Prosecution Insights
Last updated: May 29, 2026

ASML Netherlands B.V.

134 pending office actions • 42 art units • 73 examiners • 46 of 134 (34%) have an AI response strategy ready • 218 patents granted in the last 365 days

Portfolio Summary

134
Total Pending OAs
71
Non-Final OAs
54
Final Rejections
9
Advisory / Quayle

Response Deadline Pressure

Based on the USPTO statutory response window for each pending office action. 131 of the docket's apps have a known mailing date; the rest are excluded from the tile counts.

78
Overdue
3
Due this week
25
Due this month
13
Due in next 60 days
12
Due later

Deadline Fire Line

Every pending office action with a known statutory deadline, placed on a days-until-due axis. Dots left of Today are overdue; the further right, the more runway. Cases that share a deadline window stack vertically. 131 of the docket's apps have a known mailing date.

-30dToday30d60d90d120d
Overdue (78)Due ≤ 7 days (3)Due ≤ 30 days (25)Due ≤ 60 days (13)Due later (12)

Case Difficulty Mix

Difficulty is derived from the rejection statutes on the most recent pending office action. §101-driven and multi-statute cases are graded Hard; §112-only and obviousness-type double-patenting cases are graded Easy; everything else is Medium. "Unknown" means we have not yet parsed a statute for that office action.

12
Hard (9%)
111
Medium (83%)
8
Easy (6%)
3
Unknown (2%)

Rejection Statute Mix

BucketCases
§101 only12 (9%)
§103 only89 (66%)
§102 only20 (15%)
§112 only8 (6%)
Double-patenting + other2 (1%)
No statute on record3 (2%)

Industry Mix

How the docket's pending cases split across USPTO tech-center bands.

20
Life Sciences
15% of docket
17
Information Tech
13% of docket
18
Communications
13% of docket
74
Semiconductors
55% of docket
3
Mechanical / Eng
2% of docket
2
Business / Other
1% of docket

Time-on-OA Estimate

Manual office-action response work runs about 10 hours per case. The time-saved bands below show what IP Author's prosecution pipeline typically delivers — a conservative 20% on the low end, 35% in the middle, 50% on the high end.

1,340 h
Manual time on pending OAs
268 h
Time saved (low, 20%)
469 h
Time saved (mid, 35%)
11.7 wks
FTE-weeks freed (mid)

Top Examiners on this docket

ExaminerApps on this docketAllow rateInterview lift
WHITESELL, STEVEN H 11 81.8% +13.3%
KIM, PETER B 7 82.8% +9.1%
PERSAUD, DEORAM 7 76.7% +11.8%
ASFAW, MESFIN T 5 82.7% +14.2%
ANGEBRANNDT, MARTIN J 5 55.2% +34.5%
RIDDLE, CHRISTINA A 4 80.8% +13.7%
STOFFA, WYATT A 4 79.9% +22.4%
VANORE, DAVID A 4 88.8% +7.5%
NGUYEN, HUNG 3 90.7% +8.9%
SMITH, DAVID E 3 84.9% +7.3%

Quick Wins (35)

Cases in front of an examiner with an allow rate of 80%+ where the difficulty is Easy or Medium. The top 8 ordered by deadline are shown.

App #TitleExaminerDue in
17277583 METROLOGY METHOD AND APPARATUS THEREFOR WHITESELL, STEVEN H 118d overdue
18714547 OVERLAY METROLOGY BASED ON TEMPLATE MATCHING WITH ADAPTIVE WEIGHTING NGUYEN, HUNG 111d overdue
18511454 PROCESS WINDOW BASED ON DEFECT PROBABILITY WHITESELL, STEVEN H 88d overdue
18294202 AN OBJECT GRIPPER, A METHOD OF HOLDING AN OBJECT AND A LITHOGRAPHIC APPARATUS WHITESELL, STEVEN H 72d overdue
18705509 DETERMINING AN ETCH EFFECT BASED ON AN ETCH BIAS DIRECTION ASFAW, MESFIN T 60d overdue
18690979 METHOD FOR FOCUS METROLOGY AND ASSOCIATED APPARATUSES ASFAW, MESFIN T 56d overdue
18719902 METHOD AND APPARATUS FOR LITHOGRAPHIC IMAGING KIM, PETER B 53d overdue
18025183 TARGET STRUCTURE AND ASSOCIATED METHODS AND APPARATUS WHITESELL, STEVEN H 51d overdue

Hard Cases (12)

Multi-statute / §101-driven matters, or cases in front of an examiner with an allow rate under 30%. The top 8 ordered by deadline are shown.

App #TitleExaminerDue in
18017646 APPARATUS AND METHOD FOR SELECTING HIGH QUALITY IMAGES FROM RAW IMAGES AUTOMATICALLY HELCO, NICHOLAS JOHN 79d overdue
17874582 COMPUTATIONAL METROLOGY BASED CORRECTION AND CONTROL WHITESELL, STEVEN H 66d overdue
18718009 METHOD AND APPARATUS FOR CALCULATING REPARATION DOSE FOR A DIE OF A SUBSTRATE EXPOSED BY A LITHOGRAPHIC APPARATUS WHITESELL, STEVEN H 30d overdue
18690871 OUT-OF-BAND LEAKAGE CORRECTION METHOD AND METROLOGY APPARATUS PERSAUD, DEORAM 26d overdue
18277223 METHODS AND APPARATUS FOR CHARACTERIZING A SEMICONDUCTOR MANUFACTURING PROCESS PERSAUD, DEORAM 19d overdue
18630741 SEM IMAGE ALIGNMENT DIGUGLIELMO, DANIELLA MARIE 8d overdue
18233263 METHOD AND SYSTEM TO MONITOR A PROCESS APPARATUS PERSAUD, DEORAM 12d
18281614 METHOD OF DETERMINING AT LEAST A TARGET LAYOUT AND ASSOCIATED METROLOGY APPARATUS PERSAUD, DEORAM 22d

Interview Candidates (36)

Cases in front of an examiner whose interview lift is 10 percentage points or more — i.e. interviewed cases historically resolve more favorably than non-interviewed ones. The top 8 ordered by deadline are shown.

App #TitleExaminerDue in
17277583 METROLOGY METHOD AND APPARATUS THEREFOR WHITESELL, STEVEN H 118d overdue
17607701 A PATTERNING DEVICE ANGEBRANNDT, MARTIN J 103d overdue
18511454 PROCESS WINDOW BASED ON DEFECT PROBABILITY WHITESELL, STEVEN H 88d overdue
18294202 AN OBJECT GRIPPER, A METHOD OF HOLDING AN OBJECT AND A LITHOGRAPHIC APPARATUS WHITESELL, STEVEN H 72d overdue
17874582 COMPUTATIONAL METROLOGY BASED CORRECTION AND CONTROL WHITESELL, STEVEN H 66d overdue
18705509 DETERMINING AN ETCH EFFECT BASED ON AN ETCH BIAS DIRECTION ASFAW, MESFIN T 60d overdue
18690979 METHOD FOR FOCUS METROLOGY AND ASSOCIATED APPARATUSES ASFAW, MESFIN T 56d overdue
18025183 TARGET STRUCTURE AND ASSOCIATED METHODS AND APPARATUS WHITESELL, STEVEN H 51d overdue

Top Art Units

Art UnitApps
2882 26
2881 15
2877 12
1759 11
2878 10
1737 5
2851 5
2668 3
2665 3
2188 3

Pending Office Actions

App #TitleExaminerArt UnitStatutesStatusDue inAIFiled
18874533 HIGH-THROUGHPUT LOAD LOCK CHAMBER TIETJEN, MARINA ANNETTE 3799 §103 Non-Final OA 14d AI Ready Dec 12, 2024
18863941 CONTAMINATION DETERMINATION KIM, PETER B 2882 §103 Non-Final OA 34d Pending Nov 07, 2024
18908931 Imprint Apparatus with Movable Stages CHIDIAC, NICHOLAS J 1744 DPOther Non-Final OA 76d AI Ready Oct 08, 2024
18848085 A METHOD FOR DETERMINING A VERTICAL POSITION OF A STRUCTURE ON A SUBSTRATE AND ASSOCIATED APPARATUSES AHMED, JAMIL 2877 §102 Non-Final OA 9d overdue AI Ready Sep 17, 2024
18848095 ILLUMINATION ARRANGEMENT FOR A METROLOGY DEVICE AND ASSOCIATED METHOD AMARA, MOHAMED K 2877 §102 Non-Final OA 22d AI Ready Sep 17, 2024
18844757 METHOD FOR CORRECTING MEASUREMENTS IN THE MANUFACTURE OF INTEGRATED CIRCUITS AND ASSOCIATED APPARATUSES ASFAW, MESFIN T 2882 §102 Non-Final OA 27d AI Ready Sep 06, 2024
18844478 SETUP AND CONTROL METHODS FOR A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUSES ASFAW, MESFIN T 2882 §102 Non-Final OA 30d Pending Sep 06, 2024
18843936 METHOD FOR DETERMINING A SPATIAL DISTRIBUTION OF A PARAMETER OF INTEREST OVER AT LEAST ONE SUBSTRATE OR PORTION THEREOF ASFAW, MESFIN T 2882 §102 Non-Final OA 28d Pending Sep 04, 2024
18844043 DATA RETRIEVAL UDDIN, MOHAMMED R 2161 §103 Final Rejection 110d overdue Pending Sep 04, 2024
18842640 APPARATUS AND METHODS FOR FILTERING MEASUREMENT RADIATION WHITESELL, STEVEN H 1759 §103 Non-Final OA 9d overdue AI Ready Aug 29, 2024
18838135 INSPECTION TOOL AND BARRIER FOR USE THEREIN HANSEN, JONATHAN M 2877 §103 Non-Final OA 9d AI Ready Aug 13, 2024
18802614 DETECTION APPARATUS FOR SIMULTANEOUS ACQUISITION OF MULTIPLE DIVERSE IMAGES OF AN OBJECT RAHMAN, MD M 2877 §103 Non-Final OA 63d AI Ready Aug 13, 2024
18800925 ACTUATOR UNIT FOR POSITIONING AN OPTICAL ELEMENT WHITESELL, STEVEN H 1759 §112 Non-Final OA 19d overdue AI Ready Aug 12, 2024
18835287 INSPECTION APPARATUS, MOTORIZED APERTURES, AND METHOD BACKGROUND KIM, PETER B 2882 §103 Non-Final OA 11d overdue Pending Aug 01, 2024
18728004 METHOD AND APPARATUS FOR ILLUMINATION ADJUSTMENT AHMED, JAMIL 2877 §103 Non-Final OA 31d overdue Pending Jul 10, 2024
18749556 COMPUTATIONAL METROLOGY BASED SAMPLING SCHEME PERSAUD, DEORAM 2882 §101 Non-Final OA 43d Pending Jun 20, 2024
18721251 A SYSTEM FOR USE IN A LITHOGRAPHIC APPARATUS RIDDLE, CHRISTINA A 2882 §103 Final Rejection 84d Pending Jun 18, 2024
18719902 METHOD AND APPARATUS FOR LITHOGRAPHIC IMAGING KIM, PETER B 2882 §103 Non-Final OA 53d overdue Pending Jun 14, 2024
18718009 METHOD AND APPARATUS FOR CALCULATING REPARATION DOSE FOR A DIE OF A SUBSTRATE EXPOSED BY A LITHOGRAPHIC APPARATUS WHITESELL, STEVEN H 1759 §101 Non-Final OA 30d overdue Pending Jun 07, 2024
18716806 MACHINE LEARNING MODEL FOR ASYMMETRY-INDUCED OVERLAY ERROR CORRECTION WHITESELL, STEVEN H 1759 §103 Non-Final OA 24d overdue Pending Jun 05, 2024
18716383 METHOD AND APPARATUS FOR LITHOGRAPHIC IMAGING KIM, PETER B 2882 §103 Non-Final OA 43d overdue Pending Jun 04, 2024
18714728 SYSTEMS AND METHODS FOR OPTIMIZING LITHOGRAPHIC DESIGN VARIABLES USING IMAGE-BASED FAILURE RATE MODEL KIM, PETER B 2882 §102 Non-Final OA 36d overdue Pending May 30, 2024
18714547 OVERLAY METROLOGY BASED ON TEMPLATE MATCHING WITH ADAPTIVE WEIGHTING NGUYEN, HUNG 2882 §103 Non-Final OA 111d overdue Pending May 29, 2024
18713108 CHARGED-PARTICLE BEAM APPARATUS FOR VOLTAGE-CONTRAST INSPECTION AND METHODS THEREOF NAVARRO, HUGO IVAN 2858 §103 Non-Final OA 45d overdue AI Ready May 23, 2024
18712464 SYSTEMS AND STRUCTURES FOR VENTING AND FLOW CONDITIONING OPERATIONS IN INSPECTION SYSTEMS SHAH, NEEL D 2858 §102 Non-Final OA 32d overdue AI Ready May 22, 2024
18712671 SURROUNDING PATTERN AND PROCESS AWARE METROLOGY PERSAUD, DEORAM 2882 §102 Non-Final OA 38d overdue Pending May 22, 2024
18711842 APPARATUS FOR SUPPLYING LIQUID TARGET MATERIAL TO A RADIATION SOURCE NGUYEN, HUNG 2882 §103 Non-Final OA Pending May 20, 2024
18710127 SYSTEMS AND METHODS FOR DEFECT DETECTION AND DEFECT LOCATION IDENTIFICATION IN A CHARGED PARTICLE SYSTEM ALAVI, AMIR 2668 §103 Non-Final OA 3d overdue AI Ready May 14, 2024
18709792 VALVES WITH REDUCED PARTICLE GENERATION AND INCREASED CYCLE LIFE BASTIANELLI, JOHN 3753 §103 Non-Final OA 56d AI Ready May 13, 2024
18705509 DETERMINING AN ETCH EFFECT BASED ON AN ETCH BIAS DIRECTION ASFAW, MESFIN T 2882 §102 Non-Final OA 60d overdue Pending Apr 26, 2024
18630741 SEM IMAGE ALIGNMENT DIGUGLIELMO, DANIELLA MARIE 2666 §101 Non-Final OA 8d overdue AI Ready Apr 09, 2024
18699358 LITHOGRAPHIC APPARATUS AND ASSOCIATED METHODS RIDDLE, CHRISTINA A 2882 §103 Final Rejection 28d Pending Apr 08, 2024
18618957 CHARGED PARTICLE APPARATUS AND METHOD WANG, JING 2881 §103 Non-Final OA 13d AI Ready Mar 27, 2024
18618406 PELLICLE FOR EUV LITHOGRAPHY ANGEBRANNDT, MARTIN J 1737 §103 Non-Final OA 31d overdue Pending Mar 27, 2024
18617149 METAL-SILICIDE-NITRIDATION FOR STRESS REDUCTION ANGEBRANNDT, MARTIN J 1737 §103 Non-Final OA 30d overdue Pending Mar 26, 2024
18611689 BEAM GRID LAYOUT WHITTINGTON, KENNETH 3992 Other Final Rejection 36d AI Ready Mar 20, 2024
18691002 SOURCE SELECTION MODULE AND ASSOCIATED METROLOGY AND LITHOGRAPHIC APPARATUSES MENDOZA, ALEXANDRIA ARELLANO 2877 §103 Final Rejection 121d overdue Pending Mar 11, 2024
18690871 OUT-OF-BAND LEAKAGE CORRECTION METHOD AND METROLOGY APPARATUS PERSAUD, DEORAM 2882 §101 Final Rejection 26d overdue Pending Mar 11, 2024
18690979 METHOD FOR FOCUS METROLOGY AND ASSOCIATED APPARATUSES ASFAW, MESFIN T 2882 §103 Final Rejection 56d overdue Pending Mar 11, 2024
18686742 METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHOD STOCK JR, GORDON J 2877 §102 Non-Final OA 42d overdue Pending Feb 26, 2024
18684391 COMPENSATING OPTICAL SYSTEM FOR NONUNIFORM SURFACES, A METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF STOCK JR, GORDON J 2877 §103 Non-Final OA 43d overdue Pending Feb 16, 2024
18683389 SENSOR SYSTEM UNDERWOOD, JARREAS C 2877 §103 Final Rejection 53d Pending Feb 13, 2024
18294202 AN OBJECT GRIPPER, A METHOD OF HOLDING AN OBJECT AND A LITHOGRAPHIC APPARATUS WHITESELL, STEVEN H 1759 §103 Non-Final OA 72d overdue Pending Feb 01, 2024
18415596 ALIGNING A DISTORTED IMAGE RODIN, MARIO ANTHONY 2675 §103 Non-Final OA 19d AI Ready Jan 17, 2024
18578780 APPARATUS AND METHOD FOR PREPARING AND CLEANING A COMPONENT RIDDLE, CHRISTINA A 2882 §112 Final Rejection 2d overdue Pending Jan 12, 2024
18577678 IMAGE DISTORTION CORRECTION IN CHARGED PARTICLE INSPECTION LAM, ANDREW H 2682 §103 Non-Final OA 40d AI Ready Jan 08, 2024
18577684 METHOD AND SYSTEM FOR ANOMALY-BASED DEFECT INSPECTION BAKER, CHARLOTTE M 2664 §103 Non-Final OA 9d overdue AI Ready Jan 08, 2024
18407323 METHOD FOR DECOUPLING SOURCES OF VARIATION RELATED TO SEMICONDUCTOR MANUFACTURING CHOI, ALICIA M 2117 §101 Non-Final OA Pending Jan 08, 2024
18397896 CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD OF ALIGNING A SAMPLE IN A CHARGED PARTICLE ASSESSMENT SYSTEM STOFFA, WYATT A 2881 §102 Non-Final OA 31d overdue AI Ready Dec 27, 2023
18571118 METHOD OF DETERMINING A CORRECTION FOR AT LEAST ONE CONTROL PARAMETER IN A SEMICONDUCTOR MANUFACTURING PROCESS YANCHUS III, PAUL B 2115 §103 Non-Final OA 1d overdue Pending Dec 15, 2023
18570140 STRUCTURES FOR USE ON A SUBSTRATE HOLDER, SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS AND METHOD KIM, PETER B 2882 §103 Final Rejection 8d Pending Dec 14, 2023
18568628 CHARGED PARTICLE DETECTOR ASSEMBLY SMITH, DAVID E 2881 §103 Non-Final OA 42d overdue Pending Dec 08, 2023
18567053 METHOD AND ARRANGEMENT FOR DETERMINING THERMALLY-INDUCED DEFORMATIONS PERSAUD, DEORAM 2882 §101 Final Rejection 28d Pending Dec 05, 2023
18565951 INSPECTION DATA FILTERING SYSTEMS AND METHODS BHATNAGAR, ANAND P 2668 §102 Non-Final OA 100d overdue Pending Nov 30, 2023
18515952 Transport System Having a Magnetically Levitated Transportation Stage WHITESELL, STEVEN H 1759 §103 Final Rejection 1d overdue Pending Nov 21, 2023
18516020 DATA PROCESSING DEVICE AND METHOD, CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD SMITH, DAVID E 2881 §103 Final Rejection 83d AI Ready Nov 21, 2023
18511454 PROCESS WINDOW BASED ON DEFECT PROBABILITY WHITESELL, STEVEN H 1759 §103 Non-Final OA 88d overdue Pending Nov 16, 2023
18384791 CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD MCCORMACK, JASON L 2881 §103 Final Rejection 3d overdue AI Ready Oct 27, 2023
18287160 OPTICAL ELEMENT FOR GENERATION OF BROADBAND RADIATION WONG, ERIC K 2874 §102 Final Rejection 29d overdue Pending Oct 16, 2023
18286327 METROLOGY TOOL CALIBRATION METHOD AND ASSOCIATED METROLOGY TOOL NGUYEN, HUNG 2882 §103 Non-Final OA 12d AI Ready Oct 10, 2023
18478771 ELECTRON-OPTICAL SYSTEM AND METHOD OF OPERATING AN ELECTRON-OPTICAL SYSTEM VANORE, DAVID A 2878 §102 Non-Final OA 43d overdue AI Ready Sep 29, 2023
18284839 ON SYSTEM SELF-DIAGNOSIS AND SELF-CALIBRATION TECHNIQUE FOR CHARGED PARTICLE BEAM SYSTEMS VANORE, DAVID A 2878 §112 Non-Final OA 28d AI Ready Sep 28, 2023
18369775 SEM IMAGE ENHANCEMENT LU, ZHIYU 2665 §103 Non-Final OA 24d overdue AI Ready Sep 18, 2023
18369619 FLOOD COLUMN AND CHARGED PARTICLE APPARATUS CHOI, JAMES J 2878 §103 Final Rejection 83d AI Ready Sep 18, 2023
18281614 METHOD OF DETERMINING AT LEAST A TARGET LAYOUT AND ASSOCIATED METROLOGY APPARATUS PERSAUD, DEORAM 2882 §101 Final Rejection 22d Pending Sep 12, 2023
18280917 TARGET MATERIAL TRANSFER SYSTEM COMPONENTS AND METHODS OF MAKING THE SAME CHANG, HANWAY 2878 §103 Non-Final OA 6d Pending Sep 07, 2023
18279121 ALIGNMENT METHOD AND ASSOCIATED ALIGNMENT AND LITHOGRAPHIC APPARATUSES WHITESELL, STEVEN H 1759 §103 Final Rejection 42d overdue Pending Aug 28, 2023
18277223 METHODS AND APPARATUS FOR CHARACTERIZING A SEMICONDUCTOR MANUFACTURING PROCESS PERSAUD, DEORAM 2882 §101 Final Rejection 19d overdue Pending Aug 14, 2023
18233263 METHOD AND SYSTEM TO MONITOR A PROCESS APPARATUS PERSAUD, DEORAM 2882 §101 Final Rejection 12d Pending Aug 11, 2023
18276018 A MACHINE LEARNING MODEL USING TARGET PATTERN AND REFERENCE LAYER PATTERN TO DETERMINE OPTICAL PROXIMITY CORRECTION FOR MASK SALEH, ZAID MUHAMMAD 2668 §102 Non-Final OA 14d Pending Aug 04, 2023
18365130 PATTERN GROUPING METHOD BASED ON MACHINE LEARNING BALI, VIKKRAM 2663 DPOther Final Rejection AI Ready Aug 03, 2023
18270707 DUAL FOCUS SOLUTON FOR SEM METROLOGY TOOLS VANORE, DAVID A 2878 §112 Final Rejection 29d AI Ready Jun 30, 2023
18270074 MODULAR AUTOENCODER MODEL FOR MANUFACTURING PROCESS PARAMETER ESTIMATION CAMPOS, ALFREDO 2129 §103 Non-Final OA 35d AI Ready Jun 28, 2023
18259344 MODULAR AUTOENCODER MODEL FOR MANUFACTURING PROCESS PARAMETER ESTIMATION ALSHAHARI, SADIK AHMED 2121 §103 Non-Final OA 1d overdue AI Ready Jun 26, 2023
18268847 A METROLOGY APPARATUS AND A METROLOGY METHOD OKASHA, RAMI RAFAT 2118 §103 Non-Final OA 38d overdue Pending Jun 21, 2023
18268924 DATA-DRIVEN PREDICTION AND IDENTIFICATION OF FAILURE MODES BASED ON WAFER-LEVEL ANALYSIS AND ROOT CAUSE ANALYSIS FOR SEMICONDUCTOR PROCESSING SAFAIPOUR, BOBBAK 2665 §103 Non-Final OA 14d AI Ready Jun 21, 2023
18268953 MACHINE LEARNING-BASED SYSTEMS AND METHODS FOR GENERATING SYNTHETIC DEFECT IMAGES FOR WAFER INSPECTION DHOOGE, DEVIN J 2677 §103 Final Rejection 50d Pending Jun 21, 2023
18209445 CHARGED PARTICLE SYSTEM, METHOD OF PROCESSING A SAMPLE USING A MULTI-BEAM OF CHARGED PARTICLES CHOI, JAMES J 2878 §103 Non-Final OA 44d overdue AI Ready Jun 13, 2023
18331866 APPARATUS AND METHOD FOR DIRECTING CHARGED PARTICLE BEAM TOWARDS A SAMPLE SMITH, DAVID E 2881 §103 Non-Final OA 54d AI Ready Jun 08, 2023
18206887 MEMBRANE CLEANING APPARATUS BERGNER, ERIN FLANAGAN 1713 §103 Non-Final OA 46d overdue Pending Jun 07, 2023
18327847 CHARGED PARTICLE TOOL, CALIBRATION METHOD, INSPECTION METHOD VANORE, DAVID A 2878 §112 Final Rejection 70d AI Ready Jun 01, 2023
18039712 A METHOD OF MONITORING A LITHOGRAPHIC PROCESS LE, JOHN H 2857 §102 Non-Final OA 5d Pending May 31, 2023
18039487 METHODS AND APPARATUS FOR PROVIDING A BROADBAND LIGHT SOURCE STAHL, MICHAEL J 2874 §102 Final Rejection 70d Pending May 30, 2023
18039484 LITHOGRAPHIC METHOD KIM, PETER B 2882 §112 Non-Final OA 17d overdue Pending May 30, 2023
18203172 INTERFEROMETER SYSTEM, METHOD OF DETERMINING A MODE HOP OF A LASER SOURCE OF AN INTERFEROMETER SYSTEM, METHOD OF DETERMINING A POSITION OF A MOVABLE OBJECT, AND LITHOGRAPHIC APPARATUS LYONS, MICHAEL A 2877 §103 Non-Final OA 8d overdue Pending May 30, 2023
18039483 MACHINE LEARNING BASED IMAGE GENERATION OF AFTER-DEVELOPMENT OR AFTER-ETCH IMAGES LIU, XIAO 2664 §103 Final Rejection 16d overdue Pending May 30, 2023
18038206 SEMICONDUCTOR CHARGED PARTICLE DETECTOR FOR MICROSCOPY STOFFA, WYATT A 2881 §112 Final Rejection 71d Pending May 22, 2023
18320157 INSPECTION METHOD AND INSPECTION TOOL MCCORMACK, JASON L 2881 §103 Non-Final OA 14d AI Ready May 18, 2023
18032273 METHODS AND COMPUTER PROGRAMS FOR CONFIGURATION OF A SAMPLING SCHEME GENERATION MODEL SALOMON, PHENUEL S 2146 §103 Non-Final OA 32d overdue Pending Apr 17, 2023
18031865 METHOD FOR GENERATING MASK PATTERN LEE, ERIC D 2851 §102 Non-Final OA 36d overdue Pending Apr 13, 2023
18134020 APERTURE PATTERNS FOR DEFINING MULTI-BEAMS CHOI, JAMES J 2878 §103 Non-Final OA 30d overdue AI Ready Apr 12, 2023
18025636 VACUUM SYSTEM FOR MITIGATING DAMAGE DUE TO A VACUUM PUMP MALFUNCTION COMLEY, ALEXANDER BRYANT 3746 §102 Final Rejection 3d overdue Pending Mar 09, 2023
18025183 TARGET STRUCTURE AND ASSOCIATED METHODS AND APPARATUS WHITESELL, STEVEN H 1759 §103 Non-Final OA 51d overdue Pending Mar 07, 2023
18023708 METHOD OF PERFORMING METROLOGY, METHOD OF TRAINING A MACHINE LEARNING MODEL, METHOD OF PROVIDING A LAYER COMPRISING A TWO-DIMENSIONAL MATERIAL, METROLOGY APPARATUS DINH, LYNDA 2857 §103 Non-Final OA 50d overdue Pending Feb 27, 2023
18111503 SYSTEM AND METHOD FOR ALIGNING ELECTRON BEAMS IN MULTI-BEAM INSPECTION APPARATUS STOFFA, WYATT A 2881 §103 Non-Final OA 37d overdue AI Ready Feb 17, 2023
18018578 SYSTEMS AND METHODS FOR SIGNAL ELECTRON DETECTION IN AN INSPECTION APPARATUS MCCORMACK, JASON L 2881 §103 Final Rejection 70d AI Ready Jan 29, 2023
18017646 APPARATUS AND METHOD FOR SELECTING HIGH QUALITY IMAGES FROM RAW IMAGES AUTOMATICALLY HELCO, NICHOLAS JOHN 2667 §101 Final Rejection 79d overdue Pending Jan 23, 2023
18016811 METHOD AND APPARATUS FOR IDENTIFYING CONTAMINATION IN A SEMICONDUCTOR FAB GASSEN, CHRISTOPHER J 2881 §103 Final Rejection 43d overdue Pending Jan 18, 2023
18015313 APPARATUS AND METHOD FOR SELECTING INFORMATIVE PATTERNS FOR TRAINING MACHINE LEARNING MODELS LU, ZHIYU 2665 §103 Final Rejection 84d Pending Jan 09, 2023
18150745 CHARGED-PARTICLE MULTI-BEAM COLUMN, CHARGED-PARTICLE MULTI-BEAM COLUMN ARRAY, INSPECTION METHOD CHANG, HANWAY 2878 §103 Final Rejection 75d AI Ready Jan 05, 2023
18014431 METHOD OF DETERMINING A CORRECTION STRATEGY IN A SEMICONDUCTOR MANUFACTURING PROCESS AND ASSOCIATED APPARATUSES PAN, YUHUI R 2116 §103 Final Rejection 13d Pending Jan 04, 2023
18011593 APPARATUS FOR AND METHOD OF ACCELERATING DROPLETS IN A DROPLET GENERATOR FOR AN EUV SOURCE CHANG, HANWAY 2878 §103 Non-Final OA 12d Pending Dec 20, 2022
18064110 REPLACEABLE MODULE FOR A CHARGED PARTICLE APPARATUS OSENBAUGH-STEWART, ELIZA W 2881 §103 Non-Final OA 2d overdue AI Ready Dec 09, 2022
18008075 SYSTEMS, METHODS, AND PRODUCTS FOR DETERMINING PRINTING PROBABILITY OF ASSIST FEATURE AND ITS APPLICATION WALKE, AMANDA C 1722 §103 Final Rejection 15d overdue Pending Dec 02, 2022
17986829 APPARATUS FOR DECOMPOSING ERROR CONTRIBUTIONS FROM MULTIPLE SOURCES TO MULTIPLE FEATURES OF A PATTERN ON A SUBSTRATE ISLAM, MEHRAZUL NMN 2662 §103 Final Rejection 28d AI Ready Nov 14, 2022
17924626 SYSTEMS, PRODUCTS, AND METHODS FOR GENERATING PATTERNING DEVICES AND PATTERNS THEREFOR ALAWDI, ANWER AHMED 2851 §103 Non-Final OA 53d overdue Pending Nov 10, 2022
17924543 VERIFYING FREEFORM CURVILINEAR FEATURES OF A MASK DESIGN GARBOWSKI, LEIGH M 2851 §103 Non-Final OA 56d overdue Pending Nov 10, 2022
17922768 OPTICAL ELEMENT AND PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS ANGEBRANNDT, MARTIN J 1737 §103 Final Rejection 28d Pending Nov 01, 2022
17922580 SUBSTRATE SUPPORT SYSTEM, LITHOGRAPHIC APPARATUS AND METHOD OF EXPOSING A SUBSTRATE RIDDLE, CHRISTINA A 2882 §103 Final Rejection 55d Pending Oct 31, 2022
17961247 APERTURE ASSEMBLY, BEAM MANIPULATOR UNIT, METHOD OF MANIPULATING CHARGED PARTICLE BEAMS, AND CHARGED PARTICLE PROJECTION APPARATUS STOFFA, WYATT A 2881 §103 Non-Final OA 2d overdue AI Ready Oct 06, 2022
17799806 SYSTEMS AND METHODS FOR PROCESS METRIC AWARE PROCESS CONTROL PATEL, DHRUVKUMAR 2119 §103 Final Rejection 9d overdue Pending Aug 15, 2022
17798538 CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD OSENBAUGH-STEWART, ELIZA W 2881 §103 Final Rejection 5d Pending Aug 09, 2022
17796641 METROLOGY METHOD AND DEVICE FOR MEASURING A PERIODIC STRUCTURE ON A SUBSTRATE RUSH, ERIC 2677 §103 Non-Final OA 31d overdue AI Ready Jul 29, 2022
17796434 DETERMINING LITHOGRAPHIC MATCHING PERFORMANCE ALAWDI, ANWER AHMED 2851 §103 Final Rejection 125d overdue Pending Jul 29, 2022
17874582 COMPUTATIONAL METROLOGY BASED CORRECTION AND CONTROL WHITESELL, STEVEN H 1759 §101 Final Rejection 66d overdue Pending Jul 27, 2022
17794435 CHARGED PARTICLE MANIPULATOR DEVICE OSENBAUGH-STEWART, ELIZA W 2881 §103 Final Rejection 72d overdue Pending Jul 21, 2022
17869550 SYSTEM AND METHOD USING A SET OF MULTI-STEP DEFECT DETECTION TESTS WITH DIFFERENT SENSITIVITY LEE, HWA S 2877 §101 Final Rejection 47d AI Ready Jul 20, 2022
17792464 PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS ANGEBRANNDT, MARTIN J 1737 Other Final Rejection 33d Pending Jul 13, 2022
17780287 METHOD AND SYSTEM FOR ENHANCING TARGET FEATURES OF A PATTERN IMAGED ONTO A SUBSTRATE ALAWDI, ANWER AHMED 2851 §103 Final Rejection 3d overdue Pending May 26, 2022
17777348 METHOD AND APPARATUS FOR DETERMINING CONTROL DATA FOR A LITHOGRAPHIC APPARATUS WHITE, JAY MICHAEL 2188 §103 Final Rejection 4d overdue Pending May 17, 2022
17728691 EBeam Inspection Method SCHWARTZ, RAPHAEL M 2671 §112 Non-Final OA 66d overdue Pending Apr 25, 2022
17763698 PROCESS MONITORING AND TUNING USING PREDICTION MODELS PAN, YUHUI R 2116 §103 Final Rejection 15d overdue Pending Mar 25, 2022
17638472 SEMICONDUCTOR DEVICE GEOMETRY METHOD AND SYSTEM COLE, BRANDON S 2128 §103 Final Rejection 30d overdue Pending Feb 25, 2022
17634309 MODELING METHOD FOR COMPUTATIONAL FINGERPRINTS WHITE, JAY MICHAEL 2188 §103 Final Rejection 79d overdue Pending Feb 10, 2022
17632632 METHOD AND APPARATUS FOR PHOTOLITHOGRAPHIC IMAGING WHITE, JAY MICHAEL 2188 §102 Final Rejection 86d overdue Pending Feb 03, 2022
17623829 SUB-FIELD CONTROL OF A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUS TAN, ALVIN H 2118 §103 Final Rejection 99d overdue Pending Dec 29, 2021
17607701 A PATTERNING DEVICE ANGEBRANNDT, MARTIN J 1737 §103 Final Rejection 103d overdue Pending Oct 29, 2021
17471363 MACHINE-LEARNING BASED DEFECT IDENTIFICATION DULANEY, BENJAMIN O 2683 §103 Non-Final OA 70d Pending Sep 10, 2021
17388926 TEMPERATURE SENSING PROBE, BURL PLATE, LITHOGRAPHIC APPARATUS AND METHOD WHITTINGTON, KENNETH 3992 Other Non-Final OA 27d Pending Jul 29, 2021
17311422 APPARATUS AND METHOD FOR GROUPING IMAGE PATTERNS TO DETERMINE WAFER BEHAVIOR IN A PATTERNING PROCESS LEE, HWA S 2877 §103 Non-Final OA 55d Pending Jun 07, 2021
17334574 METHOD FOR DECREASING UNCERTAINTY IN MACHINE LEARNING MODEL PREDICTIONS OCHOA, JUAN CARLOS 2186 §103 Non-Final OA 27d AI Ready May 28, 2021
17277583 METROLOGY METHOD AND APPARATUS THEREFOR WHITESELL, STEVEN H 1759 §103 Final Rejection 118d overdue Pending Mar 18, 2021
16971012 METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF MATERIAL KACKAR, RAM N 1716 §103 Non-Final OA 4d overdue Pending Aug 19, 2020
16340771 METHODS & APPARATUS FOR CONTROLLING AN INDUSTRIAL PROCESS LINDSAY, BERNARD G 2119 §103 Non-Final OA 28d overdue Pending Apr 10, 2019

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