Prosecution Insights
Last updated: August 16, 2026

ASML Holding N.V.

193 pending office actions • 45 art units • 115 examiners • 22 of 193 (11%) have an AI response strategy ready • 235 patents granted in the last 365 days

Portfolio Summary

193
Total Pending OAs
120
Non-Final OAs
60
Final Rejections
13
Advisory / Quayle

Response Deadline Pressure

Based on the USPTO statutory response window for each pending office action. 62 of the docket's apps have a known mailing date; the rest are excluded from the tile counts.

36
Overdue
2
Due this week
13
Due this month
6
Due in next 60 days
5
Due later

Deadline Fire Line

Every pending office action with a known statutory deadline, placed on a days-until-due axis. Dots left of Today are overdue; the further right, the more runway. Cases that share a deadline window stack vertically. 62 of the docket's apps have a known mailing date.

-30dToday30d60d90d120d
Overdue (36)Due ≤ 7 days (2)Due ≤ 30 days (13)Due ≤ 60 days (6)Due later (5)

Case Difficulty Mix

Difficulty is derived from the rejection statutes on the most recent pending office action. §101-driven and multi-statute cases are graded Hard; §112-only and obviousness-type double-patenting cases are graded Easy; everything else is Medium. "Unknown" means we have not yet parsed a statute for that office action.

103
Hard (53%)
80
Medium (41%)
10
Easy (5%)
0
Unknown (0%)

Rejection Statute Mix

BucketCases
§101 only3 (2%)
§101 + other18 (9%)
§103 only55 (28%)
§102 only22 (11%)
§112 only9 (5%)
Double-patenting only1 (1%)
Double-patenting + other3 (2%)
Multi-statute (no §101)82 (42%)

Industry Mix

How the docket's pending cases split across USPTO tech-center bands.

17
Life Sciences
9% of docket
15
Information Tech
8% of docket
12
Communications
6% of docket
87
Semiconductors
45% of docket
4
Mechanical / Eng
2% of docket
58
Business / Other
30% of docket

Time-on-OA Estimate

Manual office-action response work runs about 10 hours per case. The time-saved bands below show what IP Author's prosecution pipeline typically delivers — a conservative 20% on the low end, 35% in the middle, 50% on the high end.

1,930 h
Manual time on pending OAs
386 h
Time saved (low, 20%)
676 h
Time saved (mid, 35%)
16.9 wks
FTE-weeks freed (mid)

Top Examiners on this docket

ExaminerApps on this docketAllow rateInterview lift
WHITESELL, STEVEN H 10 81.9% +12.9%
PERSAUD, DEORAM 8 76.8% +11.8%
RIDDLE, CHRISTINA A 8 80.8% +13.8%
MCCORMACK, JASON L 8 84.6% +7.9%
ASFAW, MESFIN T 7 82.8% +14.0%
LI, LARRY 5 100.0% +0.0%
KIM, PETER B 4 82.9% +9.3%
WANG, JING 4 100.0% +0.0%
OSENBAUGH-STEWART, ELIZA W 4 73.3% +16.2%
CHOI, JAMES J 4 67.9% +45.1%

Quick Wins (20)

Cases in front of an examiner with an allow rate of 80%+ where the difficulty is Easy or Medium. The top 8 ordered by deadline are shown.

App #TitleExaminerDue in
18842640 APPARATUS AND METHODS FOR FILTERING MEASUREMENT RADIATION WHITESELL, STEVEN H 9d overdue
18515952 Transport System Having a Magnetically Levitated Transportation Stage WHITESELL, STEVEN H 1d overdue
18320157 INSPECTION METHOD AND INSPECTION TOOL MCCORMACK, JASON L 14d
18844478 SETUP AND CONTROL METHODS FOR A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUSES ASFAW, MESFIN T 30d
17922580 SUBSTRATE SUPPORT SYSTEM, LITHOGRAPHIC APPARATUS AND METHOD OF EXPOSING A SUBSTRATE RIDDLE, CHRISTINA A 55d
19008794 APPARATUS AND METHOD FOR PROCESS-WINDOW CHARACTERIZATION ASFAW, MESFIN T
18869304 CABLE SLAB, POSITIONING MODULE AND LITHOGRAPHIC APPARATUS ASFAW, MESFIN T
18911806 CHARGED PARTICLE BEAM APPARATUS WITH MULTIPLE DETECTORS AND METHODS FOR IMAGING MCCORMACK, JASON L

Hard Cases (103)

Multi-statute / §101-driven matters, or cases in front of an examiner with an allow rate under 30%. The top 8 ordered by deadline are shown.

App #TitleExaminerDue in
18565951 INSPECTION DATA FILTERING SYSTEMS AND METHODS BHATNAGAR, ANAND P 100d overdue
17623829 SUB-FIELD CONTROL OF A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUS TAN, ALVIN H 99d overdue
18265431 FEATURE EXTRACTION METHOD FOR EXTRACTING FEATURE VECTORS FOR IDENTIFYING PATTERN OBJECTS LIEW, ALEX KOK SOON 93d overdue
18511454 PROCESS WINDOW BASED ON DEFECT PROBABILITY WHITESELL, STEVEN H 88d overdue
17632632 METHOD AND APPARATUS FOR PHOTOLITHOGRAPHIC IMAGING WHITE, JAY MICHAEL 86d overdue
17794435 CHARGED PARTICLE MANIPULATOR DEVICE OSENBAUGH-STEWART, ELIZA W 72d overdue
18705509 DETERMINING AN ETCH EFFECT BASED ON AN ETCH BIAS DIRECTION ASFAW, MESFIN T 60d overdue
18719902 METHOD AND APPARATUS FOR LITHOGRAPHIC IMAGING KIM, PETER B 53d overdue

Interview Candidates (41)

Cases in front of an examiner whose interview lift is 10 percentage points or more — i.e. interviewed cases historically resolve more favorably than non-interviewed ones. The top 8 ordered by deadline are shown.

App #TitleExaminerDue in
18511454 PROCESS WINDOW BASED ON DEFECT PROBABILITY WHITESELL, STEVEN H 88d overdue
17794435 CHARGED PARTICLE MANIPULATOR DEVICE OSENBAUGH-STEWART, ELIZA W 72d overdue
18705509 DETERMINING AN ETCH EFFECT BASED ON AN ETCH BIAS DIRECTION ASFAW, MESFIN T 60d overdue
18842640 APPARATUS AND METHODS FOR FILTERING MEASUREMENT RADIATION WHITESELL, STEVEN H 9d overdue
18578780 APPARATUS AND METHOD FOR PREPARING AND CLEANING A COMPONENT RIDDLE, CHRISTINA A 2d overdue
18064110 REPLACEABLE MODULE FOR A CHARGED PARTICLE APPARATUS OSENBAUGH-STEWART, ELIZA W 2d overdue
18515952 Transport System Having a Magnetically Levitated Transportation Stage WHITESELL, STEVEN H 1d overdue
17798538 CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD OSENBAUGH-STEWART, ELIZA W 5d

Top Art Units

Art UnitApps
2881 25
2877 20
2882 20
2851 8
1759 7
2878 6
1737 4
1716 3
3723 2
2668 2

Pending Office Actions

App #TitleExaminerArt UnitStatutesStatusDue inAIFiled
19011092 SUBSTRATE HOLDER FOR USE IN A LITHOGRAPHIC APPARATUS WHITESELL, STEVEN H §102§103Other Non-Final OA Pending Jan 06, 2025
19008794 APPARATUS AND METHOD FOR PROCESS-WINDOW CHARACTERIZATION ASFAW, MESFIN T §102 Non-Final OA Pending Jan 03, 2025
19009394 LITHOGRAPHIC APPARATUS AND METHOD PERSAUD, DEORAM §103Other Non-Final OA Pending Jan 03, 2025
18876196 PARAMETERIZED INSPECTION IMAGE SIMULATION CRAWFORD, JACINTA M §103 Non-Final OA Pending Dec 18, 2024
18876559 PROJECTION SYSTEM CONTROL ASFAW, MESFIN T §102§103 Non-Final OA Pending Dec 18, 2024
18876622 A MULTI-PASS RADIATION DEVICE DOUMBIA, MOHAMED 2877 §103§112 Non-Final OA Pending Dec 18, 2024
18876007 ILLUMINATION ADJUSTMENT APPARATUSES AND LITHOGRAPHIC APPARATUSES RIDDLE, CHRISTINA A §102§103§112 Non-Final OA Pending Dec 17, 2024
18875576 CONTROL METHOD AND CONTROL SYSTEM FOR CONTROLLING A POSITION OF AN OBJECT WITH AN ELECTROMAGNETIC ACTUATOR ASFAW, MESFIN T §101§102§103 Non-Final OA Pending Dec 16, 2024
18875601 A PATTERNING DEVICE VOLTAGE BIASING SYSTEM FOR USE IN EUV LITHOGRAPHY RIDDLE, CHRISTINA A §102§103§112 Non-Final OA Pending Dec 16, 2024
18983297 ACTUATOR ASSEMBLIES COMPRISING PIEZO ACTUATORS OR ELECTROSTRICTIVE ACTUATORS WHITESELL, STEVEN H §101§103§112 Non-Final OA Pending Dec 16, 2024
18873597 FOCUS MEASURMENT AND CONTROL IN METROLOGY AND ASSOCIATED WEDGE ARRANGEMENT WHITESELL, STEVEN H §103§112 Non-Final OA Pending Dec 10, 2024
18870089 METROLOGY SYSTEM USING MULTIPLE RADIATION SPOTS COOK, JONATHON 2877 §103§112 Non-Final OA Pending Nov 27, 2024
18962837 CLEANING A STRUCTURE SURFACE IN AN EUV CHAMBER RIDDLE, CHRISTINA A 2882 §102§103Other Non-Final OA Pending Nov 27, 2024
18870245 SYSTEM, APPARATUS AND METHOD FOR SELECTIVE SURFACE TREATMENT PERSAUD, DEORAM 2882 §102§103 Non-Final OA Pending Nov 27, 2024
18960519 CALIBRATION SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE BOOSALIS, FANI POLYZOS §102§103 Non-Final OA Pending Nov 26, 2024
18869304 CABLE SLAB, POSITIONING MODULE AND LITHOGRAPHIC APPARATUS ASFAW, MESFIN T 2882 §103 Non-Final OA Pending Nov 26, 2024
18868801 PLASMA SHIELDING FOR AN ELECTROSTATIC MEMS DEVICE TANINGCO, MARCUS H 2884 §102§103§112 Non-Final OA Pending Nov 25, 2024
18868800 CALIBRATION METHOD AND APPARATUS UNDERWOOD, JARREAS C 2877 §102§103§112 Non-Final OA Pending Nov 25, 2024
18868977 METHOD FOR ALIGNING AN ILLUMINATION-DETECTION SYSTEM OF A METROLOGY DEVICE AND ASSOCIATED METROLOGY DEVICE PERSAUD, DEORAM 2882 §102 Non-Final OA Pending Nov 25, 2024
18867005 METHOD AND SYSTEM FOR REDUCING CHARGING ARTIFACT IN INSPECTION IMAGE BROUGHTON, KATHLEEN M §103 Non-Final OA Pending Nov 19, 2024
18867001 SYSTEM AND METHOD FOR DISTORTION ADJUSTMENT DURING INSPECTION VANCHY JR, MICHAEL J §103 Non-Final OA Pending Nov 18, 2024
18866490 SYSTEM AND METHOD FOR COUNTING PARTICLES ON A DETECTOR DURING INSPECTION MAUPIN, HUGH H §103 Non-Final OA Pending Nov 15, 2024
18861173 MEASUREMENT OF FABRICATION PARAMETERS BASED ON MOIRÉ INTERFERENCE PATTERN COMPONENTS COOK, JONATHON 2877 §102§103 Non-Final OA Pending Oct 28, 2024
18860879 MECHATRONIC SYSTEM CONTROL METHOD, LITHOGRAPHIC APPARATUS CONTROL METHOD AND LITHOGRAPHIC APPARATUS NGUYEN, BAO LONG T §103§112 Non-Final OA Pending Oct 28, 2024
18860248 OPTICAL ARRANGEMENT FOR A METROLOGY SYSTEM BAGHDASARYAN, HOVHANNES §103 Non-Final OA Pending Oct 25, 2024
18859981 PASSIVE INTEGRATED OPTICAL SYSTEMS AND METHODS FOR REDUCTION OF SPATIAL OPTICAL COHERENCE ASFAW, MESFIN T 2882 §102§103 Final Rejection Pending Oct 24, 2024
18859655 MIRROR ASSEMBLY FOR MICROMIRROR ARRAY WHITESELL, STEVEN H 1759 §102§103 Non-Final OA Pending Oct 24, 2024
18859954 SYSTEM AND METHOD FOR IMPROVING IMAGE QUALITY DURING INSPECTION CASCAIS, JUSTIN PHILIP §103Other Non-Final OA Pending Oct 24, 2024
18857065 SYSTEMS, METHODS, AND SOFTWARE FOR MULTILAYER METROLOGY CODRINGTON, SHANE WRENSFORD §102§103§112 Non-Final OA Pending Oct 15, 2024
18856459 A LITHOGRAPHIC APPARATUS, AN INSPECTION SYSTEM, AND A DETECTOR HAVING A SQUARE-CORE FIBER AKANBI, ISIAKA O 2877 §103 Final Rejection Pending Oct 11, 2024
18911806 CHARGED PARTICLE BEAM APPARATUS WITH MULTIPLE DETECTORS AND METHODS FOR IMAGING MCCORMACK, JASON L §103 Non-Final OA Pending Oct 10, 2024
18855565 CONFIGURABLE PRINTED OPTICAL ROUTING FOR PARALLEL OPTICAL DETECTION AKANBI, ISIAKA O 2877 §102 Non-Final OA Pending Oct 09, 2024
18855625 CHARGED-PARTICLE BEAM APPARATUS WITH LARGE FIELD-OF-VIEW AND METHODS THEREOF LI, LARRY §112 Non-Final OA Pending Oct 09, 2024
18908931 Imprint Apparatus with Movable Stages CHIDIAC, NICHOLAS J 1744 §103DPOther Non-Final OA 76d AI Ready Oct 08, 2024
18907436 SENSOR SUBSTRATE, APPARATUS, AND METHOD IPPOLITO, NICOLE MARIE §102 Non-Final OA Pending Oct 04, 2024
18854000 WAFER EDGE INSPECTION OF CHARGED PARTICLE INSPECTION SYSTEM LI, LARRY §112 Non-Final OA Pending Oct 03, 2024
18853923 IMAGING METHOD AND METROLOGY DEVICE KAUR, JASPREET §101§103 Non-Final OA Pending Oct 03, 2024
18890506 CHARGED PARTICLE APPARATUS AND METHOD MCCORMACK, JASON L §102§103§112 Non-Final OA Pending Sep 19, 2024
18848095 ILLUMINATION ARRANGEMENT FOR A METROLOGY DEVICE AND ASSOCIATED METHOD AMARA, MOHAMED K 2877 §102 Final Rejection 22d AI Ready Sep 17, 2024
18848085 A METHOD FOR DETERMINING A VERTICAL POSITION OF A STRUCTURE ON A SUBSTRATE AND ASSOCIATED APPARATUSES AHMED, JAMIL 2877 §102 Non-Final OA 9d overdue AI Ready Sep 17, 2024
18882681 FULLY AUTOMATED SEM SAMPLING SYSTEM FOR E-BEAM IMAGE ENHANCEMENT HSIEH, PING Y §103Other Non-Final OA Pending Sep 11, 2024
18844478 SETUP AND CONTROL METHODS FOR A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUSES ASFAW, MESFIN T 2882 §102 Final Rejection 30d Pending Sep 06, 2024
18844195 EUV Light Source Target Metrology MCCORMACK, JASON L §103§112 Non-Final OA Pending Sep 05, 2024
18843138 INSPECTION APPARATUS, LINEARLY MOVABLE BEAM DISPLACER, AND METHOD AYUB, HINA F 2877 §102§103 Non-Final OA Pending Aug 30, 2024
18842640 APPARATUS AND METHODS FOR FILTERING MEASUREMENT RADIATION WHITESELL, STEVEN H 1759 §103 Final Rejection 9d overdue AI Ready Aug 29, 2024
18818079 LASER SYSTEM FOR TARGET METROLOGY AND ALTERATION IN AN EUV LIGHT SOURCE VANORE, DAVID A §102 Non-Final OA Pending Aug 28, 2024
18808844 Metrology Apparatus And Method For Determining A Characteristic Of One Or More Structures On A Substrate ITSKOVICH, MIKHAIL 2483 §103 Non-Final OA Pending Aug 19, 2024
18838459 SYSTEMS AND METHODS FOR DEFECT LOCATION BINNING IN CHARGED-PARTICLE SYSTEMS ANYIKIRE, CHIKAODILI E §102 Non-Final OA Pending Aug 14, 2024
18838135 INSPECTION TOOL AND BARRIER FOR USE THEREIN HANSEN, JONATHAN M 2877 §102§103 Final Rejection 9d AI Ready Aug 13, 2024
18837576 IMAGE ANALYSIS BASED ON ADAPTIVE WEIGHTING OF TEMPLATE CONTOURS BEKELE, MEKONEN T §102§103 Non-Final OA Pending Aug 09, 2024
18835287 INSPECTION APPARATUS, MOTORIZED APERTURES, AND METHOD BACKGROUND KIM, PETER B 2882 §102§103 Non-Final OA 11d overdue Pending Aug 01, 2024
18790520 EUV LITHOGRAPHY SYSTEM HAVING A GAS-BINDING COMPONENT PERSAUD, DEORAM 2882 §102§103 Final Rejection Pending Jul 31, 2024
18834970 METROLOGY METHOD AND ASSOCIATED METROLOGY DEVICE GARCIA, SANTIAGO §102 Non-Final OA Pending Jul 31, 2024
18834131 FIELD OF VIEW SELECTION FOR METROLOGY ASSOCIATED WITH SEMICONDUCTOR MANUFACTURING LANTZ, KARSTEN FOSTER 2664 §103 Non-Final OA Pending Jul 29, 2024
18834171 METROLOGY METHOD AND ASSOCIATED METROLOGY DEVICE TRAN, MAI THI NGOC §102§103 Non-Final OA Pending Jul 29, 2024
18724495 OBJECT HOLDER, LITHOGRAPHIC APPARATUS COMPRISING SUCH OBJECT HOLDER AND METHODS FOR AN OBJECT HOLDER NGUYEN, DANNY 2838 §103 Final Rejection Pending Jun 26, 2024
18724551 ELEMENT OF AN AFM TOOL SMITH, DAVID E §103§112 Non-Final OA Pending Jun 26, 2024
18751031 SYSTEMS AND METHODS OF CLEANING ELECTRON SOURCES IN CHARGED-PARTICLE BEAM SYSTEMS SMYTH, ANDREW P §102§103 Non-Final OA Pending Jun 21, 2024
18748694 METHOD OF PROCESSING A SAMPLE, AND CHARGED PARTICLE ASSESSMENT SYSTEM MCCORMACK, JASON L §112 Non-Final OA Pending Jun 20, 2024
18720941 SUBSTRATE COMPRISING A TARGET ARRANGEMENT, ASSOCIATED PATTERNING DEVICE AND METROLOGY METHOD HANSEN, JONATHAN M 2877 §102§103 Non-Final OA Pending Jun 17, 2024
18719902 METHOD AND APPARATUS FOR LITHOGRAPHIC IMAGING KIM, PETER B 2882 §102§103 Final Rejection 53d overdue Pending Jun 14, 2024
18742934 CHARGED-PARTICLE APPARATUS, MULTI-DEVICE APPARATUS, METHOD OF USING CHARGED-PARTICLE APPARATUS AND CONTROL METHOD IPPOLITO, NICOLE MARIE §112 Non-Final OA Pending Jun 13, 2024
18741204 CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD IPPOLITO, NICOLE MARIE §112 Non-Final OA Pending Jun 12, 2024
18716468 APERTURE AND METHOD GASSEN, CHRISTOPHER J §102§103§112 Non-Final OA Pending Jun 04, 2024
18716007 TARGET ASYMMETRY MEASUREMENT FOR SUBSTRATE ALIGNMENT IN LITHOGRAPHY SYSTEMS PEREZ-GUZMAN, CARLOS GABRIEL §102§103 Non-Final OA Pending Jun 03, 2024
18716117 A FRAMEWORK FOR CONDITION TUNING AND IMAGE PROCESSING FOR METROLOGY APPLICATIONS SUN, JIANGENG 2671 §102§103§112 Non-Final OA Pending Jun 03, 2024
18674282 PLATFORM FOR CHARGED PARTICLE APPARATUS AND COMPONENTS WITHIN A CHARGED PARTICLE APPARATUS WANG, JING §102§103§112 Non-Final OA Pending May 24, 2024
18712765 IDENTIFYING DEVIATING MODULES FROM A REFERENCE POPULATION FOR MACHINE DIAGNOSTICS AGRAWAL, SHISHIR §103 Non-Final OA Pending May 23, 2024
18713127 THERMAL CONTROL SYSTEMS, MODELS, AND MANUFACTURING PROCESSES IN LITHOGRAPHY HARTMAN JR, RONALD D §103 Non-Final OA Pending May 23, 2024
18713108 CHARGED-PARTICLE BEAM APPARATUS FOR VOLTAGE-CONTRAST INSPECTION AND METHODS THEREOF NAVARRO, HUGO IVAN 2858 §103§112 Non-Final OA 45d overdue AI Ready May 23, 2024
18709792 VALVES WITH REDUCED PARTICLE GENERATION AND INCREASED CYCLE LIFE BASTIANELLI, JOHN 3753 §102§103 Non-Final OA 56d AI Ready May 13, 2024
18661389 ALIGNING A DISTORTED IMAGE NGUYEN, KIET TUAN 2881 §102 Non-Final OA Pending May 10, 2024
18707651 A LIQUID TARGET MATERIAL SUPPLYING APPARATUS, FUEL EMITTER, RADIATION SOURCE, LITHOGRAPHIC APPARATUS, AND LIQUID TARGET MATERIAL SUPPLYING METHOD LI, LARRY 2881 §103§112 Non-Final OA Pending May 06, 2024
18706592 WAFER EDGE INSPECTION OF CHARGED PARTICLE INSPECTION SYSTEM LI, LARRY 2881 §112 Non-Final OA Pending May 01, 2024
18705509 DETERMINING AN ETCH EFFECT BASED ON AN ETCH BIAS DIRECTION ASFAW, MESFIN T 2882 §101§102 Final Rejection 60d overdue Pending Apr 26, 2024
18703486 GENERATING AUGMENTED DATA TO TRAIN MACHINE LEARNING MODELS TO PRESERVE PHYSICAL TRENDS CODRINGTON, SHANE WRENSFORD §103 Non-Final OA Pending Apr 22, 2024
18639657 DETECTOR ASSEMBLY, CHARGED PARTICLE DEVICE, APPARATUS, AND METHODS MCCORMACK, JASON L 2881 §112 Non-Final OA Pending Apr 18, 2024
18700125 ELECTRICAL CONNECTOR FOR HIGH POWER IN A VACUUM ENVIRONMENT AND METHOD NGUYEN, THANG H §103 Non-Final OA Pending Apr 10, 2024
18699358 LITHOGRAPHIC APPARATUS AND ASSOCIATED METHODS RIDDLE, CHRISTINA A 2882 §102§103 Final Rejection 28d Pending Apr 08, 2024
18618957 CHARGED PARTICLE APPARATUS AND METHOD WANG, JING 2881 §103§112 Final Rejection 13d AI Ready Mar 27, 2024
18691828 SYSTEM AND METHOD FOR INSPECTION BY FAILURE MECHANISM CLASSIFICATION AND IDENTIFICATION IN A CHARGED PARTICLE SYSTEM WANG, JING 2881 §103 Final Rejection Pending Mar 13, 2024
18690873 OPTICAL MODULE FOR EXTREME ULTRAVIOLET LIGHT SOURCE RICKEL, ALEX PARK 2881 §103§112 Non-Final OA Pending Mar 11, 2024
18691002 SOURCE SELECTION MODULE AND ASSOCIATED METROLOGY AND LITHOGRAPHIC APPARATUSES MENDOZA, ALEXANDRIA ARELLANO 2877 §103 Final Rejection 121d overdue Pending Mar 11, 2024
18596467 PATTERNING DEVICE DEFECT DETECTION SYSTEMS AND METHODS KALISZEWSKI, ALINA ROSE 2881 §102§103 Final Rejection Pending Mar 05, 2024
18596540 SEM IMAGE ENHANCEMENT MCCORMACK, JASON L 2881 §102 Non-Final OA Pending Mar 05, 2024
18687727 THERMAL CONDITIONING UNIT, SUBSTRATE HANDLING DEVICE AND LITHOGRAPHIC APPARATUS PERSAUD, DEORAM 2882 §102§103 Non-Final OA Pending Feb 28, 2024
18686742 METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHOD STOCK JR, GORDON J 2877 DP Non-Final OA 42d overdue Pending Feb 26, 2024
18684558 METHOD FOR CONVERTING METROLOGY DATA WASAFF, JOHN S. §101§102§103 Non-Final OA Pending Feb 16, 2024
18684391 COMPENSATING OPTICAL SYSTEM FOR NONUNIFORM SURFACES, A METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF STOCK JR, GORDON J 2877 §102§103 Final Rejection 43d overdue Pending Feb 16, 2024
18291534 METROLOGY METHOD AND METROLOGY DEVICE SMITH, MAURICE C §102 Non-Final OA Pending Jan 23, 2024
18578947 LITHOGRAPHY SYSTEM, SUBSTRATE SAG COMPENSATOR, AND METHOD PERSAUD, DEORAM 2882 §103 Non-Final OA Pending Jan 12, 2024
18578780 APPARATUS AND METHOD FOR PREPARING AND CLEANING A COMPONENT RIDDLE, CHRISTINA A 2882 §102§103§112 Final Rejection 2d overdue Pending Jan 12, 2024
18578299 METHOD FOR GENERATING MASK PATTERN WALKE, AMANDA C §103 Non-Final OA Pending Jan 10, 2024
18577678 IMAGE DISTORTION CORRECTION IN CHARGED PARTICLE INSPECTION LAM, ANDREW H 2682 §103 Non-Final OA 40d AI Ready Jan 08, 2024
18407323 METHOD FOR DECOUPLING SOURCES OF VARIATION RELATED TO SEMICONDUCTOR MANUFACTURING CHOI, ALICIA M 2117 §101 Final Rejection Pending Jan 08, 2024
18576266 DROPLET DETECTION METROLOGY UTILIZING METROLOGY BEAM SCATTERING BRYANT, REBECCA CAROLE 2877 §102§103 Non-Final OA Pending Jan 03, 2024
18402585 CHARGED PARTICLE-OPTICAL DEVICE, CHARGED PARTICLE APPARATUS AND METHOD WANG, JING 2881 §103§112 Non-Final OA Pending Jan 02, 2024
18397896 CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD OF ALIGNING A SAMPLE IN A CHARGED PARTICLE ASSESSMENT SYSTEM STOFFA, WYATT A 2881 §102§112 Final Rejection 31d overdue AI Ready Dec 27, 2023
18571649 METROLOGY METHOD AND DEVICE WALKE, AMANDA C §102 Non-Final OA Pending Dec 18, 2023
18571118 METHOD OF DETERMINING A CORRECTION FOR AT LEAST ONE CONTROL PARAMETER IN A SEMICONDUCTOR MANUFACTURING PROCESS YANCHUS III, PAUL B 2115 §101§102§103 Non-Final OA 1d overdue Pending Dec 15, 2023
18570140 STRUCTURES FOR USE ON A SUBSTRATE HOLDER, SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS AND METHOD KIM, PETER B 2882 §102§103 Final Rejection 8d Pending Dec 14, 2023
18570289 AN ILLUMINATION SOURCE AND ASSOCIATED METHOD APPARATUS KIM, PETER B 2876 §102§103 Non-Final OA Pending Dec 14, 2023
18569484 HOLDING DEVICE FOR HOLDING A STRUCTURAL PART AND METHOD FOR MANUFACTURING THE HOLDING DEVICE SHUM, KENT N 3723 §102§103§112 Non-Final OA Pending Dec 12, 2023
18533662 OBJECT TABLE, A STAGE APPARATUS AND A LITHOGRAPHIC APPARATUS WHITESELL, STEVEN H 1759 §102§103§112 Final Rejection Pending Dec 08, 2023
18567053 METHOD AND ARRANGEMENT FOR DETERMINING THERMALLY-INDUCED DEFORMATIONS PERSAUD, DEORAM 2882 §101§102§103 Final Rejection 28d Pending Dec 05, 2023
18530109 CHARGED PARTICLE APPARATUS AND METHOD OSENBAUGH-STEWART, ELIZA W 2881 §102§103§112 Non-Final OA Pending Dec 05, 2023
18565759 METHOD FOR GENERATING ASSIST FEATURES USING MACHINE LEARNING MODEL HARPER, ELIYAH STONE §102 Non-Final OA Pending Nov 30, 2023
18565951 INSPECTION DATA FILTERING SYSTEMS AND METHODS BHATNAGAR, ANAND P 2668 §101 Final Rejection 100d overdue Pending Nov 30, 2023
18565494 ETCHING SYSTEMS, MODELS, AND MANUFACTURING PROCESSES DINH, PAUL §102§103 Non-Final OA Pending Nov 29, 2023
18563841 MANIPULATION OF CARRIER TRANSPORT BEHAVIOR IN DETECTOR STOFFA, WYATT A 2881 §102 Non-Final OA Pending Nov 22, 2023
18517642 CHARGED PARTICLE DEVICE AND METHOD LI, LARRY 2881 §103 Non-Final OA Pending Nov 22, 2023
18515952 Transport System Having a Magnetically Levitated Transportation Stage WHITESELL, STEVEN H 1759 §103 Final Rejection 1d overdue Pending Nov 21, 2023
18561892 METROLOGY MEASUREMENT METHOD AND APPARATUS RIZVI, AKBAR HASSAN §101§102§103 Non-Final OA Pending Nov 17, 2023
18511454 PROCESS WINDOW BASED ON DEFECT PROBABILITY WHITESELL, STEVEN H 1759 §101 Final Rejection 88d overdue Pending Nov 16, 2023
18559942 DIFFRACTION GRATING FOR MEASUREMENTS IN EUV-EXPOSURE APPARATUSES CARLSON, JOSHUA MICHAEL 2877 §103§112 Final Rejection Pending Nov 09, 2023
18289765 METROLOGY METHOD AND ASSOCIATED METROLOGY TOOL STOCK JR, GORDON J 2800 §102 Non-Final OA Pending Nov 07, 2023
18289112 HYBRID PHOTORESIST COMPOSITION FOR EXTREME ULTRAVIOLET PHOTOLITHOGRAPHY APPLICATIONS CHU, JOHN S Y §112 Non-Final OA Pending Oct 31, 2023
18287613 CAUSAL CONVOLUTION NETWORK FOR PROCESS CONTROL ALAM, MOHAMMED §103 Non-Final OA Pending Oct 19, 2023
18287166 METHOD FOR DETERMINING A STOCHASTIC METRIC RELATING TO A LITHOGRAPHIC PROCESS ADAMS, EILEEN M 2481 §103 Final Rejection Pending Oct 16, 2023
18286485 SURFACE TREATMENT DEVICE AND METHOD JUNG, MICHAEL YOO LIM 2817 §102§103§112 Non-Final OA Pending Oct 11, 2023
18284839 ON SYSTEM SELF-DIAGNOSIS AND SELF-CALIBRATION TECHNIQUE FOR CHARGED PARTICLE BEAM SYSTEMS VANORE, DAVID A 2878 §101§112 Final Rejection 28d AI Ready Sep 28, 2023
18475068 METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF CARBON, METHOD OF FORMING A PATTERNED LAYER OF MATERIAL POWERS, LAURA C 1785 §112 Final Rejection Pending Sep 26, 2023
18369619 FLOOD COLUMN AND CHARGED PARTICLE APPARATUS CHOI, JAMES J 2878 §103 Final Rejection 83d AI Ready Sep 18, 2023
18282305 METHOD AND SYSTEM FOR PREDICTING PROCESS INFORMATION WITH A PARAMETERIZED MODEL GARBOWSKI, LEIGH M §102§112 Non-Final OA Pending Sep 15, 2023
18281519 A METHOD FOR MODELING MEASUREMENT DATA OVER A SUBSTRATE AREA AND ASSOCIATED APPARATUSES NGUYEN, NHA T §103 Non-Final OA Pending Sep 11, 2023
18280266 DATA FILTER FOR SCANNING METROLOGY MANG, LAL C 2857 §101§103 Non-Final OA Pending Sep 04, 2023
18278881 METHOD OF PATTERN SELECTION FOR A SEMICONDUCTOR MANUFACTURING RELATED PROCESS TAT, BINH C §102 Non-Final OA Pending Aug 25, 2023
18233263 METHOD AND SYSTEM TO MONITOR A PROCESS APPARATUS PERSAUD, DEORAM 2882 §101§102Other Final Rejection 12d Pending Aug 11, 2023
18276018 A MACHINE LEARNING MODEL USING TARGET PATTERN AND REFERENCE LAYER PATTERN TO DETERMINE OPTICAL PROXIMITY CORRECTION FOR MASK SALEH, ZAID MUHAMMAD 2668 §102§103 Non-Final OA 14d Pending Aug 04, 2023
18276014 METHOD TO PREDICT METROLOGY OFFSET OF A SEMICONDUCTOR MANUFACTURING PROCESS NGUYEN, NHA T §102§103 Non-Final OA Pending Aug 04, 2023
18365130 PATTERN GROUPING METHOD BASED ON MACHINE LEARNING BALI, VIKKRAM 2663 §103DPOther Non-Final OA AI Ready Aug 03, 2023
18262511 A METHOD AND SYSTEM FOR PREDICTING ABERRATIONS IN A PROJECTION SYSTEM REVERMAN, CHAD ANDREW 2877 §103 Final Rejection Pending Jul 21, 2023
18259344 MODULAR AUTOENCODER MODEL FOR MANUFACTURING PROCESS PARAMETER ESTIMATION ALSHAHARI, SADIK AHMED 2121 §101§103§112Other Final Rejection 1d overdue AI Ready Jun 26, 2023
18213765 ELECTRON-OPTICAL DEVICE CHOI, JAMES J 2878 §103 Non-Final OA Pending Jun 23, 2023
18256865 CHARGED-PARTICLE BEAM APPARATUS WITH BEAM-TILT AND METHODS THEREOF MCCORMACK, JASON L 2881 §103 Non-Final OA Pending Jun 09, 2023
18331866 APPARATUS AND METHOD FOR DIRECTING CHARGED PARTICLE BEAM TOWARDS A SAMPLE SMITH, DAVID E 2881 §103 Final Rejection 54d AI Ready Jun 08, 2023
18265606 METHOD OF METROLOGY AND ASSOCIATED APPARATUSES WHITESELL, STEVEN H 1759 §103 Non-Final OA Pending Jun 06, 2023
18265431 FEATURE EXTRACTION METHOD FOR EXTRACTING FEATURE VECTORS FOR IDENTIFYING PATTERN OBJECTS LIEW, ALEX KOK SOON 2674 §102§103 Non-Final OA 93d overdue Pending Jun 05, 2023
18039712 A METHOD OF MONITORING A LITHOGRAPHIC PROCESS LE, JOHN H 2857 §101§102 Non-Final OA 5d Pending May 31, 2023
18203172 INTERFEROMETER SYSTEM, METHOD OF DETERMINING A MODE HOP OF A LASER SOURCE OF AN INTERFEROMETER SYSTEM, METHOD OF DETERMINING A POSITION OF A MOVABLE OBJECT, AND LITHOGRAPHIC APPARATUS LYONS, MICHAEL A 2877 §102§103§112 Non-Final OA 8d overdue Pending May 30, 2023
18038206 SEMICONDUCTOR CHARGED PARTICLE DETECTOR FOR MICROSCOPY STOFFA, WYATT A 2881 §103§112 Non-Final OA 71d Pending May 22, 2023
18320157 INSPECTION METHOD AND INSPECTION TOOL MCCORMACK, JASON L 2881 §103 Final Rejection 14d AI Ready May 18, 2023
18035286 METHOD OF DETERMINING MARK STRUCTURE FOR OVERLAY FINGERPRINTS ALAM, MOHAMMED 2851 §102 Non-Final OA Pending May 03, 2023
18305925 LITHOGRAPHIC APPARATUS, METHOD FOR UNLOADING A SUBSTRATE AND METHOD FOR LOADING A SUBSTRATE SAENZ, ALBERTO 3723 §103Other Final Rejection Pending Apr 24, 2023
18033028 A METHOD FOR MODELING MEASUREMENT DATA OVER A SUBSTRATE AREA AND ASSOCIATED APPARATUSES CHAVEZ, ANTHONY RAY §101§102§103§112 Non-Final OA Pending Apr 20, 2023
18031865 METHOD FOR GENERATING MASK PATTERN LEE, ERIC D 2851 §102 Final Rejection 36d overdue Pending Apr 13, 2023
18123210 OBJECTIVE LENS ARRAY ASSEMBLY, ELECTRON-OPTICAL SYSTEM, ELECTRON-OPTICAL SYSTEM ARRAY, METHOD OF FOCUSING, OBJECTIVE LENS ARRANGEMENT CHOI, JAMES J 2878 §103 Non-Final OA Pending Mar 17, 2023
18025636 VACUUM SYSTEM FOR MITIGATING DAMAGE DUE TO A VACUUM PUMP MALFUNCTION COMLEY, ALEXANDER BRYANT 3746 §102§112 Final Rejection 3d overdue Pending Mar 09, 2023
18021537 CHARGED-PARTICLE INSPECTION APPARATUS MCDONALD, RODNEY GLENN 1794 §103 Final Rejection AI Ready Feb 15, 2023
18018034 SYSTEMS, PRODUCTS, AND METHODS FOR IMAGE-BASED PATTERN SELECTION NGUYEN, NHA T 2851 §102§103 Non-Final OA Pending Jan 25, 2023
18016811 METHOD AND APPARATUS FOR IDENTIFYING CONTAMINATION IN A SEMICONDUCTOR FAB GASSEN, CHRISTOPHER J 2881 §102§103§112 Non-Final OA 43d overdue Pending Jan 18, 2023
18015162 METHOD AND APPARATUS FOR CONCEPT DRIFT MITIGATION TANK, ANDREW L 2141 §102§103 Final Rejection Pending Jan 09, 2023
18015313 APPARATUS AND METHOD FOR SELECTING INFORMATIVE PATTERNS FOR TRAINING MACHINE LEARNING MODELS LU, ZHIYU 2665 §103 Final Rejection 84d Pending Jan 09, 2023
18014431 METHOD OF DETERMINING A CORRECTION STRATEGY IN A SEMICONDUCTOR MANUFACTURING PROCESS AND ASSOCIATED APPARATUSES PAN, YUHUI R 2116 §103 Final Rejection 13d Pending Jan 04, 2023
18091716 METHOD FOR DETERMINING AN ETCH PROFILE OF A LAYER OF A WAFER FOR A SIMULATION SYSTEM TAT, BINH C 2851 §102Other Non-Final OA Pending Dec 30, 2022
18013636 METHOD FOR CLASSIFYING SEMICONDUCTOR WAFERS TRAN, DANIEL DUC 2147 §101§103§112 Final Rejection Pending Dec 29, 2022
18064110 REPLACEABLE MODULE FOR A CHARGED PARTICLE APPARATUS OSENBAUGH-STEWART, ELIZA W 2881 §102§103§112 Non-Final OA 2d overdue AI Ready Dec 09, 2022
17924626 SYSTEMS, PRODUCTS, AND METHODS FOR GENERATING PATTERNING DEVICES AND PATTERNS THEREFOR ALAWDI, ANWER AHMED 2851 §102§103 Final Rejection 53d overdue Pending Nov 10, 2022
17922768 OPTICAL ELEMENT AND PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS ANGEBRANNDT, MARTIN J 1737 §102§103 Final Rejection 28d Pending Nov 01, 2022
17922580 SUBSTRATE SUPPORT SYSTEM, LITHOGRAPHIC APPARATUS AND METHOD OF EXPOSING A SUBSTRATE RIDDLE, CHRISTINA A 2882 §103 Final Rejection 55d Pending Oct 31, 2022
17968352 SEPARATION OF CONTRIBUTIONS TO METROLOGY DATA LIN, ARIC 2851 §103 Non-Final OA Pending Oct 18, 2022
17964783 ENERGY BAND-PASS FILTERING FOR IMPROVED HIGH LANDING ENERGY BACKSCATTERED CHARGED PARTICLE IMAGE RESOLUTION SMITH, DAVID E 2881 §102§103 Non-Final OA Pending Oct 12, 2022
17918087 PROCESSING REFERENCE DATA FOR WAFER INSPECTION DULANEY, KATHLEEN YUAN 2666 §102 Non-Final OA Pending Oct 10, 2022
17952129 FLOOD COLUMN, CHARGED PARTICLE TOOL AND METHOD FOR CHARGED PARTICLE FLOODING OF A SAMPLE CHOI, JAMES J 2878 §103 Non-Final OA Pending Sep 23, 2022
17941897 APERTURE BODY, FLOOD COLUMN AND CHARGED PARTICLE TOOL KALISZEWSKI, ALINA ROSE 2881 §102§103 Non-Final OA AI Ready Sep 09, 2022
17909352 BEAM ARRAY GEOMETRY OPTIMIZER FOR MULTI-BEAM INSPECTION SYSTEM KALISZEWSKI, ALINA ROSE 2881 §103 Final Rejection AI Ready Sep 02, 2022
17891961 INSPECTION APPARATUS CHANG, HANWAY 2878 §102§103 Final Rejection Pending Aug 19, 2022
17799806 SYSTEMS AND METHODS FOR PROCESS METRIC AWARE PROCESS CONTROL PATEL, DHRUVKUMAR 2119 §102§103 Final Rejection 9d overdue Pending Aug 15, 2022
17886348 MASK DEFECT DETECTION RIDDLE, CHRISTINA A 2882 §103§112 Non-Final OA Pending Aug 11, 2022
17798538 CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD OSENBAUGH-STEWART, ELIZA W 2881 §103 Final Rejection 5d Pending Aug 09, 2022
17796434 DETERMINING LITHOGRAPHIC MATCHING PERFORMANCE ALAWDI, ANWER AHMED 2851 §103 Final Rejection 125d overdue Pending Jul 29, 2022
17796641 METROLOGY METHOD AND DEVICE FOR MEASURING A PERIODIC STRUCTURE ON A SUBSTRATE RUSH, ERIC 2677 §103§112 Non-Final OA 31d overdue AI Ready Jul 29, 2022
17794435 CHARGED PARTICLE MANIPULATOR DEVICE OSENBAUGH-STEWART, ELIZA W 2881 §102§103§112 Non-Final OA 72d overdue Pending Jul 21, 2022
17792464 PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS ANGEBRANNDT, MARTIN J 1737 §102§103§112Other Final Rejection 33d Pending Jul 13, 2022
17780287 METHOD AND SYSTEM FOR ENHANCING TARGET FEATURES OF A PATTERN IMAGED ONTO A SUBSTRATE ALAWDI, ANWER AHMED 2851 §103 Final Rejection 3d overdue Pending May 26, 2022
17638472 SEMICONDUCTOR DEVICE GEOMETRY METHOD AND SYSTEM COLE, BRANDON S 2128 §101§103 Non-Final OA 30d overdue Pending Feb 25, 2022
17632632 METHOD AND APPARATUS FOR PHOTOLITHOGRAPHIC IMAGING WHITE, JAY MICHAEL 2188 §101§102§112 Final Rejection 86d overdue Pending Feb 03, 2022
17631557 METHOD FOR TRAINING MACHINE LEARNING MODEL FOR IMPROVING PATTERNING PROCESS CRUZ, IRIANA 2681 §103 Final Rejection Pending Jan 31, 2022
17623829 SUB-FIELD CONTROL OF A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUS TAN, ALVIN H 2118 §103§112 Non-Final OA 99d overdue Pending Dec 29, 2021
17607701 A PATTERNING DEVICE ANGEBRANNDT, MARTIN J 1737 §103 Non-Final OA 103d overdue Pending Oct 29, 2021
17471363 MACHINE-LEARNING BASED DEFECT IDENTIFICATION DULANEY, BENJAMIN O 2683 §102§103 Non-Final OA 70d Pending Sep 10, 2021
17431226 GAUGE SELECTION FOR MODEL CALIBRATION MIRABITO, MICHAEL PAUL 2187 §101§103 Final Rejection Pending Aug 16, 2021
17419689 METHOD FOR METROLOGY OPTIMIZATION FOR LITHOGRAPHIC SYSTEMS KIM, EUNHEE 2188 §103§112 Non-Final OA AI Ready Jun 29, 2021
17311422 APPARATUS AND METHOD FOR GROUPING IMAGE PATTERNS TO DETERMINE WAFER BEHAVIOR IN A PATTERNING PROCESS LEE, HWA S 2877 §103 Non-Final OA 55d Pending Jun 07, 2021
16971012 METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF MATERIAL KACKAR, RAM N 1716 §103 Non-Final OA 4d overdue Pending Aug 19, 2020
16340702 A PROCESSING APPARATUS AND A METHOD FOR CORRECTING A PARAMETER VARIATION ACROSS A SUBSTRATE MOORE, KARLA A 1716 §103§112 Final Rejection Pending Apr 10, 2019
16340771 METHODS & APPARATUS FOR CONTROLLING AN INDUSTRIAL PROCESS LINDSAY, BERNARD G 2119 §103 Non-Final OA 28d overdue Pending Apr 10, 2019
18562685 METROLOGY SYSTEMS, TEMPORAL AND SPATIAL COHERENCE SCRAMBLER AND METHODS THEREOF SULLIVAN, CALEEN O §102§103 Non-Final OA Pending Nov 20, 2023
18376237 APPARATUS AND METHOD FOR DETERMINING A CONDITION ASSOCIATED WITH A PELLICLE RIDDLE, CHRISTINA A 2882 §103DP Final Rejection Pending Oct 03, 2023
18280459 DIGITAL HOLOGRAPHIC MICROSCOPE AND ASSOCIATED METROLOGY METHOD HANSEN, JONATHAN M 2877 §102§103 Non-Final OA 50d overdue Pending Sep 05, 2023
17912202 SYSTEMS AND METHODS FOR FORMING STRUCTURES ON A SURFACE CHACKO DAVIS, DABORAH 1737 §102§103§112 Final Rejection 44d overdue Pending Sep 16, 2022
17791641 LITHOGRAPHIC APPARATUS AND METHOD FOR DRIFT COMPENSATION WHITESELL, STEVEN H 1759 §103 Final Rejection Pending Jul 08, 2022
17438021 ELECTROSTATIC CLAMP FOR A LITHOGRAPHIC APPARATUS NUCKOLS, TIFFANY Z 1716 §103 Non-Final OA Pending Sep 10, 2021

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