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| App # | Title | Examiner | Art Unit | Statutes | Status | Due in | AI | Filed |
|---|---|---|---|---|---|---|---|---|
| 19303500 | TFT STRUCTURES AND ELECTRICAL SIGNAL CONNECTIONS IN GOA AND PIXEL CIRCUITS FOR LCD AND OLED DISPLAYS | KETEMA, BENYAM | 2626 | §102§103 | Final Rejection | — | Pending | Aug 19, 2025 |
| 19282056 | HIGH CONDUCTANCE VARIABLE ORIFICE VALVE | ROST, ANDREW J | 3753 | §101§102§103Other | Non-Final OA | — | Pending | Jul 28, 2025 |
| 19261609 | ION SOURCE FOR CONTROLLING DECOMPOSITION BUILDUP USING CHLORINE CO-GAS | KING, MONICA C | 2845 | §102Other | Non-Final OA | — | Pending | Jul 07, 2025 |
| 19243488 | PLASMA ENHANCED NUCLEATION LAYER FORMATION | GAMBETTA, KELLY M | 1718 | §102§103§112 | Non-Final OA | — | Pending | Jun 19, 2025 |
| 19208337 | CYCLIC PLASMA AND THERMAL PROCESS TO IMPROVE PECVD TI SILICIDE DEPOSITION SELECTIVITY | TALBOT, BRIAN K | — | §103 | Non-Final OA | — | Pending | May 14, 2025 |
| 19206441 | METHOD OF COATING A SUBSTRATE INCLUDING A MULTI-LAYER COATING | HERNANDEZ-KENNEY, JOSE | 1717 | §103 | Final Rejection | — | Pending | May 13, 2025 |
| 19195644 | HIGH BANDGAP SWITCHED SHUNT CAPACITOR ARCHITECTURE | SKIBINSKI, TOMI SWEET | 2836 | §102§103 | Non-Final OA | — | Pending | Apr 30, 2025 |
| 19123123 | OPTICAL COATING FOR ELIMINATING GHOST IMAGES IN OPTICAL METROLOGY TOOLS | BOLOGNA, DOMINIC JOSEPH | 2877 | §102§103 | Non-Final OA | — | Pending | Apr 22, 2025 |
| 19173421 | PRECURSOR, GAS MIXTURE, AND METHOD FOR DEPOSITING A LOW K DIELECTRIC FILM | WALTERS JR, ROBERT S | 1717 | §103§112 | Final Rejection | — | Pending | Apr 08, 2025 |
| 19173702 | IMPEDANCE TUNING UTILITY OF VECTOR SPACE DEFINED BY TRANSMISSION LINE QUANTITIES | NGUYEN, HAI L | 2836 | §112 | Non-Final OA | — | Pending | Apr 08, 2025 |
| 19096353 | DELIVERY OF CONFIGURABLE PULSED VOLTAGE WAVEFORMS FOR SUBSTRATE PROCESSING | OTT, PATRICK S | 1794 | §103 | Non-Final OA | — | Pending | Mar 31, 2025 |
| 19093677 | SYSTEM AND METHOD TO MAP THICKNESS VARIATIONS OF SUBSTRATES IN MANUFACTURING SYSTEMS | RIZVI, AKBAR HASSAN | 2877 | §102§103Other | Non-Final OA | — | Pending | Mar 28, 2025 |
| 19111758 | METHODS TO MEASURE LIGHT LOSS AND EFFICIENCY OF DIFFRACTION GRATINGS ON OPTICAL SUBSTRATES | AYUB, HINA F | 2877 | §103§112 | Non-Final OA | — | Pending | Mar 13, 2025 |
| 19076106 | MULTISCALE CONTROL OF SUBSTRATE DEFORMATION IN DEVICE MANUFACTURING | KIM, PETER B | — | §102§103§112 | Non-Final OA | — | Pending | Mar 11, 2025 |
| 19075466 | REMOTE PLASMA SOURCES | PHAM, THAI N | 2845 | §103Other | Final Rejection | — | Pending | Mar 10, 2025 |
| 19074857 | APPARATUS AND METHOD FOR CONTACTLESS TRANSPORTATION OF A CARRIER | JACKSON, STEPHEN W | 2838 | §101DP | Non-Final OA | — | Pending | Mar 10, 2025 |
| 19073823 | ELECTROSTATIC CHUCK WITH LIGHT-UP RESISTANT FLOW ENHANCEMENT PLUG | CADUGAN, ERICA E | 3722 | §102§112 | Non-Final OA | — | Pending | Mar 07, 2025 |
| 19070718 | METHODS OF DEPOSITING SILICON NITRIDE | TALBOT, BRIAN K | 1712 | §103DP | Final Rejection | — | Pending | Mar 05, 2025 |
| 19071301 | MATCHING PROCESS CONTROLLERS FOR IMPROVED MATCHING OF PROCESS | NORTON, JENNIFER L | 2117 | §101Other | Non-Final OA | — | Pending | Mar 05, 2025 |
| 19070247 | APPARATUS AND METHOD FOR CLEANING SUSCEPTORS WITH PLASMA | CAMPBELL, NATASHA N. | 1714 | §103 | Non-Final OA | — | Pending | Mar 04, 2025 |
| 19064042 | SEMICONDUCTOR PROCESSING CHAMBER WITH ENHANCED PRESSURE TUNING | MURPHY, KEVIN F | 3753 | §102§103§112 | Non-Final OA | — | Pending | Feb 26, 2025 |
| 19058316 | TUNABILITY OF DOPANT CONCENTRATION IN THIN HAFNIUM OXIDE FILMS | DUMBRIS, SETH M | 1784 | §102§103§112 | Non-Final OA | — | Pending | Feb 20, 2025 |
| 19057024 | DIFFUSER-LESS GRAY-TONE LITHOGRAPHY PROCESS, MASK DESIGN, AND FABRICATION METHOD | NGUYEN, HUNG | — | §102§112 | Non-Final OA | — | Pending | Feb 19, 2025 |
| 19104809 | HIGH ASPECT RATIO GAP FILL USING CYCLIC DEPOSITION AND ETCH | PROCTOR, CACHET I | 1712 | §103§112 | Non-Final OA | — | Pending | Feb 19, 2025 |
| 19052990 | METHOD FOR DETERMINING WAFER UNIFORMITY | NAH, JONGBONG | 2674 | §103§112 | Non-Final OA | — | Pending | Feb 13, 2025 |
| 19051244 | ELECTROSTATIC CHUCK FOR NON-PLANAR SUBSTRATES | THOMAS, LUCY M | 2838 | §103 | Non-Final OA | — | Pending | Feb 12, 2025 |
| 19051385 | METAL OXIDE DIRECTIONAL REMOVAL | PHAM, THOMAS T | 1713 | §103 | Final Rejection | 2d overdue | Pending | Feb 12, 2025 |
| 19051679 | HIGH DENSITY AMORPHOUS CARBON FILM WITH REDUCED HYDROGEN CONTENT | ROLLAND, ALEX A | 1759 | §103§112 | Non-Final OA | — | Pending | Feb 12, 2025 |
| 19051154 | SEALING STRUCTURES FOR PROCESSING CHAMBERS | FOSTER, NICHOLAS L | 3675 | §102§112 | Non-Final OA | — | Pending | Feb 11, 2025 |
| 19049659 | INSPECTION OF LITHOGRAPHIC LAYERS AND DYNAMIC DATA VIA INLINE METROLOGY | PERSAUD, DEORAM | 2882 | §103 | Non-Final OA | — | Pending | Feb 10, 2025 |
| 19047868 | METHODS AND MECHANISMS FOR ADJUSTING PROCESS CHAMBER PARAMETERS DURING SUBSTRATE MANUFACTURING | JARRETT, RYAN A | 2116 | §102§103 | Non-Final OA | — | Pending | Feb 07, 2025 |
| 19037527 | ENCAPSULATION MATERIALS FOR FLAT OPTICAL DEVICES | KHAN, TAHSEEN | 1781 | §103Other | Non-Final OA | — | Pending | Jan 27, 2025 |
| 19034051 | ULTRAVIOLET AND OZONE CLEANING APPARATUS AND METHOD OF USING | GOLIGHTLY, ERIC WAYNE | 1714 | §103 | Non-Final OA | — | Pending | Jan 22, 2025 |
| 19028671 | LIFT PIN INTERFACE IN A SUBSTRATE SUPPORT | NEJAD, MAHDI H | 3723 | §102§103 | Non-Final OA | — | Pending | Jan 17, 2025 |
| 18995474 | PROCESSING APPARATUS FOR PROCESSING A FLEXIBLE SUBSTRATE AND METHODS THEREFOR | ZHANG, HAI Y | 1717 | §102§103 | Non-Final OA | — | Pending | Jan 16, 2025 |
| 19018386 | EPI ISOLATION PLATE AND PARALLEL BLOCK PURGE FLOW TUNING FOR GROWTH RATE AND UNIFORMITY | LUND, JEFFRIE ROBERT | 1714 | §102§103Other | Non-Final OA | — | Pending | Jan 13, 2025 |
| 19019158 | MULTI-CHAMBER LASER SENSING USING SPLIT BEAMS | RAHMAN, MD M | 2877 | §103 | Non-Final OA | — | Pending | Jan 13, 2025 |
| 19013048 | Bowed Substrate Clamping Method, Apparatus, and System | PATEL, DHARTI HARIDAS | 2838 | Other | Non-Final OA | — | Pending | Jan 08, 2025 |
| 19003394 | Cassette for Vapor Processing Chamber | IMPINK, MOLLIE LLEWELLYN | 3799 | §103§112 | Final Rejection | — | Pending | Dec 27, 2024 |
| 18987976 | PLASMA TREATMENT FACILITATING SELECTIVE METAL GROWTH AND PREVENTING DIELECTRIC DAMAGE | DAGENAIS, KRISTEN A | 1717 | §103 | Final Rejection | — | Pending | Dec 19, 2024 |
| 18984643 | GAS DELIVERY SYSTEM | JELLETT, MATTHEW WILLIAM | 3753 | §102§103 | Final Rejection | 27d | Pending | Dec 17, 2024 |
| 18983235 | APPARATUS, SYSTEMS, AND METHODS OF USING ATOMIC HYDROGEN RADICALS WITH SELECTIVE EPITAXIAL DEPOSITION | MOORE, KARLA A | 1716 | §103 | Non-Final OA | — | Pending | Dec 16, 2024 |
| 18980063 | HYDROGEN ADDITION TO LOW-K DIELECTRIC BARRIER FILMS | TADAYYON ESLAMI, TABASSOM | 1718 | §103 | Non-Final OA | — | Pending | Dec 13, 2024 |
| 18977686 | TEMPERATURE CONTROL OF CHEMICAL MECHANICAL POLISHING | CRANDALL, JOEL DILLON | 3723 | §103 | Non-Final OA | — | Pending | Dec 11, 2024 |
| 18973504 | RADICAL SPECIES RECOMBINATION IN SUBSTRATE PROCESSING SYSTEMS | MURATA, AUSTIN | 1712 | §103 | Non-Final OA | — | Pending | Dec 09, 2024 |
| 18968156 | DETECTION OF SURFACE PARTICLES ON CHAMBER COMPONENTS WITH CARBON DIOXIDE | WEST, PAUL M | 2855 | §103 | Non-Final OA | — | Pending | Dec 04, 2024 |
| 18960809 | COOLING ARRANGEMENTS FOR PROCESSING SYSTEMS, CHAMBERS, AND RELATED METHODS TO MODIFY SUBSTRATE TEMPERATURE PROFILES | KUNEMUND, ROBERT M | 1714 | §103 | Non-Final OA | — | Pending | Nov 26, 2024 |
| 18958006 | NANOCRYSTALLINE DIAMOND AND ULTRA-NANOCRYSTALLINE DIAMOND FILMS BY CATALYTIC CVD | PROCTOR, CACHET I | 1712 | §103 | Non-Final OA | — | Pending | Nov 25, 2024 |
| 18957056 | REAL-TIME IMAGE PROCESSING TO MEASURE SUBSTRATE OFFSETS AND APPLY CORRECTIONS TO ROBOT END EFFECTOR POSITIONING | BODNARK, MATTHEW JAMES | 2668 | §103 | Non-Final OA | — | Pending | Nov 22, 2024 |
| 18948311 | OPTICAL SPECTRUM SENSOR WAFER OR ROBOT FOR CHAMBER CONDITION MONITORING | LYONS, MICHAEL A | 2877 | §102§103 | Non-Final OA | — | Pending | Nov 14, 2024 |
| 18947949 | Selective metal Capping with Metal Halide enhancement | MCCLURE, CHRISTINA D | 1718 | §103§112 | Non-Final OA | — | Pending | Nov 14, 2024 |
| 18946807 | MULTILAYER COATING FOR CORROSION RESISTANCE | LOUIE, MANDY C | 1718 | §103 | Final Rejection | — | Pending | Nov 13, 2024 |
| 18942941 | GRAY TONE UNIFORMITY CONTROL OVER SUBSTRATE TOPOGRAPHY | PERSAUD, DEORAM | 2882 | §103Other | Non-Final OA | — | Pending | Nov 11, 2024 |
| 18939065 | PROCESS MODELING PLATFORM FOR SUBSTRATE MANUFACTURING SYSTEMS | LU, HUA | 2118 | §103 | Non-Final OA | — | Pending | Nov 06, 2024 |
| 18939220 | DUAL COLLIMATOR PHYSICAL VAPOR DEPOSITIONS PROCESSING CHAMBER | MCDONALD, RODNEY GLENN | 1794 | §103 | Final Rejection | — | Pending | Nov 06, 2024 |
| 18937925 | METHODS OF SELECTIVELY ETCHING SILICON | DUCLAIR, STEPHANIE P. | 1713 | §103 | Non-Final OA | — | Pending | Nov 05, 2024 |
| 18936104 | OPTICAL INSPECTION OF WAFER BEVELS USING MULTIPLE LIGHT SOURCES | AYUB, HINA F | 2877 | §103§112 | Final Rejection | — | Pending | Nov 04, 2024 |
| 18929425 | SEMICONDUCTOR SUBSTRATE SUPPORT LEVELING APPARATUS | NEJAD, MAHDI H | 3723 | §103 | Non-Final OA | — | Pending | Oct 28, 2024 |
| 18927064 | COMPACT BEAM PROCESSING SYSTEM HAVING IN-SITU IMAGING METROLOGY | MCCORMACK, JASON L | 2881 | §101§112 | Non-Final OA | — | Pending | Oct 25, 2024 |
| 18926108 | Low Cost Electrostatic Chuck for Chucking Insulator Substrates | AL-TAWEEL, MUAAMAR QAHTAN | 2838 | §103 | Non-Final OA | — | Pending | Oct 24, 2024 |
| 18925805 | DIRECTIONAL ANGLED ETCH FOR HARDMASK OPENING AND LWR IMPROVEMENT | AHMED, SHAMIM | 1713 | §102§103 | Non-Final OA | — | Pending | Oct 24, 2024 |
| 18924796 | Systems and Methods for Monitoring Cleanliness of a Substrate Processing Chamber | TOOHEY, RICHARD ORLANDO | 2884 | §102 | Non-Final OA | — | Pending | Oct 23, 2024 |
| 18859114 | ADJUSTING EFFECTIVE DEPTH OF FOCUS | KIM, PETER B | 2882 | §102§103§112 | Non-Final OA | — | Pending | Oct 22, 2024 |
| 18921364 | LOCKING FRAME HOLDER AND WORKPIECE LOADER FOR WET CHEMICAL SEMICONDUCTOR PROCESSING | BURKMAN, JESSICA LYNN | 3653 | §103§112 | Non-Final OA | — | Pending | Oct 21, 2024 |
| 18920284 | AUGMENTED MANUFACTURING SYSTEMS WITH FIELD-PROVISIONED SENSORS AND ALGORITHMS | POUDEL, SANTOSH RAJ | 2115 | §101§102§103 | Non-Final OA | — | Pending | Oct 18, 2024 |
| 18917730 | METHOD TO IMPROVE WAFER EDGE UNIFORMITY | CHIN, EDWARD | 2893 | §103 | Non-Final OA | — | Pending | Oct 16, 2024 |
| 18917917 | CONTROL OF RF POWER DELIVERY AND SPLITTING IN A DISTRIBUTED RF SYSTEM | WELLS, KENNETH B | 2836 | §103Other | Non-Final OA | — | Pending | Oct 16, 2024 |
| 18909425 | NOBLE GAS PLASMA CURES TO ENABLE INCREASED CROSSLINKING IN LOW-K DIELECTRIC FILMS | HERNANDEZ-KENNEY, JOSE | 1717 | §103 | Final Rejection | — | Pending | Oct 08, 2024 |
| 18907224 | Grounded Slit Door for Substrate Process Chamber | MILLER, JR, JOSEPH ALBERT | 1712 | §102§103§112 | Non-Final OA | — | Pending | Oct 04, 2024 |
| 18905932 | MECHANICALLY ROBUST COMPOSITE STRUCTURES WITH FORMED ELECTRICAL PATHS | NGUYEN, CHAU N | 2841 | §103 | Non-Final OA | — | Pending | Oct 03, 2024 |
| 18904192 | APPARATUS FOR ION ENERGY ANALYSIS OF PLASMA PROCESSES | GASSEN, CHRISTOPHER J | 2881 | §103§112 | Non-Final OA | — | Pending | Oct 02, 2024 |
| 18899974 | METHOD AND MATERIAL SYSTEM FOR MULTI-THRESHOLD-VOLTAGE GATES IN SEMICONDUCTOR STRUCTURES | ONUTA, TIBERIU DAN | 2814 | §102§103§112 | Non-Final OA | — | Pending | Sep 27, 2024 |
| 18895005 | EXHAUST SYSTEM CONTROL | MILLER, JR, JOSEPH ALBERT | 1712 | §103 | Non-Final OA | — | Pending | Sep 24, 2024 |
| 18895100 | FLOW ADAPTORS FOR GAS FLOWS, AND RELATED PROCESSING CHAMBERS, PROCESSING SYSTEMS, APPARATUS, AND METHODS | CHEN, PATRICK C | 2836 | §103 | Final Rejection | — | Pending | Sep 24, 2024 |
| 18894665 | CARBON REPLENISHMENT OF SILICON-CONTAINING MATERIALS TO REDUCE THICKNESS LOSS | LU, JIONG-PING | 1713 | §103 | Non-Final OA | — | Pending | Sep 24, 2024 |
| 18885214 | EFFICIENCY-LADDERED CROPPED EXIT PUPIL EXPANDER FOR COMPACT DIFRACTIVE WAVEGUIDES | PAK, SUNG H | 2874 | §102§103 | Non-Final OA | — | Pending | Sep 13, 2024 |
| 18885271 | LOCALLY ANTIREFLECTION-COATED SPLIT PUPIL INPUT COUPLERS FOR MULTISHEET DIFFRACTIVE WAVEGUIDES | BLEVINS, JERRY M | 2874 | §102 | Non-Final OA | — | Pending | Sep 13, 2024 |
| 18883167 | ENHANCED CROSS SECTIONAL FEATURES MEASUREMENT METHODOLOGY | IPPOLITO, NICOLE MARIE | 2881 | DP | Non-Final OA | — | Pending | Sep 12, 2024 |
| 18883308 | CORROSION-RESISTANT ACOUSTIC RESONANCE SENSOR DEVICES FOR RADICAL SPECIES DETECTION | EYASSU, MARRIT | — | §103§112 | Non-Final OA | — | Pending | Sep 12, 2024 |
| 18883906 | RUN-TO-RUN CONTROL AT A MANUFACTURING SYSTEM USING MACHINE LEARNING | JARRETT, RYAN A | 2116 | §102§103§112DP | Non-Final OA | — | Pending | Sep 12, 2024 |
| 18828202 | CLASSIFICATION OF ASPECTS OF MANUFACTURING EQUIPMENT USING ARTIFICIAL INTELLIGENCE | LOPEZ ALVAREZ, OLVIN | 2117 | §101§103 | Non-Final OA | — | Pending | Sep 09, 2024 |
| 18827642 | PORTABLE PROCESS TOOL DIAGNOSTIC SYSTEM | AMARA, MOHAMED K | 2877 | §103 | Non-Final OA | — | Pending | Sep 06, 2024 |
| 18825091 | METHOD OF MANUFACTURING A PLURALITY OF OPTICAL DEVICES AND OPTICAL DEVICE | DUDEK, JAMES A | 2871 | §102§103 | Final Rejection | — | Pending | Sep 05, 2024 |
| 18823303 | WAFER EDGE RING LIFTING SOLUTION | BENNETT, CHARLEE | 1718 | §103§112 | Non-Final OA | — | Pending | Sep 03, 2024 |
| 18820610 | COMMUNICATION NODE TO INTERFACE BETWEEN EVALUATION SYSTEMS AND A MANUFACTURING SYSTEM | JARRETT, RYAN A | 2116 | §102 | Non-Final OA | — | Pending | Aug 30, 2024 |
| 18820821 | ELECTROSTATIC CHUCKS WITH SENSORS TO DETECT SUBSTRATE DEFORMATION | NGUYEN, DANNY | 2838 | §103 | Final Rejection | — | Pending | Aug 30, 2024 |
| 18819904 | TRENCH-BASED SUPER JUNCTION STRUCTURES VIA SIDEWALL DOPING | LU, JIONG-PING | 1713 | §103DP | Non-Final OA | — | Pending | Aug 29, 2024 |
| 18820021 | SLURRY DELIVERY METHOD | GUMP, MICHAEL ANTHONY | 3723 | §102§103 | Non-Final OA | — | Pending | Aug 29, 2024 |
| 18820182 | FINDING SUBSTRATE NOTCH ON SUBSTRATE IN A CHEMICAL MECHANICAL POLISHING SYSTEM | JOH, CATHERINE | 3723 | §103§112 | Non-Final OA | — | Pending | Aug 29, 2024 |
| 18817646 | METAL-CONTAINING HARDMASK OPENING METHODS USING BORON-AND-HALOGEN-CONTAINING PRECURSORS | LAOBAK, ANDREW KEELAN | 1713 | §103 | Final Rejection | — | Pending | Aug 28, 2024 |
| 18815792 | RAPID PROGRAMMING OF MEMORY ARRAYS WITH CONCURRENT PROGRAMMING AND VERIFICATION | HUANG, MIN | 2827 | §103 | Non-Final OA | — | Pending | Aug 26, 2024 |
| 18815369 | SUBSTRATE TRANSFER SYSTEMS AND METHODS OF USE THEREOF | BURKMAN, JESSICA LYNN | 3653 | §102§103 | Non-Final OA | — | Pending | Aug 26, 2024 |
| 18814133 | SUBSTRATE PROCESSING INCLUDING INITIAL ETCHING AND FAST ETCHING, AND RELATED METHODS, APPARATUS, SYSTEMS, AND CHAMBERS | TRAN, BINH X | 1713 | §103 | Non-Final OA | — | Pending | Aug 23, 2024 |
| 18813870 | HORIZONTAL NON-CONTACT CLEAN STATION FOR CHEMICAN MECHANICAL POLISHING CLEANER | AYALEW, TINSAE B | 1711 | §103 | Non-Final OA | — | Pending | Aug 23, 2024 |
| 18811937 | APPARATUS, SYSTEMS, AND METHODS OF A COMPACT, HIGH NUMERICAL APERTURE LIGHT ENGINE | CHIEN, LUCY P | 2871 | §102Other | Final Rejection | — | Pending | Aug 22, 2024 |
| 18812431 | METHODS AND SYSTEM FOR DUTY FACTOR RAMPED TIMED ION IMPLANT MATCHING | LUQUE, RENAN | 2844 | §103 | Non-Final OA | — | Pending | Aug 22, 2024 |
| 18811911 | SUBSTRATE DEGAS STATION | RIVERA, JOSHEL | 1746 | §102 | Non-Final OA | — | Pending | Aug 22, 2024 |
| 18812803 | DOUBLE CHANNEL SINGLE INNER GATE THREE-DIMENSIONAL (3D) DYNAMIC RANDOM-ACCESS MEMORY (DRAM) DEVICES | MANDALA, VICTOR A | 2899 | §102 | Non-Final OA | — | Pending | Aug 22, 2024 |
| 18812477 | METHODS FOR TROUBLESHOOTING SUBSTRATE DEFECTS USING MACHINE LEARNING | NGUYEN, NGUYEN PHUONG | 2116 | §103§112 | Non-Final OA | — | Pending | Aug 22, 2024 |
| 18812460 | METHODS FOR TROUBLESHOOTING SUBSTRATE DEFECTS USING MACHINE LEARNING | COUSINEAU, CONNOR DANIEL | 2115 | §102§103 | Non-Final OA | — | Pending | Aug 22, 2024 |
| 18807152 | TRANSITION METAL CONTAINING CONTACT WITH REDUCED CONTACT RESISTIVITY | REAMES, MATTHEW L | 2896 | §103§112 | Non-Final OA | — | Pending | Aug 16, 2024 |
| 18807199 | SUBSTRATE-TO-SUBSTRATE BONDING USING ELECTROSTATIC CHUCKS | JANG, BO BIN | 2818 | §102§103 | Non-Final OA | — | Pending | Aug 16, 2024 |
| 18805790 | SELECTIVE ETCHING OF SILICON-CONTAINING MATERIAL | TRAN, BINH X | 1713 | §103 | Non-Final OA | — | Pending | Aug 15, 2024 |
| 18805783 | SELECTIVE ETCHING OF SILICON-AND-GERMANIUM-CONTAINING MATERIAL | ALANKO, ANITA KAREN | 1713 | §103 | Non-Final OA | — | Pending | Aug 15, 2024 |
| 18805376 | LONG SHORT-TERM MEMORY ANOMALY DETECTION FOR MULTI-SENSOR EQUIPMENT MONITORING | ANNIS, PETER THOMAS | 2123 | §101§103 | Non-Final OA | — | Pending | Aug 14, 2024 |
| 18804929 | CHAMBERS AND COATINGS FOR REDUCING BACKSIDE DAMAGE | ULLAH, ELIAS | 2893 | §102 | Non-Final OA | — | Pending | Aug 14, 2024 |
| 18803041 | MIRROR FOLDED ILLUMINATION FOR COMPACT OPTICAL METROLOGY SYSTEM | NGUYEN, SANG H | 2877 | §103 | Final Rejection | — | Pending | Aug 13, 2024 |
| 18799554 | DEPOSITION RING FOR PHYSICAL VAPOR DEPOSITION CHAMBER | MCDONALD, RODNEY GLENN | 1794 | §102§103 | Non-Final OA | — | Pending | Aug 09, 2024 |
| 18799955 | METHODS OF DEPOSITING LINER LAYERS OF THROUGH GLASS VIA | MAYY, MOHAMMAD | 1718 | §103 | Final Rejection | — | Pending | Aug 09, 2024 |
| 18798061 | FUNCTIONAL IMPRINTED OPTICAL STRUCTURES FOR OPTICAL DEVICES | TAVLYKAEV, ROBERT FUATOVICH | 2896 | §103 | Non-Final OA | — | Pending | Aug 08, 2024 |
| 18797189 | DIE REPAIR PROCESS IN MICROLED DISPLAY FABRICATION | HO, TU TU V | — | §102§103 | Non-Final OA | — | Pending | Aug 07, 2024 |
| 18792987 | SUBSTRATE HOLDER SURFACE TREATMENTS PROVIDING CORROSION RESISTANCE AND WEAR RESISTANCE | BESLER, CHRISTOPHER JAMES | 3725 | §103§112 | Non-Final OA | — | Pending | Aug 02, 2024 |
| 18835577 | Method and Apparatus for Forming Backside Power Rails | HAN, JONATHAN | 2818 | DP | Non-Final OA | — | Pending | Aug 02, 2024 |
| 18793576 | ION PROBE WITH COUPLING TO PLASMA | NGUYEN, KIET TUAN | 2881 | §112 | Final Rejection | — | Pending | Aug 02, 2024 |
| 18790596 | POST-GAP FILL TREATMENT FOR SEAM REDUCTION | CHEN, BRET P | 1718 | §103 | Non-Final OA | 5d overdue | Pending | Jul 31, 2024 |
| 18787862 | RF MEASUREMENT FROM A TRANSMISSION LINE SENSOR | ALEJNIKOV JR, ROBERT P | 2857 | DP | Non-Final OA | — | Pending | Jul 29, 2024 |
| 18786887 | METHOD OF SIMULTANEOUS SILICIDATION ON SOURCE AND DRAIN OF NMOS AND PMOS TRANSISTORS | KEBEDE, BROOK | 2818 | §102§103Other | Non-Final OA | — | Pending | Jul 29, 2024 |
| 18783581 | METHOD OF INTEGRATED COPPER OXIDE REMOVAL AND LOW K REPAIR PROCESS | ALANKO, ANITA KAREN | 1713 | §103§112 | Non-Final OA | — | Pending | Jul 25, 2024 |
| 18782320 | MEMORY CONNECTION WITH OXIDE-NITRIDE-SILICON (ONP) SCHEME | INOUSSA, MOULOUCOULAY | 2818 | §102§103 | Non-Final OA | — | Pending | Jul 24, 2024 |
| 18782761 | ELECTROMAGNETIC MAGNETIC SENSOR ASSEMBLY | PRETLOW, DEMETRIUS R | 2858 | §103 | Final Rejection | 34d | Pending | Jul 24, 2024 |
| 18782510 | REINFORCEMENT LEARNING FOR SUBSTRATE PROCESSING FACILITY | ALAM, ROKEYA SHAWALI | 2118 | §103 | Non-Final OA | — | Pending | Jul 24, 2024 |
| 18781125 | CONFORMAL SELECTIVE ETCHING OF SILICON OXIDE | LU, JIONG-PING | 1713 | §102§103 | Non-Final OA | — | Pending | Jul 23, 2024 |
| 18781101 | MICROSTRUCTURE CONTROL OF CONDUCTING MATERIALS THROUGH SURFACE COATING OF POWDERS | LE, HOA T | 1788 | §102§103 | Non-Final OA | — | Pending | Jul 23, 2024 |
| 18772701 | PACKAGING DESIGN FOR A FLOW SENSOR AND METHODS OF MANUFACTURING THEREOF | WOODWARD, NATHANIEL T | 2855 | §102§103Other | Non-Final OA | — | Pending | Jul 15, 2024 |
| 18773309 | METHODS FOR FORMING LOW RESISTIVITY TUNGSTEN FEATURES | POWERS, LAURA C | 1785 | §103 | Non-Final OA | — | Pending | Jul 15, 2024 |
| 18768570 | AMORPHOUS CARBON FOR GAP FILL | PENNY, TABATHA L | 2899 | §102§103 | Non-Final OA | — | Pending | Jul 10, 2024 |
| 18765940 | ASSEMBLY OF DISPLAY WITH COLOR CONVERSION LAYER AND ISOLATION WALLS | SCHOENHOLTZ, JOSEPH | 2893 | §102§103§112Other | Non-Final OA | — | Pending | Jul 08, 2024 |
| 18765710 | ADVANCED-PACKAGING HIGH-VOLUME-MODE DIGITAL-LITHOGRAPHY-TOOL | SULLIVAN, CALEEN O | 2899 | §103 | Non-Final OA | — | Pending | Jul 08, 2024 |
| 18765826 | METROLOGY SLOT PLATES | BENNETT, CHARLEE | 1718 | §103 | Non-Final OA | — | Pending | Jul 08, 2024 |
| 18763791 | Substrate for Semiconductor Fabrication Having Selectively Treated Perimeter and Method of Treating | VALENZUELA, PATRICIA D | 2812 | §103 | Non-Final OA | — | Pending | Jul 03, 2024 |
| 18762536 | PRESCRIPTIVE ANALYTICS IN HIGHLY COLLINEAR RESPONSE SPACE | VU, TUAN A | 2193 | §101 | Final Rejection | 35d | Pending | Jul 02, 2024 |
| 18758099 | METHODS FOR SELECTIVE DEPOSITION USING SELF-ASSEMBLED MONOLAYERS | MCCLURE, CHRISTINA D | 1718 | §103 | Non-Final OA | — | Pending | Jun 28, 2024 |
| 18756396 | METHODS OF DEPOSITING SILICON-CONTAINING FILMS FOR SEMICONDUCTOR DEVICES | EMPIE, NATHAN H | 1715 | §102§103 | Non-Final OA | — | Pending | Jun 27, 2024 |
| 18753144 | BOTTOM-UP GAP FILL PROCESSES FOR SEMICONDUCTOR SUBSTRATES | BIRCH, EKATERINA THOMASA | 2818 | §103§112 | Non-Final OA | — | Pending | Jun 25, 2024 |
| 18750987 | VENTING HOLE ON PASSIVATION LAYER ON TOP OF GAP-FILL | ZHU, SHENG-BAI | 2897 | §102§103 | Non-Final OA | — | Pending | Jun 21, 2024 |
| 18748845 | REACTION CHAMBER WITH MULTI PHASE PRECURSOR DELIVERY | MURPHY, KEVIN F | 3753 | §102§103§112 | Final Rejection | 20d | Pending | Jun 20, 2024 |
| 18749288 | DYNAMIC CORRECTION FOR LEAKAGE CURRENT AND BACKGROUND RADIATION | ARTMAN, THOMAS R | 2884 | §102§103 | Final Rejection | 12d | Pending | Jun 20, 2024 |
| 18746195 | TAPERED ANTI-REFLECTION COATING THAT PRESERVES IMAGE SHARPNESS IN WAVEGUIDE COMBINERS | BLEVINS, JERRY M | — | §102§103 | Non-Final OA | — | Pending | Jun 18, 2024 |
| 18744807 | Methods and Apparatus for Determining a Property of a Substrate Surface | GRAVINI, STEPHEN MICHAEL | 3753 | §112 | Non-Final OA | — | Pending | Jun 17, 2024 |
| 18745485 | REDUCED STRAIN AND STOP LAYER FOR Si/SiGe EPI STACKS | VU, VU A | 2897 | §102§103 | Non-Final OA | — | Pending | Jun 17, 2024 |
| 18745494 | Heated Process Kit for Substrate Processing | LUND, JEFFRIE ROBERT | 1716 | §103 | Final Rejection | — | Pending | Jun 17, 2024 |
| 18719540 | IMPROVED ADHESION LAYER IN FLEXIBLE COVERLENS | BOUTSIKARIS, LEONIDAS | 2872 | §102§103 | Final Rejection | — | Pending | Jun 13, 2024 |
| 18742898 | BLACK BODY SURFACE GENERATION USING LASER MATERIAL PROCESSING | DANIELS, MATTHEW J | 1742 | §102§103 | Non-Final OA | — | Pending | Jun 13, 2024 |
| 18741085 | TILTED SUPER VIAS | WATTS, JEREMY DANIEL | 2897 | §102§103 | Non-Final OA | — | Pending | Jun 12, 2024 |
| 18738923 | TOOL FOR ROASTING OVER OPEN FLAME OR HEAT SOURCE | SOTO, HENRIX | 3654 | §103§112Other | Non-Final OA | — | Pending | Jun 10, 2024 |
| 18737275 | SUBSTRATE SUPPORTS INCLUDING MEASUREMENT ASSEMBLIES, AND RELATED APPARATUS, METHODS, AND PROCESSING CHAMBERS | HENSON, KATINA N | 3723 | §102§103 | Non-Final OA | — | Pending | Jun 07, 2024 |
| 18735446 | CERAMICS WITH ADAPTIVE THERMAL COEFFICIENTS AND HIGH FLUORINE RESISTANCE AT HIGH TEMPERATURES | HOBAN, MATTHEW E | 1734 | §102§103 | Non-Final OA | — | Pending | Jun 06, 2024 |
| 18736157 | PRECLEAN AND ENCAPSULATION OF MICROLED FEATURES | SMITH, BRADLEY | 2817 | §112DP | Non-Final OA | — | Pending | Jun 06, 2024 |
| 18734312 | RAPID SEAL LEAK TEST USING HE OR CO2 GAS DETECTION | GRAVES, TIMOTHY P | 2855 | §103 | Non-Final OA | — | Pending | Jun 05, 2024 |
| 18734417 | AMORPHOUS MULTI-METAL-DOPED FILM FOR HARDMASK APPLICATION | WIECZOREK, MICHAEL P | 1712 | §103 | Final Rejection | — | Pending | Jun 05, 2024 |
| 18732896 | DUAL FIELD EFFECT TRANSISTOR 4F2 CELL | JOHNSON, CHRISTOPHER A | 2899 | §102§103§112 | Non-Final OA | — | Pending | Jun 04, 2024 |
| 18732211 | PHOTONIC INTEGRATED CIRCUITS TO GLASS SUBSTRATE BONDING | SMITH, CHAD | 2874 | §102§103 | Non-Final OA | — | Pending | Jun 03, 2024 |
| 18678148 | SELECTIVE METAL ETCHING BY MICROWAVE OXIDATION | LEE, KYOUNG | 2817 | §102§103 | Non-Final OA | — | Pending | May 30, 2024 |
| 18676429 | SENSORS AND SYSTEM FOR IN-SITU EDGE RING EROSION MONITOR | CARTER, JONATHAN LANGDON | 1713 | §102§103§112 | Non-Final OA | — | Pending | May 28, 2024 |
| 18674113 | COMPREHENSIVE ANALYSIS MODULE FOR DETERMINING PROCESSING EQUIPMENT PERFORMANCE | REPSHER III, JOHN T | 2143 | §103§112 | Final Rejection | — | Pending | May 24, 2024 |
| 18674730 | PREPARATION OF PHARMACEUTICAL COMPOSITIONS USING SUPERCYCLE VAPOR PHASE DEPOSITION OF METAL OXIDES | ARNOLD, ERNST V | 1613 | §103§112 | Non-Final OA | — | Pending | May 24, 2024 |
| 18674470 | CALIBRATION KIT FOR RETARDING ENERGY ANALYZER SENSORS | BOLOGNA, DOMINIC JOSEPH | 2877 | §103 | Non-Final OA | — | Pending | May 24, 2024 |
| 18672985 | NANOPILLAR STRUCTURE OF IMAGE SENSOR DEVICE AND METHOD OF FORMING | MICHAUD, NICHOLAS BRIAN | 2818 | §112 | Non-Final OA | — | Pending | May 23, 2024 |
| 18671402 | THERMALLY AND ELECTRICALLY CONDUCTIVE ADHESIVE FOR GROUNDING AND THERMAL GAP FILLING OF ELECTRODES | LUND, JEFFRIE ROBERT | 1716 | §103§112 | Non-Final OA | — | Pending | May 22, 2024 |
| 18671417 | CRYOGENIC ETCHING OF SILICON-CONTAINING MATERIALS | CARTER, JONATHAN LANGDON | 1713 | §102§103§112 | Non-Final OA | — | Pending | May 22, 2024 |
| 18669659 | CHEMICAL MECHANICAL POLISHING METHOD USING FOAMED SLURRY AND APPARATUS FOR FOAMED SLURRY GENERATION | GUMP, MICHAEL ANTHONY | 1713 | §103§112 | Final Rejection | — | Pending | May 21, 2024 |
| 18668884 | INHIBITORS FOR SELECTIVE EPITAXIAL DEPOSITION | BRATLAND JR, KENNETH A | 1714 | §103 | Non-Final OA | — | Pending | May 20, 2024 |
| 18667148 | MICROWAVE PLASMA-ENHANCED DEPOSITION OF SILICON OXIDE | CHIN, EDWARD | 2893 | §103 | Final Rejection | — | Pending | May 17, 2024 |
| 18667515 | METHOD AND APPARATUS FOR PRECLEANING A SUBSTRATE SURFACE PRIOR TO EPITAXIAL GROWTH | BERGNER, ERIN FLANAGAN | 1713 | §102§103§112DP | Final Rejection | — | Pending | May 17, 2024 |
| 18666216 | DOPED TUNGSTEN CARBIDE LOW-K ETCH HARD MASK | MILLER, JR, JOSEPH ALBERT | — | §103 | Non-Final OA | — | Pending | May 16, 2024 |
| 18666401 | BOTTOM-UP GAP FILL USING NON-CONFORMAL POISONING | TRAN, DZUNG | 2893 | §102§103 | Non-Final OA | — | Pending | May 16, 2024 |
| 18666435 | RF PULSING ASSISTED LOW-K MATERIAL DEPOSITION WITH HIGH DENSITY | CHEN, BRET P | 1718 | §103 | Non-Final OA | — | Pending | May 16, 2024 |
| 18664830 | Strain Elements in Metallic Source-Drain Architecture | MATTABONI, TIMOTHY JAMES | 2897 | §103 | Non-Final OA | — | Pending | May 15, 2024 |
| 18662802 | COMPUTER VISION FOR SUSCEPTOR LEVELING AND ALIGNMENT | WANG, ZHIPENG | 2115 | §103 | Non-Final OA | — | Pending | May 13, 2024 |
| 18659527 | UNIFORM SIGE CHANNEL FORMATION FOR GAA PMOS | HOANG, DZUNG T | 2898 | §103§112 | Non-Final OA | — | Pending | May 09, 2024 |
| 18657458 | NON-LINE-OF-SIGHT JUNCTION FORMATION | BRATLAND JR, KENNETH A | — | §102§103§112 | Non-Final OA | — | Pending | May 07, 2024 |
| 18656805 | MULTI-LAYER WET-DRY HARDCOATS FOR FLEXIBLE COVER LENS | FISCHER, JUSTIN R | 1749 | §112 | Final Rejection | 6d | Pending | May 07, 2024 |
| 18655748 | THIN FILM, IN-SITU MEASUREMENT THROUGH TRANSPARENT CRYSTAL AND TRANSPARENT SUBSTRATE WITHIN PROCESSING CHAMBER WALL | MCDONALD, RODNEY GLENN | 1794 | §103 | Non-Final OA | — | Pending | May 06, 2024 |
| 18654221 | HIGH-THROUGHPUT PLASMA LID FOR SEMICONDUCTOR MANUFACTURING PROCESSING CHAMBERS | MILLER, JR, JOSEPH ALBERT | 1712 | §103 | Final Rejection | — | Pending | May 03, 2024 |
| 18652612 | PROCESSING CHAMBER AND METHOD FOR INTEGRATED ETCHING AND DEPOSITION | ZERVIGON, RUDY | 1716 | §102§103 | Final Rejection | — | Pending | May 01, 2024 |
| 18651213 | SEMICONDUCTOR PROCESS EQUIPMENT | BURKMAN, JESSICA LYNN | 3652 | §102§103§112 | Non-Final OA | — | Pending | Apr 30, 2024 |
| 18648144 | WIRELESS CHAMBER INTERIOR SENSOR | HAMADYK, ANNA N | 2881 | §103 | Final Rejection | — | Pending | Apr 26, 2024 |
| 18647819 | MICROWAVE PRECLEAN APPARATUS AND PROCESSING METHOD FOR IMPURITY REMOVAL | BERGNER, ERIN FLANAGAN | 1713 | §103 | Non-Final OA | 83d | Pending | Apr 26, 2024 |
| 18647587 | PROCESSING MODULE HAVING A PRIMING SYSTEM | CAMPBELL, NATASHA N. | 1714 | §103§112 | Non-Final OA | — | Pending | Apr 26, 2024 |
| 18646055 | SELECTIVE METAL CAPPING PROCESSES FOR A JUNCTION SILICIDE | CRAWFORD EASON, LATANYA N | — | §103 | Non-Final OA | — | Pending | Apr 25, 2024 |
| 18646597 | NOZZLE ASSEMBLY FOR A FLUID RECOVERY SYSTEM | KLUNK, MARGARET D | 1716 | §103 | Non-Final OA | — | Pending | Apr 25, 2024 |
| 18643462 | VOLUMETRIC EXPANSION DEPOSITION OF SILICON BASED DIELECTRIC FILM | LAW, NGA LEUNG V | 1717 | §103§112 | Non-Final OA | — | Pending | Apr 23, 2024 |
| 18643137 | SELECTIVE PLASMA ASSISTED DEPOSITION OF A MOLYBDENUM SILICIDE | PURVIS, SUE A | 2893 | §103 | Non-Final OA | — | Pending | Apr 23, 2024 |
| 18643100 | SELF-LIMITED ETCHING OF LOW-K MATERIALS | ALBRECHT, PETER M | 2811 | §103 | Final Rejection | — | Pending | Apr 23, 2024 |
| 18642522 | DUAL PLASMA TREATMENT PROCESS | FAN, SU JYA | 2818 | §102§103 | Non-Final OA | — | Pending | Apr 22, 2024 |
| 18640194 | AUTOMATED MACHINE LEARNING WAFERLESS CHAMBER CONDITIONING PROCESS FOR THERMAL SEMICONDUCTOR PROCESS CHAMBERS | YANCHUS III, PAUL B | 2115 | §102 | Non-Final OA | — | Pending | Apr 19, 2024 |
| 18639572 | WORDLINE CONTACT FORMATION FOR NAND DEVICE | LI, WEI | 2899 | §103Other | Non-Final OA | — | Pending | Apr 18, 2024 |
| 18637574 | MICROWAVE APPARATUS FOR DUAL MODE OPERATION AND METHODS OF USE | TRICE III, WILLIAM CLARENCE | 2893 | §102§103 | Non-Final OA | — | Pending | Apr 17, 2024 |
| 18637079 | DUAL ZONE PEDESTAL COOLANT DISTRIBUTION SYSTEM | PHAN, AN BACH | 3763 | §102§103 | Non-Final OA | — | Pending | Apr 16, 2024 |
| 18636684 | CONTROLLED ETCH OF SILICON NITRIDE MATERIAL | ALANKO, ANITA KAREN | 1713 | §102§103Other | Non-Final OA | — | Pending | Apr 16, 2024 |
| 18633764 | Detection of Space Charge Effect During Ion Implantation | VANORE, DAVID A | 2878 | §102§112 | Non-Final OA | — | Pending | Apr 12, 2024 |
| 18634109 | DUAL GATE STRUCTURE FOR MEMORY DEVICE | TAN, DAVE | 2897 | §102§103 | Non-Final OA | — | Pending | Apr 12, 2024 |
| 18634659 | OPTIMUM MATERIAL STACKS FOR SEMICONDUCTOR CONTACTS | ANDERSON, ERIK ARTHUR | 2812 | §102§103 | Non-Final OA | — | Pending | Apr 12, 2024 |
| 18632421 | SUSCEPTOR | MOORE, KARLA A | 1716 | §103§112 | Non-Final OA | — | Pending | Apr 11, 2024 |
| 18632863 | METHOD OF LOW-TEMPERATURE N-TYPE SELECTIVE SILICON EPITAXY | SUN, MICHAEL BRENNAN | 2892 | §103§112 | Non-Final OA | — | Pending | Apr 11, 2024 |
| 18632450 | CONTACT CLEANING UNITS IN CMP POLISHER | CRANDALL, JOEL DILLON | 3723 | §102§103 | Non-Final OA | — | Pending | Apr 11, 2024 |
| 18632003 | REDUCED STRAIN HETEROEPITAXY ASSEMBLY FOR THREE-DIMENSIONAL DEVICE AND METHOD OF FABRICATION THEREFOR | NGUYEN, KHIEM D | 2892 | §102§103 | Non-Final OA | — | Pending | Apr 10, 2024 |
| 18630206 | Tapered Superjunction with Ultrathin P-Type Material Layer | PAGE, STEVEN MITCHELL CHR | 2812 | §102§103§112 | Non-Final OA | — | Pending | Apr 09, 2024 |
| 18630142 | 3D NAND CELLS WITH ENHANCED ERASE SPEED THROUGH DIPOLE ENGINEERING AND METHODS OF MAKING THE SAME | REAMES, MATTHEW L | 2896 | §102§103 | Non-Final OA | — | Pending | Apr 09, 2024 |
| 18630827 | PRESSURE SEAL METHOD AND APPARATUS | KONERU, LAKSHMI S | 3723 | §102§103 | Non-Final OA | — | Pending | Apr 09, 2024 |
| 18630981 | BACKING PLATE AND DIFFUSER PLATE ASSEMBLY | KACKAR, RAM N | 1716 | §102§103 | Non-Final OA | — | Pending | Apr 09, 2024 |
| 18627544 | METHODS FOR ENCAPSULATING SILVER MIRRORS ON OPTICAL STRUCTURES | PLESZCZYNSKA, JOANNA | 1783 | §103 | Final Rejection | 6d | Pending | Apr 05, 2024 |
| 18627065 | PLASMA SHOWERHEAD ASSEMBLY | CHEN, KEATH T | 1716 | §103§112 | Final Rejection | — | Pending | Apr 04, 2024 |
| 18621828 | METHOD OF MAKING SILICIDE IN HIGH-ASPECT RATIO STRUCTURES BY HYBRID PROCESSES | YAP, DOUGLAS ANTHONY | 2899 | §103 | Non-Final OA | — | Pending | Mar 29, 2024 |
| 18620411 | GROUNDING PLATE FOR STRESS TUNING HIGH DENSITY AND MODULUS FILMS | BENNETT, CHARLEE | 1718 | §102§103 | Non-Final OA | — | Pending | Mar 28, 2024 |
| 18620405 | PROCESS KIT HAVING TALL DEPOSITION RING FOR PVD CHAMBER | BAND, MICHAEL A | 1794 | §103§112DP | Non-Final OA | — | Pending | Mar 28, 2024 |
| 18618937 | NON-AXISYMMETRIC GAS DIFFUSER FOR PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION | MCDONALD, RODNEY GLENN | 1794 | §103 | Final Rejection | — | Pending | Mar 27, 2024 |
| 18619075 | LIFT PIN SYSTEMS AND METHODS | HAGEMAN, MARK C | 3652 | §103 | Non-Final OA | — | Pending | Mar 27, 2024 |
| 18619101 | LIFT PIN SYSTEMS AND METHODS | FARRELL, MICHAEL THADDUES | 3723 | §102Other | Non-Final OA | — | Pending | Mar 27, 2024 |
| 18617280 | ARC REDUCTION USING UNREFERENCED FLOATING POWER SUPPLIES | SWEELY, KURT D | 1718 | §102§103 | Non-Final OA | — | Pending | Mar 26, 2024 |
| 18616996 | In-Line Validation of Substrate Bonding Surface | RAIMUND, CHRISTOPHER W | 1746 | §103 | Non-Final OA | — | Pending | Mar 26, 2024 |
| 18616689 | ION IMPLANTATION FOR REDUCED ROUGHNESS OF SILICON NITRIDE | HETHERINGTON, AUBRIE IRENE | 4100 | §102§103§112 | Non-Final OA | — | Pending | Mar 26, 2024 |
| 18616162 | GE CONTACT LAYER INTEGRATION FOR CMOS DEVICES | STEWART, ROBERT LINCOLN | 2898 | §103 | Non-Final OA | — | Pending | Mar 25, 2024 |
| 18614826 | LOW-TEMPERATURE ETCHANT-FREE SELECTIVE EPITAXY OF N-TYPE DOPED SILICON | SONG, MATTHEW J | 1714 | §103 | Non-Final OA | — | Pending | Mar 25, 2024 |
| 18615617 | SEALED AXIAL FLUX MOTORS FOR VACUUM ROBOTS | MACARTHUR, VICTOR L | 3618 | §102§103 | Non-Final OA | 18d overdue | Pending | Mar 25, 2024 |
| 18613525 | MEMORY DEVICES AND METHODS OF FORMING THE SAME | HAN, JONATHAN | 2818 | §103 | Non-Final OA | — | Pending | Mar 22, 2024 |
| 18613998 | PROTECTIVE CAPPING LAYER FOR AREA SELECTIVE DEPOSITION | MAYY, MOHAMMAD | 1718 | §103§112 | Final Rejection | — | Pending | Mar 22, 2024 |
| 18614234 | LASER DICING SYSTEM FOR FILAMENTING AND SINGULATING OPTICAL DEVICES | NORTON, JOHN J | 3761 | §103§112 | Non-Final OA | — | Pending | Mar 22, 2024 |
| 18613805 | BIASABLE GAS DISTRIBUTION PLATE | IMTIAZ, S M SOHEL | 4100 | §103§112 | Non-Final OA | — | Pending | Mar 22, 2024 |
| 18613918 | GRADIENT METAL LINER FOR INTERCONNECT STRUCTURES | XU, ZHIJUN | 2818 | §103 | Non-Final OA | — | Pending | Mar 22, 2024 |
| 18611430 | PROCESS CONTROL METHOD FOR PATTERN WAFER INDEX POLISHING | SOTO, CHRISTOPHER ASHLEY | 3723 | §102§103 | Final Rejection | — | Pending | Mar 20, 2024 |
| 18609650 | METHODS OF REDUCING BACKSIDE CONTACT RESISTANCE | MINNEY, GABRIEL SEBASTIAN | 2897 | §103 | Non-Final OA | — | Pending | Mar 19, 2024 |
| 18692954 | ONE SIDE ANODIZATION OF DIFFUSER | VONCH, JEFFREY A | 2817 | §102§103§112 | Non-Final OA | — | Pending | Mar 18, 2024 |
| 18603360 | SELECTIVE OXIDATION PROCESSES FOR GATE-ALL-AROUND TRANSISTORS | TRAN, BINH X | 1713 | §112 | Final Rejection | — | Pending | Mar 13, 2024 |
| 18603672 | SEMICONDUCTOR PROCESSING CHAMBER LID AND SEALING MECHANISM | CHEN, KEATH T | 1716 | §103§112 | Non-Final OA | — | Pending | Mar 13, 2024 |
| 18603646 | ADVANCED THERMAL MANAGEMENT SYSTEM (ATM) FOR PEDESTAL TEMPERATURE CONTROL IN HIGH POWER PECVD CHAMBER | WELLS, KENNETH B | 2842 | §103 | Non-Final OA | — | Pending | Mar 13, 2024 |
| 18599846 | Aluminum Oxide Isolation for Hybrid Bonding | GRAY, AARON J | 2897 | §102§103§112 | Non-Final OA | — | Pending | Mar 08, 2024 |
| 18690574 | OVERHANG PATTERN FOR ADVANCED OLED PATTERNING | LE, THAO P | 2818 | §102§103 | Non-Final OA | — | Pending | Mar 08, 2024 |
| 18599794 | Aluminum Oxide Crystallization Barrier for Hybrid Bonding | JOHNSON, CHRISTOPHER A | 2899 | §103§112 | Non-Final OA | — | Pending | Mar 08, 2024 |
| 18597956 | DEPOSITION DEVICE AND DEPOSITION METHOD | THOMAS, BINU | — | §103Other | Non-Final OA | — | Pending | Mar 07, 2024 |
| 18597057 | CONTACT CONSTRUCTION FOR SEMICONDUCTOR DEVICES WITH LOW-DIMENSIONAL MATERIALS | WALL, VINCENT | 2898 | §102§103§112 | Non-Final OA | — | Pending | Mar 06, 2024 |
| 18596272 | METHODS AND STRUCTURES FOR REDUCING WARPAGE | RAHMAN, KHATIB A | 2818 | §102 | Non-Final OA | — | Pending | Mar 05, 2024 |
| 18595286 | REPLACEMENT SOURCE/DRAIN CONTACT METHOD IN COMPLEMENTARY FIELD EFFECT TRANSISTOR (CFET) DEVICES | MULERO FLORES, ERIC MANUEL | 2898 | §102§103§112 | Non-Final OA | — | Pending | Mar 04, 2024 |
| 18595231 | LID AND HYDBRID SUBSTRATE SUPPORT FOR EFFICIENT HEATING AND COOLING IN PROCESS CHAMBERS | BENNETT, CHARLEE | 1718 | §103 | Non-Final OA | — | Pending | Mar 04, 2024 |
| 18594527 | BARRIER ENCAPSULATION FOR ORGANIC LIGHT-EMITTING DIODES | ANGUIANO, MICHAEL | 2899 | §103§112 | Non-Final OA | — | Pending | Mar 04, 2024 |
| 18595374 | SEGMENTED FORMATION OF GATE INTERFACE | EMPIE, NATHAN H | 4100 | §102§103 | Non-Final OA | — | Pending | Mar 04, 2024 |
| 18593014 | SELECTIVE ETCHING OF ALTERNATING LAYERS OF SILICON OXIDE AND SILICON NITRIDE FOR HIGH ASPECT RATIO CONTACTS | CARTER, JONATHAN LANGDON | 1713 | §103 | Non-Final OA | — | Pending | Mar 01, 2024 |
| 18593610 | SACRIFICIAL LINER FOR COPPER INTERCONNECT | DAGENAIS, KRISTEN A | 1717 | §103 | Non-Final OA | 46d overdue | Pending | Mar 01, 2024 |
| 18592180 | SMALL CELL REACTORS WITH SHARED FORELINE AND PRESSURE CONDUIT | KITT, STEPHEN A | 1717 | §102§103§112 | Non-Final OA | — | Pending | Feb 29, 2024 |
| 18591976 | DIETHYL ZINC AND METAL HALIDE PRECURSORS FOR DEPOSITION OF METAL FILMS ON SEMICONDUCTOR SUBSTRATES | STARK, JARRETT J | 2898 | §103 | Final Rejection | — | Pending | Feb 29, 2024 |
| 18590572 | LOW TEMPERATURE ATMOSPHERIC EPITAXIAL PROCESS | SONG, MATTHEW J | 1714 | §103 | Final Rejection | — | Pending | Feb 28, 2024 |
| 18590102 | METHODS OF FORMING LOW RESISTIVITY FILMS USING Microwave treatment | PAGE, STEVEN MITCHELL CHR | 2812 | §102 | Non-Final OA | — | Pending | Feb 28, 2024 |
| 18590478 | GAS INJECTOR ASSEMBLY WITH IMPROVED GAS MIXING | SWEELY, KURT D | — | §102§103 | Final Rejection | — | Pending | Feb 28, 2024 |
| 18590752 | ELECTRICAL CONNECTION FOR CHEMICAL MECHANICAL POLISHING CARRIER HEAD | HENSON, KATINA N | 3723 | §102§103 | Final Rejection | 71d | Pending | Feb 28, 2024 |
| 18590111 | MICROWAVE ASSISTED PASSIVATION LAYER REMOVAL | PARK, SAMUEL | 2818 | §103 | Non-Final OA | — | Pending | Feb 28, 2024 |
| 18589251 | LINERS HAVING FLOW OPENINGS, AND RELATED CHAMBER KITS, PROCESSING CHAMBERS, AND METHODS FOR SEMICONDUCTOR MANUFACTURING | ZERVIGON, RUDY | 1714 | §102§112 | Non-Final OA | 76d | Pending | Feb 27, 2024 |
| 18589392 | BIASED OR FLOATING PROCESS SHIELD TO REDUCE ION LOSS TO CONTROL FILM DEPOSITION AND IMPROVE STEP COVERAGE | MILLER, JR, JOSEPH ALBERT | 1712 | §103 | Final Rejection | — | Pending | Feb 27, 2024 |
| 18585303 | IN SITU NUCLEATION FOR NANOCRYSTALLINE DIAMOND FILM DEPOSITION | HERNANDEZ-KENNEY, JOSE | 1717 | §102§103§112 | Final Rejection | — | Pending | Feb 23, 2024 |
| 18584540 | DIRECTIONAL SELECTIVE FILL USING HIGH DENSITY PLASMA | DUCLAIR, STEPHANIE P. | 1713 | §103 | Final Rejection | 29d | Pending | Feb 22, 2024 |
| 18584068 | AUTONOMOUS FAULT DIAGNOSTIC TOOLS FOR MANUFACTURING SYSTEMS BY ANALYZING PROCESS RUNS | LOPEZ ALVAREZ, OLVIN | 2117 | §101 | Final Rejection | — | Pending | Feb 22, 2024 |
| 18582977 | METHODS FOR FORMING LOW RESISTIVITY CONTACTS | MCCALL SHEPARD, SONYA D | 2898 | §103 | Final Rejection | — | Pending | Feb 21, 2024 |
| 18582547 | PROCESSING OF SIGNALS FROM AN IN-SITU MONITORING SYSTEM IN CHEMICAL MECHANICAL POLISHING | HAWKINS, JASON KHALIL | 2892 | §112 | Non-Final OA | — | Pending | Feb 20, 2024 |
| 18444858 | SELF-ALIGNED STORAGE NODE CONTACT IN DYNAMIC RANDOM ACCESS MEMORY (DRAM) DEVICE | SUN, YU-HSI DAVID | 2817 | §103 | Non-Final OA | — | Pending | Feb 19, 2024 |
| 18581127 | SILICON CARBIDE AND QUARTZ COMPOSITIONS FOR PROCESSING CHAMBERS, AND RELATED COMPONENTS AND METHODS | LUND, JEFFRIE ROBERT | 1716 | §102§103 | Non-Final OA | — | Pending | Feb 19, 2024 |
| 18581290 | EUV SENSITIVE METAL OXIDE MATERIAL AS UNDERLAYER FOR THIN CAR TO IMPROVE PATTERN TRANSFER | SULLIVAN, CALEEN O | 2899 | §102§103 | Non-Final OA | — | Pending | Feb 19, 2024 |
| 18442378 | METHOD AND APPARATUS FOR SUBSTRATE NOTCH SENSING ON CMP HEAD FOR LOCAL PLANARIZATION | KLUNK, MARGARET D | 1716 | §102§103§112 | Non-Final OA | — | Pending | Feb 15, 2024 |
| 18442234 | METHODS AND APPARATUS FOR PRECLEANING AND TREATING WAFER SURFACES | LEE, DOUGLAS | 1714 | §103 | Non-Final OA | 76d | Pending | Feb 15, 2024 |
| 18441886 | ENHANCED MOBILITY IN SEMICONDUCTOR DEVICES | CLINTON, EVAN GARRETT | 2899 | §103 | Non-Final OA | — | Pending | Feb 14, 2024 |
| 18441808 | VOID-FREE STRESS INCORPORATION IN SEMICONDUCTOR DEVICES | CLINTON, EVAN GARRETT | 2899 | §103§112 | Non-Final OA | — | Pending | Feb 14, 2024 |
| 18440209 | GRAIN GROWTH OF SILICON BY METAL INDUCED CRYSTALLIZATION | BERRY, PAUL ANTHONY | 2898 | §112 | Non-Final OA | — | Pending | Feb 13, 2024 |
| 18440573 | MULTI-ZONE PROFILE CONTROL FOR INCONSISTENT UNDERLAYER | BENNETT, CHARLEE | 1718 | §102§103 | Non-Final OA | — | Pending | Feb 13, 2024 |
| 18438222 | PHASE MASKING FOR POLARIZATION AND OPTICAL SIGNAL CONTROL IN OPTICAL INSPECTION SYSTEMS | CARLSON, JOSHUA MICHAEL | 2877 | §103 | Final Rejection | — | Pending | Feb 09, 2024 |
| 18438067 | FORMATION OF GATE ALL AROUND DEVICE | MOJADDEDI, OMAR F | 2898 | §102§103 | Non-Final OA | — | Pending | Feb 09, 2024 |
| 18436846 | SUBSTRATE SUPPORT ASSEMBLY | HONG, SEAHEE | 3723 | §102§103 | Non-Final OA | — | Pending | Feb 08, 2024 |
| 18436499 | DEFORMABLE SUBSTRATE CHUCK | ZAWORSKI, JONATHAN R | 3723 | §103 | Non-Final OA | — | Pending | Feb 08, 2024 |
| 18436423 | WIRELESS MEASUREMENT CHARACTERIZATION | ASTACIO-OQUENDO, GIOVANNI | 2858 | — | Non-Final OA | — | Pending | Feb 08, 2024 |
| 18433681 | METHODS OF MANUFACTURING INTERCONNECT STRUCTURES | MOJADDEDI, OMAR F | 2898 | §112 | Final Rejection | — | Pending | Feb 06, 2024 |
| 18433936 | BARRIER AND LINER TREATMENT USING DUAL RADIO FREQUENCY CAPACITIVE COUPLE PLASMA FOR METAL INTERCONNECTS | ZABEL, ANDREW JOHN | 2818 | §103 | Non-Final OA | — | Pending | Feb 06, 2024 |
| 18432525 | COMMUNICATION NODE TO INTERFACE BETWEEN EVALUATION SYSTEMS AND A MANUFACTURING SYSTEM | JARRETT, RYAN A | 2116 | §102 | Final Rejection | 26d | Pending | Feb 05, 2024 |
| 18433234 | TRENCH AND CHANNEL GAP FILL TUNING FOR FLOWABLE CHEMICAL VAPOR DEPOSITION (FCVD) FILMS | NGUYEN, DAO H | 2818 | §103§112 | Non-Final OA | — | Pending | Feb 05, 2024 |
| 18432955 | TEMPORAL CONTROL OF PLASMA PROCESSING | STARK, JARRETT J | 2898 | §103 | Non-Final OA | — | Pending | Feb 05, 2024 |
| 18431001 | OLED STRUCTURE AND PROCESS BASED ON PIXEL PASSIVATION BY REMOVING OLED STACK OVER HEAT ABSORBENT STRUCTURES | TRAN, TRANG Q | 2811 | §102§103 | Non-Final OA | — | Pending | Feb 02, 2024 |
| 18424156 | SUSCEPTOR WITH A TEXTURED SURFACE | BRAYTON, JOHN JOSEPH | 1794 | §102§103 | Non-Final OA | — | Pending | Jan 26, 2024 |
| 18423437 | INTERRUPTION LAYER FILL FOR LOW RESISTANCE CONTACTS | BOULGHASSOUL, YOUNES | 2814 | §102§103 | Non-Final OA | — | Pending | Jan 26, 2024 |
| 18423129 | LOW TEMPERATURE CHEMICAL VAPOR DEPOSITION OF NANOCRYSTALLINE DIAMOND FILM | ALAM, MOHAMMED R | 2897 | §103 | Non-Final OA | — | Pending | Jan 25, 2024 |
| 18421872 | Gas Distribution Plate with Enhanced Gas Hole Consistency and Extended Life | YU, YUECHUAN | 1718 | §102§103 | Non-Final OA | — | Pending | Jan 24, 2024 |
| 18418812 | METHODS OF FORMING INTERCONNECT STRUCTURES | GHEYAS, SYED I | 2893 | §102§103 | Final Rejection | — | Pending | Jan 22, 2024 |
| 18417124 | POLISHING HEAD WITH RETAINING RING WEAR SENSING | DION, MARCEL T | 3723 | §103§112 | Non-Final OA | 31d overdue | Pending | Jan 19, 2024 |
| 18417304 | APPARATUS AND METHOD FOR CMP TEMPERATURE CONTROL | CHANG, SUKWOO JAMES | 3723 | §103 | Final Rejection | 78d | Pending | Jan 19, 2024 |
| 18416747 | QUEUE TIME CONTROL | SHAFAYET, MOHAMMED | 2116 | §103 | Final Rejection | — | Pending | Jan 18, 2024 |
| 18415495 | MODEL BASED DEVELOPMENT OF ZONE BASED FLOW OR THERMAL DISTRIBUTION SYSTEMS | SHARMIN, ANZUMAN | 2115 | §103 | Non-Final OA | — | Pending | Jan 17, 2024 |
| 18415326 | ION EXTRACTION OPTICS FOR ION PROCESSING SYSTEM | GOURLIE, LAURA ELOISE | 2881 | §102 | Final Rejection | — | Pending | Jan 17, 2024 |
| 18415506 | RF FILTER TOPOLOGY FOR SUBSTRATE SUPPORT ASSEMBLY | AL-TAWEEL, MUAAMAR QAHTAN | 2838 | §103 | Non-Final OA | 8d | Pending | Jan 17, 2024 |
| 18408439 | CAUSALITY-BASED FLEET MATCHING | BARBEE, MANUEL L | 2857 | §101 | Final Rejection | — | Pending | Jan 09, 2024 |
| 18407033 | Substrate Lift Pins and Substrate Supports and Process Chambers Incorporating Same | NEJAD, MAHDI H | 3723 | §102§103 | Final Rejection | 34d | Pending | Jan 08, 2024 |
| 18407142 | HEATERS AND PLASMA GENERATORS FOR GAS ACTIVATION, AND RELATED CHAMBER AND FOR SEMICONDUCTOR MANUFACTURING | MCDONALD, RODNEY GLENN | 1794 | §103 | Non-Final OA | — | Pending | Jan 08, 2024 |
| 18405873 | ASHABLE MASK FOR SiC TRENCH IMPLANT | NARAGHI, ALI | 2817 | §103 | Non-Final OA | — | Pending | Jan 05, 2024 |
| 18403034 | MANIFOLD FOR MATERIAL REMOVAL SYSTEM | NORTON, JOHN J | 3761 | §102§103 | Non-Final OA | — | Pending | Jan 03, 2024 |
| 18400819 | SELECTIVE BOTTOM-UP METAL FILL/CAP ON JUNCTION SILICIDE BY SELECTIVE METAL REMOVAL | CRAWFORD EASON, LATANYA N | 2813 | §103 | Non-Final OA | — | Pending | Dec 29, 2023 |
| 18401112 | REAL-TIME MEASUREMENT OF MICROWAVE RESONATORS AS PLASMA DIAGNOSTICS FOR PROCESS MONITORING | BENNETT, CHARLEE | 1718 | §102§103§112 | Non-Final OA | — | Pending | Dec 29, 2023 |
| 18398723 | INTEGRATED OPTICAL SENSOR CONTROLLER FOR DEVICEMANUFACTURING MACHINES | LAPAGE, MICHAEL P | 2877 | §103 | Final Rejection | 23d overdue | Pending | Dec 28, 2023 |
| 18397234 | AIR-CORE COIL IN ANALOG CIRCUIT FILTERS FOR PLASMA PROCESSING | MOORE, KARLA A | 1716 | §103 | Non-Final OA | — | Pending | Dec 27, 2023 |
| 18397265 | CONSTRUCTING A SUBSTRATE TOPOLOGY MAP BASED ON MEASURED PROPERTIES | RIDDLE, CHRISTINA A | 2882 | §103 | Non-Final OA | 55d | Pending | Dec 27, 2023 |
| 18391776 | DIRECT APPLIED INTERPOSER FOR CO-PACKAGED OPTICS | BOULGHASSOUL, YOUNES | 2814 | §112 | Non-Final OA | — | Pending | Dec 21, 2023 |
| 18392534 | MULTI-STEP PROCESS FOR FLOWABLE GAP-FILL FILM | DANIELS, MATTHEW J | 1742 | §103 | Final Rejection | — | Pending | Dec 21, 2023 |
| 18393086 | MODULAR PROCESSING CHAMBERS AND RELATED HEATING CONFIGURATIONS, METHODS, APPARATUS, AND MODULES FOR SEMICONDUCTOR MANUFACTURING | BODNAR, JOHN A | 2893 | §102§103 | Non-Final OA | — | Pending | Dec 21, 2023 |
| 18391541 | LOW ENERGY TREATMENT TO PASSIVATE SiC SUBSTRATE DEFECTS | SUN, MICHAEL BRENNAN | 2892 | §103 | Final Rejection | 71d | Pending | Dec 20, 2023 |
| 18391423 | Electrode and Coil Configurations For Processing Chambers and Related Chamber Kits, Apparatus, and Methods For Semiconductor Manufacturing | CHEN, PATRICK C | 2842 | §103 | Non-Final OA | — | Pending | Dec 20, 2023 |
| 18391089 | CHAMBER KITS, PROCESSING CHAMBERS, AND METHODS FOR GAS ACTIVATION IN SEMICONDUCTOR MANUFACTURING | ZERVIGON, RUDY | 1716 | §102§103§112 | Non-Final OA | — | Pending | Dec 20, 2023 |
| 18391015 | BOTTOM-UP DIELECTRIC GAP-FILL FOR DEVICE ISOLATION DURING SOURCE/DRAIN EPITAXY IN CFET | CHANG, JAY C | 2817 | §102 | Final Rejection | — | Pending | Dec 20, 2023 |
| 18391176 | ELECTRODE CONFIGURATIONS AND MAGNET CONFIGURATIONS FOR PROCESSING CHAMBERS, AND RELATED METHODS AND APPARATUS, FOR SEMICONDUCTOR MANUFACTURING | MCDONALD, RODNEY GLENN | 1794 | §103 | Non-Final OA | — | Pending | Dec 20, 2023 |
| 18542562 | DETERMINING EQUIPMENT CONSTANT UPDATES BY MACHINE LEARNING | PATEL, JIGNESHKUMAR C | 2116 | §112 | Final Rejection | 16d | Pending | Dec 15, 2023 |
| 18539493 | METHODS OF MANUFACTURING LOGIC DEVICES AND MEMORY DEVICES | VALENZUELA, PATRICIA D | 2812 | §103 | Final Rejection | — | Pending | Dec 14, 2023 |
| 18540680 | GAS FLOW SUBSTRATE SUPPORTS, PROCESSING CHAMBERS, AND RELATED METHODS AND APPARATUS, FOR SEMICONDUCTOR MANUFACTURING | ZERVIGON, RUDY | 1716 | §103 | Final Rejection | — | Pending | Dec 14, 2023 |
| 18538100 | CHAMBER AND METHODS FOR DOWNSTREAM RESIDUE MANAGEMENT | FORD, NATHAN K | 1716 | §102§103 | Final Rejection | 55d | Pending | Dec 13, 2023 |
| 18538267 | INNER SPACER LINER FOR GATE-ALL-AROUND DEVICE | ELLIOTT, DANIEL KURT | 2899 | §103 | Final Rejection | — | Pending | Dec 13, 2023 |
| 18534071 | HIGH-TEMPERATURE IMPLANT FOR GATE-ALL-AROUND DEVICES | LEE, KYOUNG | 2817 | §102 | Final Rejection | 5d | Pending | Dec 08, 2023 |
| 18532381 | METHOD OF DEPOSITING A TUNGSTEN CONTAINING LAYER | SWANSON, ANDREW L | 1745 | §103 | Final Rejection | 9d overdue | Pending | Dec 07, 2023 |
| 18526788 | HARDWARE DESIGN WITH INDEPENDENT CONTROL TO IMPROVE WIW UNIFORMITY | CHEN, KEATH T | 1716 | §112 | Final Rejection | — | Pending | Dec 01, 2023 |
| 18524955 | HYBRID SEAL FOR SEMICONDUCTOR PROCESSING CHAMBERS | REYES, JOSHUA NATHANIEL PI | 1718 | §103§112 | Non-Final OA | — | Pending | Nov 30, 2023 |
| 18525660 | FAULT EVENT RECOVERY IN MULTI-SLOT PROCESSING CHAMBERS | TANG, MICHAEL XUEFEI | 2115 | §103 | Final Rejection | 29d | Pending | Nov 30, 2023 |
| 18525633 | 3D MEMORY INCLUDING HOLLOW EPITAXIAL CHANNELS | ABEL, GARY ROBERT | 2897 | §103 | Non-Final OA | 16d overdue | Pending | Nov 30, 2023 |
| 18523455 | OXIDATION CONFORMALITY IMPROVEMENT WITH IN-SITU INTEGRATED PROCESSING | CUNNINGHAM, KIERAN MURRAY | 2893 | §103 | Final Rejection | — | Pending | Nov 29, 2023 |
| 18523394 | SINGLE WAFER PROCESSING ENVIRONMENTS WITH SPATIAL SEPARATION | CHEN, KEATH T | 1716 | §103 | Non-Final OA | 14d | Pending | Nov 29, 2023 |
| 18521948 | PLASMA PROCESSING WITH INDEPENDENT TEMPERATURE CONTROL | PHAM, THOMAS T | 1713 | §103§112 | Final Rejection | — | Pending | Nov 28, 2023 |
| 18517791 | CLOSED LOOP CONTROL SYSTEM TO MONITOR INSIDE PARAMETERS OF A SUBSTRATE CARRIER | CHARIOUI, MOHAMED | 2857 | §103§112 | Final Rejection | — | Pending | Nov 22, 2023 |
| 18516728 | LOW TEMPERATURE EPI CHAMBER | SONG, MATTHEW J | 1714 | §103 | Non-Final OA | 70d | Pending | Nov 21, 2023 |
| 18512894 | LOW RESISTIVITY GAPFILL | BERRY, PAUL ANTHONY | 2898 | §103 | Final Rejection | 72d | Pending | Nov 17, 2023 |
| 18388490 | ION ANGLE SENSOR | GASSEN, CHRISTOPHER J | 2881 | §103§112 | Non-Final OA | — | Pending | Nov 09, 2023 |
| 18387987 | XRAY DIFFRACTION ANGLE VERIFICATION IN AN ION IMPLANTER | LOGIE, MICHAEL J | 2881 | §103§112 | Non-Final OA | — | Pending | Nov 08, 2023 |
| 18558817 | NOZZLE FOR A DISTRIBUTOR OF A MATERIAL DEPOSITION SOURCE, MATERIAL DEPOSITION SOURCE, VACUUM DEPOSITION SYSTEM AND METHOD FOR DEPOSITING MATERIAL | ZERVIGON, RUDY | 1716 | §102§103 | Final Rejection | 28d | Pending | Nov 03, 2023 |
| 18558388 | METHODS TO IMPROVE PRODUCTIVITY OF ADVANCED CVD W GAPFILL PROCESS | BRADFORD, PETER | 2897 | §103 | Final Rejection | — | Pending | Nov 01, 2023 |
| 18497096 | VIA SHAPING BETWEEN METAL LAYERS FOR CONTROLLED RESISTANCE | WOLDEGEORGIS, ERMIAS T | 2893 | §103 | Final Rejection | — | Pending | Oct 30, 2023 |
| 18384688 | METHOD OF BLOCKING DIELECTRIC SURFACES USING BLOCKING MOLECULES TO ENABLE SELECTIVE EPI DEPOSITION | WALTERS JR, ROBERT S | 1717 | §103 | Final Rejection | — | Pending | Oct 27, 2023 |
| 18384810 | DIO3 SPRAY TANK FOR POST CMP SUBSTRATE CLEANING | WIBLIN, MATTHEW | 3745 | §103 | Non-Final OA | 42d | Pending | Oct 27, 2023 |
| 18494319 | REAL-TIME PLASMA MEASUREMENT AND CONTROL | SHAFAYET, MOHAMMED | 2116 | §103 | Final Rejection | 46d overdue | Pending | Oct 25, 2023 |
| 18494632 | CONTROL OF CARRIER HEAD SWEEP AND PLATEN SHAPE | SEHN, MICHAEL L | 3745 | §102§103§112 | Non-Final OA | 71d | Pending | Oct 25, 2023 |
| 18383671 | PROCESSING CHAMBER WITH GAS RECYCLING | NGUYEN, HUY TRAM | 1774 | §112 | Non-Final OA | — | Pending | Oct 25, 2023 |
| 18383100 | SURFACE MODIFIERS FOR ENHANCED EPITAXIAL NUCLEATION AND WETTING | STARK, JARRETT J | 2898 | §103 | Final Rejection | — | Pending | Oct 24, 2023 |
| 18382977 | PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY | WASHVILLE, JEFFREY D | 1766 | §102 | Non-Final OA | — | Pending | Oct 23, 2023 |
| 18491584 | METHODS AND APPARATUS FOR ANISOTROPIC FILM GROWTH, AND RELATED DEVICES | ANDERSON, WILLIAM H | 2817 | §103 | Non-Final OA | — | Pending | Oct 20, 2023 |
| 18381893 | MULTIZONE REFLECTOR FOR TEMPERATURE PLANAR NON-UNIFORMITY | YU, YUECHUAN | 1718 | §102§103§112 | Non-Final OA | — | Pending | Oct 19, 2023 |
| 18555342 | METHODS AND APPLICATIONS OF NOVEL AMORPHOUS HIGH-K METAL-OXIDE DIELECTRICS BY SUPER-CYCLE ATOMIC LAYER DEPOSITION | SRINIVASAN, SESHA SAIRAMAN | 2817 | §103 | Non-Final OA | 37d overdue | Pending | Oct 16, 2023 |
| 18486291 | PROCESS CHAMBER GAS FLOW IMPROVEMENT | LEE, AIDEN Y | 1718 | §103 | Final Rejection | 46d overdue | Pending | Oct 13, 2023 |
| 18379915 | SHOWERHEAD DESIGN FOR PLASMA-ENHANCED DEPOSITION | BENNETT, CHARLEE | 1718 | §103 | Final Rejection | 12d | Pending | Oct 13, 2023 |
| 18486576 | THREE-DIMENSIONAL MEMORY DEVICE WORDLINES WITH REDUCED BLOCKING LAYER DAMAGE | GHYKA, ALEXANDER G | 2812 | §103 | Non-Final OA | 21d | Pending | Oct 13, 2023 |
| 18379106 | EUV PHOTORESIST AND UNDERLAYER ADHESION MODULATION | CHU, JOHN S Y | 1737 | §102§103 | Non-Final OA | — | Pending | Oct 11, 2023 |
| 18379028 | ENABLE CVD CHAMBER PROCESS WAFERS AT DIFFERENT TEMPERATURES | JAGAN, MIRELLYS | 1716 | §112 | Non-Final OA | — | Pending | Oct 11, 2023 |
| 18378850 | SACRIFICIAL SOURCE/DRAIN FOR METALLIC SOURCE/DRAIN HORIZONTAL GATE ALL AROUND ARCHITECTURE | PARK, SAMUEL | 2818 | §103 | Non-Final OA | 28d overdue | Pending | Oct 11, 2023 |
| 18378828 | OLIGOMER FILM FOR BOTTOM-UP GAP FILL PROCESSES | ROLLAND, ALEX A | 1759 | §102§103§112 | Final Rejection | — | Pending | Oct 11, 2023 |
| 18484016 | SCALING FOR DIE-LAST ADVANCED IC PACKAGING | ALAWDI, ANWER AHMED | 2851 | §102§103 | Non-Final OA | 23d | Pending | Oct 10, 2023 |
| 18484165 | PEDESTAL HEATER WITH SUBSTRATE TEMPERATURE MEASUREMENT SYSTEM | KLUNK, MARGARET D | 1716 | §102§103 | Non-Final OA | — | Pending | Oct 10, 2023 |
| 18483965 | COMPACT DYNAMIC LEVELING LIFT MECHANISM | BENNETT, CHARLEE | 1718 | §102§103§112 | Non-Final OA | — | Pending | Oct 10, 2023 |
| 18483957 | ELECTROPLATING CHAMBER USING JET ARRAY TO ENABLE HIGH MASS-TRANSFER | WITTENBERG, STEFANIE S | 1795 | §103 | Non-Final OA | — | Pending | Oct 10, 2023 |
| 18483352 | CURABLE FORMULATIONS FOR POLISHING PADS | REDDY, KARUNA P | 1764 | §103 | Non-Final OA | — | Pending | Oct 09, 2023 |
| 18377591 | EDGE AND HOT SPOT COMPENSATION TECHNIQUES IN CHEMICAL MECHANICAL POLISHING | DUNN, DARRIN D | 3723 | §102 | Non-Final OA | — | Pending | Oct 06, 2023 |
| 18376057 | SEAM-FREE SINGLE OPERATION AMORPHOUS SILICON GAP FILL | DAGENAIS, KRISTEN A | 1717 | §102§103 | Final Rejection | 28d overdue | Pending | Oct 03, 2023 |
| 18376356 | POLISHING HEAD WITH FLEXURE EXTENDING THROUGH PRESSURE CHAMBER | HOLIZNA, CALEB ANDREW | 3723 | §102 | Non-Final OA | 70d | Pending | Oct 03, 2023 |
| 18478723 | TEMPERATURE AND SLURRY FLOW RATE CONTROL IN CMP | RIVERA, CARLOS A | 3723 | §103 | Non-Final OA | — | Pending | Sep 29, 2023 |
| 18375409 | SUBSTRATE PROCESSING SYSTEM CARRIER | SAENZ, ALBERTO | 3723 | §103§112 | Final Rejection | — | Pending | Sep 29, 2023 |
| 18374531 | INVERTING IMPLANTER PROCESS MODEL FOR PARAMETER GENERATION | OSENBAUGH-STEWART, ELIZA W | 2881 | §102§103§112 | Final Rejection | 6d | Pending | Sep 28, 2023 |
| 18371179 | LOW RESISTIVITY METAL STACKS AND METHODS OF DEPOSITING THE SAME | ZARNEKE, DAVID A | 2891 | §102§103Other | Final Rejection | — | Pending | Sep 21, 2023 |
| 18370536 | IN-SITU SIDEWALL PASSIVATION TOWARD THE BOTTOM OF HIGH ASPECT RATIO FEATURES | PURVIS, SUE A | 2893 | §103 | Final Rejection | 60d overdue | Pending | Sep 20, 2023 |
| 18370534 | ALLOY COMPOSITION FOR CORROSION RESISTANCE | WALCK, BRIAN D | 1718 | §102§112 | Non-Final OA | — | Pending | Sep 20, 2023 |
| 18467211 | PLASMA PROCESSING CHAMBER LID COOLING | BENNETT, CHARLEE | 1718 | §102§103§112 | Final Rejection | — | Pending | Sep 14, 2023 |
| 18368311 | METHODS AND MECHANISMS FOR TRACE-BASED TRANSFER LEARNING | VINCENT, DAVID ROBERT | 2123 | §101§102 | Final Rejection | — | Pending | Sep 14, 2023 |
| 18367321 | MICROWAVE ANNEALING FOR LOW THERMAL BUDGET APPLICATIONS | MILLER, JR, JOSEPH ALBERT | 1712 | §103 | Final Rejection | — | Pending | Sep 12, 2023 |
| 18244466 | PIXEL ISOLATION STRUCTURES AND METHODS OF MAKING THEM | YEUNG LOPEZ, FEIFEI | 2899 | §103 | Non-Final OA | — | Pending | Sep 11, 2023 |
| 18244104 | SUBSTRATE MANUFACTURING EQUIPMENT COMPREHENSIVE DIGITAL TWIN FLEET | POUDEL, SANTOSH RAJ | 2115 | §103 | Final Rejection | 20d | Pending | Sep 08, 2023 |
| 18243266 | SUBSTRATE GRIPPING ASSEMBLY WITH FEEDBACK CONTROL | HOQUE, SHAHEDA SHABNAM | 3658 | §103 | Final Rejection | — | Pending | Sep 07, 2023 |
| 18242812 | CORRECTION OF GLOBAL CURVATURE DURING STRESS MANAGEMENT | NGUYEN, THANH T | 2893 | §102§103 | Non-Final OA | — | Pending | Sep 06, 2023 |
| 18242886 | METHODS AND MECHANISMS FOR VIBRATION MONITORING | BALSECA, FRANKLIN D | 2688 | §103 | Final Rejection | — | Pending | Sep 06, 2023 |
| 18243085 | INTEGRATION APPROACH FOR INCREASE OF THE MOBILITY AND ON-CURRENT IN 3D NAND CELLS | STEPHENSON, KENNETH STEPHEN | 2898 | §103 | Non-Final OA | — | Pending | Sep 06, 2023 |
| 18242184 | Laser Cleaning Used Component of Substrate Processing Chamber | HARRINGTON, ALYSON JOAN | 3741 | §103§112 | Final Rejection | — | Pending | Sep 05, 2023 |
| 18460174 | METHOD AND MATERIAL SYSTEM FOR HIGH STRENGTH SELECTIVE DIELECTRIC IN HYBRID BONDING | WARREN, MATTHEW E | 2817 | §103 | Final Rejection | — | Pending | Sep 01, 2023 |
| 18239988 | In-Vacuum Rotatable RF Component | FORD, NATHAN K | 1716 | §102§103 | Final Rejection | 29d | Pending | Aug 30, 2023 |
| 18238954 | SACRIFICIAL LAYER FOR FORMING MERGED HIGH ASPECT RATIO CONTACTS IN 3D NAND MEMORY DEVICE | FAN, SU JYA | 2818 | §103§112 | Non-Final OA | 4d overdue | Pending | Aug 28, 2023 |
| 18238107 | METHODS FOR FORMING LOW-K DIELECTRIC MATERIALS WITH REDUCED DIELECTRIC CONSTANT AND HIGH MECHANICAL STRENGTH | RODRIGUEZ, MICHAEL P | 1712 | §102§103 | Final Rejection | 42d overdue | Pending | Aug 25, 2023 |
| 18455508 | SEAM PERFORMANCE IMPROVEMENT USING HYDROXYLATION FOR GAPFILL | DAGENAIS, KRISTEN A | 1717 | §103 | Non-Final OA | 10d overdue | Pending | Aug 24, 2023 |
| 18237628 | ALUMINUM OXIDE CARBON HYBRID HARDMASKS AND METHODS FOR MAKING THE SAME | CULBERT, ROBERTS P | 1724 | §102§103 | Non-Final OA | — | Pending | Aug 24, 2023 |
| 18236042 | METHODS OF ETCHING SILICON-AND-OXYGEN-CONTAINING FEATURES AT LOW TEMPERATURES | CULBERT, ROBERTS P | 1716 | §102§103 | Final Rejection | — | Pending | Aug 21, 2023 |
| 18452426 | ACOUSTIC MONITORING FOR PROCESS RELIABILITY DURING POLISHING | SHUM, KENT N | 3723 | §103§112 | Non-Final OA | 15d | Pending | Aug 18, 2023 |
| 18234685 | PLASMA ETCHING IN SEMICONDUCTOR PROCESSING | LU, JIONG-PING | 1713 | §103 | Non-Final OA | 27d | Pending | Aug 16, 2023 |
| 18234723 | DIGITAL TWIN FOR LASER MATERIAL PROCESSING | MEADE, LORNE EDWARD | 3741 | §103 | Final Rejection | 2d overdue | Pending | Aug 16, 2023 |
| 18234453 | OPERATIONS OF ROBOT APPARATUSES WITHIN RECTANGULAR MAINFRAMES | BURKMAN, JESSICA LYNN | 3653 | §103 | Non-Final OA | 36d | Pending | Aug 16, 2023 |
| 18233984 | METHODS FOR FORMING LOW-K DIELECTRIC MATERIALS WITH REDUCED DIELECTRIC CONSTANT AND INCREASED DENSITY | GAMBETTA, KELLY M | 1718 | §103 | Non-Final OA | — | Pending | Aug 15, 2023 |
| 18232631 | METHODS OF FORMING CONFORMAL TRANSITION METAL DICHALCOGENIDE FILMS | MURATA, AUSTIN | 1712 | §103 | Non-Final OA | 33d | Pending | Aug 10, 2023 |
| 18366433 | CHAMBER COMPONENT FOR IMPROVED CLEANING EFFICIENCY | KENDALL, BENJAMIN R | 2896 | §103§112 | Non-Final OA | — | Pending | Aug 07, 2023 |
| 18365520 | PAD CONDITIONING DISK GIMBALING CONTROL | HOLIZNA, CALEB ANDREW | 3723 | §102§103 | Non-Final OA | 29d overdue | Pending | Aug 04, 2023 |
| 18230615 | Direct 3D Laser Engraved Gasket For Parts Used In Semiconductor Processing | RHUE, ABIGAIL H | 3761 | §102§103 | Non-Final OA | — | Pending | Aug 04, 2023 |
| 18365482 | CARRIER HEAD ACOUSTIC MONITORING WITH SENSOR IN PLATEN | XU, PETER | 2119 | §103 | Final Rejection | — | Pending | Aug 04, 2023 |
| 18363545 | PAD SURFACE CLEANING DEVICE AROUND PAD CONDITIONER TO ENABLE INSITU PAD CONDITIONING | HOLIZNA, CALEB ANDREW | 3723 | §103 | Final Rejection | 19d | Pending | Aug 01, 2023 |
| 18228393 | CLUSTER PROCESSING SYSTEM FOR FORMING A METAL CONTAINING MATERIAL | REYES, JOSHUA NATHANIEL PI | 1718 | §102§103 | Final Rejection | — | Pending | Jul 31, 2023 |
| 18274991 | POLISHING FLUID RECOVERY AND REUSE SYSTEM FOR SEMICONDUCTOR SUBSTRATE PROCESSING | RIVERA, CARLOS A | 3723 | §103 | Final Rejection | 54d | Pending | Jul 28, 2023 |
| 18360074 | METHOD AND SYSTEM FOR AUTOMATIC IHC MARKER-HER2 SCORE | TAYLOR, MEREDITH IREENE DUPAI | 2671 | §102§103 | Final Rejection | 97d overdue | Pending | Jul 27, 2023 |
| 18227226 | CHAMBER FOR SUBSTRATE BACKSIDE AND BEVEL DEPOSITION | CHAN, LAUREEN | 1716 | §103 | Final Rejection | 9d overdue | Pending | Jul 27, 2023 |
| 18226579 | METHODS OF FORMING ABRUPT INTERFACES BETWEEN SILICON-AND-CARBON-CONTAINING MATERIALS AND SILICON-AND-OXYGEN-CONTAINING MATERIALS | DUREN, TIMOTHY EDWARD | 2817 | §102§103§112 | Final Rejection | 53d | Pending | Jul 26, 2023 |
| 18226554 | METHODS AND MECHANISMS TO IMPROVE MONITORING CAPABILITIES USING RATE OF CHANGE OF SENSOR VALUES | CHANG, VINCENT WEN-LIANG | 2119 | §103 | Final Rejection | 14d | Pending | Jul 26, 2023 |
| 18226007 | METHODS, SYSTEMS, AND APPARATUS FOR FORMING LAYERS HAVING SINGLE CRYSTALLINE STRUCTURES | BRATLAND JR, KENNETH A | 1714 | §103§112 | Non-Final OA | 12d | Pending | Jul 25, 2023 |
| 18225007 | METHODS OF ADJUSTING UNIFORMITY, AND RELATED APPARATUS AND SYSTEMS, FOR SEMICONDUCTOR MANUFACTURING | LEONG, NATHAN T | 1718 | §103 | Final Rejection | 33d | Pending | Jul 21, 2023 |
| 18223183 | SINGLE PIECE OR TWO PIECE SUSCEPTOR | FORD, NATHAN K | 1716 | §102§103 | Final Rejection | — | Pending | Jul 18, 2023 |
| 18222671 | SEMICONDUCTOR CHEMICAL PRECURSOR WITH GAS PASSAGES | LEE, AIDEN Y | 1718 | §102§103§112 | Final Rejection | — | Pending | Jul 17, 2023 |
| 18272438 | Deposition Of Piezoelectric Films | TALBOT, BRIAN K | 1712 | §103 | Non-Final OA | — | Pending | Jul 14, 2023 |
| 18221505 | CYCLIC ETCH OF SILICON OXIDE AND SILICON NITRIDE | LU, JIONG-PING | 1713 | §102§103 | Non-Final OA | 21d | Pending | Jul 13, 2023 |
| 18218979 | VACUUM ENABLED GRIPPER WITH ROLLER CONTACT FINGERS | RODDEN, JOSHUA E | 4100 | §102§103§112 | Non-Final OA | — | Pending | Jul 06, 2023 |
| 18212314 | INCREASED ETCH RATES OF SILICON-CONTAINING MATERIALS | CULBERT, ROBERTS P | 1716 | §102§103 | Non-Final OA | — | Pending | Jun 21, 2023 |
| 18337294 | FORMING OPTICAL DEVICE USING MIXED-PARTICLE LAYER | ROLLAND, ALEX A | 1759 | §103§112 | Non-Final OA | — | Pending | Jun 19, 2023 |
| 18336157 | METHOD FOR FORMATION OF CONFORMAL ALD SIO2 FILMS | ROLLAND, ALEX A | 1759 | §103 | Final Rejection | — | Pending | Jun 16, 2023 |
| 18336036 | EVAPORATION DEVICE AND EVAPORATION METHOD | MOORE, KARLA A | 1716 | §103 | Non-Final OA | — | Pending | Jun 16, 2023 |
| 18208710 | ATOMIC LAYER DEPOSITION OF HIGH DIELECTRIC CONSTANT MATERIALS | JEFFERSON, QUOVAUNDA | 2899 | §103 | Non-Final OA | — | Pending | Jun 12, 2023 |
| 18208010 | Integrated Pressure Sensor for Process Chamber Assemblies | HOTCHKISS, MICHAEL WAYNE | 1716 | §103 | Final Rejection | 83d | Pending | Jun 09, 2023 |
| 18206847 | CCP GAS DELIVERY NOZZLE | KACKAR, RAM N | 1716 | §103 | Final Rejection | 28d | Pending | Jun 07, 2023 |
| 18206852 | ICP SOURCE GAS DELIVERY HUB AND NOZZLE | KENDALL, BENJAMIN R | 2896 | §102§103 | Non-Final OA | — | Pending | Jun 07, 2023 |
| 18206332 | CERAMIC COOLING BASE | POUDEL, SANTOSH RAJ | 3722 | §103 | Non-Final OA | — | Pending | Jun 06, 2023 |
| 18205262 | MONITORING OF ACOUSTIC EVENTS ON A SUBSTRATE | FORDJOUR, SARAH AKYAA | 3723 | §103§112 | Non-Final OA | — | Pending | Jun 02, 2023 |
| 18204805 | METHOD TO OPTIMIZE POST DEPOSITION BAKING CONDITION OF PHOTO RESISTIVE MATERIALS | EOFF, ANCA | 1722 | §102§103 | Non-Final OA | — | Pending | Jun 01, 2023 |
| 18323941 | DYNAMIC INTERFACE FOR PROVIDING A SYMMETRIC RADIO FREQUENCY RETURN PATH | BENNETT, CHARLEE | 1718 | §103 | Non-Final OA | — | Pending | May 25, 2023 |
| 18322928 | CHEMICAL MECHANICAL POLISH PAD CONDITIONER WITH MULTIPLE DISKS | ZAWORSKI, JONATHAN R | 3723 | §103 | Final Rejection | 19d | Pending | May 24, 2023 |
| 18038441 | ANALYSIS OF MULTI-RUN CYCLIC PROCESSING PROCEDURES | COLLINS, GARY | 2115 | §101§102§103 | Final Rejection | 9d overdue | Pending | May 23, 2023 |
| 18200921 | SUBSTRATE PLACEMENT OPTIMIZATION USING SUBSTRATE MEASUREMENTS | TANG, MICHAEL XUEFEI | 2115 | §103 | Non-Final OA | 41d | Pending | May 23, 2023 |
| 18199614 | DRUG COMPOSITIONS AND METHODS OF PREPARING THE SAME | TCHERKASSKAYA, OLGA V | 1615 | §103§112 | Non-Final OA | 12d | Pending | May 19, 2023 |
| 18199625 | OZONE-BASED LOW TEMPERATURE SILICON OXIDE COATING FOR PHARMACEUTICAL APPLICATIONS | MITCHELL, EDWIN COLEMAN | 1619 | §103§112DP | Non-Final OA | 18d overdue | Pending | May 19, 2023 |
| 18319876 | EPITAXIAL SILICON CHANNEL GROWTH | STEPHENSON, KENNETH STEPHEN | 2898 | §102§103§112 | Final Rejection | 46d overdue | Pending | May 18, 2023 |
| 18319869 | EPITAXIAL SILICON CHANNEL GROWTH | FREY, KIMBERLY NEWMAN | 2817 | §102 | Final Rejection | — | Pending | May 18, 2023 |
| 18198043 | MEMORY DEVICE WITH HIGH-MOBILITY OXIDE SEMICONDUCTOR CHANNEL AND METHODS FOR FORMING THE SAME | GREWAL, HEIM KIRIN | 2812 | §103 | Non-Final OA | 29d | Pending | May 16, 2023 |
| 18198123 | SENSOR FOR MEASUREMENT OF RADICALS | CHEN, KEATH T | 1716 | §103 | Non-Final OA | 28d | Pending | May 16, 2023 |
| 18198073 | FINGERPRINTING AND PROCESS CONTROL OF PHOTOSENSITIVE FILM DEPOSITION CHAMBER | CARLSON, JOSHUA MICHAEL | 2800 | §103 | Non-Final OA | — | Pending | May 16, 2023 |
| 18197658 | HIGH-TEMPERATURE SUBSTRATE SUPPORT ASSEMBLY WITH FAILURE PROTECTION | MACEDA, KRYSTENE NHE BANDONG | 3745 | §102§103§112 | Non-Final OA | — | Pending | May 15, 2023 |
| 18196187 | Ohmic Contact for Semiconductor Structures | KIM, JAY C | 2815 | §112 | Final Rejection | 10d overdue | Pending | May 11, 2023 |
| 18144747 | HIGH EFFICIENCY MICROWAVE PLASMA APPLICATOR | MCDONALD, RODNEY GLENN | 1794 | §102§103 | Non-Final OA | 9d | Pending | May 08, 2023 |
| 18144745 | MICROWAVE PLASMA APPLICATOR WITH REPLACEABLE DIELECTRIC PLATE | MCDONALD, RODNEY GLENN | 1794 | §103 | Non-Final OA | 29d | Pending | May 08, 2023 |
| 18142654 | LARGE-AREA HIGH-DENSITY PLASMA PROCESSING CHAMBER FOR FLAT PANEL DISPLAYS | KACKAR, RAM N | 1716 | §103§112DP | Final Rejection | 41d | Pending | May 03, 2023 |
| 18309314 | SUBSTRATE CLEANING IMPROVEMENT | POON, DANA LEE | 3723 | §103 | Non-Final OA | — | Pending | Apr 28, 2023 |
| 18308776 | EPI THERMAL PROFILE TUNING WITH LAMP RADIATION SHIELDS | LUND, JEFFRIE ROBERT | 1716 | §102§103 | Final Rejection | — | Pending | Apr 28, 2023 |
| 18141177 | HYBRID WAFER DICING APPROACH USING A RECTANGULAR LASER SPOT-BASED LASER SCRIBING PROCESS AND PLASMA ETCH PROCESS | OZDEN, ILKER NMN | 2812 | §103Other | Non-Final OA | — | Pending | Apr 28, 2023 |
| 18140207 | EPI ISOLATION PLATE AND PARALLEL BLOCK PURGE FLOW TUNING FOR GROWTH RATE AND UNIFORMITY | QI, HUA | 1714 | §103§112 | Non-Final OA | 41d | Pending | Apr 27, 2023 |
| 18138811 | METHOD OF PLASMA CLEANING OF FUSED SILICA TUBES | LINDSEY, COLE LEON | 2812 | §102§103 | Final Rejection | 34d | Pending | Apr 25, 2023 |
| 18138629 | UNIFORM PLASMA PROCESSING WITH A LINEAR PLASMA SOURCE | LEE, WILSON | 2844 | §103§112 | Final Rejection | 3d overdue | Pending | Apr 24, 2023 |
| 18138733 | MULTI-ELECTRODE SOURCE ASSEMBLY FOR PLASMA PROCESSING | REYES, JOSHUA NATHANIEL PI | 1718 | §103 | Final Rejection | 23d overdue | Pending | Apr 24, 2023 |
| 18305852 | HIGH-DENSITY MICRO-LED ARRAYS WITH REFLECTIVE SIDEWALLS | MUSE, ISMAIL A | 2812 | §103§112 | Non-Final OA | 15d | Pending | Apr 24, 2023 |
| 18138396 | Elastomer Bonded Door For Vacuum Systems | LEE, GILBERT Y | 3675 | §103 | Non-Final OA | — | Pending | Apr 24, 2023 |
| 18306187 | METHOD OF METROLOGY ON PATTERN WAFER USING REFLECTOMETRY | WEGNER, AARON MICHAEL | 2897 | §102§103 | Final Rejection | 60d overdue | Pending | Apr 24, 2023 |
| 18136970 | HYBRID MOLYBDENUM FILL SCHEME FOR LOW RESISTIVITY SEMICONDUCTOR APPLICATIONS | PARKER, JOHN M | 2899 | §102§103 | Final Rejection | 73d overdue | Pending | Apr 20, 2023 |
| 18135434 | COATING COMPONENTS FOR SEMICONDUCTOR PROCESSING WITH FLUORINE-CONTAINING MATERIALS | MAYY, MOHAMMAD | 1718 | §103 | Non-Final OA | 2d overdue | Pending | Apr 17, 2023 |
| 18300280 | METHODS FOR FORMING MULTI-TIER TUNGSTEN FEATURES | TRAN, TONY | 2893 | §103 | Final Rejection | — | Pending | Apr 13, 2023 |
| 18131534 | ADVANCED METHOD FOR CREATING ELECTROSTATIC CHUCK (ESC) MESA PATTERNS | BENNETT, CHARLEE | 1718 | §103 | Non-Final OA | — | Pending | Apr 06, 2023 |
| 18131212 | HIGH TEMPERATURE METAL SEALS FOR VACUUM SEGREGATION | MOORE, KARLA A | 1716 | §102§103§112 | Final Rejection | 1d overdue | Pending | Apr 05, 2023 |
| 18128124 | CERAMIC SYNTHESIS THROUGH SURFACE COATING OF POWDERS | GAMBETTA, KELLY M | 1718 | §103 | Non-Final OA | — | Pending | Mar 29, 2023 |
| 18126701 | MICRO-LED STRUCTURES AND PHOTOLUMINESCENT MATERIALS HAVING UV LIGHT FILTERS | GEBREMARIAM, SAMUEL A | 2811 | §102§103 | Final Rejection | — | Pending | Mar 27, 2023 |
| 18124674 | MULTI-VT INTEGRATION SCHEME FOR SEMICONDUCTOR DEVICES | LINDSEY, COLE LEON | 2812 | §102§103 | Non-Final OA | — | Pending | Mar 22, 2023 |
| 18124401 | INDIRECT PLASMA HEALTH MONITORING | SUN, XIUQIN | 2857 | §103 | Final Rejection | 34d | Pending | Mar 21, 2023 |
| 18123085 | RESIST MODELING METHOD FOR ANGLED GRATINGS | LIN, ARIC | 2851 | §103 | Final Rejection | 2d overdue | Pending | Mar 17, 2023 |
| 18182856 | DISPLAY PIXELS MADE FROM STACKED MICRO-LED STRUCTURES AND PHOTOLUMINESCENT MATERIALS | HAN, JONATHAN | 2818 | §102§103 | Final Rejection | 43d overdue | Pending | Mar 13, 2023 |
| 18115269 | PROCESSING METHODS TO IMPROVE ETCHED SILICON-AND-GERMANIUM-CONTAINING MATERIAL SURFACE ROUGHNESS | ALANKO, ANITA KAREN | 1713 | §103§112DP | Non-Final OA | — | Pending | Feb 28, 2023 |
| 18115561 | SELECTIVE VIA-FILL WITH CONFORMAL SIDEWALL COVERAGE | LUKE, DANIEL M | 2896 | §102§103§112 | Non-Final OA | — | Pending | Feb 28, 2023 |
| 18112252 | TREATMENTS TO IMPROVE ETCHED SILICON-AND-GERMANIUM-CONTAINING MATERIAL SURFACE ROUGHNESS | ALANKO, ANITA KAREN | 1713 | §103DP | Non-Final OA | — | Pending | Feb 21, 2023 |
| 18171119 | SILICON SUPER JUNCTION STRUCTURES FOR INCREASED THROUGHPUT | RAHIM, NILUFA | 2893 | §102§103 | Non-Final OA | 21d | Pending | Feb 17, 2023 |
| 18168168 | PROCESSING SYSTEM AND METHODS TO CO-STRIKE PLASMA TO ENHANCE TUNGSTEN GROWTH INCUBATION DELAY | FORD, NATHAN K | 1716 | §103 | Final Rejection | 15d | Pending | Feb 13, 2023 |
| 18108327 | MOLYBDENUM(0) PRECURSORS FOR DEPOSITION OF MOLYBDENUM FILMS | BAKSHI, PANCHAM | 1623 | §102§103 | Non-Final OA | — | Pending | Feb 10, 2023 |
| 18107819 | System and Method for Reducing Particle Formation in a Process Chamber of an Ion Implanter | GOURLIE, LAURA ELOISE | 2881 | §103 | Final Rejection | 43d overdue | Pending | Feb 09, 2023 |
| 18162074 | SUBSTRATE PROCESSING FOR AlN AND GaN POLARITY CONTROL | CHUNG, ANDREW | 2898 | §103 | Non-Final OA | 50d overdue | Pending | Jan 31, 2023 |
| 18019054 | TOOL DRIFT COMPENSATION WITH MACHINE LEARNING | PARK, HYUN D | 2857 | §103 | Non-Final OA | — | Pending | Jan 31, 2023 |
| 18160274 | METHODS AND APPARATUS FOR CALIBRATION OF SUBSTRATE PROCESSING CHAMBER PLACEMENT VIA IMAGING | XING, CHRISTINA ILONA | 2877 | §103 | Final Rejection | 91d overdue | Pending | Jan 26, 2023 |
| 18102055 | RF GROUNDING CONFIGURATION FOR PEDESTALS | KACKAR, RAM N | 1716 | §103 | Non-Final OA | 17d overdue | Pending | Jan 26, 2023 |
| 18101932 | SYSTEMS AND METHODS FOR TITANIUM-CONTAINING FILM REMOVAL | LAOBAK, ANDREW KEELAN | 1713 | §103 | Non-Final OA | 30d overdue | Pending | Jan 26, 2023 |
| 18160109 | SURGING FLOW FOR BUBBLE CLEARING IN ELECTROPLATING SYSTEMS | WITTENBERG, STEFANIE S | 1795 | §103 | Final Rejection | — | Pending | Jan 26, 2023 |
| 18101523 | PRE-HEAT RINGS AND PROCESSING CHAMBERS INCLUDING BLACK QUARTZ, AND RELATED METHODS | NUCKOLS, TIFFANY Z | 1716 | §103 | Final Rejection | 3d overdue | Pending | Jan 25, 2023 |
| 18159208 | APPARATUS AND METHODS FOR HEATING TUNABILITY IN PROCESSING CHAMBERS | OLIVA, STEPHANIE RENEE | 3761 | §102§103 | Final Rejection | — | Pending | Jan 25, 2023 |
| 18100978 | METHOD FOR CONTROLLING LAYER-TO-LAYER THICKNESS IN MULTI-TIER EPITAXIAL PROCESS | SONG, MATTHEW J | 1714 | §103 | Final Rejection | — | Pending | Jan 24, 2023 |
| 18098791 | DRY ETCH OF BORON-CONTAINING MATERIAL | LAOBAK, ANDREW KEELAN | 1713 | §103 | Final Rejection | 29d | Pending | Jan 19, 2023 |
| 18099210 | SUBSTRATE SUPPORT CARRIER HAVING MULTIPLE CERAMIC DISCS | ADDISU, SARA | 3722 | §102§103 | Non-Final OA | 83d | Pending | Jan 19, 2023 |
| 18098547 | SUBSTRATE MODIFICATION FOR SUPERLATTICE CRITICAL THICKNESS IMPROVEMENT | RONO, VINCENT KIPKEMOI | 2891 | §103 | Non-Final OA | 61d | Pending | Jan 18, 2023 |
| 18095262 | MODULAR PRECURSOR DELIVERY AND SPLITTING FOR FAST SWITCHING | FORD, NATHAN K | 1716 | §103 | Final Rejection | — | Pending | Jan 10, 2023 |
| 18094765 | CHAMBERS, METHODS, AND APPARATUS FOR GENERATING ATOMIC RADICALS USING UV LIGHT | CHEN, KEATH T | 1716 | §103 | Non-Final OA | 55d | Pending | Jan 09, 2023 |
| 18093648 | HYDROGEN MANAGEMENT IN PLASMA DEPOSITED FILMS | TURNER, BRIAN | 2818 | §103 | Final Rejection | 84d | Pending | Jan 05, 2023 |
| 18093156 | PLASMA-ENHANCED MOLYBDENUM DEPOSITION | ROLLAND, ALEX A | 1759 | §103 | Non-Final OA | 42d overdue | Pending | Jan 04, 2023 |
| 18091552 | Methods and Apparatus for Processing a Substrate | OTT, PATRICK S | 1794 | §103 | Final Rejection | — | Pending | Dec 30, 2022 |
| 18091525 | STAMP TREATMENT TO GUIDE SOLVENT REMOVAL DIRECTION AND MAINTAIN CRITICAL DIMENSION | MALIK, VIPUL | 1754 | §103 | Non-Final OA | 33d | Pending | Dec 30, 2022 |
| 18088889 | TUNEABLE UNIFORMITY CONTROL UTILIZING ROTATIONAL MAGNETIC HOUSING | LAW, NGA LEUNG V | 1717 | §103 | Final Rejection | — | Pending | Dec 27, 2022 |
| 18087641 | MACHINE AND DEEP LEARNING TECHNIQUES FOR PREDICTING ECOLOGICAL EFFICIENCY IN SUBSTRATE PROCESSING | TRAN, VI N | 2117 | §103 | Final Rejection | — | Pending | Dec 22, 2022 |
| 18083372 | FAST GAS SWITCHING | BENNETT, CHARLEE | 1718 | §103 | Non-Final OA | — | Pending | Dec 16, 2022 |
| 18065742 | Gas Distribution Apparatuses | ZERVIGON, RUDY | 1716 | §102§103 | Non-Final OA | 22d | Pending | Dec 14, 2022 |
| 18077087 | REDUCTION OF BR2 AND CL2 IN SEMICONDUCTOR PROCESSES | ZERVIGON, RUDY | 1716 | §103 | Final Rejection | — | Pending | Dec 07, 2022 |
| 18070744 | MODELING FOR INDEXING AND SEMICONDUCTOR DEFECT IMAGE RETRIEVAL | ZAK, JACQUELINE ROSE | 2666 | §103§112 | Non-Final OA | 34d | Pending | Nov 29, 2022 |
| 17989767 | METHODS OF REMOVING METAL OXIDE USING CLEANING PLASMA | WEDDLE, ALEXANDER MARION | 1712 | §103 | Final Rejection | — | Pending | Nov 18, 2022 |
| 17977019 | METHOD FOR FABRICATING CHAMBER PARTS | RUMMEL, JULIA L | 1784 | §103§112 | Final Rejection | — | Pending | Oct 31, 2022 |
| 17975195 | EPI OVERLAPPING DISK AND RING | NUCKOLS, TIFFANY Z | 1716 | §102§103 | Final Rejection | 17d overdue | Pending | Oct 27, 2022 |
| 17974385 | PIXEL DEFINING ENCAPSULATING BARRIER FOR RGB COLOR PATTERNING | MANDALA, MICHELLE | 2893 | §102 | Non-Final OA | 42d | Pending | Oct 26, 2022 |
| 17973927 | OXIDATION ENHANCED DOPING | JEFFERSON, QUOVAUNDA | 2899 | §103 | Non-Final OA | 72d | Pending | Oct 26, 2022 |
| 17971338 | HEAT SOURCE ARRANGEMENTS, PROCESSING CHAMBERS, AND RELATED METHODS TO FACILITATE DEPOSITION PROCESS ADJUSTABILITY | TRAN-LE, THAO UYEN | 3761 | §103§112 | Non-Final OA | — | Pending | Oct 21, 2022 |
| 17970451 | PLASMA PROCESSING CHAMBERS CONFIGURED FOR TUNABLE SUBSTRATE AND EDGE SHEATH CONTROL | BENNETT, CHARLEE | 1718 | §103§112 | Non-Final OA | — | Pending | Oct 20, 2022 |
| 17919896 | WAFER EDGE TEMPERATURE CORRECTION IN BATCH THERMAL PROCESS CHAMBER | NUCKOLS, TIFFANY Z | 1716 | §103 | Final Rejection | — | Pending | Oct 19, 2022 |
| 18046872 | DETERMINING SUBSTRATE PROFILE PROPERTIES USING MACHINE LEARNING | LIN, ARIC | 2851 | §103§112 | Final Rejection | 28d | Pending | Oct 14, 2022 |
| 17964621 | INDUCTIVELY COUPLED PLASMA APPARATUS WITH NOVEL FARADAY SHIELD | ALEJANDRO MULERO, LUZ L | 1716 | §103 | Final Rejection | — | Pending | Oct 12, 2022 |
| 17961553 | HALOGEN-RESISTANT THERMAL BARRIER COATING FOR PROCESSING CHAMBERS | KENDALL, BENJAMIN R | 2896 | §102§103 | Non-Final OA | — | Pending | Oct 06, 2022 |
| 17955185 | MULTILAYER METASURFACE ARCHITECTURES WITH IMPEDANCE MATCHING | RAKOWSKI, CARA E | 2872 | §103§112 | Non-Final OA | — | Pending | Sep 28, 2022 |
| 17950946 | PLASMA-ENHANCED MOLYBDENUM DEPOSITION | MCCLURE, CHRISTINA D | 1718 | §103 | Final Rejection | — | Pending | Sep 22, 2022 |
| 17945861 | SINGULATION OF OPTICAL DEVICES FROM OPTICAL DEVICE SUBSTRATES VIA LASER ABLATION | THONG, YEONG JUEN | 3761 | §103 | Final Rejection | 32d overdue | Pending | Sep 15, 2022 |
| 17903892 | CONTROLLED DELIVERY OF LOW-VAPOR-PRESSURE PRECURSOR INTO A CHAMBER | LOUIE, MANDY C | 1718 | §103 | Non-Final OA | — | Pending | Sep 06, 2022 |
| 17902551 | SiC MOSFET Including Trench with Rounded Corners | DEGRASSE, IAN ISAAC | 2818 | §103 | Non-Final OA | — | Pending | Sep 02, 2022 |
| 17898796 | LANTHANUM NITRIDE AS A DRAM MOLYBDENUM LINER | TRAN, TONY | 2893 | §103 | Non-Final OA | — | Pending | Aug 30, 2022 |
| 17822009 | SUBSTRATE PLACEMENT OPTIMIZATION USING SUBSTRATE MEASUREMENTS | TANG, MICHAEL XUEFEI | 2115 | §103 | Non-Final OA | 13d | Pending | Aug 24, 2022 |
| 17893430 | CLAMPED DUAL-CHANNEL SHOWERHEAD | KLUNK, MARGARET D | 1716 | §103§112 | Final Rejection | 2d overdue | Pending | Aug 23, 2022 |
| 17893018 | GROUND PATH SYSTEMS FOR PROVIDING A SHORTER AND SYMMETRICAL GROUND PATH | KACKAR, RAM N | 1716 | §102§103 | Final Rejection | 4d overdue | Pending | Aug 22, 2022 |
| 17891753 | CONFORMAL MOLYBDENUM DEPOSITION | LOUIE, MANDY C | 1718 | §103§112 | Final Rejection | 21d | Pending | Aug 19, 2022 |
| 17886102 | STIFFENER FRAME FOR SEMICONDUCTOR DEVICE PACKAGES | PETERSON, ERIK T | 2898 | §103§112 | Final Rejection | — | Pending | Aug 11, 2022 |
| 17879097 | SELECTION GATE STRUCTURE AND FABRICATION METHOD FOR 3D MEMORY | PIZARRO CRESPO, MARCOS D | 2814 | §112 | Final Rejection | 16d | Pending | Aug 02, 2022 |
| 17875535 | PATTERNING SCHEME TO IMPROVE EUV RESIST AND HARD MASK SELECTIVITY | BERRY, PAUL ANTHONY | 2898 | §103§112 | Final Rejection | — | Pending | Jul 28, 2022 |
| 17864552 | Metal Surface Blocking Molecules for Selective Deposition | MICHAUD, NICHOLAS BRIAN | 2818 | §103§112 | Non-Final OA | — | Pending | Jul 14, 2022 |
| 17863647 | SILICIDES, ALLOYS AND INTERMETALLICS TO MINIMIZE RESISTANCE | KHALIFA, MOATAZ | 2815 | §103§112 | Final Rejection | — | Pending | Jul 13, 2022 |
| 17854456 | CO-DOPING TO CONTROL WET ETCH RATE OF FCVD OXIDE LAYERS | BAUMAN, SCOTT E | 2815 | §103 | Non-Final OA | — | Pending | Jun 30, 2022 |
| 17786520 | SURFACE PROFILING AND TEXTURING OF CHAMBER COMPONENTS | MACARTHUR, SYLVIA | 1716 | §103Other | Final Rejection | 12d | Pending | Jun 16, 2022 |
| 17831781 | PLASMA CHAMBER WITH A MULTIPHASE ROTATING CROSS-FLOW WITH UNIFORMITY TUNING | KLUNK, MARGARET D | 1716 | §103§112 | Non-Final OA | — | Pending | Jun 03, 2022 |
| 17827356 | HIGHLY CONFORMAL METAL ETCH IN HIGH ASPECT RATIO SEMICONDUCTOR FEATURES | RICHARDS, NORMAN DREW | 2892 | §112 | Non-Final OA | — | Pending | May 27, 2022 |
| 17750295 | TEMPERATURE TUNABLE MULTI-ZONE ELECTROSTATIC CHUCK | PAIK, SANG YEOP | 3761 | §103 | Non-Final OA | — | Pending | May 20, 2022 |
| 17748329 | METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE | MCCLURE, CHRISTINA D | 1718 | §103 | Final Rejection | 55d | Pending | May 19, 2022 |
| 17740848 | HYBRID ION SOURCE FOR ALUMINUM ION GENERATION USING A TARGET HOLDER AND ORGANOALUMINIUM COMPOUNDS | STOFFA, WYATT A | 2881 | §102§103Other | Non-Final OA | — | Pending | May 10, 2022 |
| 17735623 | WAFER FILM FRAME CARRIER | SOTO, CHRISTOPHER ASHLEY | 3723 | §103 | Non-Final OA | 46d overdue | Pending | May 03, 2022 |
| 17710728 | GENERATING SYNTHETIC MICROSPY IMAGES OF MANUFACTURED DEVICES | HALES, BRIAN J | 2125 | §103 | Non-Final OA | 33d | Pending | Mar 31, 2022 |
| 17703505 | LASER DRILLED FACEPLATE | NGUYEN, THUYHANG NGOC | 3700 | §103§112 | Non-Final OA | — | Pending | Mar 24, 2022 |
| 17693037 | SEMICONDUCTOR CHAMBER COMPONENTS WITH MULTI-LAYER COATING | CHEN, KEATH T | 1716 | §103§112 | Final Rejection | 30d overdue | Pending | Mar 11, 2022 |
| 17688650 | GENERATING AND UTILIZING SYNTHETIC TIME SERIES DATA FOR IMPOVING SUBSTRATE MANUFACTURING | SMITH, KEVIN LEE | 2122 | §102§103 | Final Rejection | 15d | Pending | Mar 07, 2022 |
| 17685272 | BIASABLE ROTATING PEDESTAL | OTT, PATRICK S | 1794 | §103 | Final Rejection | 26d | Pending | Mar 02, 2022 |
| 17674127 | HIGHLY SELECTIVE SILICON ETCHING | PHAM, THOMAS T | 1713 | §103 | Final Rejection | — | Pending | Feb 17, 2022 |
| 17673538 | OPTICAL DEVICE FILM WITH TUNABLE REFRACTIVE INDEX | BOURQUINE, MACKENZI TATE | 2872 | §103 | Non-Final OA | 30d | Pending | Feb 16, 2022 |
| 17671235 | LED TRANSFER MATERIALS AND PROCESSES | ASSOUMAN, HERVE-LOUIS Y | 2812 | §102§103 | Non-Final OA | — | Pending | Feb 14, 2022 |
| 17571320 | PREDICTIVE MODELING FOR CHAMBER CONDITION MONITORING | HONORE, EVEL NMN | 2142 | §103 | Non-Final OA | — | Pending | Jan 07, 2022 |
| 17571370 | PROCESSING CHAMBER CALIBRATION | DARWISH, AMIR ELSAYED | 2199 | §103 | Non-Final OA | 28d | Pending | Jan 07, 2022 |
| 17561085 | BASE PLATE FOR HEATER PEDESTAL | REYES, JOSHUA NATHANIEL PI | 1718 | §103 | Non-Final OA | — | Pending | Dec 23, 2021 |
| 17545781 | RECIPE OPTIMIZATION THROUGH MACHINE LEARNING | ALAWDI, ANWER AHMED | 2851 | §103 | Final Rejection | 23d | Pending | Dec 08, 2021 |
| 17534287 | VAPOR DEPOSITION OF CARBON-DOPED METAL OXIDES FOR USE AS PHOTORESISTS | WEDDLE, ALEXANDER MARION | 1712 | §102Other | Non-Final OA | — | Pending | Nov 23, 2021 |
| 17510111 | HORIZONTAL BUFFING MODULE | REYES, JOSHUA NATHANIEL PI | 1718 | §103 | Final Rejection | 13d | Pending | Oct 25, 2021 |
| 17402832 | USING DEFECT MODELS TO ESTIMATE DEFECT RISK AND OPTIMIZE PROCESS RECIPES | MEYER, JACQUELINE CHRISTINE | 2144 | §103 | Non-Final OA | — | Pending | Aug 16, 2021 |
| 17380788 | FACE-UP WAFER EDGE POLISHING APPARATUS | KLUNK, MARGARET D | 1716 | §103 | Final Rejection | 14d | Pending | Jul 20, 2021 |
| 17379707 | DETERMINING SUBSTRATE PROFILE PROPERTIES USING MACHINE LEARNING | LIN, ARIC | 2851 | §103 | Final Rejection | 28d | Pending | Jul 19, 2021 |
| 17371441 | METHOD FOR DEPOSITION OF DEPTH-VARYING REFRACTIVE INDEX FILMS | SIPES, JOHN CURTIS | 2872 | §103 | Final Rejection | 55d | Pending | Jul 09, 2021 |
| 17318166 | HIGH MOBILITY SEMICONDUCTOR CHANNEL BASED THIN-FILM TRANSISTORS AND MANUFACTURING METHODS | WIEGAND, TYLER J | 2812 | §102§103 | Non-Final OA | 79d | Pending | May 12, 2021 |
| 17204428 | Pedestal Geometry for Fast Gas Exchange | NUCKOLS, TIFFANY Z | 1716 | §103 | Non-Final OA | — | Pending | Mar 17, 2021 |
| 17192355 | SYSTEMS AND METHODS FOR PROCESS CHAMBER HEALTH MONITORING AND DIAGNOSTICS USING VIRTUAL MODEL | ZAYKOVA-FELDMAN, LYUDMILA | 2857 | §103 | Final Rejection | 19d | Pending | Mar 04, 2021 |
| 17166965 | HYBRID PHYSICS/MACHINE LEARNING MODELING OF PROCESSES | RAMESH, TIRUMALE K | 2121 | §101§103 | Non-Final OA | — | Pending | Feb 03, 2021 |
| 17156957 | METHODS AND APPARATUS FOR TUNING SEMICONDUCTOR PROCESSES | REYES, JOSHUA NATHANIEL PI | 1718 | §103 | Final Rejection | 34d | Pending | Jan 25, 2021 |
| 17142641 | DOPED SILICON NITRIDE FOR 3D NAND | STEVENSON, ANDRE C | 2899 | §103§112 | Final Rejection | 12d | Pending | Jan 06, 2021 |
| 17099454 | APPARATUS, SYSTEMS, AND METHODS OF USING ATOMIC HYDROGEN RADICALS WITH SELECTIVE EPITAXIAL DEPOSITION | QI, HUA | 1714 | §103 | Final Rejection | 12d | Pending | Nov 16, 2020 |
| 17089047 | PMOS High-K Metal Gates | PIZARRO CRESPO, MARCOS D | 2814 | §103 | Non-Final OA | 44d overdue | Pending | Nov 04, 2020 |
| 17081773 | SURFACE ENCASING MATERIAL LAYER | WALTERS JR, ROBERT S | 1717 | §103 | Final Rejection | 33d | Pending | Oct 27, 2020 |
| 17063366 | BEVEL BACKSIDE DEPOSITION ELIMINATION | REYES, JOSHUA NATHANIEL PI | 1718 | §102§103 | Final Rejection | — | Pending | Oct 05, 2020 |
| 17023186 | PLASMA CHAMBER WITH A MULTIPHASE ROTATING MODULATED CROSS-FLOW | CHAN, LAUREEN | 1716 | §103 | Final Rejection | 13d | Pending | Sep 16, 2020 |
| 16922931 | MULTI-LID STRUCTURE FOR SEMICONDUCTOR PROCESSING SYSTEM | MOORE, KARLA A | 1716 | §112 | Final Rejection | 28d | Pending | Jul 07, 2020 |
| 16898244 | CLEAN UNIT FOR CHAMBER EXHAUST CLEANING | ALEJANDRO MULERO, LUZ L | 1716 | §103DP | Non-Final OA | 70d | Pending | Jun 10, 2020 |
| 16858439 | Coated Drug Compositions and Methods of Preparing the Same | KASSA, TIGABU | 1619 | §103 | Final Rejection | — | Pending | Apr 24, 2020 |
| 16262102 | METHOD FOR PROCESSING A MASK SUBSTRATE TO ENABLE BETTER FILM QUALITY | ANGEBRANNDT, MARTIN J | 1737 | §103 | Non-Final OA | — | Pending | Jan 30, 2019 |
| 16134200 | SYSTEMS AND PROCESSES FOR PLASMA TUNING | CROWELL, ANNA M | 1716 | §103 | Final Rejection | 142d overdue | Pending | Sep 18, 2018 |
