| 19448851 |
STANDARD BASE COMPONENTS FOR FORMING INBOARD AND OUTBOARD SUBSTRATE HANDLING CHAMBERS AND THEIR USE IN PRODUCTION OF SUBSTRATE PROCESSING SYSTEMS WITH EXPANDED PRODUCTION CAPACITY |
HOLLY, LEE A |
3729 |
§102§103 |
Non-Final OA |
— |
Pending |
Jan 14, 2026 |
| 19401507 |
METHOD OF FILLING GAP WITH FLOWABLE CARBON LAYER |
HERNANDEZ-KENNEY, JOSE |
1717 |
§103DP |
Non-Final OA |
— |
Pending |
Nov 26, 2025 |
| 19313558 |
SEMICONDUCTOR PROCESSING SYSTEMS AND ASSOCIATED METHODS FOR FORMING SUPER-LATTICE STRUCTURES USING SEMICONDUCTOR PROCESSING SYSTEMS |
ZERVIGON, RUDY |
1716 |
§103§112 |
Non-Final OA |
— |
Pending |
Aug 28, 2025 |
| 19283552 |
METHOD OF FORMING LOW-K MATERIAL LAYER, STRUCTURE INCLUDING THE LAYER, AND SYSTEM FOR FORMING SAME |
MCCLURE, CHRISTINA D |
1718 |
§103§112 |
Non-Final OA |
— |
Pending |
Jul 29, 2025 |
| 19284207 |
METHOD AND SYSTEM FOR DEPOSITING METAL CARBIDE ON A SUBSTRATE |
LAW, NGA LEUNG V |
1717 |
§103§112 |
Non-Final OA |
— |
Pending |
Jul 29, 2025 |
| 19251984 |
METHODS FOR FORMING A DOPED HIGH-K LAYER ON A SUBSTRATE |
MELLOTT, JAMES M |
1759 |
§103DP |
Final Rejection |
50d |
Pending |
Jun 27, 2025 |
| 19234603 |
METHOD AND SYSTEM FOR FORMING A SILICON OXYCARBIDE LAYER AND STRUCTURE FORMED USING SAME |
HERNANDEZ-KENNEY, JOSE |
1717 |
§103 |
Non-Final OA |
— |
Pending |
Jun 11, 2025 |
| 19200826 |
METHOD, SYSTEM AND APPARATUS FOR FORMING METAL-INSULATOR-METAL AND/OR METAL-FERROELECTRIC-METAL DEVICE |
MAYY, MOHAMMAD |
1718 |
§102§103§112 |
Non-Final OA |
— |
Pending |
May 07, 2025 |
| 19199769 |
Methods for Depositing Gap-Filling Fluids and Related Systems and Devices |
WALTERS JR, ROBERT S |
1717 |
§103 |
Final Rejection |
— |
Pending |
May 06, 2025 |
| 19194543 |
SUBSTRATE PROCESSING APPARATUS WITH TEMPERATURE CONTROLLER |
MILLER, MICHAEL G |
1712 |
§103 |
Non-Final OA |
— |
Pending |
Apr 30, 2025 |
| 19180592 |
SUBSTRATE PROCESSING METHOD |
TADAYYON ESLAMI, TABASSOM |
1718 |
§103 |
Non-Final OA |
— |
Pending |
Apr 16, 2025 |
| 19175324 |
METHOD OF FORMING A STRUCTURE INCLUDING CARBON MATERIAL, STRUCTURE FORMED USING THE METHOD, AND SYSTEM FOR FORMING THE STRUCTURE |
MCCLURE, CHRISTINA D |
1718 |
§103§112 |
Non-Final OA |
— |
Pending |
Apr 10, 2025 |
| 19084915 |
SUBSTRATE PROCESSING METHOD |
MAYY, MOHAMMAD |
1718 |
§102§103§112 |
Non-Final OA |
— |
Pending |
Mar 20, 2025 |
| 19075175 |
METHOD OF DEPOSITING SILICON NITRIDE THIN FILM IN TRENCH OF SUBSTRATE |
LOUIE, MANDY C |
1718 |
§103Other |
Final Rejection |
— |
Pending |
Mar 10, 2025 |
| 19068714 |
DETECTING FAILED PULSE FROM RF POWER SOURCE |
PRETLOW, DEMETRIUS R |
2858 |
§102§103 |
Non-Final OA |
— |
Pending |
Mar 03, 2025 |
| 19065143 |
APPARATUS AND METHOD FOR PROVIDING A PULSE OF A PRECURSOR |
MILLER, MICHAEL G |
1712 |
§102§103 |
Non-Final OA |
— |
Pending |
Feb 27, 2025 |
| 19064376 |
END EFFECTOR AND SUBSTRATE PROCESSING SYSTEM USING THE SAME |
AHADI, ELIA |
3652 |
§102§103§112 |
Non-Final OA |
— |
Pending |
Feb 26, 2025 |
| 19042619 |
SUSCEPTOR MANUFACTURING METHOD AND THE MANUFACTURED SUSCEPTOR USING THE SAME |
WILLIAMS, JOSEPH L |
2875 |
Other |
Non-Final OA |
— |
Pending |
Jan 31, 2025 |
| 19036574 |
SUBSTARATE PROCESSING APPARATUS WITH VUV INTENSITY CONTROL |
ASFAW, MESFIN T |
2882 |
§102§103 |
Non-Final OA |
— |
Pending |
Jan 24, 2025 |
| 19032149 |
METHODS AND SYSTEM FOR PRECURSOR RECYCLING |
ALEJANDRO MULERO, LUZ L |
1716 |
§103 |
Non-Final OA |
— |
Pending |
Jan 20, 2025 |
| 19008803 |
METHOD AND APPARATUS FOR AREA-SELECTIVE DEPOSITION |
GAMBETTA, KELLY M |
1718 |
§103 |
Final Rejection |
41d |
Pending |
Jan 03, 2025 |
| 19007858 |
GAS MANIFOLD AND ASSEMBLY AND SYSTEM INCLUDING SAME |
MURPHY, KEVIN F |
3753 |
§103 |
Final Rejection |
— |
Pending |
Jan 02, 2025 |
| 19000941 |
METHODS AND ASSEMBLIES FOR SELECTIVE DEPOSITION OF METAL-CONTAINING MATERIAL |
WEDDLE, ALEXANDER MARION |
1712 |
§102§103 |
Final Rejection |
— |
Pending |
Dec 24, 2024 |
| 18985379 |
APPARATUS FOR A SUBSTRATE SUPPORT WITH MULTI-ZONE CONTROL |
WILSON, LEE D |
3723 |
§103§112 |
Non-Final OA |
— |
Pending |
Dec 18, 2024 |
| 18982214 |
DEPOSITION OF ORGANIC FILMS |
LU, JIONG-PING |
1713 |
§102§103DP |
Non-Final OA |
— |
Pending |
Dec 16, 2024 |
| 18975928 |
SUBSTRATE TRANSFER ARM AND APPARATUS USING THE SAME |
LE, HUAN G |
3655 |
§102§103§112 |
Non-Final OA |
— |
Pending |
Dec 10, 2024 |
| 18973788 |
APPARATUS AND METHODS FOR PERFORMING AN IN-SITU ETCH OF REACTION CHAMBERS WITH FLUORINE-BASED RADICALS |
REMAVEGE, CHRISTOPHER |
1713 |
§102DP |
Non-Final OA |
— |
Pending |
Dec 09, 2024 |
| 18962111 |
LOAD LOCK ARRANGEMENTS CONFIGURED FOR PERFORMING PARALLEL PROCESSES, AND ASSOCIATED SYSTEMS AND METHODS |
KEENAN, JAMES W |
3655 |
§102§103 |
Non-Final OA |
— |
Pending |
Nov 27, 2024 |
| 18930631 |
METHOD FOR FORMING A RARE-EARTH-CONTAINING LAYER, APPARATUS, AND STRUCTURE |
MCCLURE, CHRISTINA D |
1718 |
§103 |
Final Rejection |
— |
Pending |
Oct 29, 2024 |
| 18928314 |
METHODS AND APPARATUS FOR SUSCEPTOR LEVELING |
TAUFIQ, FARAH N |
1754 |
§103 |
Non-Final OA |
— |
Pending |
Oct 28, 2024 |
| 18925862 |
METHOD AND SYSTEM FOR DEPOSITING METAL PHOSPHIDE |
TUROCY, DAVID P |
1718 |
§103§112 |
Final Rejection |
19d overdue |
Pending |
Oct 24, 2024 |
| 18904974 |
METHODS AND SYSTEMS FOR PREVENTIVE MAINTENANCE OF SEMICONDUCTOR PROCESSING EQUIPMENT |
CAMPBELL, NATASHA N. |
1714 |
§103§112 |
Non-Final OA |
— |
Pending |
Oct 02, 2024 |
| 18904480 |
MIXING BLOCKS FOR FLUID SYSTEMS, FIXTURES AND FIXTURE ARRANGEMENTS INCLUDING MIXING BLOCKS, AND METHODS OF MAKING MIXING BLOCKS FOR FLUID SYSTEMS |
GARDNER, NICOLE |
3753 |
§102§103§112 |
Non-Final OA |
— |
Pending |
Oct 02, 2024 |
| 18900571 |
SELECTIVE DEPOSITION OF INHIBITOR MATERIAL AND DEPOSITION ASSEMBLIES |
ROLLAND, ALEX A |
1759 |
§103 |
Non-Final OA |
56d |
Pending |
Sep 27, 2024 |
| 18900134 |
METHOD, SYSTEM AND APPARATUS FOR FORMING ANISOTROPIC LAYER |
KUNEMUND, ROBERT M |
1714 |
§103 |
Non-Final OA |
— |
Pending |
Sep 27, 2024 |
| 18889069 |
SELECTIVE DEPOSITION OF ORGANIC POLYMER MATERIAL AND DEPOSITION ASSEMBLIES |
EMPIE, NATHAN H |
1712 |
§102§103§112 |
Non-Final OA |
— |
Pending |
Sep 18, 2024 |
| 18883125 |
METHODS FOR FORMING A METAL SILICATE LAYER FOR CONTROLLING A THRESHOLD VOLTAGE OF A METAL-OXIDE-SEMICONDUCTOR FIELD EFFECT TRANSISTOR |
RODRIGUEZ, MICHAEL P |
— |
§103 |
Non-Final OA |
— |
Pending |
Sep 12, 2024 |
| 18817489 |
METHODS AND APPARATUS FOR A GAS LINE MATRIX AND INTERCHANGE ASSEMBLY |
CAHILL, JESSICA MARIE |
3753 |
§102§103 |
Final Rejection |
— |
Pending |
Aug 28, 2024 |
| 18817440 |
METHODS AND APPARATUS FOR A SUSCEPTOR ASSEMBLY |
COMBER, KEVIN J |
2812 |
§103 |
Non-Final OA |
— |
Pending |
Aug 28, 2024 |
| 18816095 |
DEPOSITION OF ORGANIC MATERIAL |
DAGENAIS, KRISTEN A |
1717 |
§103 |
Non-Final OA |
— |
Pending |
Aug 27, 2024 |
| 18815636 |
METHODS OF FORMING SEMICONDUCTOR STRUCTURES, SEMICONDUCTOR PROCESSING SYSTEMS AND RELATED COMPUTER PROGRAM PRODUCTS |
WATTS, JEREMY DANIEL |
2897 |
§102§103 |
Non-Final OA |
— |
Pending |
Aug 26, 2024 |
| 18806906 |
LOAD LOCK ARRANGEMENTS, SEMICONDUCTOR PROCESSING SYSTEMS INCLUDING LOAD LOCK ARRANGEMENTS, AND ASSOCIATED METHODS FOR REGULATING THE TEMPERATURE OF SUBSTRATES WITHIN LOAD LOCK ARRANGEMENTS |
WILSON, GREGORY A |
3762 |
§102 |
Non-Final OA |
— |
Pending |
Aug 16, 2024 |
| 18788490 |
SUBSTRATE PROCESSING METHOD |
MINNEY, GABRIEL SEBASTIAN |
2897 |
§102§103§112 |
Non-Final OA |
— |
Pending |
Jul 30, 2024 |
| 18786895 |
METHOD, SYSTEM AND APPARATUS FOR TREATING SUBSTRATE SURFACE |
TALBOT, BRIAN K |
1712 |
§102§103§112 |
Non-Final OA |
— |
Pending |
Jul 29, 2024 |
| 18787053 |
PROTECTED METALLIC COMPONENTS, REACTION CHAMBERS INCLUDING PROTECTED METALLIC COMPONENTS, AND METHODS FOR FORMING AND UTILIZING PROTECTED METALLIC COMPONENTS |
SWEELY, KURT D |
1718 |
§102§103§112 |
Non-Final OA |
33d |
Pending |
Jul 29, 2024 |
| 18783002 |
METHOD FOR FORMING A MOLYBDENUM SILICIDE LAYER ON A SURFACE OF A SUBSTRATE |
MILLER, MICHAEL G |
— |
§102§103 |
Non-Final OA |
— |
Pending |
Jul 24, 2024 |
| 18780059 |
BOTTOM-UP METAL NITRIDE FORMATION |
ARMAND, MARC ANTHONY |
2813 |
DP |
Non-Final OA |
— |
Pending |
Jul 22, 2024 |
| 18777790 |
METHOD FOR FORMING SILICON NITRIDE FILM SELECTIVELY ON SIDEWALLS OF TRENCHES |
TIVARUS, CRISTIAN ALEXANDRU |
2899 |
§102§103§112 |
Non-Final OA |
— |
Pending |
Jul 19, 2024 |
| 18775963 |
DETERMINING SUBSTRATE DECENTERING IN SEMICONDUCTOR PROCESSING SYSTEMS EMPLOYED TO DEPOSIT MATERIAL LAYERS ONTO SUBSTRATES |
RAIMUND, CHRISTOPHER W |
1746 |
§103§112 |
Non-Final OA |
— |
Pending |
Jul 17, 2024 |
| 18773858 |
Vapor Deposition Processes |
CROWELL, ANNA M |
1716 |
§102§103§112DP |
Non-Final OA |
— |
Pending |
Jul 16, 2024 |
| 18754246 |
METHODS AND ASSEMBLIES FOR DEPOSITING MATERIAL IN A GAP |
WALTERS JR, ROBERT S |
1717 |
§103 |
Non-Final OA |
— |
Pending |
Jun 26, 2024 |
| 18755620 |
MATERIAL LAYER DEPOSITION METHODS, SEMICONDUCTOR PROCESSING SYSTEMS, AND COMPUTER PROGRAM PRODUCTS FOR CONTROLLING THICKNESS OF PRECOAT MATERIAL LAYERS IN SEMICONDUCTOR PROCESSING SYSTEMS |
LOUIE, MANDY C |
1718 |
§103§112 |
Final Rejection |
— |
Pending |
Jun 26, 2024 |
| 18740699 |
METHOD, SYSTEM, AND APPARATUS FOR DEPOSITION OF TRANSITION METAL FILM |
HALL, VICTORIA KATHLEEN |
2897 |
§102§103§112 |
Non-Final OA |
— |
Pending |
Jun 12, 2024 |
| 18677160 |
EPITAXY FAST RAMP TEMPERATURE CONTROL SYSTEMS AND PROCESSES |
GIORDANO, MICHAEL JAMES |
3762 |
§103 |
Non-Final OA |
— |
Pending |
May 29, 2024 |
| 18676023 |
METHOD SYSTEM AND APPARATUS FOR REMOTE SOLID REFILL |
ARNETT, NICOLAS ALLEN |
3753 |
§102§103§112 |
Non-Final OA |
— |
Pending |
May 28, 2024 |
| 18666277 |
EQUIPMENT FRONT END MODULE |
SCHULT, ALLEN |
3652 |
§103 |
Non-Final OA |
— |
Pending |
May 16, 2024 |
| 18660652 |
LIQUID PRECURSOR CONTAINERS, LIQUID PRECURSOR SYSTEMS AND SEMICONDUCTOR PROCESSING SYSTEMS HAVING LIQUID PRECURSOR CONTAINERS, AND METHODS OF DEPOSITING MATERIAL LAYERS USING LIQUID PRECURSORS |
NUCKOLS, TIFFANY Z |
1716 |
§102§103§112 |
Non-Final OA |
— |
Pending |
May 10, 2024 |
| 18659368 |
METHOD OF FORMING AN EPITAXIAL STACK AND SUBSTRATE PROCESSING APPARATUS FOR FORMING THE SAME |
BOEGEL, CHEVY JACOB |
2812 |
§103 |
Final Rejection |
— |
Pending |
May 09, 2024 |
| 18656799 |
SELECTIVE DEPOSITION OF A MATERIAL COMPRISING SILICON AND NITROGEN |
RAMALLO, GUSTAVO G |
2812 |
§102§103§112 |
Non-Final OA |
— |
Pending |
May 07, 2024 |
| 18642877 |
SYSTEMS AND METHODS FOR DEPOSITING MATERIAL LAYERS ONTO SUBSTRATES |
MCCLURE, CHRISTINA D |
1718 |
§103 |
Non-Final OA |
— |
Pending |
Apr 23, 2024 |
| 18635185 |
SUBSTRATE PROCESSING APPARATUS INCLUDING ELECTROSTATIC CHUCK |
AL-TAWEEL, MUAAMAR QAHTAN |
2838 |
§103 |
Non-Final OA |
— |
Pending |
Apr 15, 2024 |
| 18631858 |
SEMICONDUCTOR PROCESSING DEVICE WITH EDGE PURGING |
BENNETT, CHARLEE |
1718 |
§103 |
Non-Final OA |
— |
Pending |
Apr 10, 2024 |
| 18624808 |
LOW LEAKAGE CAPACITORS, AND RELATED STRUCTURES, METHODS, AND SYSTEMS |
KEBEDE, BROOK |
2818 |
§102 |
Non-Final OA |
— |
Pending |
Apr 02, 2024 |
| 18610654 |
METHOD FOR REDUCING INCUBATION PERIOD OF SILICON NITRIDE LAYER DEPOSITION, STRUCTURE FORMED USING THE METHOD, AND SYSTEM FOR PERFORMING THE METHOD |
HERNANDEZ-KENNEY, JOSE |
4100 |
§103 |
Non-Final OA |
— |
Pending |
Mar 20, 2024 |
| 18608609 |
METHODS OF FORMING A SEMICONDUCTOR STRUCTURE |
DEMISSIE, BERHANU GELETA |
4100 |
§102§103 |
Non-Final OA |
— |
Pending |
Mar 18, 2024 |
| 18603366 |
ENCLOSURE CONSTRUCTIONS FOR REACTORS USED IN SEMICONDUCTOR FABRICATION PROCESSING |
DANIELS, MATTHEW J |
1742 |
§103 |
Final Rejection |
— |
Pending |
Mar 13, 2024 |
| 18598145 |
METHOD OF FORMING DIELECTRIC MATERIAL LAYER USING PLASMA |
MCCLURE, CHRISTINA D |
1718 |
§103§112 |
Non-Final OA |
— |
Pending |
Mar 07, 2024 |
| 18596144 |
REACTANT VAPORIZER AND RELATED SYSTEMS AND METHODS |
TADAYYON ESLAMI, TABASSOM |
1718 |
§103 |
Final Rejection |
28d |
Pending |
Mar 05, 2024 |
| 18595668 |
SYSTEMS AND METHODS FOR MONITORING OF A CONTROLLED ENVIRONMENT IN A SUBSTRATE PROCESSING SYSTEM |
BARTLETT, WILLIAM P |
2169 |
§103 |
Final Rejection |
— |
Pending |
Mar 05, 2024 |
| 18585313 |
WAFER PROCESSING APPARATUS WITH FILM UNIFORMITY IMPROVEMENT CAPABILITIES |
SWEELY, KURT D |
1718 |
§103 |
Non-Final OA |
— |
Pending |
Feb 23, 2024 |
| 18433899 |
SYSTEM AND METHOD FOR DIAGNOSING PLASMA CHAMBER |
TRAN, MINH |
2845 |
§102Other |
Non-Final OA |
— |
Pending |
Feb 06, 2024 |
| 18402950 |
METHODS AND SYSTEMS FOR FORMING STRUCTURES COMPRISING A THRESHOLD VOLTAGE TUNING LAYER |
JUNGE, BRYAN R. |
2897 |
§102§112 |
Non-Final OA |
12d |
Pending |
Jan 03, 2024 |
| 18395822 |
METHODS AND APPARATUS FOR AN ACCUMULATOR |
DURDEN, RICHARD KYLE |
3753 |
§103§112 |
Non-Final OA |
— |
Pending |
Dec 26, 2023 |
| 18395907 |
PARTIAL BREAKDOWN OF PRECURSORS FOR ENHANCED ALD FILM GROWTH |
YEUNG LOPEZ, FEIFEI |
2899 |
§103§112 |
Final Rejection |
— |
Pending |
Dec 26, 2023 |
| 18392538 |
SUBSTRATE PROCESSING APPARATUS WITH CAPABILITIES OF AUTOMATIC DEVICE CONFIGURATION AND A METHOD THEREOF |
FOLLANSBEE, YVONNE TRANG |
2117 |
§103 |
Final Rejection |
— |
Pending |
Dec 21, 2023 |
| 18392301 |
LOAD LOCK ARRANGEMENTS, ASSOCIATED TEMPERATURE CONTROL ASSEMBLIES, AND SEMICONDUCTOR PROCESSING SYSTEMS INCLUDING LOAD LOCK ARRANGEMENTS AND TEMPERATURE CONTROL ASSEMBLIES |
JENNISON, BRIAN W |
3761 |
§112 |
Non-Final OA |
— |
Pending |
Dec 21, 2023 |
| 18540329 |
METHODS FOR FORMING MULTILAYER STRUCTURES ON A SUBSTRATE AND RELATED MULTILAYER STRUCTURES |
WALL, VINCENT |
2898 |
§103 |
Final Rejection |
— |
Pending |
Dec 14, 2023 |
| 18540230 |
METHODS FOR FORMING SEMICONDUCTOR STACKED STRUCTURES ON A SUBSTRATE AND RELATED SEMICONDUCTOR STRUCTURES |
BRATLAND JR, KENNETH A |
1714 |
§103§112 |
Non-Final OA |
— |
Pending |
Dec 14, 2023 |
| 18532190 |
SEMICONDUCTOR MANUFACTURING CHEMICAL COMPOUND MONITORING PROCESS |
NYAMOGO, JOSEPH A |
2858 |
§102§103 |
Final Rejection |
— |
Pending |
Dec 07, 2023 |
| 18530444 |
SUBSTRATE PROCESSING SYSTEM |
TADAYYON ESLAMI, TABASSOM |
1718 |
§103 |
Non-Final OA |
— |
Pending |
Dec 06, 2023 |
| 18522152 |
LOAD LOCK ARRANGEMENTS, SEMICONDUCTOR PROCESSING SYSTEMS HAVING LOAD LOCK ARRANGEMENTS, AND METHODS OF MAKING LOAD LOCKS FOR SEMICONDUCTOR PROCESSING SYSTEMS |
FORD, NATHAN K |
1716 |
§102§103 |
Final Rejection |
— |
Pending |
Nov 28, 2023 |
| 18519172 |
METHOD OF FORMING AN ORGANIC POLYMER COMPRISING POLYIMIDE |
GOODWIN, DAVID J |
2817 |
§103 |
Final Rejection |
— |
Pending |
Nov 27, 2023 |
| 18517837 |
VAPOR PHASE PRECURSOR DELIVERY SYSTEM |
REYES, JOSHUA NATHANIEL PI |
1718 |
§102§103 |
Non-Final OA |
— |
Pending |
Nov 22, 2023 |
| 18388578 |
METHOD AND DEVICE FOR DEPOSITING SILICON ONTO SUBSTRATES |
KLUNK, MARGARET D |
1716 |
§103 |
Final Rejection |
— |
Pending |
Nov 10, 2023 |
| 18386481 |
CHAMBER LINER FOR SUBSTRATE PROCESSING APPARATUS |
ZERVIGON, RUDY |
1716 |
§103 |
Non-Final OA |
— |
Pending |
Nov 02, 2023 |
| 18496081 |
SEMICONDUCTOR PROCESSING CHAMBER WITH FILAMENT LAMPS HAVING NONUNIFORM HEAT OUTPUT |
WILCZEWSKI, MARY A |
2898 |
§102§103 |
Final Rejection |
— |
Pending |
Oct 27, 2023 |
| 18494430 |
VAPOR PHASE PRECURSOR DELIVERY SYSTEM |
TUROCY, DAVID P |
1718 |
§102§103 |
Non-Final OA |
— |
Pending |
Oct 25, 2023 |
| 18491546 |
ALD DEPOSITION METHOD AND SYSTEM |
MAYY, MOHAMMAD |
1718 |
§103 |
Final Rejection |
— |
Pending |
Oct 20, 2023 |
| 18377885 |
GAS INLET TUBE ASSEMBLY FOR AN IMPROVED GAS MIXTURE IN A SUBSTRATE PROCESSING APPARATUS |
BENNETT, CHARLEE |
1718 |
§103 |
Final Rejection |
21d |
Pending |
Oct 09, 2023 |
| 18376597 |
METHODS FOR FORMING A TRANSITION METAL NIOBIUM NITRIDE FILM ON A SUBSTRATE BY ATOMIC LAYER DEPOSITION AND RELATED SEMICONDUCTOR DEVICE STRUCTURES |
ANDERSON, WILLIAM H |
2817 |
§103 |
Final Rejection |
— |
Pending |
Oct 04, 2023 |
| 18465835 |
METHOD OF FORMING A SI-COMPRISING EPITAXIAL LAYER SELECTIVELY ON A SUBSTRATE |
SLUTSKER, JULIA |
2891 |
§103 |
Final Rejection |
— |
Pending |
Sep 12, 2023 |
| 18243173 |
SYSTEM AND APPARATUS FOR A LIFT PIN |
CHEN, KEATH T |
1716 |
§102§103 |
Non-Final OA |
— |
Pending |
Sep 07, 2023 |
| 18463034 |
COMPOSITIONS COMPRISING BORAZINE AND ITS DERIVATIVES, AND RELATED METHODS AND SYSTEMS |
MILLER, MICHAEL G |
1712 |
§103 |
Final Rejection |
— |
Pending |
Sep 07, 2023 |
| 18239176 |
SYSTEM AND APPARATUS FOR A REACTION CHAMBER |
KENDALL, BENJAMIN R |
2896 |
§103 |
Non-Final OA |
26d |
Pending |
Aug 29, 2023 |
| 18452725 |
SUBSTRATE PROCESSING APPARATUS |
MILLER, JR, JOSEPH ALBERT |
1712 |
§102§103 |
Final Rejection |
— |
Pending |
Aug 21, 2023 |
| 18234549 |
METHOD OF FORMING MATERIAL WITHIN A RECESS |
TADAYYON ESLAMI, TABASSOM |
1718 |
§103§112 |
Final Rejection |
34d |
Pending |
Aug 16, 2023 |
| 18228122 |
SUBSTRATE PROCESSING METHOD |
STEVENSON, ANDRE C |
2899 |
§103 |
Final Rejection |
— |
Pending |
Jul 31, 2023 |
| 18362404 |
WAFER BOAT AND A METHOD FOR FORMING LAYER ON A PLURALITY OF SUBSTRATES |
BRAYTON, JOHN JOSEPH |
1794 |
§103 |
Non-Final OA |
22d |
Pending |
Jul 31, 2023 |
| 18222012 |
SUBSTRATE PROCESSING METHOD |
LOUIE, MANDY C |
1718 |
§103 |
Non-Final OA |
— |
Pending |
Jul 14, 2023 |
| 18346608 |
SEMICONDUCTOR PROCESSING APPARATUS FOR PROCESSING A PLURALITY OF SUBSTRATES WITH CROSS FLOW |
BRAYTON, JOHN JOSEPH |
1794 |
§103 |
Non-Final OA |
— |
Pending |
Jul 03, 2023 |
| 18214656 |
METHOD OF FORMING P-TYPE DOPED SILICON-GERMANIUM LAYERS AND SYSTEM FOR FORMING SAME |
TADAYYON ESLAMI, TABASSOM |
1718 |
§103 |
Non-Final OA |
— |
Pending |
Jun 27, 2023 |
| 18203873 |
HIGH-TEMPERATURE METHODS OF FORMING PHOTORESIST UNDERLAYER AND SYSTEMS FOR FORMING SAME |
DAGENAIS, KRISTEN A |
1717 |
§103 |
Non-Final OA |
— |
Pending |
May 31, 2023 |
| 18324411 |
SUBSTRATE SUPPORTS, SEMICONDUCTOR PROCESSING SYSTEMS, AND MATERIAL LAYER DEPOSITION METHODS |
LUND, JEFFRIE ROBERT |
1716 |
§102§103 |
Final Rejection |
— |
Pending |
May 26, 2023 |
| 18199018 |
SUBSTRATE PROCESSING METHOD |
STEVENSON, ANDRE C |
2899 |
§103 |
Final Rejection |
19d |
Pending |
May 18, 2023 |
| 18195456 |
FILM FORMING APPARATUS WITH ANNULAR EXHAUST DUCT |
SWEELY, KURT D |
1718 |
§103 |
Final Rejection |
76d |
Pending |
May 10, 2023 |
| 18135792 |
PRECURSOR VESSEL COOLING ASSEMBLY, SYSTEM INCLUDING THE ASSEMBLY, AND METHODS OF USING SAME |
KING, BRIAN M |
3763 |
§103§112 |
Final Rejection |
75d |
Pending |
Apr 18, 2023 |
| 18131279 |
GAS-PHASE METHOD OF FORMING RADIATION-SENSITIVE PATTERNABLE MATERIAL |
LEE, ALEXANDER N |
1737 |
§102§103 |
Non-Final OA |
25d overdue |
Pending |
Apr 05, 2023 |
| 18129932 |
GAS-DELIVERY ASSEMBLY AND REACTOR SYSTEM INCLUDING SAME |
KENDALL, BENJAMIN R |
2896 |
§103 |
Non-Final OA |
40d |
Pending |
Apr 03, 2023 |
| 18190696 |
PYROMETER CONTROLLED MULTI-WAFER CLEANING PROCESS |
BRATLAND JR, KENNETH A |
1714 |
§103 |
Non-Final OA |
— |
Pending |
Mar 27, 2023 |
| 18120752 |
ELECTROSTATIC CHUCK ASSEMBLY AND METHOD OF USING SAME |
ADDISU, SARA |
3722 |
§103 |
Final Rejection |
— |
Pending |
Mar 13, 2023 |
| 18179187 |
SEMICONDUCTOR PROCESSING SYSTEM WITH GAS LINE FOR TRANSPORTING EXCITED SPECIES AND RELATED METHODS |
REYES, JOSHUA NATHANIEL PI |
1718 |
§103 |
Non-Final OA |
26d |
Pending |
Mar 06, 2023 |
| 18110403 |
SYSTEMS AND METHODS FOR PROCESSING THE SURFACE OF AN EPITAXIALLY GROWN SILICON FILM USING A RADICAL SPECIES |
QI, HUA |
1714 |
§102§103§112 |
Final Rejection |
21d |
Pending |
Feb 16, 2023 |
| 18105275 |
REACTOR COOLING SYSTEM |
SWEELY, KURT D |
1718 |
§103 |
Non-Final OA |
— |
Pending |
Feb 03, 2023 |
| 18149700 |
METHODS FOR FORMING A SEMICONDUCTOR STRUCTURE INCLUDING A DIPOLE LAYER |
ROLLAND, ALEX A |
1759 |
§103§112 |
Non-Final OA |
— |
Pending |
Jan 04, 2023 |
| 18092362 |
REMOTE PLASMA UNIT AND SUBSTRATE PROCESSING APPARATUS INCLUDING REMOTE PLASMA |
MOORE, KARLA A |
1716 |
§103§112Other |
Non-Final OA |
4d overdue |
Pending |
Jan 02, 2023 |
| 18089635 |
METHODS AND APPARATUS FOR HEATING AND TEMPERATURE MONITORING |
AMAR, MARC J |
3741 |
§103§112 |
Final Rejection |
22d |
Pending |
Dec 28, 2022 |
| 18072764 |
METHODS FOR IMPROVING THIN FILM QUALITY |
GAMBETTA, KELLY M |
1718 |
§103§112 |
Final Rejection |
71d |
Pending |
Dec 01, 2022 |
| 17990776 |
METHOD OF FORMING SIOC AND SIOCN LOW-K SPACERS |
MCCLURE, CHRISTINA D |
1718 |
§103 |
Final Rejection |
28d |
Pending |
Nov 21, 2022 |
| 18051803 |
SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS |
BENNETT, CHARLEE |
1718 |
§103§112 |
Final Rejection |
— |
Pending |
Nov 01, 2022 |
| 17971829 |
PLASMA CVD APPARATUS WITH A BEVEL MASK WITH A PLANAR INNER EDGE |
FORD, NATHAN K |
1718 |
§103 |
Final Rejection |
— |
Pending |
Oct 24, 2022 |
| 18048188 |
METHOD OF FORMING A DOPED POLYSILICON LAYER |
CHUNG, ANDREW |
2898 |
§103 |
Final Rejection |
70d |
Pending |
Oct 20, 2022 |
| 17955816 |
MODULAR REACTION CHAMBER |
NUCKOLS, TIFFANY Z |
1718 |
§102§103§112 |
Final Rejection |
— |
Pending |
Sep 29, 2022 |
| 17948674 |
SYSTEM AND APPARATUS FOR GAS DISTRIBUTION |
FORD, NATHAN K |
1716 |
§103 |
Non-Final OA |
— |
Pending |
Sep 20, 2022 |
| 17900065 |
METHOD OF FORMING AN UNDERLAYER FOR EXTREME ULTRAVIOLET (EUV) DOSE REDUCTION AND STRUCTURE INCLUDING SAME |
ANGEBRANNDT, MARTIN J |
1737 |
§102§103 |
Non-Final OA |
5d overdue |
Pending |
Aug 31, 2022 |
| 17897461 |
SUBSTRATE PROCESSING APPARATUS INCLUDING IMPEDANCE ADJUSTER |
KENDALL, BENJAMIN R |
2896 |
§103 |
Non-Final OA |
65d |
Pending |
Aug 29, 2022 |
| 17896218 |
CVD APPARATUS AND METHOD FOR CLEANING CHAMBER OF CVD APPARATUS |
KLUNK, MARGARET D |
1718 |
§103 |
Final Rejection |
33d |
Pending |
Aug 26, 2022 |
| 17895370 |
SEALING SYSTEM FOR A REACTOR SYSTEM |
KLUNK, MARGARET D |
1716 |
§102§103§112 |
Non-Final OA |
— |
Pending |
Aug 25, 2022 |
| 17864698 |
SUBSTRATE SUPPORT UNIT, THIN FILM DEPOSITION APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME |
LAW, NGA LEUNG V |
1717 |
§103 |
Final Rejection |
49d overdue |
Pending |
Jul 14, 2022 |
| 17857344 |
SUBSTRATE SUPPORT STRUCTURES AND METHODS OF MAKING SUBSTRATE SUPPORT STRUCTURES |
REYES, JOSHUA NATHANIEL PI |
1718 |
§103 |
Final Rejection |
72d |
Pending |
Jul 05, 2022 |
| 17847470 |
SUBSTRATE PROCESSING APPRATUS INCLUDING A SUBSTRATE LIFT MECHANISM |
SWEELY, KURT D |
1718 |
§103 |
Non-Final OA |
— |
Pending |
Jun 23, 2022 |
| 17840870 |
SUSCEPTOR CLEANING |
REYES, JOSHUA NATHANIEL PI |
1718 |
§103 |
Non-Final OA |
— |
Pending |
Jun 15, 2022 |
| 17739493 |
CVD APPARATUS AND FILM FORMING METHOD |
FORD, NATHAN K |
1716 |
§103 |
Non-Final OA |
— |
Pending |
May 09, 2022 |
| 17689392 |
SUBSTRATE PROCESSING APPARATUS |
KLUNK, MARGARET D |
1716 |
§112 |
Final Rejection |
55d |
Pending |
Mar 08, 2022 |
| 17680607 |
METHODS AND SYSTEMS FOR FILLING A GAP |
YAP, DOUGLAS ANTHONY |
2899 |
§102§103§112 |
Non-Final OA |
— |
Pending |
Feb 25, 2022 |
| 17666681 |
METHOD AND SYSTEM FOR FORMING BORON NITRIDE ON A SURFACE OF A SUBSTRATE |
HERNANDEZ-KENNEY, JOSE |
1717 |
§102§103 |
Non-Final OA |
— |
Pending |
Feb 08, 2022 |
| 17457605 |
HIGH PERFORMANCE SUSCEPTOR APPARATUS |
NUCKOLS, TIFFANY Z |
1716 |
§102§103 |
Non-Final OA |
3d overdue |
Pending |
Dec 03, 2021 |
| 17360045 |
METHOD FOR FORMING A DOPED METAL CARBIDE FILM ON A SUBSTRATE AND RELATED SEMICONDUCTOR DEVICE STRUCTURES |
BENITEZ ROSARIO, JOSHUA |
2815 |
§103 |
Non-Final OA |
— |
Pending |
Jun 28, 2021 |
| 17169440 |
REACTOR SYSTEM WITH MULTI-DIRECTIONAL REACTION CHAMBER |
MOORE, KARLA A |
1716 |
§103§112 |
Non-Final OA |
— |
Pending |
Feb 06, 2021 |
| 17152592 |
METHOD FOR DEPOSITION OF SILICON NITRIDE LAYER USING PRETREATMENT, STRUCTURE FORMED USING THE METHOD, AND SYSTEM FOR PERFORMING THE METHOD |
STEVENSON, ANDRE C |
2899 |
§103 |
Final Rejection |
— |
Pending |
Jan 19, 2021 |
| 17147827 |
SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD FOR MONITORING INTEGRATED VALUE |
KACKAR, RAM N |
1716 |
§103 |
Non-Final OA |
— |
Pending |
Jan 13, 2021 |
| 17109080 |
SUBSTRATE PROCESSING APPARATUS, BEVEL MASK AND SUBSTRATE PROCESSING METHOD |
LAW, NGA LEUNG V |
1717 |
§103 |
Non-Final OA |
— |
Pending |
Dec 01, 2020 |
| 16210922 |
METHOD OF FORMING A STRUCTURE INCLUDING SILICON NITRIDE ON TITANIUM NITRIDE AND STRUCTURE FORMED USING THE METHOD |
CIESLEWICZ, ANETA B |
2893 |
§103 |
Non-Final OA |
— |
Pending |
Dec 05, 2018 |
Prosecution Insights