| 19042432 |
CHEMICAL SUPPLY APPARATUS AND CHEMICAL EXCHANGE METHOD |
GOLIGHTLY, ERIC WAYNE |
1714 |
§103§112 |
Non-Final OA |
— |
Pending |
Jan 31, 2025 |
| 19004721 |
SUBSTRATE TREATING APPARATUS |
ORTA, LAUREN GRACE |
1711 |
§102§103 |
Non-Final OA |
— |
Pending |
Dec 30, 2024 |
| 19005111 |
APPARATUS AND METHOD OF PROCESSING A SUBSTRATE |
RIVERA-CORDERO, ARLYN I |
1714 |
§103§112 |
Final Rejection |
— |
Pending |
Dec 30, 2024 |
| 19005208 |
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD |
CHAUDHRI, OMAIR |
1711 |
§112 |
Non-Final OA |
— |
Pending |
Dec 30, 2024 |
| 19005050 |
SUBSTRATE PROCESSING APPARATUS AND METHOD |
SHAHINIAN, LEVON J |
1711 |
§102 |
Non-Final OA |
— |
Pending |
Dec 30, 2024 |
| 19004660 |
SUBSTRATE TRANSFER EQUIPMENT AND SUBSTRATE PROCESSING SYSTEM USING THE SAME |
TIGHE, BRENDAN P |
3652 |
§102§103§112 |
Non-Final OA |
— |
Pending |
Dec 30, 2024 |
| 19001878 |
STOCKER DEVICE AND SUBSTRATE PROCESSING APPARATUS |
DIAZ, THOMAS C |
3617 |
§102Other |
Non-Final OA |
— |
Pending |
Dec 26, 2024 |
| 18982011 |
SUBSTRATE PROCESSING APPARATUS |
AYALEW, TINSAE B |
1711 |
§102§103§112 |
Non-Final OA |
— |
Pending |
Dec 16, 2024 |
| 18983337 |
CONTAINER TRANSPORTING APPARATUS AND LOGISTICS PROCESSING SYSTEM INCLUDING THE SAME |
AN, IG TAI |
3662 |
§102§103 |
Non-Final OA |
— |
Pending |
Dec 16, 2024 |
| 18978173 |
TRANSFER UNIT, AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME |
COOK, CORTEZ M |
2837 |
§103 |
Non-Final OA |
— |
Pending |
Dec 12, 2024 |
| 18977906 |
ARTICLE TRANSPORT FACILITY |
IJAZ, MUHAMMAD |
3631 |
§102§112 |
Non-Final OA |
— |
Pending |
Dec 11, 2024 |
| 18974963 |
SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD |
GOLIGHTLY, ERIC WAYNE |
1714 |
§103§112 |
Non-Final OA |
— |
Pending |
Dec 10, 2024 |
| 18975387 |
CARRIAGE DRIVING SYSTEM AND METHOD |
BROTHERS, LAURENCE RAPHAEL |
3655 |
§102§103§112 |
Non-Final OA |
— |
Pending |
Dec 10, 2024 |
| 18968854 |
APPARATUS AND METHOD OF TREATING SUBSTRATE |
RIVERA-CORDERO, ARLYN I |
1714 |
§103 |
Final Rejection |
— |
Pending |
Dec 04, 2024 |
| 18957865 |
TRANSFER ROBOT, METHOD OF OPERATING TRANSFER ROBOT, AND SEMICONDUCTOR MANUFACTURING FACILITY |
BOUZIANE, SAID |
2837 |
§102§112 |
Non-Final OA |
— |
Pending |
Nov 24, 2024 |
| 18956926 |
APPARATUS AND METHOD OF TREATING SUBSTRATE |
ORTA, LAUREN GRACE |
1711 |
§103§112 |
Non-Final OA |
— |
Pending |
Nov 22, 2024 |
| 18956558 |
SUBSTRATE PROCESSING METHOD, MANUFACTURING METHOD, AND SUBSTRATE PROCESSING APPARATUS |
AHMED, SHAMIM |
1713 |
§103§112 |
Non-Final OA |
— |
Pending |
Nov 22, 2024 |
| 18953319 |
ASSEMBLY FOR PROCESSING REFERENCE POINT, APPARATUS FOR DISPENSING CHEMICAL SOLUTION INCLUDING THE ASSEMBLY AND METHOD FOR DISPENSING CHEMICAL SOLUTION USING THE APPARATUS |
KNIEF, THOMAS RAY |
2853 |
§102§112 |
Non-Final OA |
— |
Pending |
Nov 20, 2024 |
| 18950077 |
TRANSFERRING APPARATUS |
ADAMS, NATHANIEL L |
3654 |
§102§103§112 |
Non-Final OA |
— |
Pending |
Nov 16, 2024 |
| 18947084 |
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD |
LEE, KEVIN G |
1711 |
§103 |
Non-Final OA |
— |
Pending |
Nov 14, 2024 |
| 18938859 |
SHOWERHEAD UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME |
ZERVIGON, RUDY |
1716 |
§102§103§112 |
Non-Final OA |
— |
Pending |
Nov 06, 2024 |
| 18938634 |
SHOWER HEAD ASSEMBLY AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME |
MILLER, JR, JOSEPH ALBERT |
1712 |
§102§103 |
Non-Final OA |
— |
Pending |
Nov 06, 2024 |
| 18933004 |
SHOWERHEAD AND SUBSTRATE TREATMENT APPARATUS INCLUDING SHOWERHEAD |
BRAYTON, JOHN JOSEPH |
1794 |
§102§103 |
Non-Final OA |
— |
Pending |
Oct 31, 2024 |
| 18932470 |
COVER MODULE AND SUBSTRATE TREATMENT APPARATUS INCLUDING COVER MODULE |
WEINERT, WILLIAM C |
3762 |
§102 |
Non-Final OA |
— |
Pending |
Oct 30, 2024 |
| 18916864 |
SHOWERHEAD ASSEMBLY AND SUBSTRATE PROCESSING APPARATUS COMPRISING THE SAME |
MCDONALD, RODNEY GLENN |
1794 |
§112 |
Non-Final OA |
— |
Pending |
Oct 16, 2024 |
| 18914595 |
SUBSTRATE TREATING APPARATUS AND MANUFACTURING METHOD THEREOF |
CHEN, KEATH T |
1716 |
§103 |
Non-Final OA |
— |
Pending |
Oct 14, 2024 |
| 18912780 |
CONTAMINANT PROCESSING DEVICE |
KATZ, DYLAN MICHAEL |
3657 |
§103§112 |
Non-Final OA |
— |
Pending |
Oct 11, 2024 |
| 18901094 |
MANUFACTURING METHOD, SUBSTRATE PROCESSING METHOD, AND SUBSTRATE PROCESSING APPARATUS |
CAMPBELL, NATASHA N. |
1714 |
§102§103 |
Non-Final OA |
— |
Pending |
Sep 30, 2024 |
| 18901383 |
SHOWER HEAD UNIT, GAS SUPPLY UNIT AND SUBSTRATE PROCESSING DEVICE HAVING THE SAME |
JELLETT, MATTHEW WILLIAM |
3753 |
§112 |
Non-Final OA |
— |
Pending |
Sep 30, 2024 |
| 18890723 |
GRIPPING DEVICE AND TRANSPORT APPARATUS INCLUDING THE SAME |
YABUT, DANIEL D |
3617 |
§102§103 |
Non-Final OA |
— |
Pending |
Sep 19, 2024 |
| 18829177 |
EDGE BEAD REMOVAL METHOD, SUBSTRATE TREATMENT APPARATUS PERFORMING EDGE BEAD REMOVAL METHOD, AND SUBSTRATE TREATMENT METHOD |
MELLOTT, JAMES M |
1759 |
§103 |
Final Rejection |
— |
Pending |
Sep 09, 2024 |
| 18824834 |
SEMICONDUCTOR PACKAGE CUTTING SYSTEM AND METHOD |
CROSBY JR, RICHARD D |
3724 |
§102§103 |
Final Rejection |
34d |
Pending |
Sep 04, 2024 |
| 18812989 |
VACUUM HOLE CONNECTOR, SUBSTRATE SUPPORT, SUBSTRATE TREATMENT APPARATUS |
BESLER, CHRISTOPHER JAMES |
3726 |
§112 |
Non-Final OA |
— |
Pending |
Aug 22, 2024 |
| 18811189 |
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD |
PATEL, VISHAL I |
— |
§103 |
Non-Final OA |
— |
Pending |
Aug 21, 2024 |
| 18803641 |
ELECTRICAL TERMINAL CONNECTOR, SUBSTRATE SUPPORT, SUBSTRATE TREATING APPARATUS |
JIMENEZ, OSCAR C |
— |
§102 |
Non-Final OA |
— |
Pending |
Aug 13, 2024 |
| 18799283 |
METHOD FOR TREATING A SUBSTRATE |
COLEMAN, RYAN L |
1714 |
§103 |
Final Rejection |
— |
Pending |
Aug 09, 2024 |
| 18796952 |
SUBSTRATE SUPPORT DEVICE AND METHOD OF CONTROLLING PREVENTION OF LEAKAGE OF TEMPERATURE CONTROL FLUID |
LING, FOR K. |
3763 |
§103 |
Non-Final OA |
— |
Pending |
Aug 07, 2024 |
| 18794502 |
RING ASSEMBLY AND SUBSTRATE PROCESSING APPARATUS COMPRISING THE SAME |
BENNETT, CHARLEE |
1718 |
§102§103§112 |
Non-Final OA |
— |
Pending |
Aug 05, 2024 |
| 18791704 |
SUBSTRATE PROCESSING DEVICE AND DEFECT DETECTION METHOD FOR SUBSTRATE PROCESSING DEVICE |
WALTON, CHESIREE A |
3624 |
§103 |
Non-Final OA |
— |
Pending |
Aug 01, 2024 |
| 18767451 |
SUBSTRATE PROCESSING APPARATUS |
SIDDIQUEE, TAMEEM |
2116 |
§103 |
Non-Final OA |
— |
Pending |
Jul 09, 2024 |
| 18764435 |
TRANSFER UNIT AND TRANSFER ROBOT SYSTEM INCLUDING TRANSFER ROBOT |
ABD EL LATIF, HOSSAM M |
3664 |
§103§112 |
Non-Final OA |
— |
Pending |
Jul 05, 2024 |
| 18758101 |
APPARATUS AND METHOD OF CLEANING COMPONENT |
ORTA, LAUREN GRACE |
1711 |
§103 |
Final Rejection |
— |
Pending |
Jun 28, 2024 |
| 18739684 |
APPARATUS FOR TREATING SUBSTRATE |
TADESSE, YEWEBDAR T |
1717 |
§102§103 |
Non-Final OA |
— |
Pending |
Jun 11, 2024 |
| 18675465 |
TREATMENT LIQUID SUPPLY APPARATUS, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME AND METHOD FOR PROCESSING TREATMENT LIQUID |
ORTA, LAUREN GRACE |
1711 |
§103 |
Final Rejection |
— |
Pending |
May 28, 2024 |
| 18660317 |
APPARATUS FOR PROCESSING SUBSTRATE AND METHOD OF PROCESSING SUBSTRATE |
LEE, KEVIN G |
1711 |
§102§103 |
Final Rejection |
— |
Pending |
May 10, 2024 |
| 18584446 |
TOOL CHANGING APPARATUS AND METHOD |
AVERICK, LAWRENCE |
3799 |
§102 |
Non-Final OA |
— |
Pending |
Feb 22, 2024 |
| 18582808 |
SYSTEM FOR ANALYZING ABNORMAL DATA AND OPERATING METHOD THEREOF |
GO, RICKY |
2857 |
§101§102 |
Non-Final OA |
— |
Pending |
Feb 21, 2024 |
| 18442486 |
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD |
AYALEW, TINSAE B |
1711 |
§103§112 |
Non-Final OA |
— |
Pending |
Feb 15, 2024 |
| 18413805 |
SUBSTRATE TREATING APPARATUS AND FLUID SUPPLY UNIT |
NUCKOLS, TIFFANY Z |
1716 |
§103 |
Non-Final OA |
— |
Pending |
Jan 16, 2024 |
| 18395489 |
FIRE PROTECTION APPARATUS AND FIRE PROTECTION METHOD |
MASSAD, ABE L |
3634 |
§103 |
Non-Final OA |
— |
Pending |
Dec 23, 2023 |
| 18395487 |
AIRFLOW CONTROL SYSTEM AND AIRFLOW CONTROL METHOD |
BRAWNER, CHARLES RILEY |
3762 |
§103§112 |
Final Rejection |
— |
Pending |
Dec 23, 2023 |
| 18393850 |
SUBSTRATE SUPPORT APPARATUS |
NEJAD, MAHDI H |
3723 |
§103 |
Non-Final OA |
25d overdue |
Pending |
Dec 22, 2023 |
| 18394198 |
APPARATUS AND METHOD FOR TREATING SUBSTRATE |
KLUNK, MARGARET D |
1716 |
§103§112 |
Final Rejection |
12d |
Pending |
Dec 22, 2023 |
| 18545660 |
APPARATUS FOR TREATING SUBSTRATE |
ZERVIGON, RUDY |
1716 |
§102§103 |
Non-Final OA |
— |
Pending |
Dec 19, 2023 |
| 18543499 |
SUBSTRATE PROCESSING DEVICE |
MOORE, KARLA A |
1716 |
§102§103 |
Non-Final OA |
— |
Pending |
Dec 18, 2023 |
| 18540731 |
SUBSTRATE TREATMENT APPARATUS AND PLASMA DENSITY CONTROL METHOD |
MACARTHUR, SYLVIA |
1716 |
§102§103 |
Non-Final OA |
— |
Pending |
Dec 14, 2023 |
| 18538919 |
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT SYSTEM |
CARTER, JONATHAN LANGDON |
1712 |
§103Other |
Non-Final OA |
— |
Pending |
Dec 13, 2023 |
| 18536845 |
APPARATUS FOR TRANSFERRING SUBSTRATE |
NEUPANE, ADARSH |
3655 |
§102§103§112 |
Final Rejection |
— |
Pending |
Dec 12, 2023 |
| 18524241 |
SUBSTRATE PROCESSING METHOD, THERMAL PROCESSING APPARATUS, AND SEMICONDUCTOR MANUFACTURING EQUIPMENT |
NGUYEN, KHIEM D |
2892 |
§103 |
Non-Final OA |
— |
Pending |
Nov 30, 2023 |
| 18516895 |
CARRIAGE SYSTEM CONTROL METHOD AND CARRIAGE SYSTEM CONTROL APPARATUS |
RODRIGUEZ, JOSEPH C |
3653 |
§103 |
Final Rejection |
— |
Pending |
Nov 21, 2023 |
| 18515638 |
SUBSTRATE PROCESSING APPARATUS |
HONG, SEAHEE |
3723 |
§102§103 |
Final Rejection |
— |
Pending |
Nov 21, 2023 |
| 18515867 |
SUBSTRATE HEATER AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME |
ZERVIGON, RUDY |
1716 |
§102§103§112 |
Non-Final OA |
— |
Pending |
Nov 21, 2023 |
| 18507065 |
FOCUS RING INSPECTION DEVICE AND FOCUS RING INSPECTION METHOD |
KLUNK, MARGARET D |
1716 |
§103 |
Non-Final OA |
— |
Pending |
Nov 12, 2023 |
| 18505319 |
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR MEASURING DEGREE OF WEAR OF CONSUMABLE COMPONENT |
MOORE, KARLA A |
1716 |
§112 |
Non-Final OA |
— |
Pending |
Nov 09, 2023 |
| 18505289 |
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR MEASURING DEGREE OF WEAR OF CONSUMABLE COMPONENT |
MOORE, KARLA A |
1716 |
§112 |
Non-Final OA |
— |
Pending |
Nov 09, 2023 |
| 18499623 |
MOBILE TRANSPORT DEVICE AND MOBILE TRANSPORT SYSTEM INCLUDING THE SAME |
KEENAN, JAMES W |
3655 |
§103§112 |
Non-Final OA |
— |
Pending |
Nov 01, 2023 |
| 18384639 |
SUBSTRATE TRANSPORT ROBOT AND SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME |
MCCLAIN, GERALD |
3652 |
§102 |
Final Rejection |
14d |
Pending |
Oct 27, 2023 |
| 18384384 |
SUBSTRATE TREATING APPARATUS INCLUDING ECCENTRICITY CORRECTION UNIT, AND SUBSTRATE TREATING METHOD |
TEKA, ABIY |
3745 |
§102§103 |
Non-Final OA |
— |
Pending |
Oct 27, 2023 |
| 18495266 |
METHOD OF FABRICATING SEMICONDUCTOR DEVICE |
LI, MEIYA |
2811 |
§112 |
Final Rejection |
9d overdue |
Pending |
Oct 26, 2023 |
| 18494055 |
SUBSTRATE TRANSFERRING APPARATUS AND SUBSTRATE TRANSFERRING METHOD |
BUFFINGTON, HEAVEN RICHELLE |
3615 |
§112 |
Final Rejection |
— |
Pending |
Oct 25, 2023 |
| 18492149 |
SUBSTRATE TREATMENT APPARATUS USING SUPERCRITICAL FLUID |
MCDONALD, RODNEY GLENN |
1794 |
§103 |
Non-Final OA |
6d |
Pending |
Oct 23, 2023 |
| 18380656 |
COMPUTING RESOURCE MANAGEMENT SYSTEM AND METHOD USING SOFTWARE MODULARIZATION |
AMIN, MUSTAFA A |
2194 |
§101§103 |
Final Rejection |
34d |
Pending |
Oct 17, 2023 |
| 18381151 |
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD |
BENNETT, CHARLEE |
1718 |
§103 |
Final Rejection |
— |
Pending |
Oct 17, 2023 |
| 18480393 |
SUBSTRATE TREATING APPARATUS AND METHOD FOR SUBSTRATE TREATING |
WANG, FRANKLIN JEFFERSON |
3761 |
§102§103Other |
Non-Final OA |
— |
Pending |
Oct 03, 2023 |
| 18376429 |
CHEMICAL TEST APPARATUS AND SUBSTRATE PROCESSING APPARATUS |
SEIFU, LESSANEWORK T |
1774 |
§102§103 |
Non-Final OA |
— |
Pending |
Oct 03, 2023 |
| 18469755 |
APPARATUS FOR TREATING SUBSTRATE |
MACARTHUR, SYLVIA |
1716 |
§102§103 |
Final Rejection |
— |
Pending |
Sep 19, 2023 |
| 18241893 |
ORGANIC SOLVENT SUPPLYING APPARATUS, SUBSTRATE PROCESSING METHOD, AND SUBSTRATE PROCESSING APPARATUS |
CHAUDHRI, OMAIR |
1711 |
§103 |
Non-Final OA |
— |
Pending |
Sep 03, 2023 |
| 18231727 |
PHOTOMASK PROCESSING APPARATUS AND METHOD OF PROCESSING PHOTOMASK |
ASFAW, MESFIN T |
1724 |
§103 |
Non-Final OA |
— |
Pending |
Aug 08, 2023 |
| 18225668 |
INKJET HEAD UNIT AND SUBSTRATE TREATMENT APPARATUS INCLUDING THE SAME |
FIDLER, SHELBY LEE |
2853 |
§103§112 |
Non-Final OA |
8d |
Pending |
Jul 24, 2023 |
| 18354823 |
FILTER FLUSHING DEVICE AND FILTER FLUSHING METHOD |
VARMA, AKASH K |
1773 |
§103§112 |
Non-Final OA |
— |
Pending |
Jul 19, 2023 |
| 18332233 |
ETCHING GAS COMPOSITION, SUBSTRATE PROCESSING APPARATUS, AND PATTERN FORMING METHOD USING THE ETCHING GAS COMPOSITION |
ALANKO, ANITA KAREN |
1713 |
§103 |
Final Rejection |
— |
Pending |
Jun 09, 2023 |
| 18206089 |
ESC TEMPERATURE CONTROL UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME |
KACKAR, RAM N |
1716 |
§103§112 |
Non-Final OA |
— |
Pending |
Jun 06, 2023 |
| 18200017 |
CHAMBER INSULATION PLATE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME |
MACARTHUR, SYLVIA |
1716 |
§103 |
Non-Final OA |
— |
Pending |
May 22, 2023 |
| 18197677 |
APPARATUS FOR PROCESSING SUBSTRATE AND SEMICONDUCTOR MANUFACTURING APPARATUS INCLUDING THE SAME |
WEDDLE, ALEXANDER MARION |
1712 |
§103 |
Non-Final OA |
46d |
Pending |
May 15, 2023 |
| 18143273 |
COOLING MODULE FOR BAKING DEVICE AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME |
CHEN, SIMPSON ABRAHAM |
3761 |
§103§112 |
Non-Final OA |
— |
Pending |
May 04, 2023 |
| 18305801 |
MAINTENANCE ASSEMBLY FOR AN INKJET HEAD, MAINTENANCE METHOD FOR AN INKJET HEAD AND APPARATUS FOR PROCESSING A SUBSTRATE INCLUDING A MAINTENANCE ASSEMBLY FOR AN INKJET HEAD |
VALENCIA, ALEJANDRO |
2853 |
§103 |
Non-Final OA |
3d overdue |
Pending |
Apr 24, 2023 |
| 18135681 |
APPARATUS AND METHOD OF DETECTING WAFER EDGE USING LASER SCANNER, AND SEMICONDUCTOR TRANSFER DEVICE |
BHAT, ADITYA S |
2857 |
§101§102 |
Final Rejection |
14d |
Pending |
Apr 17, 2023 |
| 18126974 |
COMPONENT CARRIER FOR SEMICONDUCTOR MANUFACTURING AND COMPONENT TRANSPORT SYSTEM USING SAME |
SWEELY, KURT D |
1718 |
§102§103§112 |
Non-Final OA |
— |
Pending |
Mar 27, 2023 |
| 18108655 |
NOZZLE HAVING DOUBLE PIPE STRUCTURE, AND PHOTORESIST DISPENSER AND SPIN COATER, EACH INCLUDING THE NOZZLE |
ZHAO, XIAO SI |
1744 |
§103 |
Final Rejection |
3d overdue |
Pending |
Feb 12, 2023 |
| 18105739 |
ANOMALY DETECTION METHOD, ELECTRONIC DEVICE, NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM, AND COMPUTER PROGRAM |
ADMASU, MAHLIET TASEW |
2123 |
§101§103 |
Non-Final OA |
— |
Pending |
Feb 03, 2023 |
| 18101121 |
SUBSTRATE PROCESSING APPARATUS |
KURPLE, KARL |
1717 |
§103 |
Final Rejection |
41d |
Pending |
Jan 25, 2023 |
| 18097232 |
ANTENNA MEMBER AND APPARATUS AND METHOD FOR TREATING SUBSTRATE |
KENDALL, BENJAMIN R |
2896 |
§103 |
Final Rejection |
— |
Pending |
Jan 14, 2023 |
| 18148044 |
SUBSTRATE SUPPORT UNIT AND PLASMA PROCESSING APPARATUS |
CHEN, KEATH T |
1716 |
§103 |
Final Rejection |
— |
Pending |
Dec 29, 2022 |
| 18148078 |
LIFT PIN UNIT AND UNIT FOR SUPPORTING SUBSTRATE AND SUBSTRATE TREATING APPARATUS |
CHEN, KEATH T |
1716 |
§103 |
Non-Final OA |
3d overdue |
Pending |
Dec 29, 2022 |
| 18146693 |
APPARATUS AND METHOD FOR TREATING SUBSTRATE |
CHEN, KEATH T |
1716 |
§103 |
Non-Final OA |
3d overdue |
Pending |
Dec 27, 2022 |
| 18083555 |
ANTENNA ASSEMBLY AND PLASMA PROCESSING EQUIPMENT INCLUDING SAME |
SWEELY, KURT D |
1718 |
§103 |
Non-Final OA |
— |
Pending |
Dec 18, 2022 |
| 18073568 |
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE |
CLEVELAND, MICHAEL B |
1737 |
§103§112 |
Final Rejection |
— |
Pending |
Dec 02, 2022 |
| 18073483 |
HOME PORT, AND SUBSTRATE PROCESSING APPARATUS AND HOME PORT CLEANING METHOD USING THE SAME |
ORTA, LAUREN GRACE |
1700 |
§112 |
Final Rejection |
— |
Pending |
Dec 01, 2022 |
| 17993996 |
PROCESS GAS SUPPLYING UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME |
LUND, JEFFRIE ROBERT |
1718 |
§103 |
Non-Final OA |
23d |
Pending |
Nov 25, 2022 |
| 17979149 |
DETECTING UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME |
MACARTHUR, SYLVIA |
1718 |
§103 |
Non-Final OA |
12d |
Pending |
Nov 02, 2022 |
| 17978973 |
VIRTUAL DRIVING SYSTEM AND ITS CONTROL METHOD |
PIERRE LOUIS, ANDRE |
2187 |
§112 |
Final Rejection |
35d |
Pending |
Nov 02, 2022 |
| 17967172 |
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR OPERATING THEREOF |
MOORE, KARLA A |
1716 |
§112 |
Final Rejection |
71d |
Pending |
Oct 17, 2022 |
| 17944190 |
APPARATUS FOR PROCESSING SUBSTRATE |
SWEELY, KURT D |
1718 |
§103 |
Final Rejection |
70d |
Pending |
Sep 14, 2022 |
| 17901103 |
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING A SUBSTRATE |
MOORE, KARLA A |
1716 |
§103§112 |
Non-Final OA |
— |
Pending |
Sep 01, 2022 |
| 17898459 |
HEAT TREATMENT UNIT AND SUBSTRATE PROCESSING APPARATUS |
THOMAS, BINU |
1717 |
§103§112 |
Non-Final OA |
— |
Pending |
Aug 29, 2022 |
| 17895266 |
APPARATUS FOR TREATING SUBSTRATES AND TEMPERATURE CONTROL METHOD OF HEATING ELEMENTS |
KACKAR, RAM N |
1716 |
§103 |
Final Rejection |
19d overdue |
Pending |
Aug 25, 2022 |
| 17879780 |
SUBSTRATE TREATING APPARATUS AND SEMICONDUCTOR MANUFACTURING EQUIPMENT INCLUDING THE SAME |
BALDWIN, GORDON |
1718 |
§103 |
Final Rejection |
— |
Pending |
Aug 03, 2022 |
| 17876506 |
FLOW CONTROL SYSTEM, APPARATUS FOR TREATING SUBSTRATE INCLUDING THE SAME AND METHOD FOR TREATING SUBSTRATE USING THE SAME |
DURDEN, RICHARD KYLE |
3753 |
§103 |
Final Rejection |
61d |
Pending |
Jul 28, 2022 |
| 17854661 |
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD |
BENNETT, CHARLEE |
1718 |
§103 |
Non-Final OA |
— |
Pending |
Jun 30, 2022 |
| 17846166 |
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE |
REYES, JOSHUA NATHANIEL PI |
1718 |
§103 |
Non-Final OA |
— |
Pending |
Jun 22, 2022 |
| 17843919 |
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD |
COLEMAN, RYAN L |
1714 |
§103§112 |
Final Rejection |
— |
Pending |
Jun 17, 2022 |
| 17739377 |
SUBSTRATE TREATING FACILITY AND SUBSTRATE TREATING METHOD |
BENNETT, CHARLEE |
1718 |
§103§112 |
Non-Final OA |
— |
Pending |
May 09, 2022 |
| 17727659 |
APPARATUS FOR HEATING CHEMICAL LIQUID AND SYSTEM FOR TREATING SUBSTRATE INCLUDING THE SAME |
CORMIER, DAVID G |
1711 |
§103 |
Non-Final OA |
54d |
Pending |
Apr 22, 2022 |
| 17563252 |
SUBSTRATE TREATING APPARATUS |
REYES, JOSHUA NATHANIEL PI |
1718 |
§103 |
Final Rejection |
— |
Pending |
Dec 28, 2021 |
| 17521950 |
DRYING UNIT AND APPARATUS FOR PROCESSING A SUBSTRATE INCLUDING A DRYING UNIT |
WANG, FRANKLIN JEFFERSON |
3761 |
§102§103 |
Final Rejection |
— |
Pending |
Nov 09, 2021 |
| 17406641 |
VEHICLE INSPECTION DEVICE AND ARTICLE TRANSFER SYSTEM HAVING THE SAME |
CAMPBELL, JOSHUA A |
3747 |
§102§103 |
Non-Final OA |
29d |
Pending |
Aug 19, 2021 |
| 17315322 |
SUBSTRATE TREATING APPARATUS |
REYES, JOSHUA NATHANIEL PI |
1718 |
§103 |
Non-Final OA |
— |
Pending |
May 09, 2021 |
Prosecution Insights