Prosecution Insights
Prosecution Insights
Technology area: Semiconductors, Circuits & Optics
201 pending office actions • 41 art units • 118 examiners • 17 of 201 (8%) have an AI response strategy ready • 227 patents granted in the last 365 days
ASML Holding N.V. is currently navigating 202 pending office actions within the Semiconductors, Circuits & Optics technology area. These actions are distributed among 120 distinct examiners and 43 distinct art units. This indicates a high volume of activity across a wide range of technical classifications and individual examiners. DEORAM PERSAUD is the busiest examiner for the company, currently overseeing 10 pending office actions. While this is a significant number for one person, it represents only a small portion of the 202 total pending actions.
The involvement of 43 distinct art units highlights the complexity and breadth of the company's semiconductor and optics innovations. With 120 distinct examiners, the company must manage a vast array of individual prosecution styles and preferences. This broad distribution across 43 distinct art units suggests that the company's intellectual property touches on many different specialized facets of semiconductor technology. DEORAM PERSAUD is the most frequent point of contact, but the majority of the 120 distinct examiners are handling far fewer than 10 pending office actions each.
Based on the USPTO statutory response window for each pending office action. 60 of the docket's apps have a known mailing date; the rest are excluded from the tile counts.
Every pending office action with a known statutory deadline, placed on a days-until-due axis. Dots left of Today are overdue; the further right, the more runway. Cases that share a deadline window stack vertically. 60 of the docket's apps have a known mailing date.
Difficulty is derived from the rejection statutes on the most recent pending office action. §101-driven and multi-statute cases are graded Hard; §112-only and obviousness-type double-patenting cases are graded Easy; everything else is Medium. "Unknown" means we have not yet parsed a statute for that office action.
| Bucket | Cases |
|---|---|
| §101 only | 3 (1%) |
| §101 + other | 26 (13%) |
| §103 only | 57 (28%) |
| §102 only | 16 (8%) |
| §112 only | 6 (3%) |
| Double-patenting only | 1 (0%) |
| Double-patenting + other | 2 (1%) |
| Multi-statute (no §101) | 90 (45%) |
How the docket's pending cases split across USPTO tech-center bands.
Manual office-action response work runs about 10 hours per case. The time-saved bands below show what IP Author's prosecution pipeline typically delivers — a conservative 20% on the low end, 35% in the middle, 50% on the high end.
| Examiner | Apps on this docket | Allow rate | Interview lift |
|---|---|---|---|
| PERSAUD, DEORAM | 12 | 76.9% | +12.0% |
| WHITESELL, STEVEN H | 9 | 81.9% | +12.9% |
| MCCORMACK, JASON L | 7 | 84.6% | +8.1% |
| RIDDLE, CHRISTINA A | 6 | 81.0% | +13.9% |
| KIM, PETER B | 5 | 83.0% | +9.5% |
| SMITH, DAVID E | 5 | 85.2% | +7.0% |
| WANG, JING | 5 | 100.0% | +0.0% |
| ASFAW, MESFIN T | 4 | 83.0% | +13.9% |
| HANSEN, JONATHAN M | 4 | 79.4% | +11.4% |
| KALISZEWSKI, ALINA ROSE | 4 | 84.4% | +23.8% |
Cases in front of an examiner with an allow rate of 80%+ where the difficulty is Easy or Medium. The top 8 ordered by deadline are shown.
| App # | Title | Examiner | Due in |
|---|---|---|---|
| 17277583 | METROLOGY METHOD AND APPARATUS THEREFOR | WHITESELL, STEVEN H | 118d overdue |
| 17874582 | COMPUTATIONAL METROLOGY BASED CORRECTION AND CONTROL | WHITESELL, STEVEN H | 66d overdue |
| 18568628 | CHARGED PARTICLE DETECTOR ASSEMBLY | SMITH, DAVID E | 42d overdue |
| 18842640 | APPARATUS AND METHODS FOR FILTERING MEASUREMENT RADIATION | WHITESELL, STEVEN H | 9d overdue |
| 18570140 | STRUCTURES FOR USE ON A SUBSTRATE HOLDER, SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS AND METHOD | KIM, PETER B | 8d |
| 18331866 | APPARATUS AND METHOD FOR DIRECTING CHARGED PARTICLE BEAM TOWARDS A SAMPLE | SMITH, DAVID E | 54d |
| 17922580 | SUBSTRATE SUPPORT SYSTEM, LITHOGRAPHIC APPARATUS AND METHOD OF EXPOSING A SUBSTRATE | RIDDLE, CHRISTINA A | 55d |
| 19008794 | APPARATUS AND METHOD FOR PROCESS-WINDOW CHARACTERIZATION | ASFAW, MESFIN T | — |
Multi-statute / §101-driven matters, or cases in front of an examiner with an allow rate under 30%. The top 8 ordered by deadline are shown.
| App # | Title | Examiner | Due in |
|---|---|---|---|
| 17607701 | A PATTERNING DEVICE | ANGEBRANNDT, MARTIN J | 103d overdue |
| 18565951 | INSPECTION DATA FILTERING SYSTEMS AND METHODS | BHATNAGAR, ANAND P | 100d overdue |
| 17623829 | SUB-FIELD CONTROL OF A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUS | TAN, ALVIN H | 99d overdue |
| 18265431 | FEATURE EXTRACTION METHOD FOR EXTRACTING FEATURE VECTORS FOR IDENTIFYING PATTERN OBJECTS | LIEW, ALEX KOK SOON | 93d overdue |
| 18511454 | PROCESS WINDOW BASED ON DEFECT PROBABILITY | WHITESELL, STEVEN H | 88d overdue |
| 17632632 | METHOD AND APPARATUS FOR PHOTOLITHOGRAPHIC IMAGING | WHITE, JAY MICHAEL | 86d overdue |
| 18294202 | AN OBJECT GRIPPER, A METHOD OF HOLDING AN OBJECT AND A LITHOGRAPHIC APPARATUS | WHITESELL, STEVEN H | 72d overdue |
| 17794435 | CHARGED PARTICLE MANIPULATOR DEVICE | OSENBAUGH-STEWART, ELIZA W | 72d overdue |
Cases in front of an examiner whose interview lift is 10 percentage points or more — i.e. interviewed cases historically resolve more favorably than non-interviewed ones. The top 8 ordered by deadline are shown.
| App # | Title | Examiner | Due in |
|---|---|---|---|
| 17277583 | METROLOGY METHOD AND APPARATUS THEREFOR | WHITESELL, STEVEN H | 118d overdue |
| 18511454 | PROCESS WINDOW BASED ON DEFECT PROBABILITY | WHITESELL, STEVEN H | 88d overdue |
| 18294202 | AN OBJECT GRIPPER, A METHOD OF HOLDING AN OBJECT AND A LITHOGRAPHIC APPARATUS | WHITESELL, STEVEN H | 72d overdue |
| 17874582 | COMPUTATIONAL METROLOGY BASED CORRECTION AND CONTROL | WHITESELL, STEVEN H | 66d overdue |
| 18705509 | DETERMINING AN ETCH EFFECT BASED ON AN ETCH BIAS DIRECTION | ASFAW, MESFIN T | 60d overdue |
| 18025183 | TARGET STRUCTURE AND ASSOCIATED METHODS AND APPARATUS | WHITESELL, STEVEN H | 51d overdue |
| 18280459 | DIGITAL HOLOGRAPHIC MICROSCOPE AND ASSOCIATED METROLOGY METHOD | HANSEN, JONATHAN M | 50d overdue |
| 18712671 | SURROUNDING PATTERN AND PROCESS AWARE METROLOGY | PERSAUD, DEORAM | 38d overdue |
| Art Unit | Apps |
|---|---|
| 2881 | 22 |
| 2882 | 21 |
| 2877 | 20 |
| 1759 | 9 |
| 1737 | 7 |
| 2878 | 6 |
| 2851 | 5 |
| 2884 | 4 |
| 2677 | 2 |
| 2666 | 2 |
| App # | Title | Examiner | Art Unit | Statutes | Status | Due in | AI | Filed |
|---|---|---|---|---|---|---|---|---|
| 19092004 | COOLING DEVICE FOR COOLING A POSITION-SENSITIVE COMPONENT OF A LITHOGRAPHY SYSTEM | PERSAUD, DEORAM | — | §102§103 | Non-Final OA | — | Pending | Mar 27, 2025 |
| 19026708 | SUBSTRATE HOLDER FOR USE IN LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD | PERSAUD, DEORAM | — | §103 | Non-Final OA | — | Pending | Jan 17, 2025 |
| 19029961 | METHOD FOR DETERMINING DEFECTIVENESS OF PATTERN BASED ON AFTER DEVELOPMENT IMAGE | BAKER, CHARLOTTE M | — | DP | Non-Final OA | — | Pending | Jan 17, 2025 |
| 19009394 | LITHOGRAPHIC APPARATUS AND METHOD | PERSAUD, DEORAM | — | §103Other | Non-Final OA | — | Pending | Jan 03, 2025 |
| 19009546 | ABERRATION IMPACT SYSTEMS, MODELS, AND MANUFACTURING PROCESSES | PERSAUD, DEORAM | — | §102§103Other | Non-Final OA | — | Pending | Jan 03, 2025 |
| 19008794 | APPARATUS AND METHOD FOR PROCESS-WINDOW CHARACTERIZATION | ASFAW, MESFIN T | — | §102 | Non-Final OA | — | Pending | Jan 03, 2025 |
| 18877850 | PARTICLE DETECTOR WITH REDUCED INTER-SYMBOL INTERFERENCE | GUNBERG, EDWIN C | 2884 | §102§103 | Non-Final OA | — | Pending | Dec 20, 2024 |
| 18876810 | METROLOGY METHOD AND ASSOCIATED METROLOGY DEVICE | PERSAUD, DEORAM | 2882 | §101§112 | Non-Final OA | — | Pending | Dec 19, 2024 |
| 18876191 | READOUT DESIGN FOR CHARGED PARTICLE COUNTING DETECTORS | GUNBERG, EDWIN C | 2884 | §102§103 | Non-Final OA | — | Pending | Dec 18, 2024 |
| 18876622 | A MULTI-PASS RADIATION DEVICE | DOUMBIA, MOHAMED | 2877 | §103§112 | Non-Final OA | — | Pending | Dec 18, 2024 |
| 18876559 | PROJECTION SYSTEM CONTROL | ASFAW, MESFIN T | — | §102§103 | Non-Final OA | — | Pending | Dec 18, 2024 |
| 18876196 | PARAMETERIZED INSPECTION IMAGE SIMULATION | CRAWFORD, JACINTA M | — | §103 | Non-Final OA | — | Pending | Dec 18, 2024 |
| 18874812 | SYSTEMS FOR PATH COMPENSATION WITH A MOVING OBJECTIVE | SUMLAR, JOURNEY F | — | §102 | Non-Final OA | — | Pending | Dec 13, 2024 |
| 18873382 | SEMICONDUCTOR CHARGED PARTICLE DETECTOR AND METHODS THEREOF | KEFAYATI, SOORENA | 2884 | §103 | Non-Final OA | — | Pending | Dec 10, 2024 |
| 18871903 | METHOD AND APPARATUS FOR CONTACTLESS INSPECTION OF A SUBSTRATE | HOQUE, FARHANA AKHTER | — | §102 | Non-Final OA | — | Pending | Dec 05, 2024 |
| 18871795 | FLUID DISPENSING SYSTEM AND METHOD | CLEMENTE, ROBERT ARTHUR | 1711 | §102 | Non-Final OA | — | Pending | Dec 04, 2024 |
| 18871448 | ISOLATING SPACER FOR ELECTRON-OPTICAL ASSEMBLY | GASSEN, CHRISTOPHER J | — | §102§103§112 | Non-Final OA | — | Pending | Dec 03, 2024 |
| 18870245 | SYSTEM, APPARATUS AND METHOD FOR SELECTIVE SURFACE TREATMENT | PERSAUD, DEORAM | 2882 | §102§103 | Non-Final OA | — | Pending | Nov 27, 2024 |
| 18960519 | CALIBRATION SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE | BOOSALIS, FANI POLYZOS | — | §102§103 | Non-Final OA | — | Pending | Nov 26, 2024 |
| 18868972 | A MEMBRANE AND ASSOCIATED METHOD AND APPARATUS | KIM, PETER B | 2882 | §103 | Non-Final OA | — | Pending | Nov 25, 2024 |
| 18868800 | CALIBRATION METHOD AND APPARATUS | UNDERWOOD, JARREAS C | 2877 | §102§103§112 | Non-Final OA | — | Pending | Nov 25, 2024 |
| 18867491 | CLASSIFYING PRODUCT UNITS | CHOI, ALICIA M | — | §101 | Non-Final OA | — | Pending | Nov 20, 2024 |
| 18867005 | METHOD AND SYSTEM FOR REDUCING CHARGING ARTIFACT IN INSPECTION IMAGE | BROUGHTON, KATHLEEN M | — | §103 | Non-Final OA | — | Pending | Nov 19, 2024 |
| 18866666 | METHOD AND APPARATUSES FOR FOURIER TRANSFORM SPECTROMETRY | SMITH, MAURICE C | 2877 | §103 | Final Rejection | — | Pending | Nov 18, 2024 |
| 18867001 | SYSTEM AND METHOD FOR DISTORTION ADJUSTMENT DURING INSPECTION | VANCHY JR, MICHAEL J | — | §103 | Non-Final OA | — | Pending | Nov 18, 2024 |
| 18866471 | DROPLET GENERATOR NOZZLE | MCCORMACK, JASON L | — | §102§103 | Non-Final OA | — | Pending | Nov 15, 2024 |
| 18866490 | SYSTEM AND METHOD FOR COUNTING PARTICLES ON A DETECTOR DURING INSPECTION | MAUPIN, HUGH H | — | §103 | Non-Final OA | — | Pending | Nov 15, 2024 |
| 18865955 | ENHANCED ALIGNMENT APPARATUS FOR LITHOGRAPHIC SYSTEMS | LEE, HWA S | 2877 | §103 | Final Rejection | — | Pending | Nov 14, 2024 |
| 18864761 | METHOD OF SPATIALLY ALIGNING A PATTERNING DEVICE AND A SUBSTRATE | HANSEN, JONATHAN M | 2877 | §102 | Final Rejection | — | Pending | Nov 11, 2024 |
| 18864463 | OBTAINING HIGH RESOLUTION INFORMATION FROM LOW RESOLUTION IMAGES | KALISZEWSKI, ALINA ROSE | — | §101§103§112 | Non-Final OA | — | Pending | Nov 08, 2024 |
| 18864099 | DETECTOR FOR DETECTING RADIATION, METHOD OF DETECTING RADIATION, ASSESSMENT SYSTEM | SONG, HOON K | — | §102§103 | Non-Final OA | — | Pending | Nov 08, 2024 |
| 18863941 | CONTAMINATION DETERMINATION | KIM, PETER B | 2882 | §103§112 | Final Rejection | 34d | Pending | Nov 07, 2024 |
| 18863624 | CONTAMINATION MEASUREMENT | AMARA, MOHAMED K | 2877 | §103 | Final Rejection | — | Pending | Nov 06, 2024 |
| 18861859 | METHOD AND SYSTEM OF OVERLAY MEASUREMENT USING CHARGED-PARTICLE INSPECTION APPARATUS | NGUYEN, HUNG | 2882 | §102§103 | Final Rejection | — | Pending | Oct 30, 2024 |
| 18861173 | MEASUREMENT OF FABRICATION PARAMETERS BASED ON MOIRÉ INTERFERENCE PATTERN COMPONENTS | COOK, JONATHON | 2877 | §102§103 | Non-Final OA | — | Pending | Oct 28, 2024 |
| 18860879 | MECHATRONIC SYSTEM CONTROL METHOD, LITHOGRAPHIC APPARATUS CONTROL METHOD AND LITHOGRAPHIC APPARATUS | NGUYEN, BAO LONG T | — | §103§112 | Non-Final OA | — | Pending | Oct 28, 2024 |
| 18860115 | SINGLE PAD OVERLAY MEASUREMENT | BRYANT, REBECCA CAROLE | 2877 | §102 | Final Rejection | — | Pending | Oct 25, 2024 |
| 18860248 | OPTICAL ARRANGEMENT FOR A METROLOGY SYSTEM | BAGHDASARYAN, HOVHANNES | — | §103 | Non-Final OA | — | Pending | Oct 25, 2024 |
| 18859954 | SYSTEM AND METHOD FOR IMPROVING IMAGE QUALITY DURING INSPECTION | CASCAIS, JUSTIN PHILIP | — | §103Other | Non-Final OA | — | Pending | Oct 24, 2024 |
| 18859466 | TRANSIENT DEFECT INSPECTION USING AN INSPECTION IMAGE | GORADIA, SHEFALI DINESH | — | §101§103§112 | Non-Final OA | — | Pending | Oct 23, 2024 |
| 18859485 | THERMALLY ACTUATED COOLING SYSTEM | EINHORN, MICA JILLIAN | — | §102§103 | Non-Final OA | — | Pending | Oct 23, 2024 |
| 18857065 | SYSTEMS, METHODS, AND SOFTWARE FOR MULTILAYER METROLOGY | CODRINGTON, SHANE WRENSFORD | — | §102§103§112 | Non-Final OA | — | Pending | Oct 15, 2024 |
| 18856459 | A LITHOGRAPHIC APPARATUS, AN INSPECTION SYSTEM, AND A DETECTOR HAVING A SQUARE-CORE FIBER | AKANBI, ISIAKA O | 2877 | §103 | Final Rejection | — | Pending | Oct 11, 2024 |
| 18911806 | CHARGED PARTICLE BEAM APPARATUS WITH MULTIPLE DETECTORS AND METHODS FOR IMAGING | MCCORMACK, JASON L | — | §103§112 | Non-Final OA | — | Pending | Oct 10, 2024 |
| 18855625 | CHARGED-PARTICLE BEAM APPARATUS WITH LARGE FIELD-OF-VIEW AND METHODS THEREOF | LI, LARRY | — | §103§112 | Non-Final OA | — | Pending | Oct 09, 2024 |
| 18910626 | SELF-DIFFERENTIAL CONFOCAL TILT SENSOR FOR MEASURING LEVEL VARIATION IN CHARGED PARTICLE BEAM SYSTEM | SMITH, DAVID E | — | §102§103 | Non-Final OA | — | Pending | Oct 09, 2024 |
| 18855206 | HOLLOW-CORE OPTICAL FIBER BASED RADIATION SOURCE | HOLLWEG, THOMAS A | — | §102§103 | Non-Final OA | — | Pending | Oct 08, 2024 |
| 18907436 | SENSOR SUBSTRATE, APPARATUS, AND METHOD | IPPOLITO, NICOLE MARIE | — | §102 | Non-Final OA | — | Pending | Oct 04, 2024 |
| 18854000 | WAFER EDGE INSPECTION OF CHARGED PARTICLE INSPECTION SYSTEM | LI, LARRY | — | §103§112 | Non-Final OA | — | Pending | Oct 03, 2024 |
| 18853562 | HIGH PRESSURE COUPLING ASSEMBLY | BOOSALIS, FANI POLYZOS | 2884 | §102§103 | Final Rejection | — | Pending | Oct 02, 2024 |
| 18890506 | CHARGED PARTICLE APPARATUS AND METHOD | MCCORMACK, JASON L | — | §102§103§112 | Non-Final OA | — | Pending | Sep 19, 2024 |
| 18882681 | FULLY AUTOMATED SEM SAMPLING SYSTEM FOR E-BEAM IMAGE ENHANCEMENT | HSIEH, PING Y | — | §103Other | Non-Final OA | — | Pending | Sep 11, 2024 |
| 18829231 | SEM IMAGE ENHANCEMENT METHODS AND SYSTEMS | CESE, KENNY A | — | §103§112 | Non-Final OA | — | Pending | Sep 09, 2024 |
| 18844195 | EUV Light Source Target Metrology | MCCORMACK, JASON L | — | §103§112 | Non-Final OA | — | Pending | Sep 05, 2024 |
| 18843936 | METHOD FOR DETERMINING A SPATIAL DISTRIBUTION OF A PARAMETER OF INTEREST OVER AT LEAST ONE SUBSTRATE OR PORTION THEREOF | ASFAW, MESFIN T | 2882 | §101§102 | Final Rejection | 28d | Pending | Sep 04, 2024 |
| 18842640 | APPARATUS AND METHODS FOR FILTERING MEASUREMENT RADIATION | WHITESELL, STEVEN H | 1759 | §103 | Non-Final OA | 9d overdue | AI Ready | Aug 29, 2024 |
| 18842649 | RETICLE STAGE | RIDDLE, CHRISTINA A | 2882 | §102§103 | Non-Final OA | — | Pending | Aug 29, 2024 |
| 18818079 | LASER SYSTEM FOR TARGET METROLOGY AND ALTERATION IN AN EUV LIGHT SOURCE | VANORE, DAVID A | — | §102 | Non-Final OA | — | Pending | Aug 28, 2024 |
| 18841032 | METHODS AND SYSTEMS FOR IMPROVING WAFER DEFECT CLASSIFICATION NUISANCE RATE | PARK, SOO JIN | — | §103§112 | Non-Final OA | — | Pending | Aug 23, 2024 |
| 18838135 | INSPECTION TOOL AND BARRIER FOR USE THEREIN | HANSEN, JONATHAN M | 2877 | §102§103 | Final Rejection | 9d | AI Ready | Aug 13, 2024 |
| 18837576 | IMAGE ANALYSIS BASED ON ADAPTIVE WEIGHTING OF TEMPLATE CONTOURS | BEKELE, MEKONEN T | — | §102§103 | Non-Final OA | — | Pending | Aug 09, 2024 |
| 18790520 | EUV LITHOGRAPHY SYSTEM HAVING A GAS-BINDING COMPONENT | PERSAUD, DEORAM | 2882 | §102§103 | Final Rejection | — | Pending | Jul 31, 2024 |
| 18834131 | FIELD OF VIEW SELECTION FOR METROLOGY ASSOCIATED WITH SEMICONDUCTOR MANUFACTURING | LANTZ, KARSTEN FOSTER | 2664 | §103 | Non-Final OA | — | Pending | Jul 29, 2024 |
| 18834171 | METROLOGY METHOD AND ASSOCIATED METROLOGY DEVICE | TRAN, MAI THI NGOC | — | §102§103 | Non-Final OA | — | Pending | Jul 29, 2024 |
| 18776207 | INSPECTION APPARATUS AND METHOD | MCCORMACK, JASON L | — | §112 | Non-Final OA | — | Pending | Jul 17, 2024 |
| 18726728 | A PELLICLE CLEANING SYSTEM | RIDDLE, CHRISTINA A | 2882 | §102§103 | Final Rejection | — | Pending | Jul 03, 2024 |
| 18761319 | SOFTWARE, METHODS, AND SYSTEMS FOR DETERMINATION OF A LOCAL FOCUS POINT | STOFFA, WYATT A | — | §101§102§112 | Non-Final OA | — | Pending | Jul 02, 2024 |
| 18748694 | METHOD OF PROCESSING A SAMPLE, AND CHARGED PARTICLE ASSESSMENT SYSTEM | MCCORMACK, JASON L | — | §112 | Non-Final OA | — | Pending | Jun 20, 2024 |
| 18749556 | COMPUTATIONAL METROLOGY BASED SAMPLING SCHEME | PERSAUD, DEORAM | 2882 | §101 | Final Rejection | 43d | Pending | Jun 20, 2024 |
| 18721405 | GENERATING AN ALIGNMENT SIGNAL WITHOUT DEDICATED ALIGNMENT STRUCTURES | CHILTON, CLARA GRACE | — | §102§103§112 | Non-Final OA | — | Pending | Jun 18, 2024 |
| 18721460 | HIERARCHICAL ANOMALY DETECTION AND DATA REPRESENTATION METHOD TO IDENTIFY SYSTEM LEVEL DEGRADATION | QUIGLEY, KYLE ROBERT | — | §101§102§103 | Non-Final OA | — | Pending | Jun 18, 2024 |
| 18720941 | SUBSTRATE COMPRISING A TARGET ARRANGEMENT, ASSOCIATED PATTERNING DEVICE AND METROLOGY METHOD | HANSEN, JONATHAN M | 2877 | §102 | Non-Final OA | — | Pending | Jun 17, 2024 |
| 18719902 | METHOD AND APPARATUS FOR LITHOGRAPHIC IMAGING | KIM, PETER B | 2882 | §102§103 | Final Rejection | 53d overdue | Pending | Jun 14, 2024 |
| 18743011 | CHARGED-PARTICLE OPTICAL APPARATUS AND PROJECTION METHOD | WANG, JING | — | §102§103 | Final Rejection | — | Pending | Jun 13, 2024 |
| 18718306 | METHOD AND APPARATUS TO DETERMINE OVERLAY | RIVERA-MARTINEZ, GUILLERMO M | 2677 | §103§112 | Non-Final OA | — | Pending | Jun 10, 2024 |
| 18718240 | METHOD OF PATTERNING A TARGET LAYER, APPARATUS FOR PATTERNING A TARGET LAYER | LEE, AIDEN Y | 1713 | §102§103§112 | Non-Final OA | — | Pending | Jun 10, 2024 |
| 18716468 | APERTURE AND METHOD | GASSEN, CHRISTOPHER J | — | §102§103§112 | Non-Final OA | — | Pending | Jun 04, 2024 |
| 18716007 | TARGET ASYMMETRY MEASUREMENT FOR SUBSTRATE ALIGNMENT IN LITHOGRAPHY SYSTEMS | PEREZ-GUZMAN, CARLOS GABRIEL | — | §102§103 | Non-Final OA | — | Pending | Jun 03, 2024 |
| 18674282 | PLATFORM FOR CHARGED PARTICLE APPARATUS AND COMPONENTS WITHIN A CHARGED PARTICLE APPARATUS | WANG, JING | — | §102§103§112 | Non-Final OA | — | Pending | May 24, 2024 |
| 18713108 | CHARGED-PARTICLE BEAM APPARATUS FOR VOLTAGE-CONTRAST INSPECTION AND METHODS THEREOF | NAVARRO, HUGO IVAN | 2858 | §103§112 | Non-Final OA | 45d overdue | AI Ready | May 23, 2024 |
| 18712765 | IDENTIFYING DEVIATING MODULES FROM A REFERENCE POPULATION FOR MACHINE DIAGNOSTICS | AGRAWAL, SHISHIR | — | §101§103§112 | Non-Final OA | — | Pending | May 23, 2024 |
| 18713127 | THERMAL CONTROL SYSTEMS, MODELS, AND MANUFACTURING PROCESSES IN LITHOGRAPHY | HARTMAN JR, RONALD D | — | §103 | Non-Final OA | — | Pending | May 23, 2024 |
| 18712649 | METROLOGY CALIBRATION METHOD | SATANOVSKY, ALEXANDER | — | §103 | Non-Final OA | — | Pending | May 22, 2024 |
| 18712671 | SURROUNDING PATTERN AND PROCESS AWARE METROLOGY | PERSAUD, DEORAM | 2882 | §101§102 | Final Rejection | 38d overdue | Pending | May 22, 2024 |
| 18712560 | METHODS OF DETERMINING A MECHANICAL PROPERTY OF A LAYER APPLIED TO A SUBSTRATE, AND ASSOCIATED DEVICES | KAY, DOUGLAS | — | §101§103§112DP | Non-Final OA | — | Pending | May 22, 2024 |
| 18709795 | METHOD AND SYSTEM OF REDUCING CHAMBER VIBRATION | WANG, JING | 2881 | §103 | Final Rejection | — | Pending | May 13, 2024 |
| 18706592 | WAFER EDGE INSPECTION OF CHARGED PARTICLE INSPECTION SYSTEM | LI, LARRY | 2881 | §103§112 | Non-Final OA | — | Pending | May 01, 2024 |
| 18705509 | DETERMINING AN ETCH EFFECT BASED ON AN ETCH BIAS DIRECTION | ASFAW, MESFIN T | 2882 | §101§102 | Non-Final OA | 60d overdue | Pending | Apr 26, 2024 |
| 18703486 | GENERATING AUGMENTED DATA TO TRAIN MACHINE LEARNING MODELS TO PRESERVE PHYSICAL TRENDS | CODRINGTON, SHANE WRENSFORD | — | §102§103 | Non-Final OA | — | Pending | Apr 22, 2024 |
| 18630741 | SEM IMAGE ALIGNMENT | WILBURN, MOLLY K | 2666 | §101 | Final Rejection | 8d overdue | AI Ready | Apr 09, 2024 |
| 18699358 | LITHOGRAPHIC APPARATUS AND ASSOCIATED METHODS | RIDDLE, CHRISTINA A | 2882 | §102§103 | Final Rejection | 28d | Pending | Apr 08, 2024 |
| 18627338 | FIBER ALIGNMENT MONITORING TOOL AND ASSOCIATED FIBER ALIGNMENT METHOD | CAPUTO, LISA M | 2874 | §102 | Final Rejection | — | Pending | Apr 04, 2024 |
| 18618406 | PELLICLE FOR EUV LITHOGRAPHY | ANGEBRANNDT, MARTIN J | 1737 | §102§103§112 | Final Rejection | 31d overdue | Pending | Mar 27, 2024 |
| 18691828 | SYSTEM AND METHOD FOR INSPECTION BY FAILURE MECHANISM CLASSIFICATION AND IDENTIFICATION IN A CHARGED PARTICLE SYSTEM | WANG, JING | 2881 | §103 | Non-Final OA | — | Pending | Mar 13, 2024 |
| 18691002 | SOURCE SELECTION MODULE AND ASSOCIATED METROLOGY AND LITHOGRAPHIC APPARATUSES | MENDOZA, ALEXANDRIA ARELLANO | 2877 | §103 | Non-Final OA | 121d overdue | Pending | Mar 11, 2024 |
| 18596467 | PATTERNING DEVICE DEFECT DETECTION SYSTEMS AND METHODS | KALISZEWSKI, ALINA ROSE | 2881 | §102§103 | Final Rejection | — | Pending | Mar 05, 2024 |
| 18687727 | THERMAL CONDITIONING UNIT, SUBSTRATE HANDLING DEVICE AND LITHOGRAPHIC APPARATUS | PERSAUD, DEORAM | 2882 | §102§103 | Non-Final OA | — | Pending | Feb 28, 2024 |
| 18686994 | PATTERN SELECTION SYSTEMS AND METHODS | LIN, ARIC | — | §101§102§103 | Non-Final OA | — | Pending | Feb 27, 2024 |
| 18686742 | METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHOD | STOCK JR, GORDON J | 2877 | §102DP | Non-Final OA | 42d overdue | Pending | Feb 26, 2024 |
| 18684391 | COMPENSATING OPTICAL SYSTEM FOR NONUNIFORM SURFACES, A METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF | STOCK JR, GORDON J | 2877 | §102§103 | Final Rejection | 43d overdue | Pending | Feb 16, 2024 |
| 18684558 | METHOD FOR CONVERTING METROLOGY DATA | WASAFF, JOHN S. | — | §101§102§103 | Non-Final OA | — | Pending | Feb 16, 2024 |
| 18684048 | SOURCE SEPARATION FROM METROLOGY DATA | PEREZ BERMUDEZ, YARITZA H | — | §101§102§103§112 | Non-Final OA | — | Pending | Feb 15, 2024 |
| 18681613 | METHOD OF EVALUATING SELECTED SET OF PATTERNS | PARIHAR, SUCHIN | — | §102 | Non-Final OA | — | Pending | Feb 06, 2024 |
| 18294202 | AN OBJECT GRIPPER, A METHOD OF HOLDING AN OBJECT AND A LITHOGRAPHIC APPARATUS | WHITESELL, STEVEN H | 1759 | §102§103 | Final Rejection | 72d overdue | Pending | Feb 01, 2024 |
| 18291534 | METROLOGY METHOD AND METROLOGY DEVICE | SMITH, MAURICE C | — | §102 | Non-Final OA | — | Pending | Jan 23, 2024 |
| 18580062 | OPTICAL ELEMENT FOR USE IN METROLOGY SYSTEMS | KIDWELL, KAITLYN ELIZABETH | 2877 | §102§103§112 | Non-Final OA | — | Pending | Jan 17, 2024 |
| 18578299 | METHOD FOR GENERATING MASK PATTERN | WALKE, AMANDA C | — | §103 | Non-Final OA | — | Pending | Jan 10, 2024 |
| 18402585 | CHARGED PARTICLE-OPTICAL DEVICE, CHARGED PARTICLE APPARATUS AND METHOD | WANG, JING | 2881 | §103§112 | Non-Final OA | — | Pending | Jan 02, 2024 |
| 18397896 | CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD OF ALIGNING A SAMPLE IN A CHARGED PARTICLE ASSESSMENT SYSTEM | STOFFA, WYATT A | 2881 | §102§112 | Non-Final OA | 31d overdue | AI Ready | Dec 27, 2023 |
| 18570140 | STRUCTURES FOR USE ON A SUBSTRATE HOLDER, SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS AND METHOD | KIM, PETER B | 2882 | §103 | Non-Final OA | 8d | Pending | Dec 14, 2023 |
| 18570572 | DETERMINING LOCALIZED IMAGE PREDICTION ERRORS TO IMPROVE A MACHINE LEARNING MODEL IN PREDICTING AN IMAGE | DINH, PAUL | — | §102 | Non-Final OA | — | Pending | Dec 14, 2023 |
| 18570289 | AN ILLUMINATION SOURCE AND ASSOCIATED METHOD APPARATUS | KIM, PETER B | 2876 | §102§103 | Non-Final OA | — | Pending | Dec 14, 2023 |
| 18568628 | CHARGED PARTICLE DETECTOR ASSEMBLY | SMITH, DAVID E | 2881 | §103 | Final Rejection | 42d overdue | Pending | Dec 08, 2023 |
| 18533662 | OBJECT TABLE, A STAGE APPARATUS AND A LITHOGRAPHIC APPARATUS | WHITESELL, STEVEN H | 1759 | §102§103§112 | Final Rejection | — | Pending | Dec 08, 2023 |
| 18568585 | INSPECTION SYSTEM FOR RETICLE PARTICLE DETECTION USING A STRUCTURAL ILLUMINATION WITH APERTURE APODIZATION | AMARA, MOHAMED K | 2877 | §103 | Final Rejection | — | Pending | Dec 08, 2023 |
| 18567053 | METHOD AND ARRANGEMENT FOR DETERMINING THERMALLY-INDUCED DEFORMATIONS | PERSAUD, DEORAM | 2882 | §101§102§103 | Final Rejection | 28d | Pending | Dec 05, 2023 |
| 18530109 | CHARGED PARTICLE APPARATUS AND METHOD | OSENBAUGH-STEWART, ELIZA W | 2881 | §102§103§112 | Non-Final OA | — | Pending | Dec 05, 2023 |
| 18566713 | METHOD OF PRODUCING PHOTONIC CRYSTAL FIBERS | SNELTING, ERIN LYNN | 1741 | §103§112 | Final Rejection | — | Pending | Dec 04, 2023 |
| 18565951 | INSPECTION DATA FILTERING SYSTEMS AND METHODS | BHATNAGAR, ANAND P | 2668 | §101§103 | Final Rejection | 100d overdue | Pending | Nov 30, 2023 |
| 18565494 | ETCHING SYSTEMS, MODELS, AND MANUFACTURING PROCESSES | DINH, PAUL | — | §102§103 | Non-Final OA | — | Pending | Nov 29, 2023 |
| 18563841 | MANIPULATION OF CARRIER TRANSPORT BEHAVIOR IN DETECTOR | STOFFA, WYATT A | 2881 | §102 | Final Rejection | — | Pending | Nov 22, 2023 |
| 18517642 | CHARGED PARTICLE DEVICE AND METHOD | LI, LARRY | 2881 | §102§103§112 | Non-Final OA | — | Pending | Nov 22, 2023 |
| 18561892 | METROLOGY MEASUREMENT METHOD AND APPARATUS | RIZVI, AKBAR HASSAN | — | §102§103 | Final Rejection | — | Pending | Nov 17, 2023 |
| 18511454 | PROCESS WINDOW BASED ON DEFECT PROBABILITY | WHITESELL, STEVEN H | 1759 | §101§102§103Other | Final Rejection | 88d overdue | Pending | Nov 16, 2023 |
| 18559942 | DIFFRACTION GRATING FOR MEASUREMENTS IN EUV-EXPOSURE APPARATUSES | CARLSON, JOSHUA MICHAEL | 2877 | §103§112 | Final Rejection | — | Pending | Nov 09, 2023 |
| 18289765 | METROLOGY METHOD AND ASSOCIATED METROLOGY TOOL | STOCK JR, GORDON J | 2800 | §102§103§112 | Non-Final OA | — | Pending | Nov 07, 2023 |
| 18289384 | DETERMINING MASK RULE CHECK VIOLATIONS AND MASK DESIGN | SOUNDRANAYAGAM, RAYAPPU NMN | — | §112 | Non-Final OA | — | Pending | Nov 03, 2023 |
| 18558910 | METROLOGY APPARATUS AND LITHOGRAPHIC APPARATUS | GRAY, SUNGHEE Y | 1737 | §103 | Non-Final OA | — | Pending | Nov 03, 2023 |
| 18557578 | HIERARCHICAL CLUSTERING OF FOURIER TRANSFORM BASED LAYOUT PATTERNS | GOEBEL, EMMA ROSE | 2662 | §103 | Non-Final OA | — | Pending | Oct 26, 2023 |
| 18287613 | CAUSAL CONVOLUTION NETWORK FOR PROCESS CONTROL | ALAM, MOHAMMED | — | §103 | Non-Final OA | — | Pending | Oct 19, 2023 |
| 18287166 | METHOD FOR DETERMINING A STOCHASTIC METRIC RELATING TO A LITHOGRAPHIC PROCESS | ADAMS, EILEEN M | 2481 | §103 | Final Rejection | — | Pending | Oct 16, 2023 |
| 18284974 | SYSTEM AND METHOD TO ENSURE PARAMETER MEASUREMENT MATCHING ACROSS METROLOGY TOOLS | CHARIOUI, MOHAMED | 2857 | §101§103 | Non-Final OA | — | Pending | Sep 29, 2023 |
| 18284839 | ON SYSTEM SELF-DIAGNOSIS AND SELF-CALIBRATION TECHNIQUE FOR CHARGED PARTICLE BEAM SYSTEMS | VANORE, DAVID A | 2878 | §101§112 | Non-Final OA | 28d | AI Ready | Sep 28, 2023 |
| 18281519 | A METHOD FOR MODELING MEASUREMENT DATA OVER A SUBSTRATE AREA AND ASSOCIATED APPARATUSES | NGUYEN, NHA T | — | §103 | Non-Final OA | — | Pending | Sep 11, 2023 |
| 18280529 | HOLLOW-CORE PHOTONIC CRYSTAL FIBER BASED MULTIPLE WAVELENGTH LIGHT SOURCE DEVICE | PEACE, RHONDA S | 2828 | §102§103 | Final Rejection | — | Pending | Sep 06, 2023 |
| 18453531 | Metrology Apparatus and a Method of Determining a Characteristic of Interest | GRAY, SUNGHEE Y | 2877 | §103 | Non-Final OA | — | Pending | Aug 22, 2023 |
| 18233263 | METHOD AND SYSTEM TO MONITOR A PROCESS APPARATUS | PERSAUD, DEORAM | 2882 | §101§102Other | Non-Final OA | 12d | Pending | Aug 11, 2023 |
| 18276014 | METHOD TO PREDICT METROLOGY OFFSET OF A SEMICONDUCTOR MANUFACTURING PROCESS | NGUYEN, NHA T | — | §102§103 | Non-Final OA | — | Pending | Aug 04, 2023 |
| 18270074 | MODULAR AUTOENCODER MODEL FOR MANUFACTURING PROCESS PARAMETER ESTIMATION | CAMPOS, ALFREDO | 2129 | §101§103§112 | Final Rejection | 35d | AI Ready | Jun 28, 2023 |
| 18259344 | MODULAR AUTOENCODER MODEL FOR MANUFACTURING PROCESS PARAMETER ESTIMATION | ALSHAHARI, SADIK AHMED | 2121 | §103§112 | Final Rejection | 1d overdue | AI Ready | Jun 26, 2023 |
| 18213765 | ELECTRON-OPTICAL DEVICE | CHOI, JAMES J | 2878 | §103 | Non-Final OA | — | Pending | Jun 23, 2023 |
| 18268847 | A METROLOGY APPARATUS AND A METROLOGY METHOD | OKASHA, RAMI RAFAT | 2118 | §103§112 | Final Rejection | 38d overdue | Pending | Jun 21, 2023 |
| 18268953 | MACHINE LEARNING-BASED SYSTEMS AND METHODS FOR GENERATING SYNTHETIC DEFECT IMAGES FOR WAFER INSPECTION | DHOOGE, DEVIN J | 2677 | §103 | Non-Final OA | 50d | Pending | Jun 21, 2023 |
| 18331866 | APPARATUS AND METHOD FOR DIRECTING CHARGED PARTICLE BEAM TOWARDS A SAMPLE | SMITH, DAVID E | 2881 | §103 | Final Rejection | 54d | AI Ready | Jun 08, 2023 |
| 18265606 | METHOD OF METROLOGY AND ASSOCIATED APPARATUSES | WHITESELL, STEVEN H | 1759 | §103 | Non-Final OA | — | Pending | Jun 06, 2023 |
| 18265431 | FEATURE EXTRACTION METHOD FOR EXTRACTING FEATURE VECTORS FOR IDENTIFYING PATTERN OBJECTS | LIEW, ALEX KOK SOON | 2674 | §102§103 | Non-Final OA | 93d overdue | Pending | Jun 05, 2023 |
| 18327847 | CHARGED PARTICLE TOOL, CALIBRATION METHOD, INSPECTION METHOD | VANORE, DAVID A | 2878 | §112 | Non-Final OA | 70d | AI Ready | Jun 01, 2023 |
| 18038206 | SEMICONDUCTOR CHARGED PARTICLE DETECTOR FOR MICROSCOPY | STOFFA, WYATT A | 2881 | §103§112 | Non-Final OA | 71d | Pending | May 22, 2023 |
| 18251261 | CONDITIONING APPARATUS AND METHOD | RIDDLE, CHRISTINA A | 2882 | §112 | Final Rejection | — | Pending | May 01, 2023 |
| 18305925 | LITHOGRAPHIC APPARATUS, METHOD FOR UNLOADING A SUBSTRATE AND METHOD FOR LOADING A SUBSTRATE | SAENZ, ALBERTO | 3723 | §103Other | Final Rejection | — | Pending | Apr 24, 2023 |
| 18033028 | A METHOD FOR MODELING MEASUREMENT DATA OVER A SUBSTRATE AREA AND ASSOCIATED APPARATUSES | CHAVEZ, ANTHONY RAY | — | §101§102§103§112 | Non-Final OA | — | Pending | Apr 20, 2023 |
| 18031865 | METHOD FOR GENERATING MASK PATTERN | LEE, ERIC D | 2851 | §102 | Final Rejection | 36d overdue | Pending | Apr 13, 2023 |
| 18134020 | APERTURE PATTERNS FOR DEFINING MULTI-BEAMS | CHOI, JAMES J | 2878 | §102§103§112 | Non-Final OA | 30d overdue | AI Ready | Apr 12, 2023 |
| 18123210 | OBJECTIVE LENS ARRAY ASSEMBLY, ELECTRON-OPTICAL SYSTEM, ELECTRON-OPTICAL SYSTEM ARRAY, METHOD OF FOCUSING, OBJECTIVE LENS ARRANGEMENT | CHOI, JAMES J | 2878 | §103 | Non-Final OA | — | Pending | Mar 17, 2023 |
| 18025636 | VACUUM SYSTEM FOR MITIGATING DAMAGE DUE TO A VACUUM PUMP MALFUNCTION | COMLEY, ALEXANDER BRYANT | 3746 | §102§112 | Non-Final OA | 3d overdue | Pending | Mar 09, 2023 |
| 18025183 | TARGET STRUCTURE AND ASSOCIATED METHODS AND APPARATUS | WHITESELL, STEVEN H | 1759 | §102§103§112 | Final Rejection | 51d overdue | Pending | Mar 07, 2023 |
| 18023708 | METHOD OF PERFORMING METROLOGY, METHOD OF TRAINING A MACHINE LEARNING MODEL, METHOD OF PROVIDING A LAYER COMPRISING A TWO-DIMENSIONAL MATERIAL, METROLOGY APPARATUS | DINH, LYNDA | 2857 | §101§103 | Final Rejection | 50d overdue | Pending | Feb 27, 2023 |
| 18022476 | APPARATUS AND METHOD FOR PROCESSING A RETICLE AND PELLICLE ASSEMBLY | COSGROVE, JAYSON D | 1737 | §103 | Final Rejection | — | Pending | Feb 21, 2023 |
| 18021537 | CHARGED-PARTICLE INSPECTION APPARATUS | MCDONALD, RODNEY GLENN | 1794 | §103 | Non-Final OA | — | AI Ready | Feb 15, 2023 |
| 18018034 | SYSTEMS, PRODUCTS, AND METHODS FOR IMAGE-BASED PATTERN SELECTION | NGUYEN, NHA T | 2851 | §102§103 | Non-Final OA | — | Pending | Jan 25, 2023 |
| 18017646 | APPARATUS AND METHOD FOR SELECTING HIGH QUALITY IMAGES FROM RAW IMAGES AUTOMATICALLY | HELCO, NICHOLAS JOHN | 2667 | §103 | Non-Final OA | 79d overdue | Pending | Jan 23, 2023 |
| 18016811 | METHOD AND APPARATUS FOR IDENTIFYING CONTAMINATION IN A SEMICONDUCTOR FAB | GASSEN, CHRISTOPHER J | 2881 | §101§102§103 | Non-Final OA | 43d overdue | Pending | Jan 18, 2023 |
| 18155698 | EMITTER FOR EMITTING CHARGED PARTICLES | SMITH, DAVID E | 2881 | §103 | Final Rejection | — | AI Ready | Jan 17, 2023 |
| 18015162 | METHOD AND APPARATUS FOR CONCEPT DRIFT MITIGATION | TANK, ANDREW L | 2141 | §102§103 | Final Rejection | — | Pending | Jan 09, 2023 |
| 18015313 | APPARATUS AND METHOD FOR SELECTING INFORMATIVE PATTERNS FOR TRAINING MACHINE LEARNING MODELS | LU, ZHIYU | 2665 | §103 | Final Rejection | 84d | Pending | Jan 09, 2023 |
| 18013636 | METHOD FOR CLASSIFYING SEMICONDUCTOR WAFERS | TRAN, DANIEL DUC | 2147 | §101§103§112 | Final Rejection | — | Pending | Dec 29, 2022 |
| 18010251 | SYSTEMS AND METHODS FOR LASER-TO-DROPLET ALIGNMENT | LOGIE, MICHAEL J | 2881 | §102§103§112 | Non-Final OA | — | Pending | Dec 14, 2022 |
| 18064110 | REPLACEABLE MODULE FOR A CHARGED PARTICLE APPARATUS | OSENBAUGH-STEWART, ELIZA W | 2881 | §103 | Non-Final OA | 2d overdue | AI Ready | Dec 09, 2022 |
| 17986829 | APPARATUS FOR DECOMPOSING ERROR CONTRIBUTIONS FROM MULTIPLE SOURCES TO MULTIPLE FEATURES OF A PATTERN ON A SUBSTRATE | ISLAM, MEHRAZUL NMN | 2662 | §103§112 | Non-Final OA | 28d | AI Ready | Nov 14, 2022 |
| 17924626 | SYSTEMS, PRODUCTS, AND METHODS FOR GENERATING PATTERNING DEVICES AND PATTERNS THEREFOR | ALAWDI, ANWER AHMED | 2851 | §102§103 | Non-Final OA | 53d overdue | Pending | Nov 10, 2022 |
| 17922768 | OPTICAL ELEMENT AND PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS | ANGEBRANNDT, MARTIN J | 1737 | §102§103 | Final Rejection | 28d | Pending | Nov 01, 2022 |
| 17922580 | SUBSTRATE SUPPORT SYSTEM, LITHOGRAPHIC APPARATUS AND METHOD OF EXPOSING A SUBSTRATE | RIDDLE, CHRISTINA A | 2882 | §103 | Final Rejection | 55d | Pending | Oct 31, 2022 |
| 17968352 | SEPARATION OF CONTRIBUTIONS TO METROLOGY DATA | LIN, ARIC | 2851 | §103 | Non-Final OA | — | Pending | Oct 18, 2022 |
| 17964783 | ENERGY BAND-PASS FILTERING FOR IMPROVED HIGH LANDING ENERGY BACKSCATTERED CHARGED PARTICLE IMAGE RESOLUTION | SMITH, DAVID E | 2881 | §102§103 | Non-Final OA | — | Pending | Oct 12, 2022 |
| 17918087 | PROCESSING REFERENCE DATA FOR WAFER INSPECTION | DULANEY, KATHLEEN YUAN | 2666 | §102 | Non-Final OA | — | Pending | Oct 10, 2022 |
| 17913305 | CONFIGURATION OF AN IMPUTER MODEL | MOUNDI, ISHAN NMN | 2141 | §103 | Non-Final OA | — | Pending | Sep 21, 2022 |
| 17941897 | APERTURE BODY, FLOOD COLUMN AND CHARGED PARTICLE TOOL | KALISZEWSKI, ALINA ROSE | 2881 | §102§103 | Non-Final OA | — | AI Ready | Sep 09, 2022 |
| 17909352 | BEAM ARRAY GEOMETRY OPTIMIZER FOR MULTI-BEAM INSPECTION SYSTEM | KALISZEWSKI, ALINA ROSE | 2881 | §103 | Final Rejection | — | AI Ready | Sep 02, 2022 |
| 17891961 | INSPECTION APPARATUS | CHANG, HANWAY | 2878 | §102§103 | Final Rejection | — | Pending | Aug 19, 2022 |
| 17798538 | CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD | OSENBAUGH-STEWART, ELIZA W | 2881 | §103 | Non-Final OA | 5d | Pending | Aug 09, 2022 |
| 17796434 | DETERMINING LITHOGRAPHIC MATCHING PERFORMANCE | ALAWDI, ANWER AHMED | 2851 | §103 | Final Rejection | 125d overdue | Pending | Jul 29, 2022 |
| 17874582 | COMPUTATIONAL METROLOGY BASED CORRECTION AND CONTROL | WHITESELL, STEVEN H | 1759 | §103 | Non-Final OA | 66d overdue | Pending | Jul 27, 2022 |
| 17794435 | CHARGED PARTICLE MANIPULATOR DEVICE | OSENBAUGH-STEWART, ELIZA W | 2881 | §102§103§112 | Non-Final OA | 72d overdue | Pending | Jul 21, 2022 |
| 17792464 | PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS | ANGEBRANNDT, MARTIN J | 1737 | §102§103§112Other | Final Rejection | 33d | Pending | Jul 13, 2022 |
| 17771761 | CHARGED PARTICLE INSPECTION SYSTEM AND METHOD USING MULTI-WAVELENGTH CHARGE CONTROLLERS | MCCORMACK, JASON L | 2881 | §112 | Final Rejection | — | Pending | Apr 25, 2022 |
| 17766585 | METHODS OF FITTING MEASUREMENT DATA TO A MODEL AND MODELING A PERFORMANCE PARAMETER DISTRIBUTION AND ASSOCIATED APPARATUSES | DARWISH, AMIR ELSAYED | 2199 | §103 | Non-Final OA | — | Pending | Apr 05, 2022 |
| 17763698 | PROCESS MONITORING AND TUNING USING PREDICTION MODELS | PAN, YUHUI R | 2116 | §103 | Non-Final OA | 15d overdue | Pending | Mar 25, 2022 |
| 17638472 | SEMICONDUCTOR DEVICE GEOMETRY METHOD AND SYSTEM | COLE, BRANDON S | 2128 | §101§103 | Non-Final OA | 30d overdue | Pending | Feb 25, 2022 |
| 17632632 | METHOD AND APPARATUS FOR PHOTOLITHOGRAPHIC IMAGING | WHITE, JAY MICHAEL | 2188 | §101§102§112 | Non-Final OA | 86d overdue | Pending | Feb 03, 2022 |
| 17631557 | METHOD FOR TRAINING MACHINE LEARNING MODEL FOR IMPROVING PATTERNING PROCESS | CRUZ, IRIANA | 2681 | §103 | Final Rejection | — | Pending | Jan 31, 2022 |
| 17623829 | SUB-FIELD CONTROL OF A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUS | TAN, ALVIN H | 2118 | §103§112 | Non-Final OA | 99d overdue | Pending | Dec 29, 2021 |
| 17607701 | A PATTERNING DEVICE | ANGEBRANNDT, MARTIN J | 1737 | §102§103§112 | Non-Final OA | 103d overdue | Pending | Oct 29, 2021 |
| 17471363 | MACHINE-LEARNING BASED DEFECT IDENTIFICATION | DULANEY, BENJAMIN O | 2683 | §102§103 | Non-Final OA | 70d | Pending | Sep 10, 2021 |
| 17311422 | APPARATUS AND METHOD FOR GROUPING IMAGE PATTERNS TO DETERMINE WAFER BEHAVIOR IN A PATTERNING PROCESS | LEE, HWA S | 2877 | §103 | Non-Final OA | 55d | Pending | Jun 07, 2021 |
| 17277583 | METROLOGY METHOD AND APPARATUS THEREFOR | WHITESELL, STEVEN H | 1759 | §103 | Non-Final OA | 118d overdue | Pending | Mar 18, 2021 |
| 16340702 | A PROCESSING APPARATUS AND A METHOD FOR CORRECTING A PARAMETER VARIATION ACROSS A SUBSTRATE | MOORE, KARLA A | 1716 | §103§112 | Final Rejection | — | Pending | Apr 10, 2019 |
| 18562685 | METROLOGY SYSTEMS, TEMPORAL AND SPATIAL COHERENCE SCRAMBLER AND METHODS THEREOF | SULLIVAN, CALEEN O | — | §102§103 | Non-Final OA | — | Pending | Nov 20, 2023 |
| 18376237 | APPARATUS AND METHOD FOR DETERMINING A CONDITION ASSOCIATED WITH A PELLICLE | RIDDLE, CHRISTINA A | 2882 | §103DP | Final Rejection | — | Pending | Oct 03, 2023 |
| 18280459 | DIGITAL HOLOGRAPHIC MICROSCOPE AND ASSOCIATED METROLOGY METHOD | HANSEN, JONATHAN M | 2877 | §102§103 | Non-Final OA | 50d overdue | Pending | Sep 05, 2023 |
| 17912202 | SYSTEMS AND METHODS FOR FORMING STRUCTURES ON A SURFACE | CHACKO DAVIS, DABORAH | 1737 | §102§103§112 | Final Rejection | 44d overdue | Pending | Sep 16, 2022 |
| 17791641 | LITHOGRAPHIC APPARATUS AND METHOD FOR DRIFT COMPENSATION | WHITESELL, STEVEN H | 1759 | §103 | Final Rejection | — | Pending | Jul 08, 2022 |
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