SUBSTRATE PROCESSING APPARATUS | MCCLURE, CHRISTINA D | 4100 | §103§112 | Non-Final OA | — | Pending | Mar 19, 2024 |
| 18609326 | METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, RECORDING MEDIUM, AND SUBSTRATE PROCESSING APPARATUS | MCCLURE, CHRISTINA D | 1718 | §103 | Non-Final OA | — | Pending | Mar 19, 2024 |
| 18609531 | SUBSTRATE PROCESSING APPARATUS, PLASMA GENERATING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM | REYES, JOSHUA NATHANIEL PI | 1713 | §103 | Non-Final OA | — | Pending | Mar 19, 2024 |
| 18608204 | SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM | MCCLURE, CHRISTINA D | 1718 | §103§112 | Non-Final OA | — | Pending | Mar 18, 2024 |
| 18602841 | SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM | JELLETT, MATTHEW WILLIAM | 3753 | §102§103 | Final Rejection | — | Pending | Mar 12, 2024 |
| 18601076 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE CHECKING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM | TIGHE, BRENDAN P | 3652 | §103 | Final Rejection | 8d overdue | Pending | Mar 11, 2024 |
| 18599877 | METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM | JOHNSON, CHRISTOPHER A | 2899 | §102§103 | Non-Final OA | — | Pending | Mar 08, 2024 |
| 18596844 | SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM | LU, HUA | 2118 | §103 | Final Rejection | — | Pending | Mar 06, 2024 |
| 18594675 | METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, RECORDING MEDIUM, AND SUBSTRATE PROCESSING APPARATUS | LASASSO, VICTOR JOSEPH | 2898 | §103§112 | Non-Final OA | — | Pending | Mar 04, 2024 |
| 18592646 | SUBSTRATE PROCESSING APPARATUS, CLEANING METHOD, SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM | MALSAWMA, LALRINFAMKIM HMAR | 2892 | §102§103 | Non-Final OA | — | Pending | Mar 01, 2024 |
| 18588105 | METHOD OF COOLING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE COOLING SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM | TADESSE, YEWEBDAR T | 2893 | §102 | Non-Final OA | — | Pending | Feb 27, 2024 |
| 18437565 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, GAS SUPPLY METHOD, SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM | GREEN, TELLY D | 2898 | §103 | Non-Final OA | — | Pending | Feb 09, 2024 |
| 18436231 | METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM | CHEN, BRET P | 1718 | §103 | Non-Final OA | — | Pending | Feb 08, 2024 |
| 18436677 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM | MCDONALD, RODNEY GLENN | 1794 | §103 | Final Rejection | — | Pending | Feb 08, 2024 |
| 18430763 | SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM | PENCE, JETHRO M | 1717 | §102§112 | Non-Final OA | — | Pending | Feb 02, 2024 |
| 18430036 | COATING METHOD, PROCESSING APPARATUS, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM, SUBSTRATE PROCESSING METHOD AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE | ZERVIGON, RUDY | 1716 | §103§112 | Final Rejection | — | Pending | Feb 01, 2024 |
| 18428866 | SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM | MACARTHUR, SYLVIA | 2813 | §102§103 | Non-Final OA | — | Pending | Jan 31, 2024 |
| 18421051 | SUBSTRATE PROCESSING APPARATUS, TRANSFER METHOD OF SUBSTRATE SUPPORT, RECORDING MEDIUM, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE | SNELTING, JONATHAN D | 3652 | §102§103§112 | Non-Final OA | — | Pending | Jan 24, 2024 |
| 18417671 | HEATER ASSEMBLY, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE | BENNETT, CHARLEE | 1718 | §112 | Final Rejection | — | Pending | Jan 19, 2024 |
| 18405275 | PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM | TUROCY, DAVID P | 1718 | §103§112 | Non-Final OA | — | Pending | Jan 05, 2024 |
| 18402814 | SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM | MOORE, KARLA A | 1716 | §103§112 | Non-Final OA | — | Pending | Jan 03, 2024 |
| 18514631 | Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medium | SHECHTMAN, SEAN P | 2896 | §102§112Other | Non-Final OA | — | Pending | Nov 20, 2023 |
| 18377159 | METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM | ANDERSON, ERIK ARTHUR | 2812 | §102§103§112 | Final Rejection | 30d | Pending | Oct 05, 2023 |
| 18472815 | METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, RECORDING MEDIUM, AND SUBSTRATE PROCESSING APPARATUS | BERMAN, JASON | 1794 | §102§103 | Non-Final OA | — | Pending | Sep 22, 2023 |
| 18471098 | SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM | HASSANZADEH, PARVIZ | 1716 | §103 | Non-Final OA | — | Pending | Sep 20, 2023 |
| 18471034 | METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM | AHMAD, KHAJA | 2813 | §102§103 | Final Rejection | — | Pending | Sep 20, 2023 |
| 18469679 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, DISPLAY METHOD, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS | NGO, BRIAN | 2851 | §102 | Non-Final OA | — | Pending | Sep 19, 2023 |
| 18468780 | SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM | KOSSEK, MAGDALENA IZABELLA | 2117 | §102§103 | Non-Final OA | — | Pending | Sep 18, 2023 |
| 18368096 | SUBSTRATE PROCESSING APPARATUS, METHOD OF CLEANING, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM | MILLER, JR, JOSEPH ALBERT | 1712 | §103§112 | Final Rejection | — | Pending | Sep 14, 2023 |
| 18244616 | SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM | MOORE, KARLA A | 1716 | §102§103§112 | Final Rejection | 70d | Pending | Sep 11, 2023 |
| 18463529 | SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM | SHAFAYET, MOHAMMED | 2116 | §103 | Final Rejection | 26d | Pending | Sep 08, 2023 |
| 18463435 | SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS | MILLER, JR, JOSEPH ALBERT | 1712 | §103 | Final Rejection | — | Pending | Sep 08, 2023 |
| 18451187 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE | HUNTER, JOHN S | 3700 | §101 | Final Rejection | — | Pending | Aug 17, 2023 |
| 18447533 | SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM | KENDALL, BENJAMIN R | 2896 | §102§103§112 | Final Rejection | 4d overdue | Pending | Aug 10, 2023 |
| 18341239 | SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, CLEANING METHOD, AND RECORDING MEDIUM | CULBERT, ROBERTS P | 1716 | §103 | Non-Final OA | — | Pending | Jun 26, 2023 |
| 18336524 | SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM | MILLER, JR, JOSEPH ALBERT | 1712 | §103§112 | Final Rejection | 30d | Pending | Jun 16, 2023 |
| 18124799 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, RECORDING MEDIUM, AND SUBSTRATE PROCESSING APPARATUS | PEREZ BERMUDEZ, YARITZA H | 2857 | §101§103§112 | Non-Final OA | 19d | Pending | Mar 22, 2023 |
| 18185673 | METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS | MCCLURE, CHRISTINA D | 1718 | §103§112 | Non-Final OA | — | Pending | Mar 17, 2023 |
| 18185647 | SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS | RAHIM, NILUFA | 2893 | §103 | Non-Final OA | 28d | Pending | Mar 17, 2023 |
| 18172785 | SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM | LEE, AIDEN Y | 1718 | §112 | Final Rejection | 46d | Pending | Feb 22, 2023 |
| 18171903 | SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS | TALBOT, BRIAN K | 1712 | §103§112 | Final Rejection | — | Pending | Feb 21, 2023 |
| 18099338 | GAS SUPPLY ASSEMBLY, SUBSTRATE PROCESSING APPARATUS, NOZZLE, METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM | LEE, AIDEN Y | 1718 | §102§103§112 | Non-Final OA | 46d overdue | Pending | Jan 20, 2023 |
| 17951205 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM | GAMBETTA, KELLY M | 1718 | §103 | Final Rejection | — | Pending | Sep 23, 2022 |
| 17941278 | METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING SYSTEM, AND RECORDING MEDIUM | STEVENSON, ANDRE C | 2899 | §103 | Final Rejection | 11d overdue | Pending | Sep 09, 2022 |
| 17903515 | SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER READABLE RECORDING MEDIUM | BENNETT, CHARLEE | 1718 | §103§112 | Non-Final OA | — | Pending | Sep 06, 2022 |
| 17898760 | SUBSTRATE PROCESSING APPARATUS, EXHAUST DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE | LUND, JEFFRIE ROBERT | 1716 | §103 | Non-Final OA | — | Pending | Aug 30, 2022 |
| 17881772 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM | STEVENSON, ANDRE C | 2899 | §103 | Non-Final OA | 14d | Pending | Aug 05, 2022 |
| 17489305 | SUBSTRATE PROCESSING APPARATUS, DEVICE MANAGEMENT CONTROLLER, AND RECORDING MEDIUM | LIANG, LEONARD S | 2857 | §101§102§103 | Final Rejection | — | Pending | Sep 29, 2021 |
| 17313491 | SUBSTRATE PROCESSING APPARATUS | MOORE, KARLA A | 1716 | §112Other | Final Rejection | 13d | Pending | May 06, 2021 |
| 17104244 | METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM | CRAWFORD EASON, LATANYA N | 2813 | §103§112 | Non-Final OA | 36d | Pending | Nov 25, 2020 |