138 pending office actions
| App # | Title | Examiner | Art Unit | Status | Filed |
|---|---|---|---|---|---|
| 18874533 | HIGH-THROUGHPUT LOAD LOCK CHAMBER | TIETJEN, MARINA ANNETTE | 3799 | Non-Final OA | Dec 12, 2024 |
| 18855565 | CONFIGURABLE PRINTED OPTICAL ROUTING FOR PARALLEL OPTICAL DETECTION | AKANBI, ISIAKA O | 2877 | Non-Final OA | Oct 09, 2024 |
| 18904066 | MULTI-BEAM INSPECTION METHODS AND SYSTEMS | LEUNG, CHRISTINA Y | 3991 | Non-Final OA | Oct 01, 2024 |
| 18848085 | A METHOD FOR DETERMINING A VERTICAL POSITION OF A STRUCTURE ON A SUBSTRATE AND ASSOCIATED APPARATUSES | AHMED, JAMIL | 2877 | Non-Final OA | Sep 17, 2024 |
| 18848095 | ILLUMINATION ARRANGEMENT FOR A METROLOGY DEVICE AND ASSOCIATED METHOD | AMARA, MOHAMED K | 2877 | Non-Final OA | Sep 17, 2024 |
| 18844757 | METHOD FOR CORRECTING MEASUREMENTS IN THE MANUFACTURE OF INTEGRATED CIRCUITS AND ASSOCIATED APPARATUSES | ASFAW, MESFIN T | 2882 | Non-Final OA | Sep 06, 2024 |
| 18844043 | DATA RETRIEVAL | UDDIN, MOHAMMED R | 2161 | Final Rejection | Sep 04, 2024 |
| 18843936 | METHOD FOR DETERMINING A SPATIAL DISTRIBUTION OF A PARAMETER OF INTEREST OVER AT LEAST ONE SUBSTRATE OR PORTION THEREOF | ASFAW, MESFIN T | 2882 | Non-Final OA | Sep 04, 2024 |
| 18843138 | INSPECTION APPARATUS, LINEARLY MOVABLE BEAM DISPLACER, AND METHOD | AYUB, HINA F | 2877 | Non-Final OA | Aug 30, 2024 |
| 18842640 | APPARATUS AND METHODS FOR FILTERING MEASUREMENT RADIATION | WHITESELL, STEVEN H | 1759 | Non-Final OA | Aug 29, 2024 |
| 18808844 | Metrology Apparatus And Method For Determining A Characteristic Of One Or More Structures On A Substrate | ITSKOVICH, MIKHAIL | 2483 | Final Rejection | Aug 19, 2024 |
| 18838135 | INSPECTION TOOL AND BARRIER FOR USE THEREIN | HANSEN, JONATHAN M | 2877 | Non-Final OA | Aug 13, 2024 |
| 18800925 | ACTUATOR UNIT FOR POSITIONING AN OPTICAL ELEMENT | WHITESELL, STEVEN H | 1759 | Non-Final OA | Aug 12, 2024 |
| 18835287 | INSPECTION APPARATUS, MOTORIZED APERTURES, AND METHOD BACKGROUND | KIM, PETER B | 2882 | Non-Final OA | Aug 01, 2024 |
| 18790520 | EUV LITHOGRAPHY SYSTEM HAVING A GAS-BINDING COMPONENT | PERSAUD, DEORAM | 2882 | Non-Final OA | Jul 31, 2024 |
| 18728004 | METHOD AND APPARATUS FOR ILLUMINATION ADJUSTMENT | AHMED, JAMIL | 2877 | Non-Final OA | Jul 10, 2024 |
| 18723849 | LITHOGRAPHIC PERFORMANCE QUALIFICATION AND ASSOCIATED APPARATUSES | KIM, PETER B | 2882 | Non-Final OA | Jun 24, 2024 |
| 18719902 | METHOD AND APPARATUS FOR LITHOGRAPHIC IMAGING | KIM, PETER B | 2882 | Non-Final OA | Jun 14, 2024 |
| 18718009 | METHOD AND APPARATUS FOR CALCULATING REPARATION DOSE FOR A DIE OF A SUBSTRATE EXPOSED BY A LITHOGRAPHIC APPARATUS | WHITESELL, STEVEN H | 1759 | Non-Final OA | Jun 07, 2024 |
| 18716806 | MACHINE LEARNING MODEL FOR ASYMMETRY-INDUCED OVERLAY ERROR CORRECTION | WHITESELL, STEVEN H | 1759 | Non-Final OA | Jun 05, 2024 |
| 18716383 | METHOD AND APPARATUS FOR LITHOGRAPHIC IMAGING | KIM, PETER B | 2882 | Non-Final OA | Jun 04, 2024 |
| 18714728 | SYSTEMS AND METHODS FOR OPTIMIZING LITHOGRAPHIC DESIGN VARIABLES USING IMAGE-BASED FAILURE RATE MODEL | KIM, PETER B | 2882 | Non-Final OA | May 30, 2024 |
| 18714547 | OVERLAY METROLOGY BASED ON TEMPLATE MATCHING WITH ADAPTIVE WEIGHTING | NGUYEN, HUNG | 2882 | Non-Final OA | May 29, 2024 |
| 18713108 | CHARGED-PARTICLE BEAM APPARATUS FOR VOLTAGE-CONTRAST INSPECTION AND METHODS THEREOF | NAVARRO, HUGO IVAN | 2858 | Non-Final OA | May 23, 2024 |
| 18712671 | SURROUNDING PATTERN AND PROCESS AWARE METROLOGY | PERSAUD, DEORAM | 2882 | Non-Final OA | May 22, 2024 |
| 18712464 | SYSTEMS AND STRUCTURES FOR VENTING AND FLOW CONDITIONING OPERATIONS IN INSPECTION SYSTEMS | SHAH, NEEL D | 2858 | Non-Final OA | May 22, 2024 |
| 18710127 | SYSTEMS AND METHODS FOR DEFECT DETECTION AND DEFECT LOCATION IDENTIFICATION IN A CHARGED PARTICLE SYSTEM | ALAVI, AMIR | 2668 | Non-Final OA | May 14, 2024 |
| 18705509 | DETERMINING AN ETCH EFFECT BASED ON AN ETCH BIAS DIRECTION | ASFAW, MESFIN T | 2882 | Non-Final OA | Apr 26, 2024 |
| 18704337 | INSPECTION APPARATUS, POLARIZATION-MAINTAINING ROTATABLE BEAM DISPLACER, AND METHOD | PERSAUD, DEORAM | 2882 | Non-Final OA | Apr 24, 2024 |
| 18700780 | A FLUID EXTRACTION SYSTEM, METHOD AND LITHOGRAPHIC APPARATUS | NGUYEN, HUNG | 2882 | Final Rejection | Apr 12, 2024 |
| 18630741 | SEM IMAGE ALIGNMENT | DIGUGLIELMO, DANIELLA MARIE | 2666 | Non-Final OA | Apr 09, 2024 |
| 18699358 | LITHOGRAPHIC APPARATUS AND ASSOCIATED METHODS | RIDDLE, CHRISTINA A | 2882 | Final Rejection | Apr 08, 2024 |
| 18619839 | METROLOGY METHOD AND SYSTEM AND LITHOGRAPHIC SYSTEM | WHITESELL, STEVEN H | 1759 | Final Rejection | Mar 28, 2024 |
| 18618957 | CHARGED PARTICLE APPARATUS AND METHOD | WANG, JING | 2881 | Non-Final OA | Mar 27, 2024 |
| 18618406 | PELLICLE FOR EUV LITHOGRAPHY | ANGEBRANNDT, MARTIN J | 1737 | Non-Final OA | Mar 27, 2024 |
| 18617149 | METAL-SILICIDE-NITRIDATION FOR STRESS REDUCTION | ANGEBRANNDT, MARTIN J | 1737 | Non-Final OA | Mar 26, 2024 |
| 18691002 | SOURCE SELECTION MODULE AND ASSOCIATED METROLOGY AND LITHOGRAPHIC APPARATUSES | MENDOZA, ALEXANDRIA ARELLANO | 2877 | Final Rejection | Mar 11, 2024 |
| 18690871 | OUT-OF-BAND LEAKAGE CORRECTION METHOD AND METROLOGY APPARATUS | PERSAUD, DEORAM | 2882 | Final Rejection | Mar 11, 2024 |
| 18690979 | METHOD FOR FOCUS METROLOGY AND ASSOCIATED APPARATUSES | ASFAW, MESFIN T | 2882 | Non-Final OA | Mar 11, 2024 |
| 18686742 | METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHOD | STOCK JR, GORDON J | 2877 | Non-Final OA | Feb 26, 2024 |
| 18684391 | COMPENSATING OPTICAL SYSTEM FOR NONUNIFORM SURFACES, A METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF | STOCK JR, GORDON J | 2877 | Non-Final OA | Feb 16, 2024 |
| 18443827 | METROLOGY METHOD AND APPARATUS | KIM, PETER B | 2882 | Final Rejection | Feb 16, 2024 |
| 18294202 | AN OBJECT GRIPPER, A METHOD OF HOLDING AN OBJECT AND A LITHOGRAPHIC APPARATUS | WHITESELL, STEVEN H | 1759 | Non-Final OA | Feb 01, 2024 |
| 18415596 | ALIGNING A DISTORTED IMAGE | RODIN, MARIO ANTHONY | 2675 | Non-Final OA | Jan 17, 2024 |
| 18580062 | OPTICAL ELEMENT FOR USE IN METROLOGY SYSTEMS | KIDWELL, KAITLYN ELIZABETH | 2877 | Final Rejection | Jan 17, 2024 |
| 18578780 | APPARATUS AND METHOD FOR PREPARING AND CLEANING A COMPONENT | RIDDLE, CHRISTINA A | 2882 | Final Rejection | Jan 12, 2024 |
| 18578947 | LITHOGRAPHY SYSTEM, SUBSTRATE SAG COMPENSATOR, AND METHOD | PERSAUD, DEORAM | 2882 | Final Rejection | Jan 12, 2024 |
| 18577684 | METHOD AND SYSTEM FOR ANOMALY-BASED DEFECT INSPECTION | BAKER, CHARLOTTE M | 2664 | Non-Final OA | Jan 08, 2024 |
| 18402585 | CHARGED PARTICLE-OPTICAL DEVICE, CHARGED PARTICLE APPARATUS AND METHOD | WANG, JING | 2881 | Non-Final OA | Jan 02, 2024 |
| 18397896 | CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD OF ALIGNING A SAMPLE IN A CHARGED PARTICLE ASSESSMENT SYSTEM | STOFFA, WYATT A | 2881 | Non-Final OA | Dec 27, 2023 |
| 18571118 | METHOD OF DETERMINING A CORRECTION FOR AT LEAST ONE CONTROL PARAMETER IN A SEMICONDUCTOR MANUFACTURING PROCESS | YANCHUS III, PAUL B | 2115 | Non-Final OA | Dec 15, 2023 |
| 18570140 | STRUCTURES FOR USE ON A SUBSTRATE HOLDER, SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS AND METHOD | KIM, PETER B | 2882 | Final Rejection | Dec 14, 2023 |
| 18568628 | CHARGED PARTICLE DETECTOR ASSEMBLY | SMITH, DAVID E | 2881 | Non-Final OA | Dec 08, 2023 |
| 18567053 | METHOD AND ARRANGEMENT FOR DETERMINING THERMALLY-INDUCED DEFORMATIONS | PERSAUD, DEORAM | 2882 | Final Rejection | Dec 05, 2023 |
| 18565951 | INSPECTION DATA FILTERING SYSTEMS AND METHODS | BHATNAGAR, ANAND P | 2668 | Non-Final OA | Nov 30, 2023 |
| 18517642 | CHARGED PARTICLE DEVICE AND METHOD | LI, LARRY | 2881 | Non-Final OA | Nov 22, 2023 |
| 18515952 | Transport System Having a Magnetically Levitated Transportation Stage | WHITESELL, STEVEN H | 1759 | Final Rejection | Nov 21, 2023 |
| 18516020 | DATA PROCESSING DEVICE AND METHOD, CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD | SMITH, DAVID E | 2881 | Non-Final OA | Nov 21, 2023 |
| 18513481 | CHARGED PARTICLE OPTICAL DEVICE, OBJECTIVE LENS ASSEMBLY, DETECTOR, DETECTOR ARRAY, AND METHODS | CHANG, HANWAY | 2878 | Non-Final OA | Nov 17, 2023 |
| 18511454 | PROCESS WINDOW BASED ON DEFECT PROBABILITY | WHITESELL, STEVEN H | 1759 | Non-Final OA | Nov 16, 2023 |
| 18506923 | ASSESSMENT SYSTEM, METHOD OF ASSESSING | IPPOLITO, NICOLE MARIE | 2881 | Non-Final OA | Nov 10, 2023 |
| 18559942 | DIFFRACTION GRATING FOR MEASUREMENTS IN EUV-EXPOSURE APPARATUSES | CARLSON, JOSHUA MICHAEL | 2877 | Non-Final OA | Nov 09, 2023 |
| 18384791 | CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD | MCCORMACK, JASON L | 2881 | Final Rejection | Oct 27, 2023 |
| 18286327 | METROLOGY TOOL CALIBRATION METHOD AND ASSOCIATED METROLOGY TOOL | NGUYEN, HUNG | 2882 | Non-Final OA | Oct 10, 2023 |
| 18478771 | ELECTRON-OPTICAL SYSTEM AND METHOD OF OPERATING AN ELECTRON-OPTICAL SYSTEM | VANORE, DAVID A | 2878 | Non-Final OA | Sep 29, 2023 |
| 18284839 | ON SYSTEM SELF-DIAGNOSIS AND SELF-CALIBRATION TECHNIQUE FOR CHARGED PARTICLE BEAM SYSTEMS | VANORE, DAVID A | 2878 | Non-Final OA | Sep 28, 2023 |
| 18475068 | METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF CARBON, METHOD OF FORMING A PATTERNED LAYER OF MATERIAL | POWERS, LAURA C | 1785 | Non-Final OA | Sep 26, 2023 |
| 18281614 | METHOD OF DETERMINING AT LEAST A TARGET LAYOUT AND ASSOCIATED METROLOGY APPARATUS | PERSAUD, DEORAM | 2882 | Final Rejection | Sep 12, 2023 |
| 18281272 | SYSTEM AND METHOD FOR INSPECTION BY DEFLECTOR CONTROL IN A CHARGED PARTICLE SYSTEM | MCCORMACK, JASON L | 2881 | Non-Final OA | Sep 08, 2023 |
| 18280917 | TARGET MATERIAL TRANSFER SYSTEM COMPONENTS AND METHODS OF MAKING THE SAME | CHANG, HANWAY | 2878 | Non-Final OA | Sep 07, 2023 |
| 18242842 | METHOD FOR CONTROLLING A MANUFACTURING PROCESS AND ASSOCIATED APPARATUSES | PERSAUD, DEORAM | 2882 | Non-Final OA | Sep 06, 2023 |
| 18279121 | ALIGNMENT METHOD AND ASSOCIATED ALIGNMENT AND LITHOGRAPHIC APPARATUSES | WHITESELL, STEVEN H | 1759 | Final Rejection | Aug 28, 2023 |
| 18277223 | METHODS AND APPARATUS FOR CHARACTERIZING A SEMICONDUCTOR MANUFACTURING PROCESS | PERSAUD, DEORAM | 2882 | Final Rejection | Aug 14, 2023 |
| 18233263 | METHOD AND SYSTEM TO MONITOR A PROCESS APPARATUS | PERSAUD, DEORAM | 2882 | Final Rejection | Aug 11, 2023 |
| 18276018 | A MACHINE LEARNING MODEL USING TARGET PATTERN AND REFERENCE LAYER PATTERN TO DETERMINE OPTICAL PROXIMITY CORRECTION FOR MASK | SALEH, ZAID MUHAMMAD | 2668 | Non-Final OA | Aug 04, 2023 |
| 18274990 | NOVEL INTERFACE DEFINITION FOR LITHOGRAPHIC APPARATUS | LU, HUA | 2118 | Non-Final OA | Jul 28, 2023 |
| 18270988 | METHOD FOR DETERMINING A FOCUS ACTUATION PROFILE FOR ONE OR MORE ACTUATORS OF A LITHOGRAPHIC EXPOSURE APPARATUS | NGUYEN, HUNG | 2882 | Final Rejection | Jul 05, 2023 |
| 18270707 | DUAL FOCUS SOLUTON FOR SEM METROLOGY TOOLS | VANORE, DAVID A | 2878 | Final Rejection | Jun 30, 2023 |
| 18259344 | MODULAR AUTOENCODER MODEL FOR MANUFACTURING PROCESS PARAMETER ESTIMATION | ALSHAHARI, SADIK AHMED | 2121 | Non-Final OA | Jun 26, 2023 |
| 18259354 | MODULAR AUTOENCODER MODEL FOR MANUFACTURING PROCESS PARAMETER ESTIMATION | LEE, PAUL D | 2857 | Non-Final OA | Jun 26, 2023 |
| 18269532 | OPERATION METHODS OF 2D PIXELATED DETECTOR FOR AN APPARATUS WITH PLURAL CHARGED-PARTICLE BEAMS AND MAPPING SURFACE POTENTIALS | MCCORMACK, JASON L | 2881 | Final Rejection | Jun 23, 2023 |
| 18268924 | DATA-DRIVEN PREDICTION AND IDENTIFICATION OF FAILURE MODES BASED ON WAFER-LEVEL ANALYSIS AND ROOT CAUSE ANALYSIS FOR SEMICONDUCTOR PROCESSING | SAFAIPOUR, BOBBAK | 2665 | Non-Final OA | Jun 21, 2023 |
| 18268847 | A METROLOGY APPARATUS AND A METROLOGY METHOD | OKASHA, RAMI RAFAT | 2118 | Non-Final OA | Jun 21, 2023 |
| 18206887 | MEMBRANE CLEANING APPARATUS | BERGNER, ERIN FLANAGAN | 1713 | Non-Final OA | Jun 07, 2023 |
| 18265431 | FEATURE EXTRACTION METHOD FOR EXTRACTING FEATURE VECTORS FOR IDENTIFYING PATTERN OBJECTS | LIEW, ALEX KOK SOON | 2674 | Final Rejection | Jun 05, 2023 |
| 18327847 | CHARGED PARTICLE TOOL, CALIBRATION METHOD, INSPECTION METHOD | VANORE, DAVID A | 2878 | Non-Final OA | Jun 01, 2023 |
| 18039712 | A METHOD OF MONITORING A LITHOGRAPHIC PROCESS | LE, JOHN H | 2857 | Non-Final OA | May 31, 2023 |
| 18203172 | INTERFEROMETER SYSTEM, METHOD OF DETERMINING A MODE HOP OF A LASER SOURCE OF AN INTERFEROMETER SYSTEM, METHOD OF DETERMINING A POSITION OF A MOVABLE OBJECT, AND LITHOGRAPHIC APPARATUS | LYONS, MICHAEL A | 2877 | Non-Final OA | May 30, 2023 |
| 18039484 | LITHOGRAPHIC METHOD | KIM, PETER B | 2882 | Non-Final OA | May 30, 2023 |
| 18039483 | MACHINE LEARNING BASED IMAGE GENERATION OF AFTER-DEVELOPMENT OR AFTER-ETCH IMAGES | LIU, XIAO | 2664 | Final Rejection | May 30, 2023 |
| 18320157 | INSPECTION METHOD AND INSPECTION TOOL | MCCORMACK, JASON L | 2881 | Non-Final OA | May 18, 2023 |
| 18305925 | LITHOGRAPHIC APPARATUS, METHOD FOR UNLOADING A SUBSTRATE AND METHOD FOR LOADING A SUBSTRATE | SAENZ, ALBERTO | 3723 | Non-Final OA | Apr 24, 2023 |
| 18032273 | METHODS AND COMPUTER PROGRAMS FOR CONFIGURATION OF A SAMPLING SCHEME GENERATION MODEL | SALOMON, PHENUEL S | 2146 | Non-Final OA | Apr 17, 2023 |
| 18031865 | METHOD FOR GENERATING MASK PATTERN | LEE, ERIC D | 2851 | Non-Final OA | Apr 13, 2023 |
| 18025636 | VACUUM SYSTEM FOR MITIGATING DAMAGE DUE TO A VACUUM PUMP MALFUNCTION | COMLEY, ALEXANDER BRYANT | 3746 | Final Rejection | Mar 09, 2023 |
| 18025183 | TARGET STRUCTURE AND ASSOCIATED METHODS AND APPARATUS | WHITESELL, STEVEN H | 1759 | Non-Final OA | Mar 07, 2023 |
| 18178088 | VIBRATION ISOLATOR FOR SUPPORTING A PAYLOAD | TORRES WILLIAMS, MELANIE | 3616 | Final Rejection | Mar 03, 2023 |
| 18115712 | READOUT CIRCUIT FOR PIXELIZED ELECTRON DETECTOR | MCCORMACK, JASON L | 2881 | Non-Final OA | Feb 28, 2023 |
| 18023708 | METHOD OF PERFORMING METROLOGY, METHOD OF TRAINING A MACHINE LEARNING MODEL, METHOD OF PROVIDING A LAYER COMPRISING A TWO-DIMENSIONAL MATERIAL, METROLOGY APPARATUS | DINH, LYNDA | 2857 | Non-Final OA | Feb 27, 2023 |
| 18021537 | CHARGED-PARTICLE INSPECTION APPARATUS | MCDONALD, RODNEY GLENN | 1794 | Non-Final OA | Feb 15, 2023 |
| 18161140 | OPTICAL SYSTEM AND METHOD OF OPERATING AN OPTICAL SYSTEM | WHITESELL, STEVEN H | 1759 | Non-Final OA | Jan 30, 2023 |
| 18018578 | SYSTEMS AND METHODS FOR SIGNAL ELECTRON DETECTION IN AN INSPECTION APPARATUS | MCCORMACK, JASON L | 2881 | Non-Final OA | Jan 29, 2023 |
| 18017646 | APPARATUS AND METHOD FOR SELECTING HIGH QUALITY IMAGES FROM RAW IMAGES AUTOMATICALLY | HELCO, NICHOLAS JOHN | 2667 | Final Rejection | Jan 23, 2023 |
| 18016811 | METHOD AND APPARATUS FOR IDENTIFYING CONTAMINATION IN A SEMICONDUCTOR FAB | GASSEN, CHRISTOPHER J | 2881 | Final Rejection | Jan 18, 2023 |
| 18015313 | APPARATUS AND METHOD FOR SELECTING INFORMATIVE PATTERNS FOR TRAINING MACHINE LEARNING MODELS | LU, ZHIYU | 2665 | Final Rejection | Jan 09, 2023 |
| 18014431 | METHOD OF DETERMINING A CORRECTION STRATEGY IN A SEMICONDUCTOR MANUFACTURING PROCESS AND ASSOCIATED APPARATUSES | PAN, YUHUI R | 2116 | Final Rejection | Jan 04, 2023 |
| 18011593 | APPARATUS FOR AND METHOD OF ACCELERATING DROPLETS IN A DROPLET GENERATOR FOR AN EUV SOURCE | CHANG, HANWAY | 2878 | Non-Final OA | Dec 20, 2022 |
| 18064110 | REPLACEABLE MODULE FOR A CHARGED PARTICLE APPARATUS | OSENBAUGH-STEWART, ELIZA W | 2881 | Non-Final OA | Dec 09, 2022 |
| 18008075 | SYSTEMS, METHODS, AND PRODUCTS FOR DETERMINING PRINTING PROBABILITY OF ASSIST FEATURE AND ITS APPLICATION | WALKE, AMANDA C | 1722 | Final Rejection | Dec 02, 2022 |
| 17986829 | APPARATUS FOR DECOMPOSING ERROR CONTRIBUTIONS FROM MULTIPLE SOURCES TO MULTIPLE FEATURES OF A PATTERN ON A SUBSTRATE | ISLAM, MEHRAZUL NMN | 2662 | Final Rejection | Nov 14, 2022 |
| 17924626 | SYSTEMS, PRODUCTS, AND METHODS FOR GENERATING PATTERNING DEVICES AND PATTERNS THEREFOR | ALAWDI, ANWER AHMED | 2851 | Non-Final OA | Nov 10, 2022 |
| 17924543 | VERIFYING FREEFORM CURVILINEAR FEATURES OF A MASK DESIGN | GARBOWSKI, LEIGH M | 2851 | Non-Final OA | Nov 10, 2022 |
| 17922768 | OPTICAL ELEMENT AND PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS | ANGEBRANNDT, MARTIN J | 1737 | Final Rejection | Nov 01, 2022 |
| 17961247 | APERTURE ASSEMBLY, BEAM MANIPULATOR UNIT, METHOD OF MANIPULATING CHARGED PARTICLE BEAMS, AND CHARGED PARTICLE PROJECTION APPARATUS | TANDY, LAURA ELOISE | 2881 | Final Rejection | Oct 06, 2022 |
| 17891961 | INSPECTION APPARATUS | CHANG, HANWAY | 2878 | Non-Final OA | Aug 19, 2022 |
| 17799806 | SYSTEMS AND METHODS FOR PROCESS METRIC AWARE PROCESS CONTROL | PATEL, DHRUVKUMAR | 2119 | Final Rejection | Aug 15, 2022 |
| 17798538 | CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD | OSENBAUGH-STEWART, ELIZA W | 2881 | Final Rejection | Aug 09, 2022 |
| 17796434 | DETERMINING LITHOGRAPHIC MATCHING PERFORMANCE | ALAWDI, ANWER AHMED | 2851 | Final Rejection | Jul 29, 2022 |
| 17874582 | COMPUTATIONAL METROLOGY BASED CORRECTION AND CONTROL | WHITESELL, STEVEN H | 1759 | Final Rejection | Jul 27, 2022 |
| 17794435 | CHARGED PARTICLE MANIPULATOR DEVICE | OSENBAUGH-STEWART, ELIZA W | 2881 | Final Rejection | Jul 21, 2022 |
| 17869550 | SYSTEM AND METHOD USING A SET OF MULTI-STEP DEFECT DETECTION TESTS WITH DIFFERENT SENSITIVITY | LEE, HWA S | 2877 | Final Rejection | Jul 20, 2022 |
| 17792464 | PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS | ANGEBRANNDT, MARTIN J | 1737 | Final Rejection | Jul 13, 2022 |
| 17780287 | METHOD AND SYSTEM FOR ENHANCING TARGET FEATURES OF A PATTERN IMAGED ONTO A SUBSTRATE | ALAWDI, ANWER AHMED | 2851 | Final Rejection | May 26, 2022 |
| 17777348 | METHOD AND APPARATUS FOR DETERMINING CONTROL DATA FOR A LITHOGRAPHIC APPARATUS | WHITE, JAY MICHAEL | 2188 | Final Rejection | May 17, 2022 |
| 17763698 | PROCESS MONITORING AND TUNING USING PREDICTION MODELS | PAN, YUHUI R | 2116 | Final Rejection | Mar 25, 2022 |
| 17762982 | OPTICAL MODULATOR | SUMLAR, JOURNEY F | 2872 | Non-Final OA | Mar 23, 2022 |
| 17638472 | SEMICONDUCTOR DEVICE GEOMETRY METHOD AND SYSTEM | COLE, BRANDON S | 2128 | Final Rejection | Feb 25, 2022 |
| 17634309 | MODELING METHOD FOR COMPUTATIONAL FINGERPRINTS | WHITE, JAY MICHAEL | 2188 | Final Rejection | Feb 10, 2022 |
| 17623829 | SUB-FIELD CONTROL OF A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUS | TAN, ALVIN H | 2118 | Final Rejection | Dec 29, 2021 |
| 17607701 | A PATTERNING DEVICE | ANGEBRANNDT, MARTIN J | 1737 | Final Rejection | Oct 29, 2021 |
| 17496555 | METHOD AND APPARATUS FOR INSPECTION AND METROLOGY | MAPAR, BIJAN | 2189 | Final Rejection | Oct 07, 2021 |
| 17471363 | MACHINE-LEARNING BASED DEFECT IDENTIFICATION | DULANEY, BENJAMIN O | 2683 | Final Rejection | Sep 10, 2021 |
| 17388926 | TEMPERATURE SENSING PROBE, BURL PLATE, LITHOGRAPHIC APPARATUS AND METHOD | WHITTINGTON, KENNETH | 3992 | Non-Final OA | Jul 29, 2021 |
| 17334574 | METHOD FOR DECREASING UNCERTAINTY IN MACHINE LEARNING MODEL PREDICTIONS | OCHOA, JUAN CARLOS | 2186 | Non-Final OA | May 28, 2021 |
| 17277583 | METROLOGY METHOD AND APPARATUS THEREFOR | WHITESELL, STEVEN H | 1759 | Final Rejection | Mar 18, 2021 |
| 16971012 | METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF MATERIAL | KACKAR, RAM N | 1716 | Non-Final OA | Aug 19, 2020 |
| 16970648 | METHODS FOR TRAINING MACHINE LEARNING MODEL FOR COMPUTATION LITHOGRAPHY | COLE, BRANDON S | 2128 | Final Rejection | Aug 18, 2020 |
| 16340771 | METHODS & APPARATUS FOR CONTROLLING AN INDUSTRIAL PROCESS | LINDSAY, BERNARD G | 2119 | Non-Final OA | Apr 10, 2019 |
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