| 19210413 |
SUBSTRATE HOLDER FOR USE IN A LITHOGRAPHIC APPARATUS |
ASFAW, MESFIN T |
— |
§102§103Other |
Non-Final OA |
— |
Pending |
May 16, 2025 |
| 18376237 |
APPARATUS AND METHOD FOR DETERMINING A CONDITION ASSOCIATED WITH A PELLICLE |
RIDDLE, CHRISTINA A |
2882 |
§103DP |
Final Rejection |
— |
Pending |
Oct 03, 2023 |
| 18280459 |
DIGITAL HOLOGRAPHIC MICROSCOPE AND ASSOCIATED METROLOGY METHOD |
HANSEN, JONATHAN M |
2877 |
§102§103 |
Non-Final OA |
50d overdue |
Pending |
Sep 05, 2023 |
| 17912202 |
SYSTEMS AND METHODS FOR FORMING STRUCTURES ON A SURFACE |
CHACKO DAVIS, DABORAH |
1737 |
§102§103§112 |
Final Rejection |
44d overdue |
Pending |
Sep 16, 2022 |
| 17791641 |
LITHOGRAPHIC APPARATUS AND METHOD FOR DRIFT COMPENSATION |
WHITESELL, STEVEN H |
1759 |
§103 |
Final Rejection |
— |
Pending |
Jul 08, 2022 |
| 19125621 |
CONTAMINATION CONTROL |
ASFAW, MESFIN T |
2882 |
§103 |
Non-Final OA |
— |
Pending |
Apr 29, 2025 |
| 19092004 |
COOLING DEVICE FOR COOLING A POSITION-SENSITIVE COMPONENT OF A LITHOGRAPHY SYSTEM |
PERSAUD, DEORAM |
2882 |
§102§103 |
Non-Final OA |
— |
Pending |
Mar 27, 2025 |
| 19110674 |
AN ILLUMINATION MODULE FOR A METROLOGY DEVICE |
DUDEK, JAMES A |
— |
§102§103 |
Non-Final OA |
— |
Pending |
Mar 11, 2025 |
| 19029961 |
METHOD FOR DETERMINING DEFECTIVENESS OF PATTERN BASED ON AFTER DEVELOPMENT IMAGE |
BAKER, CHARLOTTE M |
2664 |
DP |
Non-Final OA |
— |
Pending |
Jan 17, 2025 |
| 19011092 |
SUBSTRATE HOLDER FOR USE IN A LITHOGRAPHIC APPARATUS |
WHITESELL, STEVEN H |
1759 |
§102§103Other |
Final Rejection |
— |
Pending |
Jan 06, 2025 |
| 19009546 |
ABERRATION IMPACT SYSTEMS, MODELS, AND MANUFACTURING PROCESSES |
PERSAUD, DEORAM |
2882 |
§102§103Other |
Non-Final OA |
— |
Pending |
Jan 03, 2025 |
| 19009394 |
LITHOGRAPHIC APPARATUS AND METHOD |
PERSAUD, DEORAM |
2882 |
§103Other |
Non-Final OA |
— |
Pending |
Jan 03, 2025 |
| 19008794 |
APPARATUS AND METHOD FOR PROCESS-WINDOW CHARACTERIZATION |
ASFAW, MESFIN T |
2882 |
§102 |
Non-Final OA |
— |
Pending |
Jan 03, 2025 |
| 18876810 |
METROLOGY METHOD AND ASSOCIATED METROLOGY DEVICE |
PERSAUD, DEORAM |
2882 |
§101§112 |
Non-Final OA |
— |
Pending |
Dec 19, 2024 |
| 18875601 |
A PATTERNING DEVICE VOLTAGE BIASING SYSTEM FOR USE IN EUV LITHOGRAPHY |
RIDDLE, CHRISTINA A |
2882 |
§102§103 |
Final Rejection |
— |
Pending |
Dec 16, 2024 |
| 18874812 |
SYSTEMS FOR PATH COMPENSATION WITH A MOVING OBJECTIVE |
SUMLAR, JOURNEY F |
2872 |
§102 |
Non-Final OA |
— |
Pending |
Dec 13, 2024 |
| 18874483 |
METROLOGY METHOD AND ASSOCIATED METROLOGY DEVICE |
PEREZ-GUZMAN, CARLOS GABRIEL |
2877 |
§102§103 |
Non-Final OA |
— |
Pending |
Dec 12, 2024 |
| 18873382 |
SEMICONDUCTOR CHARGED PARTICLE DETECTOR AND METHODS THEREOF |
KEFAYATI, SOORENA |
2884 |
§103 |
Non-Final OA |
— |
Pending |
Dec 10, 2024 |
| 18871903 |
METHOD AND APPARATUS FOR CONTACTLESS INSPECTION OF A SUBSTRATE |
HOQUE, FARHANA AKHTER |
2858 |
§102 |
Non-Final OA |
— |
Pending |
Dec 05, 2024 |
| 18871448 |
ISOLATING SPACER FOR ELECTRON-OPTICAL ASSEMBLY |
GASSEN, CHRISTOPHER J |
2881 |
§102§103§112 |
Non-Final OA |
— |
Pending |
Dec 03, 2024 |
| 18870245 |
SYSTEM, APPARATUS AND METHOD FOR SELECTIVE SURFACE TREATMENT |
PERSAUD, DEORAM |
2882 |
§102§103 |
Non-Final OA |
— |
Pending |
Nov 27, 2024 |
| 18869149 |
A RADIATION SOURCE |
RIDDLE, CHRISTINA A |
2882 |
§103 |
Final Rejection |
— |
Pending |
Nov 25, 2024 |
| 18868972 |
A MEMBRANE AND ASSOCIATED METHOD AND APPARATUS |
KIM, PETER B |
2882 |
§103 |
Non-Final OA |
— |
Pending |
Nov 25, 2024 |
| 18868800 |
CALIBRATION METHOD AND APPARATUS |
UNDERWOOD, JARREAS C |
2877 |
§102§103§112 |
Non-Final OA |
— |
Pending |
Nov 25, 2024 |
| 18868802 |
SENSOR MODULE, ILLUMINATOR, METROLOGY DEVICE AND ASSOCIATED METROLOGY METHOD |
RIDDLE, CHRISTINA A |
2882 |
§102§103 |
Final Rejection |
— |
Pending |
Nov 25, 2024 |
| 18868113 |
ELECTRON-OPTICAL APPARATUS AND METHOD OF OBTAINING TOPOGRAPHICAL INFORMATION ABOUT A SAMPLE SURFACE |
WANG, JING |
2881 |
§103§112 |
Non-Final OA |
— |
Pending |
Nov 21, 2024 |
| 18867491 |
CLASSIFYING PRODUCT UNITS |
CHOI, ALICIA M |
2117 |
§101 |
Non-Final OA |
— |
Pending |
Nov 20, 2024 |
| 18867005 |
METHOD AND SYSTEM FOR REDUCING CHARGING ARTIFACT IN INSPECTION IMAGE |
BROUGHTON, KATHLEEN M |
2661 |
§103 |
Non-Final OA |
— |
Pending |
Nov 19, 2024 |
| 18866780 |
SUBSTRATE HOLDING SYSTEM AND LITHOGRAPHIC APPARATUS |
HUANG, STEVEN |
3723 |
§103 |
Non-Final OA |
— |
Pending |
Nov 18, 2024 |
| 18866471 |
DROPLET GENERATOR NOZZLE |
MCCORMACK, JASON L |
2881 |
§102§103 |
Non-Final OA |
— |
Pending |
Nov 15, 2024 |
| 18866014 |
METHOD AND SYSTEM FOR FINE FOCUSING SECONDARY BEAM SPOTS ON DETECTOR FOR MULTI-BEAM INSPECTION APPARATUS |
WANG, JING |
— |
§102§103 |
Non-Final OA |
— |
Pending |
Nov 14, 2024 |
| 18864761 |
METHOD OF SPATIALLY ALIGNING A PATTERNING DEVICE AND A SUBSTRATE |
HANSEN, JONATHAN M |
2877 |
§102 |
Final Rejection |
— |
Pending |
Nov 11, 2024 |
| 18864099 |
DETECTOR FOR DETECTING RADIATION, METHOD OF DETECTING RADIATION, ASSESSMENT SYSTEM |
SONG, HOON K |
2884 |
§102§103 |
Non-Final OA |
— |
Pending |
Nov 08, 2024 |
| 18864463 |
OBTAINING HIGH RESOLUTION INFORMATION FROM LOW RESOLUTION IMAGES |
KALISZEWSKI, ALINA ROSE |
2881 |
§101§103§112 |
Non-Final OA |
— |
Pending |
Nov 08, 2024 |
| 18863941 |
CONTAMINATION DETERMINATION |
KIM, PETER B |
2882 |
§103§112 |
Final Rejection |
34d |
Pending |
Nov 07, 2024 |
| 18863624 |
CONTAMINATION MEASUREMENT |
AMARA, MOHAMED K |
2877 |
§103 |
Final Rejection |
— |
Pending |
Nov 06, 2024 |
| 18861859 |
METHOD AND SYSTEM OF OVERLAY MEASUREMENT USING CHARGED-PARTICLE INSPECTION APPARATUS |
NGUYEN, HUNG |
2882 |
§102§103 |
Final Rejection |
— |
Pending |
Oct 30, 2024 |
| 18861173 |
MEASUREMENT OF FABRICATION PARAMETERS BASED ON MOIRÉ INTERFERENCE PATTERN COMPONENTS |
COOK, JONATHON |
2877 |
§102§103 |
Non-Final OA |
— |
Pending |
Oct 28, 2024 |
| 18860879 |
MECHATRONIC SYSTEM CONTROL METHOD, LITHOGRAPHIC APPARATUS CONTROL METHOD AND LITHOGRAPHIC APPARATUS |
NGUYEN, BAO LONG T |
3656 |
§103§112 |
Non-Final OA |
— |
Pending |
Oct 28, 2024 |
| 18860248 |
OPTICAL ARRANGEMENT FOR A METROLOGY SYSTEM |
BAGHDASARYAN, HOVHANNES |
3645 |
§103 |
Non-Final OA |
— |
Pending |
Oct 25, 2024 |
| 18860115 |
SINGLE PAD OVERLAY MEASUREMENT |
BRYANT, REBECCA CAROLE |
2877 |
§102 |
Final Rejection |
— |
Pending |
Oct 25, 2024 |
| 18859655 |
MIRROR ASSEMBLY FOR MICROMIRROR ARRAY |
WHITESELL, STEVEN H |
1759 |
§102§103 |
Final Rejection |
— |
Pending |
Oct 24, 2024 |
| 18859466 |
TRANSIENT DEFECT INSPECTION USING AN INSPECTION IMAGE |
GORADIA, SHEFALI DINESH |
2676 |
§101§103§112 |
Non-Final OA |
— |
Pending |
Oct 23, 2024 |
| 18859485 |
THERMALLY ACTUATED COOLING SYSTEM |
EINHORN, MICA JILLIAN |
2881 |
§102§103 |
Non-Final OA |
— |
Pending |
Oct 23, 2024 |
| 18857065 |
SYSTEMS, METHODS, AND SOFTWARE FOR MULTILAYER METROLOGY |
CODRINGTON, SHANE WRENSFORD |
2667 |
§102§103§112 |
Non-Final OA |
— |
Pending |
Oct 15, 2024 |
| 18856459 |
A LITHOGRAPHIC APPARATUS, AN INSPECTION SYSTEM, AND A DETECTOR HAVING A SQUARE-CORE FIBER |
AKANBI, ISIAKA O |
2877 |
§103 |
Final Rejection |
— |
Pending |
Oct 11, 2024 |
| 18911806 |
CHARGED PARTICLE BEAM APPARATUS WITH MULTIPLE DETECTORS AND METHODS FOR IMAGING |
MCCORMACK, JASON L |
2881 |
§103§112 |
Non-Final OA |
— |
Pending |
Oct 10, 2024 |
| 18910626 |
SELF-DIFFERENTIAL CONFOCAL TILT SENSOR FOR MEASURING LEVEL VARIATION IN CHARGED PARTICLE BEAM SYSTEM |
SMITH, DAVID E |
2881 |
§102§103 |
Non-Final OA |
— |
Pending |
Oct 09, 2024 |
| 18855625 |
CHARGED-PARTICLE BEAM APPARATUS WITH LARGE FIELD-OF-VIEW AND METHODS THEREOF |
LI, LARRY |
2881 |
§103§112 |
Non-Final OA |
— |
Pending |
Oct 09, 2024 |
| 18855206 |
HOLLOW-CORE OPTICAL FIBER BASED RADIATION SOURCE |
HOLLWEG, THOMAS A |
2874 |
§102§103 |
Non-Final OA |
— |
Pending |
Oct 08, 2024 |
| 18853983 |
E-BEAM OPTIMIZATION FOR OVERLAY MEASUREMENT OF BURIED FEATURES |
LI, LARRY |
2884 |
§101§103 |
Non-Final OA |
— |
Pending |
Oct 03, 2024 |
| 18853562 |
HIGH PRESSURE COUPLING ASSEMBLY |
BOOSALIS, FANI POLYZOS |
2884 |
§102§103 |
Final Rejection |
— |
Pending |
Oct 02, 2024 |
| 18851144 |
END-EFFECTOR AND METHOD FOR HANDLING A SUBSTRATE |
LOIKITH, CATHERINE A |
3656 |
§102§103§112 |
Non-Final OA |
— |
Pending |
Sep 26, 2024 |
| 18893626 |
METROLOGY METHOD AND METHOD FOR TRAINING A DATA STRUCTURE FOR USE IN METROLOGY |
LU, ZHIYU |
2665 |
§103 |
Final Rejection |
— |
Pending |
Sep 23, 2024 |
| 18848095 |
ILLUMINATION ARRANGEMENT FOR A METROLOGY DEVICE AND ASSOCIATED METHOD |
AMARA, MOHAMED K |
2877 |
§103 |
Non-Final OA |
22d |
AI Ready |
Sep 17, 2024 |
| 18882681 |
FULLY AUTOMATED SEM SAMPLING SYSTEM FOR E-BEAM IMAGE ENHANCEMENT |
HSIEH, PING Y |
2664 |
§103Other |
Non-Final OA |
— |
Pending |
Sep 11, 2024 |
| 18829231 |
SEM IMAGE ENHANCEMENT METHODS AND SYSTEMS |
CESE, KENNY A |
2663 |
§103§112 |
Non-Final OA |
— |
Pending |
Sep 09, 2024 |
| 18845206 |
VACUUM CHAMBER SYSTEM INCLUDING TEMPERATURE CONDITIONING PLATE |
OSENBAUGH-STEWART, ELIZA W |
2881 |
§102§103§112 |
Non-Final OA |
— |
Pending |
Sep 09, 2024 |
| 18844478 |
SETUP AND CONTROL METHODS FOR A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUSES |
ASFAW, MESFIN T |
2882 |
§102 |
Non-Final OA |
30d |
Pending |
Sep 06, 2024 |
| 18843936 |
METHOD FOR DETERMINING A SPATIAL DISTRIBUTION OF A PARAMETER OF INTEREST OVER AT LEAST ONE SUBSTRATE OR PORTION THEREOF |
ASFAW, MESFIN T |
2882 |
§101§102 |
Final Rejection |
28d |
Pending |
Sep 04, 2024 |
| 18841032 |
METHODS AND SYSTEMS FOR IMPROVING WAFER DEFECT CLASSIFICATION NUISANCE RATE |
PARK, SOO JIN |
2675 |
§103§112 |
Non-Final OA |
— |
Pending |
Aug 23, 2024 |
| 18838135 |
INSPECTION TOOL AND BARRIER FOR USE THEREIN |
HANSEN, JONATHAN M |
2877 |
§102§103 |
Non-Final OA |
9d |
AI Ready |
Aug 13, 2024 |
| 18837353 |
SYSTEMS AND METHODS FOR CLEANING A PORTION OF A LITHOGRAPHY APPARATUS |
PERSAUD, DEORAM |
2882 |
§102§103 |
Non-Final OA |
— |
Pending |
Aug 09, 2024 |
| 18837576 |
IMAGE ANALYSIS BASED ON ADAPTIVE WEIGHTING OF TEMPLATE CONTOURS |
BEKELE, MEKONEN T |
2699 |
§102§103 |
Non-Final OA |
— |
Pending |
Aug 09, 2024 |
| 18834131 |
FIELD OF VIEW SELECTION FOR METROLOGY ASSOCIATED WITH SEMICONDUCTOR MANUFACTURING |
LANTZ, KARSTEN FOSTER |
2664 |
§103 |
Non-Final OA |
— |
Pending |
Jul 29, 2024 |
| 18832408 |
METHODS OF METROLOGY |
PEREZ BERMUDEZ, YARITZA H |
2857 |
§101§103 |
Non-Final OA |
— |
Pending |
Jul 23, 2024 |
| 18776207 |
INSPECTION APPARATUS AND METHOD |
MCCORMACK, JASON L |
2881 |
§112 |
Non-Final OA |
— |
Pending |
Jul 17, 2024 |
| 18726728 |
A PELLICLE CLEANING SYSTEM |
RIDDLE, CHRISTINA A |
2882 |
§102§103 |
Final Rejection |
— |
Pending |
Jul 03, 2024 |
| 18759499 |
BEAM MANIPULATOR IN CHARGED PARTICLE-BEAM APPARATUS |
LI, LARRY |
2881 |
§103§112 |
Non-Final OA |
— |
Pending |
Jun 28, 2024 |
| 18724286 |
AN OPTICAL SYSTEM IMPLEMENTED IN A SYSTEM FOR FAST OPTICAL INSPECTION OF TARGETS |
TABA, MONICA TERESA |
2878 |
§102§103 |
Final Rejection |
— |
Pending |
Jun 26, 2024 |
| 18724551 |
ELEMENT OF AN AFM TOOL |
SMITH, DAVID E |
2881 |
§103 |
Final Rejection |
— |
Pending |
Jun 26, 2024 |
| 18749556 |
COMPUTATIONAL METROLOGY BASED SAMPLING SCHEME |
PERSAUD, DEORAM |
2882 |
§101 |
Final Rejection |
43d |
Pending |
Jun 20, 2024 |
| 18721460 |
HIERARCHICAL ANOMALY DETECTION AND DATA REPRESENTATION METHOD TO IDENTIFY SYSTEM LEVEL DEGRADATION |
QUIGLEY, KYLE ROBERT |
2857 |
§101§102§103 |
Non-Final OA |
— |
Pending |
Jun 18, 2024 |
| 18721405 |
GENERATING AN ALIGNMENT SIGNAL WITHOUT DEDICATED ALIGNMENT STRUCTURES |
CHILTON, CLARA GRACE |
3645 |
§102§103§112 |
Non-Final OA |
— |
Pending |
Jun 18, 2024 |
| 18720941 |
SUBSTRATE COMPRISING A TARGET ARRANGEMENT, ASSOCIATED PATTERNING DEVICE AND METROLOGY METHOD |
HANSEN, JONATHAN M |
2877 |
§102 |
Non-Final OA |
— |
Pending |
Jun 17, 2024 |
| 18719902 |
METHOD AND APPARATUS FOR LITHOGRAPHIC IMAGING |
KIM, PETER B |
2882 |
§102§103 |
Final Rejection |
53d overdue |
Pending |
Jun 14, 2024 |
| 18718306 |
METHOD AND APPARATUS TO DETERMINE OVERLAY |
RIVERA-MARTINEZ, GUILLERMO M |
2677 |
§103§112 |
Non-Final OA |
— |
Pending |
Jun 10, 2024 |
| 18718240 |
METHOD OF PATTERNING A TARGET LAYER, APPARATUS FOR PATTERNING A TARGET LAYER |
LEE, AIDEN Y |
1713 |
§102§103§112 |
Non-Final OA |
— |
Pending |
Jun 10, 2024 |
| 18716806 |
MACHINE LEARNING MODEL FOR ASYMMETRY-INDUCED OVERLAY ERROR CORRECTION |
WHITESELL, STEVEN H |
1759 |
§101§102§103 |
Final Rejection |
24d overdue |
Pending |
Jun 05, 2024 |
| 18716007 |
TARGET ASYMMETRY MEASUREMENT FOR SUBSTRATE ALIGNMENT IN LITHOGRAPHY SYSTEMS |
PEREZ-GUZMAN, CARLOS GABRIEL |
2877 |
§102§103 |
Non-Final OA |
— |
Pending |
Jun 03, 2024 |
| 18713127 |
THERMAL CONTROL SYSTEMS, MODELS, AND MANUFACTURING PROCESSES IN LITHOGRAPHY |
HARTMAN JR, RONALD D |
— |
§103 |
Non-Final OA |
— |
Pending |
May 23, 2024 |
| 18713108 |
CHARGED-PARTICLE BEAM APPARATUS FOR VOLTAGE-CONTRAST INSPECTION AND METHODS THEREOF |
NAVARRO, HUGO IVAN |
2858 |
§103§112 |
Non-Final OA |
45d overdue |
AI Ready |
May 23, 2024 |
| 18712765 |
IDENTIFYING DEVIATING MODULES FROM A REFERENCE POPULATION FOR MACHINE DIAGNOSTICS |
AGRAWAL, SHISHIR |
2123 |
§101§103§112 |
Non-Final OA |
— |
Pending |
May 23, 2024 |
| 18712649 |
METROLOGY CALIBRATION METHOD |
SATANOVSKY, ALEXANDER |
2857 |
§103 |
Non-Final OA |
— |
Pending |
May 22, 2024 |
| 18712671 |
SURROUNDING PATTERN AND PROCESS AWARE METROLOGY |
PERSAUD, DEORAM |
2882 |
§102 |
Final Rejection |
38d overdue |
Pending |
May 22, 2024 |
| 18712560 |
METHODS OF DETERMINING A MECHANICAL PROPERTY OF A LAYER APPLIED TO A SUBSTRATE, AND ASSOCIATED DEVICES |
KAY, DOUGLAS |
2857 |
§101§103§112DP |
Non-Final OA |
— |
Pending |
May 22, 2024 |
| 18703486 |
GENERATING AUGMENTED DATA TO TRAIN MACHINE LEARNING MODELS TO PRESERVE PHYSICAL TRENDS |
CODRINGTON, SHANE WRENSFORD |
2667 |
§102§103 |
Non-Final OA |
— |
Pending |
Apr 22, 2024 |
| 18702508 |
FUEL DROPLET NOZZLE ASSEMBLY |
GASSEN, CHRISTOPHER J |
2881 |
§102§112 |
Non-Final OA |
— |
Pending |
Apr 18, 2024 |
| 18630741 |
SEM IMAGE ALIGNMENT |
WILBURN, MOLLY K |
2666 |
§101 |
Final Rejection |
8d overdue |
AI Ready |
Apr 09, 2024 |
| 18627338 |
FIBER ALIGNMENT MONITORING TOOL AND ASSOCIATED FIBER ALIGNMENT METHOD |
CAPUTO, LISA M |
2874 |
§102 |
Final Rejection |
— |
Pending |
Apr 04, 2024 |
| 18618406 |
PELLICLE FOR EUV LITHOGRAPHY |
ANGEBRANNDT, MARTIN J |
1737 |
§102§103§112 |
Final Rejection |
31d overdue |
Pending |
Mar 27, 2024 |
| 18691828 |
SYSTEM AND METHOD FOR INSPECTION BY FAILURE MECHANISM CLASSIFICATION AND IDENTIFICATION IN A CHARGED PARTICLE SYSTEM |
WANG, JING |
2881 |
§103 |
Non-Final OA |
— |
Pending |
Mar 13, 2024 |
| 18690979 |
METHOD FOR FOCUS METROLOGY AND ASSOCIATED APPARATUSES |
ASFAW, MESFIN T |
2882 |
§102§103 |
Non-Final OA |
56d overdue |
Pending |
Mar 11, 2024 |
| 18691002 |
SOURCE SELECTION MODULE AND ASSOCIATED METROLOGY AND LITHOGRAPHIC APPARATUSES |
MENDOZA, ALEXANDRIA ARELLANO |
2877 |
§103 |
Non-Final OA |
121d overdue |
Pending |
Mar 11, 2024 |
| 18686994 |
PATTERN SELECTION SYSTEMS AND METHODS |
LIN, ARIC |
2851 |
§101§102§103 |
Non-Final OA |
— |
Pending |
Feb 27, 2024 |
| 18686742 |
METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHOD |
STOCK JR, GORDON J |
2877 |
§102DP |
Non-Final OA |
42d overdue |
Pending |
Feb 26, 2024 |
| 18684558 |
METHOD FOR CONVERTING METROLOGY DATA |
WASAFF, JOHN S. |
3629 |
§101§102§103 |
Non-Final OA |
— |
Pending |
Feb 16, 2024 |
| 18684048 |
SOURCE SEPARATION FROM METROLOGY DATA |
PEREZ BERMUDEZ, YARITZA H |
2857 |
§101§102§103§112 |
Non-Final OA |
— |
Pending |
Feb 15, 2024 |
| 18681613 |
METHOD OF EVALUATING SELECTED SET OF PATTERNS |
PARIHAR, SUCHIN |
2851 |
§102 |
Non-Final OA |
— |
Pending |
Feb 06, 2024 |
| 18294202 |
AN OBJECT GRIPPER, A METHOD OF HOLDING AN OBJECT AND A LITHOGRAPHIC APPARATUS |
WHITESELL, STEVEN H |
1759 |
§102§103 |
Final Rejection |
72d overdue |
Pending |
Feb 01, 2024 |
| 18580062 |
OPTICAL ELEMENT FOR USE IN METROLOGY SYSTEMS |
KIDWELL, KAITLYN ELIZABETH |
2877 |
§102§103§112 |
Non-Final OA |
— |
Pending |
Jan 17, 2024 |
| 18578299 |
METHOD FOR GENERATING MASK PATTERN |
WALKE, AMANDA C |
1722 |
§103 |
Non-Final OA |
— |
Pending |
Jan 10, 2024 |
| 18575518 |
A METHOD OF MONITORING A MEASUREMENT RECIPE AND ASSOCIATED METROLOGY METHODS AND APPARATUSES |
HISHAM, MOSTOFA AHMED |
2857 |
§101§102§103§112 |
Final Rejection |
— |
Pending |
Dec 29, 2023 |
| 18572764 |
PATTERN SELECTION FOR SOURCE MASK OPTIMIZATION AND TARGET OPTIMIZATION |
ALAM, MOHAMMED |
2851 |
§102 |
Non-Final OA |
— |
Pending |
Dec 20, 2023 |
| 18571490 |
APPARATUS AND METHOD FOR PRODUCING DROPLETS OF TARGET MATERIAL IN AN EUV SOURCE |
LIEUWEN, CODY J |
3752 |
§102§103§112 |
Final Rejection |
— |
Pending |
Dec 18, 2023 |
| 18570572 |
DETERMINING LOCALIZED IMAGE PREDICTION ERRORS TO IMPROVE A MACHINE LEARNING MODEL IN PREDICTING AN IMAGE |
DINH, PAUL |
2851 |
§102 |
Non-Final OA |
— |
Pending |
Dec 14, 2023 |
| 18570140 |
STRUCTURES FOR USE ON A SUBSTRATE HOLDER, SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS AND METHOD |
KIM, PETER B |
2882 |
§103 |
Non-Final OA |
8d |
Pending |
Dec 14, 2023 |
| 18568628 |
CHARGED PARTICLE DETECTOR ASSEMBLY |
SMITH, DAVID E |
2881 |
§103 |
Final Rejection |
42d overdue |
Pending |
Dec 08, 2023 |
| 18533662 |
OBJECT TABLE, A STAGE APPARATUS AND A LITHOGRAPHIC APPARATUS |
WHITESELL, STEVEN H |
1759 |
§102§103§112 |
Final Rejection |
— |
Pending |
Dec 08, 2023 |
| 18568115 |
COMPUTER IMPLEMENTED METHOD FOR DIAGNOSING A SYSTEM COMPRISING A PLURALITY OF MODULES |
TAT, BINH C |
2851 |
§102 |
Non-Final OA |
— |
Pending |
Dec 07, 2023 |
| 18565951 |
INSPECTION DATA FILTERING SYSTEMS AND METHODS |
BHATNAGAR, ANAND P |
2668 |
§101§103 |
Final Rejection |
100d overdue |
Pending |
Nov 30, 2023 |
| 18565494 |
ETCHING SYSTEMS, MODELS, AND MANUFACTURING PROCESSES |
DINH, PAUL |
2851 |
§102§103 |
Non-Final OA |
— |
Pending |
Nov 29, 2023 |
| 18563841 |
MANIPULATION OF CARRIER TRANSPORT BEHAVIOR IN DETECTOR |
STOFFA, WYATT A |
2881 |
§102 |
Final Rejection |
— |
Pending |
Nov 22, 2023 |
| 18517642 |
CHARGED PARTICLE DEVICE AND METHOD |
LI, LARRY |
2881 |
§102§103§112 |
Non-Final OA |
— |
Pending |
Nov 22, 2023 |
| 18561892 |
METROLOGY MEASUREMENT METHOD AND APPARATUS |
RIZVI, AKBAR HASSAN |
2877 |
§102§103 |
Final Rejection |
— |
Pending |
Nov 17, 2023 |
| 18511454 |
PROCESS WINDOW BASED ON DEFECT PROBABILITY |
WHITESELL, STEVEN H |
1759 |
§101§102§103Other |
Final Rejection |
88d overdue |
Pending |
Nov 16, 2023 |
| 18559942 |
DIFFRACTION GRATING FOR MEASUREMENTS IN EUV-EXPOSURE APPARATUSES |
CARLSON, JOSHUA MICHAEL |
2877 |
§103§112 |
Final Rejection |
— |
Pending |
Nov 09, 2023 |
| 18289765 |
METROLOGY METHOD AND ASSOCIATED METROLOGY TOOL |
STOCK JR, GORDON J |
2800 |
§102§103§112 |
Non-Final OA |
— |
Pending |
Nov 07, 2023 |
| 18558910 |
METROLOGY APPARATUS AND LITHOGRAPHIC APPARATUS |
GRAY, SUNGHEE Y |
1737 |
§103 |
Non-Final OA |
— |
Pending |
Nov 03, 2023 |
| 18289384 |
DETERMINING MASK RULE CHECK VIOLATIONS AND MASK DESIGN |
SOUNDRANAYAGAM, RAYAPPU NMN |
2851 |
§112 |
Non-Final OA |
— |
Pending |
Nov 03, 2023 |
| 18557578 |
HIERARCHICAL CLUSTERING OF FOURIER TRANSFORM BASED LAYOUT PATTERNS |
GOEBEL, EMMA ROSE |
2662 |
§103 |
Non-Final OA |
— |
Pending |
Oct 26, 2023 |
| 18287613 |
CAUSAL CONVOLUTION NETWORK FOR PROCESS CONTROL |
ALAM, MOHAMMED |
2851 |
§103 |
Non-Final OA |
— |
Pending |
Oct 19, 2023 |
| 18287166 |
METHOD FOR DETERMINING A STOCHASTIC METRIC RELATING TO A LITHOGRAPHIC PROCESS |
ADAMS, EILEEN M |
2481 |
§103 |
Final Rejection |
— |
Pending |
Oct 16, 2023 |
| 18284974 |
SYSTEM AND METHOD TO ENSURE PARAMETER MEASUREMENT MATCHING ACROSS METROLOGY TOOLS |
CHARIOUI, MOHAMED |
2857 |
§101§103 |
Non-Final OA |
— |
Pending |
Sep 29, 2023 |
| 18284839 |
ON SYSTEM SELF-DIAGNOSIS AND SELF-CALIBRATION TECHNIQUE FOR CHARGED PARTICLE BEAM SYSTEMS |
VANORE, DAVID A |
2878 |
§101§112 |
Non-Final OA |
28d |
AI Ready |
Sep 28, 2023 |
| 18552645 |
PATTERNING DEVICE FOR A LITHOGRAPHIC APPARATUS AND METHOD |
CHACKO DAVIS, DABORAH |
1737 |
§102§103 |
Non-Final OA |
— |
Pending |
Sep 26, 2023 |
| 18552634 |
LASER SYSTEM |
MERLIN, JESSICA M |
2871 |
§103 |
Final Rejection |
— |
Pending |
Sep 26, 2023 |
| 18281519 |
A METHOD FOR MODELING MEASUREMENT DATA OVER A SUBSTRATE AREA AND ASSOCIATED APPARATUSES |
NGUYEN, NHA T |
2851 |
§103 |
Non-Final OA |
— |
Pending |
Sep 11, 2023 |
| 18280529 |
HOLLOW-CORE PHOTONIC CRYSTAL FIBER BASED MULTIPLE WAVELENGTH LIGHT SOURCE DEVICE |
PEACE, RHONDA S |
2828 |
§102§103 |
Final Rejection |
— |
Pending |
Sep 06, 2023 |
| 18453531 |
Metrology Apparatus and a Method of Determining a Characteristic of Interest |
GRAY, SUNGHEE Y |
2877 |
§103 |
Non-Final OA |
— |
Pending |
Aug 22, 2023 |
| 18233263 |
METHOD AND SYSTEM TO MONITOR A PROCESS APPARATUS |
PERSAUD, DEORAM |
2882 |
§102Other |
Non-Final OA |
12d |
Pending |
Aug 11, 2023 |
| 18276248 |
PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS AND METHOD |
DAVIS, SHENG HAN |
1732 |
§103§112 |
Final Rejection |
— |
Pending |
Aug 07, 2023 |
| 18276014 |
METHOD TO PREDICT METROLOGY OFFSET OF A SEMICONDUCTOR MANUFACTURING PROCESS |
NGUYEN, NHA T |
2851 |
§102§103 |
Non-Final OA |
— |
Pending |
Aug 04, 2023 |
| 18270074 |
MODULAR AUTOENCODER MODEL FOR MANUFACTURING PROCESS PARAMETER ESTIMATION |
CAMPOS, ALFREDO |
2129 |
§101§103§112 |
Final Rejection |
35d |
AI Ready |
Jun 28, 2023 |
| 18259344 |
MODULAR AUTOENCODER MODEL FOR MANUFACTURING PROCESS PARAMETER ESTIMATION |
ALSHAHARI, SADIK AHMED |
2121 |
§103§112 |
Non-Final OA |
1d overdue |
AI Ready |
Jun 26, 2023 |
| 18268953 |
MACHINE LEARNING-BASED SYSTEMS AND METHODS FOR GENERATING SYNTHETIC DEFECT IMAGES FOR WAFER INSPECTION |
DHOOGE, DEVIN J |
2677 |
§103 |
Non-Final OA |
50d |
Pending |
Jun 21, 2023 |
| 18268847 |
A METROLOGY APPARATUS AND A METROLOGY METHOD |
OKASHA, RAMI RAFAT |
2118 |
§103§112 |
Final Rejection |
38d overdue |
Pending |
Jun 21, 2023 |
| 18265431 |
FEATURE EXTRACTION METHOD FOR EXTRACTING FEATURE VECTORS FOR IDENTIFYING PATTERN OBJECTS |
LIEW, ALEX KOK SOON |
2674 |
§102§103 |
Non-Final OA |
93d overdue |
Pending |
Jun 05, 2023 |
| 18039712 |
A METHOD OF MONITORING A LITHOGRAPHIC PROCESS |
LE, JOHN H |
2857 |
§101§102 |
Final Rejection |
5d |
Pending |
May 31, 2023 |
| 18038206 |
SEMICONDUCTOR CHARGED PARTICLE DETECTOR FOR MICROSCOPY |
STOFFA, WYATT A |
2881 |
§103§112 |
Non-Final OA |
71d |
Pending |
May 22, 2023 |
| 18320157 |
INSPECTION METHOD AND INSPECTION TOOL |
MCCORMACK, JASON L |
2881 |
§103 |
Non-Final OA |
14d |
AI Ready |
May 18, 2023 |
| 18251261 |
CONDITIONING APPARATUS AND METHOD |
RIDDLE, CHRISTINA A |
2882 |
§112 |
Final Rejection |
— |
Pending |
May 01, 2023 |
| 18305925 |
LITHOGRAPHIC APPARATUS, METHOD FOR UNLOADING A SUBSTRATE AND METHOD FOR LOADING A SUBSTRATE |
SAENZ, ALBERTO |
3723 |
§103Other |
Final Rejection |
— |
Pending |
Apr 24, 2023 |
| 18032273 |
METHODS AND COMPUTER PROGRAMS FOR CONFIGURATION OF A SAMPLING SCHEME GENERATION MODEL |
SALOMON, PHENUEL S |
2146 |
§101§103 |
Final Rejection |
32d overdue |
Pending |
Apr 17, 2023 |
| 18031865 |
METHOD FOR GENERATING MASK PATTERN |
LEE, ERIC D |
2851 |
§102 |
Final Rejection |
36d overdue |
Pending |
Apr 13, 2023 |
| 18134020 |
APERTURE PATTERNS FOR DEFINING MULTI-BEAMS |
CHOI, JAMES J |
2878 |
§102§103§112 |
Non-Final OA |
30d overdue |
AI Ready |
Apr 12, 2023 |
| 18025636 |
VACUUM SYSTEM FOR MITIGATING DAMAGE DUE TO A VACUUM PUMP MALFUNCTION |
COMLEY, ALEXANDER BRYANT |
3746 |
§102§112 |
Non-Final OA |
3d overdue |
Pending |
Mar 09, 2023 |
| 18025183 |
TARGET STRUCTURE AND ASSOCIATED METHODS AND APPARATUS |
WHITESELL, STEVEN H |
1759 |
§102§103§112 |
Final Rejection |
51d overdue |
Pending |
Mar 07, 2023 |
| 18023708 |
METHOD OF PERFORMING METROLOGY, METHOD OF TRAINING A MACHINE LEARNING MODEL, METHOD OF PROVIDING A LAYER COMPRISING A TWO-DIMENSIONAL MATERIAL, METROLOGY APPARATUS |
DINH, LYNDA |
2857 |
§101§103 |
Final Rejection |
50d overdue |
Pending |
Feb 27, 2023 |
| 18021537 |
CHARGED-PARTICLE INSPECTION APPARATUS |
MCDONALD, RODNEY GLENN |
1794 |
§103 |
Non-Final OA |
— |
AI Ready |
Feb 15, 2023 |
| 18017646 |
APPARATUS AND METHOD FOR SELECTING HIGH QUALITY IMAGES FROM RAW IMAGES AUTOMATICALLY |
HELCO, NICHOLAS JOHN |
2667 |
§103 |
Non-Final OA |
79d overdue |
Pending |
Jan 23, 2023 |
| 18016811 |
METHOD AND APPARATUS FOR IDENTIFYING CONTAMINATION IN A SEMICONDUCTOR FAB |
GASSEN, CHRISTOPHER J |
2881 |
§101§102§103 |
Non-Final OA |
43d overdue |
Pending |
Jan 18, 2023 |
| 18015313 |
APPARATUS AND METHOD FOR SELECTING INFORMATIVE PATTERNS FOR TRAINING MACHINE LEARNING MODELS |
LU, ZHIYU |
2665 |
§103 |
Final Rejection |
84d |
Pending |
Jan 09, 2023 |
| 18015162 |
METHOD AND APPARATUS FOR CONCEPT DRIFT MITIGATION |
TANK, ANDREW L |
2141 |
§102§103 |
Final Rejection |
— |
Pending |
Jan 09, 2023 |
| 18010251 |
SYSTEMS AND METHODS FOR LASER-TO-DROPLET ALIGNMENT |
LOGIE, MICHAEL J |
2881 |
§102§103§112 |
Non-Final OA |
— |
Pending |
Dec 14, 2022 |
| 18064110 |
REPLACEABLE MODULE FOR A CHARGED PARTICLE APPARATUS |
OSENBAUGH-STEWART, ELIZA W |
2881 |
§103 |
Non-Final OA |
2d overdue |
AI Ready |
Dec 09, 2022 |
| 17986829 |
APPARATUS FOR DECOMPOSING ERROR CONTRIBUTIONS FROM MULTIPLE SOURCES TO MULTIPLE FEATURES OF A PATTERN ON A SUBSTRATE |
ISLAM, MEHRAZUL NMN |
2662 |
§103§112 |
Non-Final OA |
28d |
AI Ready |
Nov 14, 2022 |
| 17924626 |
SYSTEMS, PRODUCTS, AND METHODS FOR GENERATING PATTERNING DEVICES AND PATTERNS THEREFOR |
ALAWDI, ANWER AHMED |
2851 |
§102§103 |
Non-Final OA |
53d overdue |
Pending |
Nov 10, 2022 |
| 17968352 |
SEPARATION OF CONTRIBUTIONS TO METROLOGY DATA |
LIN, ARIC |
2851 |
§103 |
Non-Final OA |
— |
Pending |
Oct 18, 2022 |
| 17964783 |
ENERGY BAND-PASS FILTERING FOR IMPROVED HIGH LANDING ENERGY BACKSCATTERED CHARGED PARTICLE IMAGE RESOLUTION |
SMITH, DAVID E |
2881 |
§102§103 |
Non-Final OA |
— |
Pending |
Oct 12, 2022 |
| 17909352 |
BEAM ARRAY GEOMETRY OPTIMIZER FOR MULTI-BEAM INSPECTION SYSTEM |
KALISZEWSKI, ALINA ROSE |
2881 |
§103 |
Final Rejection |
— |
AI Ready |
Sep 02, 2022 |
| 17798538 |
CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD |
OSENBAUGH-STEWART, ELIZA W |
2881 |
§103 |
Non-Final OA |
5d |
Pending |
Aug 09, 2022 |
| 17796434 |
DETERMINING LITHOGRAPHIC MATCHING PERFORMANCE |
ALAWDI, ANWER AHMED |
2851 |
§103 |
Final Rejection |
125d overdue |
Pending |
Jul 29, 2022 |
| 17874582 |
COMPUTATIONAL METROLOGY BASED CORRECTION AND CONTROL |
WHITESELL, STEVEN H |
1759 |
§103 |
Non-Final OA |
66d overdue |
Pending |
Jul 27, 2022 |
| 17794435 |
CHARGED PARTICLE MANIPULATOR DEVICE |
OSENBAUGH-STEWART, ELIZA W |
2881 |
§102§103§112 |
Non-Final OA |
72d overdue |
Pending |
Jul 21, 2022 |
| 17771761 |
CHARGED PARTICLE INSPECTION SYSTEM AND METHOD USING MULTI-WAVELENGTH CHARGE CONTROLLERS |
MCCORMACK, JASON L |
2881 |
§112 |
Final Rejection |
— |
Pending |
Apr 25, 2022 |
| 17766585 |
METHODS OF FITTING MEASUREMENT DATA TO A MODEL AND MODELING A PERFORMANCE PARAMETER DISTRIBUTION AND ASSOCIATED APPARATUSES |
DARWISH, AMIR ELSAYED |
2199 |
§103 |
Non-Final OA |
— |
Pending |
Apr 05, 2022 |
| 17763698 |
PROCESS MONITORING AND TUNING USING PREDICTION MODELS |
PAN, YUHUI R |
2116 |
§103 |
Non-Final OA |
15d overdue |
Pending |
Mar 25, 2022 |
| 17638472 |
SEMICONDUCTOR DEVICE GEOMETRY METHOD AND SYSTEM |
COLE, BRANDON S |
2128 |
§101§103 |
Non-Final OA |
30d overdue |
Pending |
Feb 25, 2022 |
| 17632632 |
METHOD AND APPARATUS FOR PHOTOLITHOGRAPHIC IMAGING |
WHITE, JAY MICHAEL |
2188 |
§101§102§112 |
Non-Final OA |
86d overdue |
Pending |
Feb 03, 2022 |
| 17623829 |
SUB-FIELD CONTROL OF A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUS |
TAN, ALVIN H |
2118 |
§103§112 |
Non-Final OA |
99d overdue |
Pending |
Dec 29, 2021 |
| 17607701 |
A PATTERNING DEVICE |
ANGEBRANNDT, MARTIN J |
1737 |
§102§103§112 |
Non-Final OA |
103d overdue |
Pending |
Oct 29, 2021 |
| 17471363 |
MACHINE-LEARNING BASED DEFECT IDENTIFICATION |
DULANEY, BENJAMIN O |
2683 |
§102§103 |
Non-Final OA |
70d |
Pending |
Sep 10, 2021 |
| 17419689 |
METHOD FOR METROLOGY OPTIMIZATION FOR LITHOGRAPHIC SYSTEMS |
KIM, EUNHEE |
2188 |
§103 |
Final Rejection |
— |
AI Ready |
Jun 29, 2021 |
| 17311422 |
APPARATUS AND METHOD FOR GROUPING IMAGE PATTERNS TO DETERMINE WAFER BEHAVIOR IN A PATTERNING PROCESS |
LEE, HWA S |
2877 |
§103 |
Non-Final OA |
55d |
Pending |
Jun 07, 2021 |
| 17277583 |
METROLOGY METHOD AND APPARATUS THEREFOR |
WHITESELL, STEVEN H |
1759 |
§103 |
Non-Final OA |
118d overdue |
Pending |
Mar 18, 2021 |
| 16340702 |
A PROCESSING APPARATUS AND A METHOD FOR CORRECTING A PARAMETER VARIATION ACROSS A SUBSTRATE |
MOORE, KARLA A |
1716 |
§103§112 |
Final Rejection |
— |
Pending |
Apr 10, 2019 |
Prosecution Insights