Prosecution Insights
Last updated: October 10, 2026

ASML Holding N.V.

Technology area: Semiconductors, Circuits & Optics

195 pending office actions • 42 art units • 116 examiners • 18 of 195 (9%) have an AI response strategy ready • 230 patents granted in the last 365 days

Analysis

ASML Holding N.V. is currently navigating 202 pending office actions within the Semiconductors, Circuits & Optics technology area. These actions are distributed among 120 distinct examiners and 43 distinct art units. This indicates a high volume of activity across a wide range of technical classifications and individual examiners. DEORAM PERSAUD is the busiest examiner for the company, currently overseeing 10 pending office actions. While this is a significant number for one person, it represents only a small portion of the 202 total pending actions.

The involvement of 43 distinct art units highlights the complexity and breadth of the company's semiconductor and optics innovations. With 120 distinct examiners, the company must manage a vast array of individual prosecution styles and preferences. This broad distribution across 43 distinct art units suggests that the company's intellectual property touches on many different specialized facets of semiconductor technology. DEORAM PERSAUD is the most frequent point of contact, but the majority of the 120 distinct examiners are handling far fewer than 10 pending office actions each.

Written from this page's own data; every figure is computed from USPTO records and verified before publication.

Portfolio Summary

195
Total Pending OAs
122
Non-Final OAs
60
Final Rejections
13
Advisory / Quayle

Response Deadline Pressure

Based on the USPTO statutory response window for each pending office action. 59 of the docket's apps have a known mailing date; the rest are excluded from the tile counts.

38
Overdue
1
Due this week
9
Due this month
7
Due in next 60 days
4
Due later

Deadline Fire Line

Every pending office action with a known statutory deadline, placed on a days-until-due axis. Dots left of Today are overdue; the further right, the more runway. Cases that share a deadline window stack vertically. 59 of the docket's apps have a known mailing date.

-30dToday30d60d90d120d
Overdue (38)Due ≤ 7 days (1)Due ≤ 30 days (9)Due ≤ 60 days (7)Due later (4)

Case Difficulty Mix

Difficulty is derived from the rejection statutes on the most recent pending office action. §101-driven and multi-statute cases are graded Hard; §112-only and obviousness-type double-patenting cases are graded Easy; everything else is Medium. "Unknown" means we have not yet parsed a statute for that office action.

110
Hard (56%)
78
Medium (40%)
7
Easy (4%)
0
Unknown (0%)

Rejection Statute Mix

BucketCases
§101 only4 (2%)
§101 + other23 (12%)
§103 only56 (29%)
§102 only20 (10%)
§112 only6 (3%)
Double-patenting only1 (1%)
Double-patenting + other2 (1%)
Multi-statute (no §101)83 (43%)

Industry Mix

How the docket's pending cases split across USPTO tech-center bands.

20
Life Sciences
10% of docket
12
Information Tech
6% of docket
12
Communications
6% of docket
80
Semiconductors
41% of docket
4
Mechanical / Eng
2% of docket
67
Business / Other
34% of docket

Time-on-OA Estimate

Manual office-action response work runs about 10 hours per case. The time-saved bands below show what IP Author's prosecution pipeline typically delivers — a conservative 20% on the low end, 35% in the middle, 50% on the high end.

1,950 h
Manual time on pending OAs
390 h
Time saved (low, 20%)
682 h
Time saved (mid, 35%)
17.1 wks
FTE-weeks freed (mid)

Top Examiners on this docket

ExaminerApps on this docketAllow rateInterview lift
PERSAUD, DEORAM 11 77.1% +11.8%
WHITESELL, STEVEN H 10 82.0% +12.9%
MCCORMACK, JASON L 7 84.6% +8.1%
RIDDLE, CHRISTINA A 6 81.0% +13.9%
ASFAW, MESFIN T 5 83.1% +13.9%
KIM, PETER B 5 83.0% +9.5%
SMITH, DAVID E 5 85.2% +7.0%
LI, LARRY 5 100.0% +0.0%
WANG, JING 5 100.0% +0.0%
HANSEN, JONATHAN M 4 79.3% +11.6%

Quick Wins (21)

Cases in front of an examiner with an allow rate of 80%+ where the difficulty is Easy or Medium. The top 8 ordered by deadline are shown.

App #TitleExaminerDue in
17277583 METROLOGY METHOD AND APPARATUS THEREFOR WHITESELL, STEVEN H 118d overdue
17874582 COMPUTATIONAL METROLOGY BASED CORRECTION AND CONTROL WHITESELL, STEVEN H 66d overdue
18568628 CHARGED PARTICLE DETECTOR ASSEMBLY SMITH, DAVID E 42d overdue
18842640 APPARATUS AND METHODS FOR FILTERING MEASUREMENT RADIATION WHITESELL, STEVEN H 9d overdue
18570140 STRUCTURES FOR USE ON A SUBSTRATE HOLDER, SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS AND METHOD KIM, PETER B 8d
18320157 INSPECTION METHOD AND INSPECTION TOOL MCCORMACK, JASON L 14d
18331866 APPARATUS AND METHOD FOR DIRECTING CHARGED PARTICLE BEAM TOWARDS A SAMPLE SMITH, DAVID E 54d
17922580 SUBSTRATE SUPPORT SYSTEM, LITHOGRAPHIC APPARATUS AND METHOD OF EXPOSING A SUBSTRATE RIDDLE, CHRISTINA A 55d

Hard Cases (110)

Multi-statute / §101-driven matters, or cases in front of an examiner with an allow rate under 30%. The top 8 ordered by deadline are shown.

App #TitleExaminerDue in
17607701 A PATTERNING DEVICE ANGEBRANNDT, MARTIN J 103d overdue
18565951 INSPECTION DATA FILTERING SYSTEMS AND METHODS BHATNAGAR, ANAND P 100d overdue
17623829 SUB-FIELD CONTROL OF A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUS TAN, ALVIN H 99d overdue
18265431 FEATURE EXTRACTION METHOD FOR EXTRACTING FEATURE VECTORS FOR IDENTIFYING PATTERN OBJECTS LIEW, ALEX KOK SOON 93d overdue
18511454 PROCESS WINDOW BASED ON DEFECT PROBABILITY WHITESELL, STEVEN H 88d overdue
17632632 METHOD AND APPARATUS FOR PHOTOLITHOGRAPHIC IMAGING WHITE, JAY MICHAEL 86d overdue
18294202 AN OBJECT GRIPPER, A METHOD OF HOLDING AN OBJECT AND A LITHOGRAPHIC APPARATUS WHITESELL, STEVEN H 72d overdue
17794435 CHARGED PARTICLE MANIPULATOR DEVICE OSENBAUGH-STEWART, ELIZA W 72d overdue

Interview Candidates (36)

Cases in front of an examiner whose interview lift is 10 percentage points or more — i.e. interviewed cases historically resolve more favorably than non-interviewed ones. The top 8 ordered by deadline are shown.

App #TitleExaminerDue in
17277583 METROLOGY METHOD AND APPARATUS THEREFOR WHITESELL, STEVEN H 118d overdue
18511454 PROCESS WINDOW BASED ON DEFECT PROBABILITY WHITESELL, STEVEN H 88d overdue
18294202 AN OBJECT GRIPPER, A METHOD OF HOLDING AN OBJECT AND A LITHOGRAPHIC APPARATUS WHITESELL, STEVEN H 72d overdue
17874582 COMPUTATIONAL METROLOGY BASED CORRECTION AND CONTROL WHITESELL, STEVEN H 66d overdue
18705509 DETERMINING AN ETCH EFFECT BASED ON AN ETCH BIAS DIRECTION ASFAW, MESFIN T 60d overdue
18025183 TARGET STRUCTURE AND ASSOCIATED METHODS AND APPARATUS WHITESELL, STEVEN H 51d overdue
18280459 DIGITAL HOLOGRAPHIC MICROSCOPE AND ASSOCIATED METROLOGY METHOD HANSEN, JONATHAN M 50d overdue
18712671 SURROUNDING PATTERN AND PROCESS AWARE METROLOGY PERSAUD, DEORAM 38d overdue

Top Art Units

Art UnitApps
2882 21
2877 21
2881 19
1759 10
2878 6
1737 6
2851 4
2884 2
2677 2
2666 2

Pending Office Actions

App #TitleExaminerArt UnitStatutesStatusDue inAIFiled
19125621 CONTAMINATION CONTROL ASFAW, MESFIN T — §103 Non-Final OA — Pending Apr 29, 2025
19092004 COOLING DEVICE FOR COOLING A POSITION-SENSITIVE COMPONENT OF A LITHOGRAPHY SYSTEM PERSAUD, DEORAM — §102§103 Non-Final OA — Pending Mar 27, 2025
19029961 METHOD FOR DETERMINING DEFECTIVENESS OF PATTERN BASED ON AFTER DEVELOPMENT IMAGE BAKER, CHARLOTTE M — DP Non-Final OA — Pending Jan 17, 2025
19026708 SUBSTRATE HOLDER FOR USE IN LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD PERSAUD, DEORAM — §103 Non-Final OA — Pending Jan 17, 2025
19009394 LITHOGRAPHIC APPARATUS AND METHOD PERSAUD, DEORAM — §103Other Non-Final OA — Pending Jan 03, 2025
19008794 APPARATUS AND METHOD FOR PROCESS-WINDOW CHARACTERIZATION ASFAW, MESFIN T — §102 Non-Final OA — Pending Jan 03, 2025
19009546 ABERRATION IMPACT SYSTEMS, MODELS, AND MANUFACTURING PROCESSES PERSAUD, DEORAM — §102§103Other Non-Final OA — Pending Jan 03, 2025
18876810 METROLOGY METHOD AND ASSOCIATED METROLOGY DEVICE PERSAUD, DEORAM 2882 §101§112 Non-Final OA — Pending Dec 19, 2024
18876622 A MULTI-PASS RADIATION DEVICE DOUMBIA, MOHAMED 2877 §103§112 Non-Final OA — Pending Dec 18, 2024
18876196 PARAMETERIZED INSPECTION IMAGE SIMULATION CRAWFORD, JACINTA M — §103 Non-Final OA — Pending Dec 18, 2024
18874812 SYSTEMS FOR PATH COMPENSATION WITH A MOVING OBJECTIVE SUMLAR, JOURNEY F — §102 Non-Final OA — Pending Dec 13, 2024
18873382 SEMICONDUCTOR CHARGED PARTICLE DETECTOR AND METHODS THEREOF KEFAYATI, SOORENA 2884 §103 Non-Final OA — Pending Dec 10, 2024
18871903 METHOD AND APPARATUS FOR CONTACTLESS INSPECTION OF A SUBSTRATE HOQUE, FARHANA AKHTER — §102 Non-Final OA — Pending Dec 05, 2024
18871795 FLUID DISPENSING SYSTEM AND METHOD CLEMENTE, ROBERT ARTHUR 1711 §102 Non-Final OA — Pending Dec 04, 2024
18871448 ISOLATING SPACER FOR ELECTRON-OPTICAL ASSEMBLY GASSEN, CHRISTOPHER J — §102§103§112 Non-Final OA — Pending Dec 03, 2024
18870245 SYSTEM, APPARATUS AND METHOD FOR SELECTIVE SURFACE TREATMENT PERSAUD, DEORAM 2882 §102§103 Non-Final OA — Pending Nov 27, 2024
18960519 CALIBRATION SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE BOOSALIS, FANI POLYZOS — §102§103 Non-Final OA — Pending Nov 26, 2024
18868972 A MEMBRANE AND ASSOCIATED METHOD AND APPARATUS KIM, PETER B 2882 §103 Non-Final OA — Pending Nov 25, 2024
18868802 SENSOR MODULE, ILLUMINATOR, METROLOGY DEVICE AND ASSOCIATED METROLOGY METHOD RIDDLE, CHRISTINA A 2882 §102§103 Final Rejection — Pending Nov 25, 2024
18868800 CALIBRATION METHOD AND APPARATUS UNDERWOOD, JARREAS C 2877 §102§103§112 Non-Final OA — Pending Nov 25, 2024
18867491 CLASSIFYING PRODUCT UNITS CHOI, ALICIA M — §101 Non-Final OA — Pending Nov 20, 2024
18867005 METHOD AND SYSTEM FOR REDUCING CHARGING ARTIFACT IN INSPECTION IMAGE BROUGHTON, KATHLEEN M — §103 Non-Final OA — Pending Nov 19, 2024
18866666 METHOD AND APPARATUSES FOR FOURIER TRANSFORM SPECTROMETRY SMITH, MAURICE C 2877 §103 Final Rejection — Pending Nov 18, 2024
18866490 SYSTEM AND METHOD FOR COUNTING PARTICLES ON A DETECTOR DURING INSPECTION MAUPIN, HUGH H — §103 Non-Final OA — Pending Nov 15, 2024
18866471 DROPLET GENERATOR NOZZLE MCCORMACK, JASON L — §102§103 Non-Final OA — Pending Nov 15, 2024
18865955 ENHANCED ALIGNMENT APPARATUS FOR LITHOGRAPHIC SYSTEMS LEE, HWA S 2877 §103 Final Rejection — Pending Nov 14, 2024
18864761 METHOD OF SPATIALLY ALIGNING A PATTERNING DEVICE AND A SUBSTRATE HANSEN, JONATHAN M 2877 §102 Final Rejection — Pending Nov 11, 2024
18864463 OBTAINING HIGH RESOLUTION INFORMATION FROM LOW RESOLUTION IMAGES KALISZEWSKI, ALINA ROSE — §101§103§112 Non-Final OA — Pending Nov 08, 2024
18864099 DETECTOR FOR DETECTING RADIATION, METHOD OF DETECTING RADIATION, ASSESSMENT SYSTEM SONG, HOON K — §102§103 Non-Final OA — Pending Nov 08, 2024
18863941 CONTAMINATION DETERMINATION KIM, PETER B 2882 §103§112 Final Rejection 34d Pending Nov 07, 2024
18863624 CONTAMINATION MEASUREMENT AMARA, MOHAMED K 2877 §103 Final Rejection — Pending Nov 06, 2024
18861859 METHOD AND SYSTEM OF OVERLAY MEASUREMENT USING CHARGED-PARTICLE INSPECTION APPARATUS NGUYEN, HUNG 2882 §102§103 Final Rejection — Pending Oct 30, 2024
18861173 MEASUREMENT OF FABRICATION PARAMETERS BASED ON MOIRÉ INTERFERENCE PATTERN COMPONENTS COOK, JONATHON 2877 §102§103 Non-Final OA — Pending Oct 28, 2024
18860879 MECHATRONIC SYSTEM CONTROL METHOD, LITHOGRAPHIC APPARATUS CONTROL METHOD AND LITHOGRAPHIC APPARATUS NGUYEN, BAO LONG T — §103§112 Non-Final OA — Pending Oct 28, 2024
18860248 OPTICAL ARRANGEMENT FOR A METROLOGY SYSTEM BAGHDASARYAN, HOVHANNES — §103 Non-Final OA — Pending Oct 25, 2024
18860115 SINGLE PAD OVERLAY MEASUREMENT BRYANT, REBECCA CAROLE 2877 §102 Final Rejection — Pending Oct 25, 2024
18859655 MIRROR ASSEMBLY FOR MICROMIRROR ARRAY WHITESELL, STEVEN H 1759 §102§103 Final Rejection — Pending Oct 24, 2024
18859981 PASSIVE INTEGRATED OPTICAL SYSTEMS AND METHODS FOR REDUCTION OF SPATIAL OPTICAL COHERENCE ASFAW, MESFIN T 2882 §102§103 Non-Final OA — Pending Oct 24, 2024
18859954 SYSTEM AND METHOD FOR IMPROVING IMAGE QUALITY DURING INSPECTION CASCAIS, JUSTIN PHILIP — §103Other Non-Final OA — Pending Oct 24, 2024
18859466 TRANSIENT DEFECT INSPECTION USING AN INSPECTION IMAGE GORADIA, SHEFALI DINESH — §101§103§112 Non-Final OA — Pending Oct 23, 2024
18859485 THERMALLY ACTUATED COOLING SYSTEM EINHORN, MICA JILLIAN — §102§103 Non-Final OA — Pending Oct 23, 2024
18857065 SYSTEMS, METHODS, AND SOFTWARE FOR MULTILAYER METROLOGY CODRINGTON, SHANE WRENSFORD — §102§103§112 Non-Final OA — Pending Oct 15, 2024
18856459 A LITHOGRAPHIC APPARATUS, AN INSPECTION SYSTEM, AND A DETECTOR HAVING A SQUARE-CORE FIBER AKANBI, ISIAKA O 2877 §103 Final Rejection — Pending Oct 11, 2024
18911806 CHARGED PARTICLE BEAM APPARATUS WITH MULTIPLE DETECTORS AND METHODS FOR IMAGING MCCORMACK, JASON L — §103§112 Non-Final OA — Pending Oct 10, 2024
18910626 SELF-DIFFERENTIAL CONFOCAL TILT SENSOR FOR MEASURING LEVEL VARIATION IN CHARGED PARTICLE BEAM SYSTEM SMITH, DAVID E — §102§103 Non-Final OA — Pending Oct 09, 2024
18855625 CHARGED-PARTICLE BEAM APPARATUS WITH LARGE FIELD-OF-VIEW AND METHODS THEREOF LI, LARRY — §103§112 Non-Final OA — Pending Oct 09, 2024
18855206 HOLLOW-CORE OPTICAL FIBER BASED RADIATION SOURCE HOLLWEG, THOMAS A — §102§103 Non-Final OA — Pending Oct 08, 2024
18907436 SENSOR SUBSTRATE, APPARATUS, AND METHOD IPPOLITO, NICOLE MARIE — §102 Non-Final OA — Pending Oct 04, 2024
18854000 WAFER EDGE INSPECTION OF CHARGED PARTICLE INSPECTION SYSTEM LI, LARRY — §103§112 Non-Final OA — Pending Oct 03, 2024
18853562 HIGH PRESSURE COUPLING ASSEMBLY BOOSALIS, FANI POLYZOS 2884 §102§103 Final Rejection — Pending Oct 02, 2024

View all 195 →

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Frequently Asked Questions

How many pending USPTO office actions does ASML Holding N.V. have?

ASML Holding N.V. has 195 pending office actions as of October 2026, spread across 42 art units and 116 examiners.

Which USPTO examiner handles the most ASML Holding N.V. applications?

Deoram Persaud has the most, with 11 of ASML Holding N.V.'s pending office actions.

What technology area are ASML Holding N.V.'s patent applications in?

Mostly Semiconductors, Circuits & Optics (USPTO Tech Center 2800), based on where its pending office actions are examined.

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