Prosecution Insights
Prosecution Insights
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| App # | Title | Examiner | Art Unit | Statutes | Status | Due in | AI | Filed |
|---|---|---|---|---|---|---|---|---|
| 19274978 | FILM FORMING METHOD AND FILM FORMING APPARATUS | LAW, NGA LEUNG V | 1717 | §103 | Non-Final OA | — | Pending | Jul 21, 2025 |
| 19272175 | SUBSTRATE PROCESSING METHOD | EMPIE, NATHAN H | 1712 | §102§103 | Non-Final OA | — | Pending | Jul 17, 2025 |
| 19265822 | PLASMA-PROCESSING APPARATUS AND PLASMA-PROCESSING METHOD | KAISER, SYED M | 2831 | §102 | Non-Final OA | — | Pending | Jul 10, 2025 |
| 19264096 | PLASMA PROCESSING APPARATUS | TRAN, MINH | 2845 | §102§103 | Non-Final OA | — | Pending | Jul 09, 2025 |
| 19240089 | PLASMA PROCESSING APPARATUS | LE, TUNG X | 2845 | §103 | Non-Final OA | — | Pending | Jun 17, 2025 |
| 19233036 | CONTROL METHOD AND PLASMA PROCESSING APPARATUS | SATHIRAJU, SRINIVAS | 2845 | DP | Non-Final OA | — | Pending | Jun 10, 2025 |
| 19232884 | CONTROL METHOD AND PLASMA PROCESSING APPARATUS | SATHIRAJU, SRINIVAS | 2845 | DP | Non-Final OA | — | Pending | Jun 10, 2025 |
| 19224909 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND MAINTENANCE METHOD | SELLS, JAMES D | 1745 | Other | Non-Final OA | — | Pending | Jun 02, 2025 |
| 19221714 | RECORDING MEDIUM, INFORMATION PROCESSING APPARATUS, AND INFORMATION PROCESSING METHOD | HU, JENSEN | 2169 | §101 | Final Rejection | — | Pending | May 29, 2025 |
| 19213239 | Substrate Processing Method and Substrate Processing Apparatus | WALTERS JR, ROBERT S | 1717 | §112 | Non-Final OA | — | Pending | May 20, 2025 |
| 19212511 | Substrate Processing Method and Substrate Processing Apparatus | HERNANDEZ-KENNEY, JOSE | 1717 | §103 | Final Rejection | — | Pending | May 19, 2025 |
| 19210017 | FILM FORMING METHOD AND PLASMA PROCESSING APPARATUS | CHEN, BRET P | 1715 | §112 | Non-Final OA | — | Pending | May 16, 2025 |
| 19205415 | CLEANING METHOD AND FILM-FORMING APPARATUS | MILLER, MICHAEL G | 1712 | §103 | Non-Final OA | — | Pending | May 12, 2025 |
| 19204688 | PLASMA PROCESSING APPARATUS | SWANSON, ANDREW L | 1745 | §101§102§103§112DP | Non-Final OA | — | Pending | May 12, 2025 |
| 19191504 | FILM FORMING METHOD AND FILM FORMING APPARATUS | WALTERS JR, ROBERT S | 1717 | §103 | Non-Final OA | — | Pending | Apr 28, 2025 |
| 19186758 | SUBSTRATE INSPECTION APPARATUS AND SUBSTRATE INSPECTION METHOD | AHMED, JAMIL | 2877 | DP | Non-Final OA | — | Pending | Apr 23, 2025 |
| 19185246 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | BAREFORD, KATHERINE A | 1718 | §103 | Final Rejection | — | Pending | Apr 22, 2025 |
| 19183966 | SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS | ADDISU, SARA | 3722 | §102§103 | Non-Final OA | — | Pending | Apr 21, 2025 |
| 19184288 | FILM FORMING METHOD AND FILM FORMING APPARATUS | WALTERS JR, ROBERT S | 1717 | §102§103 | Non-Final OA | — | Pending | Apr 21, 2025 |
| 18846977 | EXHAUST STRUCTURE AND EXHAUST METHOD FOR FLOW RATE CONTROL DEVICE, AND GAS SUPPLY SYSTEM AND GAS SUPPLY METHOD COMPRISING SAME | HICKS, ANGELISA | 3753 | §103§112 | Non-Final OA | — | Pending | Apr 17, 2025 |
| 19175014 | SUBSTRATE PROCESSING APPARATUS, MEASURING DEVICE, AND MEASURING METHOD | AMARA, MOHAMED K | 2877 | §102§103 | Non-Final OA | — | Pending | Apr 10, 2025 |
| 19170138 | DEVELOPING APPARATUS, DEVELOPING METHOD, AND COMPUTER PROGRAM | WHITESELL, STEVEN H | 1759 | §102§103 | Non-Final OA | — | Pending | Apr 04, 2025 |
| 19096492 | AREA SELECTIVE DEPOSITION USING METAL CARBONYL PRECURSORS | EMPIE, NATHAN H | 1712 | §102§103 | Non-Final OA | — | Pending | Mar 31, 2025 |
| 19093922 | METHOD FOR OPERATING FILM FORMING DEVICE AND FILM FORMING DEVICE | ROLLAND, ALEX A | 1759 | §103 | Final Rejection | — | Pending | Mar 28, 2025 |
| 19092114 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM | LOUIE, MANDY C | 1718 | §103 | Non-Final OA | — | Pending | Mar 27, 2025 |
| 19091034 | FILTER APPARATUS FOR SUBSTRATE TREATMENT APPARATUS AND CLEAN AIR SUPPLY METHOD | TIETJEN, MARINA ANNETTE | 3799 | §102 | Non-Final OA | — | Pending | Mar 26, 2025 |
| 19090475 | SUBSTRATE EVALUATION METHOD AND SUBSTRATE PROCESSING APPARATUS | AKANBI, ISIAKA O | 2877 | §102§103 | Non-Final OA | — | Pending | Mar 26, 2025 |
| 19090806 | COOLING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND COOLING METHOD | RUPPERT, ERIC S | 3763 | §102§103 | Non-Final OA | — | Pending | Mar 26, 2025 |
| 18684088 | FILM FORMING METHOD AND FILM FORMING APPARATUS | TADAYYON ESLAMI, TABASSOM | 1718 | §103 | Final Rejection | — | Pending | Mar 24, 2025 |
| 19082337 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | LOUIE, MANDY C | 1718 | §102§103 | Non-Final OA | — | Pending | Mar 18, 2025 |
| 19082876 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | AYALEW, TINSAE B | 1711 | §102§103§112 | Non-Final OA | — | Pending | Mar 18, 2025 |
| 19078750 | INSPECTION METHOD, INSPECTION DEVICE, AND PROGRAM | SANGHERA, JAS A | 2852 | §102§103 | Non-Final OA | — | Pending | Mar 13, 2025 |
| 19070912 | FILM FORMING METHOD AND FILM FORMING APPARATUS | TUROCY, DAVID P | 1718 | §103 | Non-Final OA | — | Pending | Mar 05, 2025 |
| 19063605 | MONITORING APPARATUS, SUBSTRATE PROCESSING APPARATUS, MONITORING METHOD, AND STORAGE MEDIUM | WASEL, MOHAMED A | 2454 | §102Other | Non-Final OA | — | Pending | Feb 26, 2025 |
| 19056816 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | NUCKOLS, TIFFANY Z | 1716 | §103 | Non-Final OA | — | Pending | Feb 19, 2025 |
| 19050019 | SUBSTRATE PROCESSING DEVICE AND POSITIONING METHOD OF CONVEYANCE ARM | AN, IG TAI | 3662 | §103 | Non-Final OA | — | Pending | Feb 10, 2025 |
| 19034684 | INFORMATION PROCESSING METHOD, RECORDING MEDIUM, AND INFORMATION PROCESSING APPARATUS | PATEL, DHRUVKUMAR | — | §102 | Non-Final OA | — | Pending | Jan 23, 2025 |
| 19033032 | COATING FILM FORMING METHOD, COATING FILM FORMING APPARATUS, AND STORAGE MEDIUM | TADESSE, YEWEBDAR T | 1718 | §102 | Non-Final OA | — | Pending | Jan 21, 2025 |
| 19032918 | SUBSTRATE HOLDER AND SUBSTRATE PROCESSING APPARATUS | JOERGER, KAITLIN S | — | §102 | Non-Final OA | — | Pending | Jan 21, 2025 |
| 19023579 | PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS | KENDALL, BENJAMIN R | 2896 | §102§103 | Final Rejection | — | Pending | Jan 16, 2025 |
| 19023119 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD INCLUDING A PRE-TREATMENT PROCESS OF SUPPLYING A HEATED FLUID TO A SECOND SURFACE OF A SUBSTRATE AND SUPPLYING A PRE-WETTING LIQUID TO A FIRST SURFACE OF THE SUBSTRATE, WHILE ROTATING THE SUBSTRATE | BERGNER, ERIN FLANAGAN | 1713 | §103§112 | Non-Final OA | — | Pending | Jan 15, 2025 |
| 19021284 | CONTROL PROGRAM, INFORMATION PROCESSING PROGRAM, CONTROL METHOD, INFORMATION PROCESSING METHOD, PLASMA PROCESSING DEVICE, AND INFORMATION PROCESSING DEVICE | LEE, WILSON | 2844 | §102§103 | Non-Final OA | — | Pending | Jan 15, 2025 |
| 19012374 | INFORMATION PROCESSING APPARATUS, SEMICONDUCTOR MANUFACTURING APPARATUS, AND INFORMATION PROCESSING METHOD | HATCHER, DEIRDRE D | 3625 | §101§103 | Non-Final OA | — | Pending | Jan 07, 2025 |
| 19010575 | BONDING METHOD AND BONDING APPARATUS | PATWARDHAN, ABHISHEK A | 1746 | §103§112 | Non-Final OA | — | Pending | Jan 06, 2025 |
| 19005674 | Transfer System and Semiconductor Manufacturing Method | TIGHE, BRENDAN P | 3652 | §103 | Non-Final OA | — | Pending | Dec 30, 2024 |
| 18879383 | SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING DEVICE, AND STORAGE MEDIUM | LEE, DOUGLAS | 1714 | §102§103 | Non-Final OA | — | Pending | Dec 27, 2024 |
| 18999454 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | VETERE, ROBERT A | 1712 | §103 | Non-Final OA | 63d | Pending | Dec 23, 2024 |
| 18986780 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | NGUYEN, CHI Q | 3635 | §112 | Non-Final OA | — | Pending | Dec 19, 2024 |
| 18985733 | INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, AND STORAGE MEDIUM | CHAN, CAROL WANG | 2672 | §112 | Non-Final OA | — | Pending | Dec 18, 2024 |
| 18986429 | MEASUREMENT SYSTEM, MEASUREMENT METHOD, AND PLASMA PROCESSING DEVICE | FABIAN JR, ROBERTO | — | §103 | Final Rejection | — | Pending | Dec 18, 2024 |
| 18984165 | TREATMENT SOLUTION SUPPLY APPARATUS, REPORTING METHOD, AND STORAGE MEDIUM | PAN, YONGJIA | 2118 | §102§103 | Non-Final OA | — | Pending | Dec 17, 2024 |
| 18980363 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND CLEANING METHOD | BERGNER, ERIN FLANAGAN | 1713 | §103 | Final Rejection | — | Pending | Dec 13, 2024 |
| 18962032 | DISTANCE MEASUREMENT METHOD, DISTANCE MEASUREMENT SYSTEM, AND SUBSTRATE PROCESSING APPARATUS | ASTACIO-OQUENDO, GIOVANNI | 2858 | §112 | Non-Final OA | — | Pending | Nov 27, 2024 |
| 18958534 | SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD | MACARTHUR, SYLVIA | 1716 | §103Other | Non-Final OA | — | Pending | Nov 25, 2024 |
| 18958279 | METHOD OF FORMING CARBON-BASED FILM AND FILM FORMING APPARATUS | MAYY, MOHAMMAD | 1718 | §102§103 | Final Rejection | — | Pending | Nov 25, 2024 |
| 18868298 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | ZHANG, RICHARD Z | 1711 | §102§103§112 | Non-Final OA | — | Pending | Nov 22, 2024 |
| 18954901 | METHOD FOR FORMING INSULATION FILM | GAMBETTA, KELLY M | 1718 | §103§112 | Final Rejection | — | Pending | Nov 21, 2024 |
| 18953435 | SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS AND VISUALIZATION METHOD | BROUGHTON, KATHLEEN M | 2661 | §102§112 | Non-Final OA | — | Pending | Nov 20, 2024 |
| 18951828 | SUBSTRATE HOLDER, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE TRANSFER METHOD | MOSCOSO, JUAN SALVADOR | 3652 | §103 | Non-Final OA | — | Pending | Nov 19, 2024 |
| 18951442 | PLASMA PROCESSING METHOD AND PLASMA PROCESSING SYSTEM | DEO, DUY VU NGUYEN | — | §102§103 | Non-Final OA | — | Pending | Nov 18, 2024 |
| 18949622 | METHOD AND SYSTEM FOR FORMING A HARD MASK FILM WITH A TUNABLE FILM STRESS | CARTER, JONATHAN LANGDON | 1713 | §103§112 | Non-Final OA | — | Pending | Nov 15, 2024 |
| 18949607 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | MCCLAIN, GERALD | 3652 | §102 | Non-Final OA | — | Pending | Nov 15, 2024 |
| 18949248 | SUBSTRATE STANDBY DEVICE, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE PROCESSING METHOD | LEE, DOUGLAS | 1714 | §103 | Final Rejection | — | Pending | Nov 15, 2024 |
| 18945702 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | MYERS, GLENN F | 3652 | §102§103 | Non-Final OA | — | Pending | Nov 13, 2024 |
| 18946110 | SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING DEVICE | CAMPBELL, NATASHA N. | 1714 | §103 | Non-Final OA | — | Pending | Nov 13, 2024 |
| 18944017 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | NGUYEN, CHI Q | 3635 | §112DP | Non-Final OA | — | Pending | Nov 12, 2024 |
| 18864999 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM | AHMED, SHAMIM | 1713 | §102§103 | Non-Final OA | — | Pending | Nov 12, 2024 |
| 18944260 | METHOD OF MEASURING FILM THICKNESS, AND SUBSTRATE PROCESSING APPARATUS | ARTMAN, THOMAS R | 2884 | §102§103 | Non-Final OA | — | Pending | Nov 12, 2024 |
| 18939729 | PLASMA PROCESSING APPARATUS | LUONG, HENRY T | 2845 | §103 | Non-Final OA | — | Pending | Nov 07, 2024 |
| 18937082 | SUBSTRATE SUPPORT AND SUBSTRATE PROCESSING APPARATUS | HALL JR, TYRONE VINCENT | 3723 | §102 | Non-Final OA | — | Pending | Nov 05, 2024 |
| 18935665 | CONTROL METHOD AND PLASMA PROCESSING APPARATUS | SATHIRAJU, SRINIVAS | 2844 | DP | Final Rejection | 14d | Pending | Nov 04, 2024 |
| 18935537 | PLASMA PROCESSING APPARATUS | BENNETT, CHARLEE | 1718 | §103 | Non-Final OA | — | Pending | Nov 03, 2024 |
| 18935294 | PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS | DUCLAIR, STEPHANIE P. | 1713 | §102§103 | Non-Final OA | — | Pending | Nov 01, 2024 |
| 18921728 | Teaching Method and Substrate Processing System | MORFORD, ALEXANDRA ROBYN | 3658 | §101§103 | Non-Final OA | — | Pending | Oct 21, 2024 |
| 18918374 | VACUUM PROCESSING APPARATUS AND METHOD OF CONTROLLING VACUUM PROCESSING APPARATUS | HALL JR, TYRONE VINCENT | 3723 | §102 | Non-Final OA | — | Pending | Oct 17, 2024 |
| 18917538 | FILM FORMING METHOD | TUROCY, DAVID P | 1718 | §103 | Final Rejection | — | Pending | Oct 16, 2024 |
| 18857016 | FILM-FORMING METHOD AND SUBSTRATE-PROCESSING DEVICE | TADAYYON ESLAMI, TABASSOM | 1718 | §103§112 | Final Rejection | 21d | Pending | Oct 15, 2024 |
| 18913135 | METHOD FOR SEMICONDUCTOR MANUFACTURING | BRAYTON, JOHN JOSEPH | 1794 | §103§112 | Non-Final OA | — | Pending | Oct 11, 2024 |
| 18856129 | FLOWRATE CONTROL UNIT FOR TEMPERATURE ADJUSTMENT AND SEMICONDUCTOR MANUFACTURING DEVICE | ZERVIGON, RUDY | 1716 | §102§112 | Non-Final OA | — | Pending | Oct 11, 2024 |
| 18855160 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | CULBERT, ROBERTS P | 1716 | §102§112 | Non-Final OA | — | Pending | Oct 08, 2024 |
| 18909227 | DISPLAY DEVICE, RECORDING MEDIUM, AND DISPLAY METHOD | PEREN, VINCENT ROBERT | 2617 | §103 | Final Rejection | — | Pending | Oct 08, 2024 |
| 18905097 | Calibration Method and Substrate Processing System | BRASFIELD, QUINTON A | 2814 | §102§103 | Non-Final OA | — | Pending | Oct 02, 2024 |
| 18887050 | PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS | MCDONALD, RODNEY GLENN | 1794 | §103 | Non-Final OA | — | Pending | Sep 17, 2024 |
| 18882797 | DATA ANALYSIS SYSTEM, DATA ANALYSIS DEVICE, DATA ANALYSIS METHOD, AND RECORDING MEDIUM | ERDMAN, CHAD G | 2116 | §101§103 | Non-Final OA | — | Pending | Sep 12, 2024 |
| 18830662 | OZONE CONCENTRATOR, SUBSTRATE PROCESSING APPARATUS, AND OZONE SUPPLY METHOD | CHORBAJI, MONZER R | 1799 | §102 | Non-Final OA | — | Pending | Sep 11, 2024 |
| 18844189 | CHIP ATTACHING DEVICE, CHIP PROCESSING SYSTEM, AND CHIP PROCESSING METHOD | ESKRIDGE, CORY W | 2898 | §102 | Non-Final OA | — | Pending | Sep 05, 2024 |
| 18825163 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | LUND, JEFFRIE ROBERT | 1716 | §112 | Non-Final OA | — | Pending | Sep 05, 2024 |
| 18820492 | PROFILE DETECTING METHOD AND PROFILE DETECTING APPARATUS | GARCIA, SANTIAGO | 2673 | §102 | Final Rejection | — | Pending | Aug 30, 2024 |
| 18842620 | HARD MASK, SUBSTRATE PROCESSING METHOD, AND REMOVAL METHOD FOR HARD MASK | AHMED, SHAMIM | 1713 | §103 | Final Rejection | — | Pending | Aug 29, 2024 |
| 18816114 | SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING DEVICE | DEO, DUY VU NGUYEN | — | §102§103§112 | Non-Final OA | — | Pending | Aug 27, 2024 |
| 18808265 | INSPECTION METHOD AND INSPECTION APPARATUS | CARLSON, JOSHUA MICHAEL | 2877 | §103§112 | Final Rejection | — | Pending | Aug 19, 2024 |
| 18808358 | SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD | TIGHE, BRENDAN P | 3657 | §103 | Final Rejection | — | Pending | Aug 19, 2024 |
| 18838595 | SUBTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | MCCLURE, CHRISTINA D | 1718 | §103§112 | Final Rejection | 21d | Pending | Aug 14, 2024 |
| 18797088 | SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD | VU, STEPHEN A | 3654 | §102§103§112DP | Non-Final OA | — | Pending | Aug 07, 2024 |
| 18797266 | INJECTOR AND PROCESSING APPARATUS | MOORE, KARLA A | 1716 | §103§112DP | Non-Final OA | — | Pending | Aug 07, 2024 |
| 18794757 | METHODS TO QUICKLY ADJUST THE TEMPERATURE OF AT LEAST ONE PROCESSING LIQUID USED TO PROCESS A SEMICONDUCTOR SUBSTRATE IN A WET PROCESS | COLEMAN, RYAN L | 1714 | §103§112 | Non-Final OA | — | Pending | Aug 05, 2024 |
| 18792992 | APPARATUS FOR PLASMA PROCESSING AND METHOD OF ETCHING | CROWELL, ANNA M | 1716 | §102§103DP | Non-Final OA | — | Pending | Aug 02, 2024 |
| 18835377 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | TREMARCHE, CONNOR J. | — | §102§103 | Non-Final OA | — | Pending | Aug 02, 2024 |
| 18792259 | VACUUM TRANSFER DEVICE AND METHOD FOR CONTROLLING VACUUM TRANSFER DEVICE | BABAA, NAEL N | 3763 | §112Other | Non-Final OA | — | Pending | Aug 01, 2024 |
| 18789854 | HYDROPHOBIZATION TREATMENT APPARATUS, HYDROPHOBIZATION TREATMENT METHOD, AND COMPUTER STORAGE MEDIUM | CROWELL, ANNA M | 1716 | §102§103 | Final Rejection | 3d overdue | Pending | Jul 31, 2024 |
| 18788530 | COPPER-LAYER ETCHING METHOD AND SUBSTRATE PROCESSING APPARATUS | CARTER, JONATHAN LANGDON | 1713 | §102§103 | Non-Final OA | — | Pending | Jul 30, 2024 |
| 18834129 | SUBSTRATE PROCESSING APPARATUS | HASSANZADEH, PARVIZ | 1716 | §102§103 | Non-Final OA | — | Pending | Jul 29, 2024 |
| 18781793 | ETCHING SYSTEM FOR FORMING RECESSED FEATURES WITH HIGH ASPECT RATIO | DUCLAIR, STEPHANIE P. | 1713 | §103 | Non-Final OA | — | Pending | Jul 23, 2024 |
| 18778472 | SUBSTRATE PROCESSING APPARATUS AND METHOD OF DISPOSING SUBSTRATE | TUROCY, DAVID P | 1718 | §103 | Non-Final OA | — | Pending | Jul 19, 2024 |
| 18730100 | PLASMA PROCESSING APPARATUS | KACKAR, RAM N | — | §102 | Non-Final OA | — | Pending | Jul 18, 2024 |
| 18773282 | Transfer Teaching Method and Substrate Processing System | KENIRY, HEATHER J | 3657 | §103 | Final Rejection | — | Pending | Jul 15, 2024 |
| 18771873 | METHOD OF FORMING HARD MASK STRUCTURE | GOODWIN, DAVID J | 2817 | §102§103 | Non-Final OA | — | Pending | Jul 12, 2024 |
| 18771025 | EDGE EXPOSURE APPARATUS AND EDGE EXPOSURE METHOD | NGUYEN, HUNG | 2882 | §103 | Final Rejection | 10d overdue | Pending | Jul 12, 2024 |
| 18764779 | SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS | ALANKO, ANITA KAREN | 1713 | §102§103 | Final Rejection | — | Pending | Jul 05, 2024 |
| 18761581 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | COLEMAN, RYAN L | 1714 | §103§112 | Non-Final OA | — | Pending | Jul 02, 2024 |
| 18761944 | SEPARATING APPARATUS, SEPARATING SYSTEM AND SEPARATING METHOD | HARM, NICKOLAS R | 1745 | §102 | Final Rejection | 34d | Pending | Jul 02, 2024 |
| 18726285 | DETERMINATION METHOD AND SUBSTRATE PROCESSING APPARATUS | KEFAYATI, SOORENA | 2884 | §112 | Final Rejection | — | Pending | Jul 02, 2024 |
| 18760302 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | THOMAS, BINU | — | §102 | Non-Final OA | — | Pending | Jul 01, 2024 |
| 18759466 | INFORMATION PROCESSING APPARATUS, ABNORMALITY DETECTION METHOD, AND SEMICONDUCTOR MANUFACTURING SYSTEM | OUELLETTE, JONATHAN P | 3629 | §101§102 | Non-Final OA | — | Pending | Jun 28, 2024 |
| 18757803 | SUBSTRATE PROCESSING APPARATUS, ESTIMATION METHOD OF SUBSTRATE PROCESSING AND RECORDING MEDIUM | SHAFAYET, MOHAMMED | 2116 | §101§102§103 | Non-Final OA | — | Pending | Jun 28, 2024 |
| 18754942 | INTEGRATED HIGH EFFICIENCY TRANSISTOR COOLING | KOO, LAMONT B | 2813 | §102 | Non-Final OA | — | Pending | Jun 26, 2024 |
| 18754488 | PLASMA PROCESSING APPARATUS | CHEN, KEATH T | 1716 | §103 | Non-Final OA | — | Pending | Jun 26, 2024 |
| 18750960 | SYSTEMS FOR REAL-TIME PULSE MEASUREMENT AND PULSE TIMING ADJUSTMENT TO CONTROL PLASMA PROCESS PERFORMANCE | CHEN, KEATH T | 1716 | §103§112 | Non-Final OA | — | Pending | Jun 21, 2024 |
| 18750539 | PLASMA PROCESSING APPARATUS | CHAN, LAUREEN | 1716 | §102§103 | Non-Final OA | — | Pending | Jun 21, 2024 |
| 18747506 | CONTROL DEVICE, CONTROL METHOD, AND SEMICONDUCTOR MANUFACTURING SYSTEM | SHARMIN, ANZUMAN | 2115 | §103§112 | Final Rejection | — | Pending | Jun 19, 2024 |
| 18720641 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | MOORE, KARLA A | 1713 | §103 | Non-Final OA | — | Pending | Jun 16, 2024 |
| 18569248 | METAL-CONTAINING FILM AND METHOD FOR PRODUCING METAL-CONTAINING FILM | ROLLAND, ALEX A | 1759 | §103 | Final Rejection | 14d | Pending | Jun 13, 2024 |
| 18718981 | GAS TREATMENT METHOD AND GAS TREATMENT DEVICE | LAOBAK, ANDREW KEELAN | 1713 | §103 | Non-Final OA | — | Pending | Jun 12, 2024 |
| 18734683 | METHOD FOR ETCHING A METAL HARD MASK | CARTER, JONATHAN LANGDON | 1713 | §103§112 | Non-Final OA | — | Pending | Jun 05, 2024 |
| 18716150 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM | POUDEL, SANTOSH RAJ | 2115 | §112 | Non-Final OA | — | Pending | Jun 04, 2024 |
| 18674349 | Remote Plasma Device and Plasma Processing Apparatus | FORD, NATHAN K | 1716 | §102§103§112 | Non-Final OA | — | Pending | May 24, 2024 |
| 18711900 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM | CRANDALL, JOEL DILLON | 3723 | §102§103§112 | Non-Final OA | — | Pending | May 21, 2024 |
| 18668806 | SUBSTRATE PROCESSING SYSTEM AND DISPLAY METHOD | WEDDLE, ALEXANDER MARION | 1712 | §101§103§112 | Non-Final OA | — | Pending | May 20, 2024 |
| 18668767 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND PROGRAM | NORTON, JENNIFER L | 2117 | §101§103 | Final Rejection | — | Pending | May 20, 2024 |
| 18665885 | SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS | DAGENAIS, KRISTEN A | 1717 | §103 | Non-Final OA | — | Pending | May 16, 2024 |
| 18710214 | PROCESSING SYSTEM, ELECTROSTATIC CARRIER, AND PROCESSING METHOD | MATTHEWS, TERRELL HOWARD | 3653 | §102§103 | Non-Final OA | — | Pending | May 15, 2024 |
| 18663644 | SUBSTRATE PROCESSING APPARATUS | MACARTHUR, SYLVIA | 1716 | §102§103 | Non-Final OA | — | Pending | May 14, 2024 |
| 18655619 | APPARATUS FOR TRANSPORTING SUBSTRATE, SYSTEM FOR PROCESSING SUBSTRATE, AND METHOD OF TRANSPORTING SUBSTRATE | LOWE, MICHAEL S | 3652 | §103 | Non-Final OA | 60d | Pending | May 06, 2024 |
| 18653410 | FILM-FORMING METHOD AND SUBSTRATE PROCESSING APPARATUS | GAMBETTA, KELLY M | 1718 | §112 | Non-Final OA | 54d | Pending | May 02, 2024 |
| 18648828 | SUBSTRATE PROCESSING APPARATUS | SWEELY, KURT D | 1718 | §103 | Final Rejection | — | Pending | Apr 29, 2024 |
| 18704093 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | RAHMAN, MOIN M | 2898 | §102 | Non-Final OA | — | Pending | Apr 24, 2024 |
| 18633928 | PROCESSING APPARATUS | YU, YUECHUAN | 1718 | §102§112Other | Non-Final OA | — | Pending | Apr 12, 2024 |
| 18632595 | PROCESSING SYSTEM, AND PROCESSING METHOD | DRODGE, JOSEPH W | 1773 | §103§112Other | Non-Final OA | — | Pending | Apr 11, 2024 |
| 18626693 | SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS | DEO, DUY VU NGUYEN | 1713 | §103§112 | Non-Final OA | — | Pending | Apr 04, 2024 |
| 18622694 | DIE TO WAFER BONDING METHOD AND APPARATUS WITH THERMAL CONTACT DIE SHAPE CONTROL | AHMED, SHAHED | 2813 | §102§103 | Non-Final OA | — | Pending | Mar 29, 2024 |
| 18620178 | ECCENTRICITY BASED WAFER SHAPE CONTROL | THOMAS, BINU | 1717 | §103 | Non-Final OA | — | Pending | Mar 28, 2024 |
| 18620111 | SELECTIVE ETCHING OF SILICON ADJACENT TO SILICON-GERMANIUM | TRAN, BINH X | 1713 | §103§112 | Non-Final OA | — | Pending | Mar 28, 2024 |
| 18620549 | SELF-ALIGNED CONTACT FORMATION ON SOURCE/DRAIN | STUESSY, NOLAN GABRIEL | 2812 | §102§103 | Non-Final OA | — | Pending | Mar 28, 2024 |
| 18620222 | METHOD FOR SEMICONDUCTOR PROCESSING | BERRY, PAUL ANTHONY | 2898 | §103 | Non-Final OA | — | Pending | Mar 28, 2024 |
| 18618354 | INTEGRATING NITRIDE STRESS COMPENSATION LAYERS FOR THICK OXIDE WAFER CREATION | HARBOTTLE, CHARLOTTE ELIZABETH | 2818 | §103§112 | Final Rejection | — | Pending | Mar 27, 2024 |
| 18616634 | USING LASER BASED SYSTEM FOR MEAN OF SHAPING OF UNSINGULATED & SINGULATED DIES BY SUBSTRATE LATTICE MANIPULATION | STEWART, ROBERT LINCOLN | 2898 | §102§103 | Final Rejection | — | Pending | Mar 26, 2024 |
| 18617380 | MULTIPATTERNING WITH CROSSLINKABLE OVERCOAT | SULLIVAN, CALEEN O | 2899 | §102§103 | Non-Final OA | — | Pending | Mar 26, 2024 |
| 18616526 | PLASMA ETCHING APPARATUS AND PLASMA ETCHING METHOD | SWEELY, KURT D | 1713 | §103 | Final Rejection | — | Pending | Mar 26, 2024 |
| 18616594 | SUBSTRATE PROCESSING APPARATUS | PAIK, SANG YEOP | 3761 | §102 | Non-Final OA | — | Pending | Mar 26, 2024 |
| 18614207 | METAL ENCAPSULATION OF ETCH MASK VIA SPUTTERING | BAND, MICHAEL A | 1794 | §103§112 | Final Rejection | — | Pending | Mar 22, 2024 |
| 18611527 | PLASMA ASSISTED METAL OXIDE REDUCTION | BERRY, PAUL ANTHONY | 4100 | §103 | Final Rejection | — | Pending | Mar 20, 2024 |
| 18610909 | SYSTEM AND METHOD FOR ADJUSTING ETCH SELECTIVITY OF ETCHANT SOLUTION | REMAVEGE, CHRISTOPHER | 4100 | §112 | Non-Final OA | — | Pending | Mar 20, 2024 |
| 18610344 | SUBSTRATE PROCESSING APPARATUS | PAIK, SANG YEOP | 3761 | §102§103 | Non-Final OA | — | Pending | Mar 20, 2024 |
| 18609525 | FILM FORMING METHOD AND FILM FORMING APPARATUS | BRATLAND JR, KENNETH A | 1714 | §103§112 | Non-Final OA | — | Pending | Mar 19, 2024 |
| 18606289 | GRID-LESS ION ENERGY DETECTOR | OSENBAUGH-STEWART, ELIZA W | 2881 | §102§103§112 | Final Rejection | — | Pending | Mar 15, 2024 |
| 18607202 | HARC ETCH CHEMISTRY FOR SEMINCONDUCTORS | LAOBAK, ANDREW KEELAN | 1713 | §102§103 | Final Rejection | — | Pending | Mar 15, 2024 |
| 18605275 | PLASMA PROCESSING APPARATUS | REYES, JOSHUA NATHANIEL PI | 1718 | §103 | Non-Final OA | — | Pending | Mar 14, 2024 |
| 18603049 | CYCLIC ETCH/DEPOSITION PLASMA PROCESSES USING TUNGSTEN BASED PRECURSOR GAS | LAOBAK, ANDREW KEELAN | 1713 | §103 | Non-Final OA | 11d overdue | Pending | Mar 12, 2024 |
| 18690810 | PLASMA PROCESSING APPARATUS, CONTROL METHOD, AND STORING MEDIUM | MILLER, JR, JOSEPH ALBERT | 1712 | §102§112 | Non-Final OA | — | Pending | Mar 11, 2024 |
| 18599876 | PILLAR CRITICAL DIMENSION REDUCTION BY ISOTROPIC PLASMA ETCHING WITH HIGH SELECTIVITY TO SILICON-CONTAINING ANTIREFLECTIVE COATING AND SILICON NITRIDE | JOHNSON, CHRISTOPHER A | 2899 | §103 | Non-Final OA | — | Pending | Mar 08, 2024 |
| 18600373 | SUBSTRATE PROCESSING APPARATUS | CHEN, KEATH T | 1716 | §103 | Final Rejection | — | Pending | Mar 08, 2024 |
| 18591695 | IN SITU REMOVABLE BLOCKING LAYER FORMATION | CHEN, DAVID Z | 2815 | §112 | Non-Final OA | — | Pending | Feb 29, 2024 |
| 18589845 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | DANIELS, MATTHEW J | 2891 | §103§112 | Final Rejection | — | Pending | Feb 28, 2024 |
| 18589744 | DISTRIBUTOR AND PLASMA PROCESSING APPARATUS | CHEN, KEATH T | 1716 | §103§112DP | Non-Final OA | — | Pending | Feb 28, 2024 |
| 18589947 | INFORMATION PROCESSING METHOD, INFORMATION PROCESSING APPARATUS, AND INFORMATION PROCESSING SYSTEM | WENG, PEI YONG | 2141 | §101§102§103 | Non-Final OA | — | Pending | Feb 28, 2024 |
| 18589462 | INFORMATION PROCESSING METHOD, INFORMATION PROCESSING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM | BENOURAIDA, AMINA MORENO | 2129 | §101§103§112 | Non-Final OA | — | Pending | Feb 28, 2024 |
| 18588315 | SUBSTRATE PROCESSING APPARATUS | KLUNK, MARGARET D | 1716 | §102§103 | Final Rejection | — | Pending | Feb 27, 2024 |
| 18588371 | SUBSTRATE PROCESSING APPARATUS | KLUNK, MARGARET D | 1716 | §102§103Other | Final Rejection | — | Pending | Feb 27, 2024 |
| 18588318 | IN-SITU VARIABLE TEMPERATURE BOW METROLOGY | SADATE-MOUALEU, MIREILLE SANDRA | 2855 | §103 | Non-Final OA | — | Pending | Feb 27, 2024 |
| 18588751 | VERTICAL FEATURE GROWTH USING FLUORINE-CONTAINING GAS | DUCLAIR, STEPHANIE P. | 1713 | §103 | Final Rejection | 56d | Pending | Feb 27, 2024 |
| 18581954 | SUBSTRATE PROCESSING APPARATUS | KENDALL, BENJAMIN R | 2896 | §103 | Non-Final OA | — | Pending | Feb 20, 2024 |
| 18441518 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PLACING METHOD | KITT, STEPHEN A | 3652 | §103§112 | Non-Final OA | — | Pending | Feb 14, 2024 |
| 18440435 | DIE SHAPE CONTROL FOR DIE TO WAFER BOND ENHANCEMENT | BLACKWELL, ASHLEY NICOLE | 2897 | §103 | Final Rejection | — | Pending | Feb 13, 2024 |
| 18439469 | IN-SITU METAL DEPOSITION FOR REDUCED CHARGING DURING DIELECTRIC ETCH | TRAN, BINH X | 1713 | §103 | Final Rejection | — | Pending | Feb 12, 2024 |
| 18436543 | APPARATUS FOR PLASMA PROCESSING | NGUYEN, SOPHIA T | 2893 | §103 | Non-Final OA | — | Pending | Feb 08, 2024 |
| 18433320 | DIRECT CURRENT SUPERPOSITION (DCS) FOR PROTECTION OF ORGANIC MANDREL DURING SPACER DEPOSITION | PHAM, THOMAS T | 1713 | §103 | Final Rejection | 27d | Pending | Feb 05, 2024 |
| 18429479 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | NGUYEN, THANH T | 2893 | §102 | Non-Final OA | — | Pending | Feb 01, 2024 |
| 18427992 | STATE DETERMINATION METHOD AND COMPUTER-READABLE RECORDING MEDIUM | FLETCHER III, WILLIAM P | 1759 | §102§103§112DP | Non-Final OA | — | Pending | Jan 31, 2024 |
| 18429046 | PLASMA MEASUREMENT METHOD AND PLASMA PROCESSING APPARATUS | NAVARRO, HUGO IVAN | 2858 | §103§112 | Final Rejection | 82d | Pending | Jan 31, 2024 |
| 18422013 | ETCHING METHOD, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, ETCHING PROGRAM, AND PLASMA PROCESSING APPARATUS | LAOBAK, ANDREW KEELAN | 1713 | §103 | Non-Final OA | — | Pending | Jan 25, 2024 |
| 18419733 | ROENTGEN INTEGRATED METROLOGY FOR HYBRID BONDING PROCESS CONTROL IN ULTRA HIGH 3D INTEGRATION | OJEH, NDUKA E | 2892 | §102 | Non-Final OA | — | Pending | Jan 23, 2024 |
| 18418849 | TUNGSTEN-BASED ADDITIVE FOR THROUGH-SUBSTRATE ETCHING | RODRIGUEZ VILLANU, SANDRA MILENA | 2898 | §103§112 | Non-Final OA | — | Pending | Jan 22, 2024 |
| 18412676 | FILTER CIRCUIT AND PLASMA PROCESSING APPARATUS | COLE, VICTOR | 3762 | §102§112 | Non-Final OA | — | Pending | Jan 15, 2024 |
| 18411359 | PLASMA PROCESSING APPARATUS | MOORE, KARLA A | 1716 | §102 | Non-Final OA | — | Pending | Jan 12, 2024 |
| 18402328 | FAULT DETECTION AND CLASSIFICATION (FDC) FOR ENDPOINT DETECTION (EPD) BY REFLECTOMETRY | PHAM, THOMAS T | 1713 | §103 | Final Rejection | 16d | Pending | Jan 02, 2024 |
| 18398213 | CONSUMABLE MEMBER, PLASMA PROCESSING APPARATUS, AND METHOD OF MANUFACTURING CONSUMABLE MEMBER | LEE, WOO KYUNG | 2815 | §102§103 | Final Rejection | — | Pending | Dec 28, 2023 |
| 18573700 | SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING SYSTEM AND COMPUTER-READABLE RECORDING MEDIUM | PHAM, THOMAS T | 1713 | §103 | Non-Final OA | — | Pending | Dec 22, 2023 |
| 18395132 | SINGLE MASK MULTI-CRITICAL DIMENSION ETCHING USING ETCH STOP | LU, JIONG-PING | 2815 | §102§103 | Non-Final OA | — | Pending | Dec 22, 2023 |
| 18392102 | SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS | MACARTHUR, SYLVIA | 1716 | §103 | Final Rejection | — | Pending | Dec 21, 2023 |
| 18392205 | FILTER CIRCUIT AND PLASMA PROCESSING APPARATUS | LEE, AIDEN Y | 1718 | §103§112 | Final Rejection | — | Pending | Dec 21, 2023 |
| 18539451 | FILM FORMING METHOD AND FILM FORMING APPARATUS | TALBOT, BRIAN K | 2898 | §102 | Non-Final OA | — | Pending | Dec 14, 2023 |
| 18534880 | SHOWER HEAD ASSEMBLY AND FILM FORMING APPARATUS | THOMAS, BINU | 1759 | §102§103 | Non-Final OA | — | Pending | Dec 11, 2023 |
| 18531276 | LAYER BY LAYER ETCH PROCESS | RAHMAN, MOIN M | 2898 | §102§103 | Non-Final OA | — | Pending | Dec 06, 2023 |
| 18525935 | TRANSFER MODULE AND TRANSFER METHOD | MCCLAIN, GERALD | 3652 | §103 | Non-Final OA | — | Pending | Dec 01, 2023 |
| 18524015 | SUBSTRATE PROCESSING APPARATUS, PLASMA MEASUREMENT METHOD, AND PLASMA REGULATION METHOD | KENDALL, BENJAMIN R | 2896 | §103 | Non-Final OA | — | Pending | Nov 30, 2023 |
| 18565489 | FILM FORMATION METHOD AND FILM FORMATION APPARATUS | BAREFORD, KATHERINE A | 1718 | §103 | Non-Final OA | 60d | Pending | Nov 29, 2023 |
| 18523060 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | BOWMAN, ANDREW J | 1717 | §103 | Non-Final OA | — | Pending | Nov 29, 2023 |
| 18521112 | INFORMATION PROCESSING APPARATUS, STORAGE MEDIUM, AND OPTIMAL SOLUTION SEARCH METHOD | NGUYEN, NHA T | 2851 | §102 | Non-Final OA | — | Pending | Nov 28, 2023 |
| 18518696 | PLASMA PROCESSING APPARATUS AND SUBSTRATE SUPPORT | MCDONALD, RODNEY GLENN | 1794 | §103 | Non-Final OA | — | Pending | Nov 24, 2023 |
| 18518256 | Semiconductor device and semiconductor device manufacturing method | RAMPERSAUD, PRIYA M | 2897 | §102§103 | Non-Final OA | — | Pending | Nov 22, 2023 |
| 18563382 | PHOTORESIST COMPOSITION, METHOD FOR FORMING RESIST PATTERN, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND SUBSTRATE PROCESSING DEVICE | WALKE, AMANDA C | 1722 | §102§103 | Non-Final OA | — | Pending | Nov 22, 2023 |
| 18517486 | OPTICAL METROLOGY FOR A PLURALITY OF PROCESS CHAMBERS | GARBER, ERIN R | 2878 | §103 | Non-Final OA | — | Pending | Nov 22, 2023 |
| 18511327 | LAYER STACK FOR EXTREME ULTRAVIOLET LITHOGRAPHY | LEE, ALEXANDER N | 1737 | §102§103 | Non-Final OA | — | Pending | Nov 16, 2023 |
| 18510273 | PLASMA PROCESSING APPARATUS | BRAYTON, JOHN JOSEPH | 1794 | §103§112 | Final Rejection | — | Pending | Nov 15, 2023 |
| 18289525 | TRANSFER DEVICE AND EXPANSION AMOUNT CALCULATION METHOD | MORFORD, ALEXANDRA ROBYN | 3658 | §103§112 | Non-Final OA | — | Pending | Nov 03, 2023 |
| 18386618 | ETCHING METHOD AND PLASMA PROCESSING APPARATUS | PHAM, THOMAS T | 1713 | §102§103 | Non-Final OA | — | Pending | Nov 03, 2023 |
| 18500087 | SUBSTRATE PROCESSING APPARATUS | BOYER, RANDY | 1771 | §102 | Non-Final OA | — | Pending | Nov 01, 2023 |
| 18385528 | METHOD OF CLEANING PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING APPARATUS | BERGNER, ERIN FLANAGAN | 1713 | §103 | Final Rejection | — | Pending | Oct 31, 2023 |
| 18498698 | ENDPOINT DETECTION IN DRY DEVELOPMENT OF PHOTORESIST | SULLIVAN, CALEEN O | 2899 | §102§103 | Non-Final OA | — | Pending | Oct 31, 2023 |
| 18382809 | FREQUENCY-VARIABLE POWER SUPPLY AND PLASMA PROCESSING APPARATUS | FERNANDEZ, PEDRO C | 2844 | §103 | Final Rejection | — | Pending | Oct 23, 2023 |
| 18556569 | FILM FORMING METHOD AND FILM FORMING APPARATUS | CHEN, BRET P | 1718 | §103 | Final Rejection | — | Pending | Oct 20, 2023 |
| 18381269 | SUBSTRATE STAGE, SUBSTRATE PROCESSING APPARATUS, AND TEMPERATURE CONTROL METHOD | WOLDEGEORGIS, ERMIAS T | 2893 | §103 | Final Rejection | 9d | Pending | Oct 18, 2023 |
| 18381075 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | OLIVA, STEPHANIE RENEE | 3761 | §103 | Non-Final OA | — | Pending | Oct 17, 2023 |
| 18380776 | SYSTEMS AND METHODS FOR IMPROVING PLANARITY USING SELECTIVE ATOMIC LAYER ETCHING (ALE) | KENDALL, BENJAMIN R | 2896 | §103 | Non-Final OA | — | Pending | Oct 17, 2023 |
| 18555055 | SURFACE TREATMENT METHOD AND SUBSTRATE TREATMENT DEVICE | HERNANDEZ-KENNEY, JOSE | 1717 | §103 | Final Rejection | 34d | Pending | Oct 12, 2023 |
| 18483608 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE GRIPPING DEVICE | MACARTHUR, SYLVIA | 1716 | §102 | Non-Final OA | — | Pending | Oct 10, 2023 |
| 18482401 | SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS | TRAN, BINH X | 1713 | §102§103 | Non-Final OA | 27d | Pending | Oct 06, 2023 |
| 18554225 | ETCHING METHOD AND PROCESSING DEVICE | LU, JIONG-PING | 1713 | §102§103 | Non-Final OA | — | Pending | Oct 06, 2023 |
| 18479986 | PLASMA PROCESSING SYSTEM, PLASMA PROCESSING APPARATUS, AND ETCHING METHOD | BRAYTON, JOHN JOSEPH | 1794 | §103 | Final Rejection | — | Pending | Oct 03, 2023 |
| 18374679 | PLASMA PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS | LEE, AIDEN Y | 1718 | §103§112 | Final Rejection | — | Pending | Sep 29, 2023 |
| 18475593 | SUBSTRATE PROCESSING APPARATUS AND HOLDING METHOD OF SUBSTRATE | ADDISU, SARA | 3722 | §102 | Non-Final OA | — | Pending | Sep 27, 2023 |
| 18373098 | SHIFTED MULTI-VIA CONNECTION FOR HYBRID BONDING | PATEL, REEMA | 2812 | §103 | Final Rejection | — | Pending | Sep 26, 2023 |
| 18552108 | SUBSTRATE LIQUID-TREATMENT DEVICE | MACARTHUR, SYLVIA | 1716 | §103 | Final Rejection | 14d | Pending | Sep 22, 2023 |
| 18369219 | SUBSTRATE PROCESSING METHOD, COMPONENT PROCESSING METHOD, AND SUBSTRATE PROCESSING APPARATUS | LEE, AIDEN Y | 1718 | §102§103§112Other | Final Rejection | 19d overdue | Pending | Sep 18, 2023 |
| 18368110 | ETCHING METHOD AND ETCHING APPARATUS | TRAN, BINH X | 1713 | §103 | Final Rejection | — | Pending | Sep 14, 2023 |
| 18550535 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | BAREFORD, KATHERINE A | 1718 | §103§112 | Non-Final OA | — | Pending | Sep 14, 2023 |
| 18367742 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | LEE, KEVIN G | 1711 | §103 | Final Rejection | — | Pending | Sep 13, 2023 |
| 18243059 | INFORMATION PROCESSING APPARATUS AND PARAMETER CONTROL METHOD | BARBEE, MANUEL L | 2857 | §101§102 | Final Rejection | 46d | Pending | Sep 06, 2023 |
| 18240010 | PLASMA PROCESSING APPARATUS | CROWELL, ANNA M | 1716 | §103DP | Final Rejection | — | Pending | Aug 30, 2023 |
| 18454948 | PROCESSING SYSTEM AND PROCESSING METHOD | DRODGE, JOSEPH W | 1735 | §102§103§112 | Non-Final OA | — | Pending | Aug 24, 2023 |
| 18237409 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | KENDALL, BENJAMIN R | 2896 | §103 | Non-Final OA | — | Pending | Aug 24, 2023 |
| 18453350 | PLASMA PROCESSING APPARATUS | CHEN, KEATH T | 1716 | §103 | Non-Final OA | — | Pending | Aug 22, 2023 |
| 18263920 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | LOUIE, MANDY C | 1718 | §103 | Final Rejection | 22d | Pending | Aug 02, 2023 |
| 18227370 | PLASMA PROCESSING APPARATUS AND METHOD FOR CONTROLLING SOURCE FREQUENCY OF SOURCE RADIO-FREQUENCY POWER | YU, YUECHUAN | 1718 | §102§103 | Non-Final OA | — | Pending | Jul 28, 2023 |
| 18360384 | SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS | CROWELL, ANNA M | 1716 | §103 | Final Rejection | — | Pending | Jul 27, 2023 |
| 18359783 | APPARATUS AND METHOD FOR PLASMA PROCESSING | KENDALL, BENJAMIN R | 2896 | §103 | Non-Final OA | 18d overdue | Pending | Jul 26, 2023 |
| 18223703 | INFORMATION PROCESSING APPARATUS, STORAGE MEDIUM, AND PROCESS CONDITION OPTIMIZATION METHOD | KITT, STEPHEN A | 1717 | §102§103 | Non-Final OA | — | Pending | Jul 19, 2023 |
| 18353300 | SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND RECORDING MEDIUM | RIDDLE, CHRISTINA A | 2882 | §103 | Final Rejection | 5d | Pending | Jul 17, 2023 |
| 18353747 | PLASMA PROCESSING APPARATUS AND PLASMA STATE ESTIMATION METHOD | CHEN, KEATH T | 1716 | §101§103 | Final Rejection | 33d | Pending | Jul 17, 2023 |
| 18353757 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | KACKAR, RAM N | 1716 | §103 | Final Rejection | 55d | Pending | Jul 17, 2023 |
| 18210368 | HEAT TREATMENT APPARATUS AND TEMPERATURE REGULATION METHOD OF HEAT TREATMENT APPARATUS | GIORDANO, MICHAEL JAMES | 3762 | §102§103§112 | Final Rejection | 62d | Pending | Jun 15, 2023 |
| 18206106 | MOUNTING PAD, MOUNTING MECHANISM, AND SUBSTRATE TRANSFER MECHANISM | LEE, GILBERT Y | 3675 | §112 | Non-Final OA | — | Pending | Jun 06, 2023 |
| 18329372 | VACUUM HEAT TREATMENT APPARATUS | GIORDANO, MICHAEL JAMES | 3762 | §112 | Final Rejection | 49d overdue | Pending | Jun 05, 2023 |
| 18326266 | HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD, AND RECORDING MEDIUM | ADHIKARI DAWADI, BIPANA | 2898 | §103§112 | Final Rejection | 31d overdue | Pending | May 31, 2023 |
| 18325423 | ETCHING METHOD AND PLASMA PROCESSING APPARATUS | KLUNK, MARGARET D | 1716 | §103 | Final Rejection | 28d | Pending | May 30, 2023 |
| 18319419 | ETCHING METHOD AND PLASMA PROCESSING APPARATUS | LAOBAK, ANDREW KEELAN | 1713 | §103 | Non-Final OA | — | Pending | May 17, 2023 |
| 18035401 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE | LUND, JEFFRIE ROBERT | 1716 | §103 | Non-Final OA | — | Pending | May 04, 2023 |
| 18249552 | PLASMA PROCESSING APPARATUS | REYES, JOSHUA NATHANIEL PI | 1718 | §103 | Non-Final OA | — | Pending | Apr 19, 2023 |
| 18298829 | Method and System for Plasma Processing | REYES, JOSHUA NATHANIEL PI | 1718 | §103 | Non-Final OA | 83d | Pending | Apr 11, 2023 |
| 18296944 | PLASMA PROCESSING SYSTEMS WITH MATCHING NETWORK AND METHODS | KACKAR, RAM N | 1716 | §103§112 | Non-Final OA | — | Pending | Apr 06, 2023 |
| 18193324 | Dry Developing Metal-Free Photoresists | LEE, ALEXANDER N | 1737 | §112 | Non-Final OA | 1d overdue | Pending | Mar 30, 2023 |
| 18027722 | METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND DEVICE FOR MANUFACTURING SEMICONDUCTOR DEVICE | TRAN, TONY | 2893 | §102§103 | Non-Final OA | — | Pending | Mar 22, 2023 |
| 18185674 | PROCESSING APPARATUS AND TEMPERATURE CONTROL METHOD | HUNTER, JOHN S | 3761 | §103 | Non-Final OA | — | Pending | Mar 17, 2023 |
| 18120050 | UPPER ELECTRODE AND PLASMA PROCESSING APPARATUS | CHAN, LAUREEN | 1716 | §103§112 | Final Rejection | 36d overdue | Pending | Mar 10, 2023 |
| 18025250 | RAW MATERIAL SUPPLY DEVICE AND RAW MATERIAL SUPPLY METHOD | TADESSE, YEWEBDAR T | 1717 | §103 | Final Rejection | — | Pending | Mar 08, 2023 |
| 18044386 | LASER PROCESSING APPARATUS AND LASER PROCESSING METHOD | ZABEL, ANDREW JOHN | 2818 | §103 | Non-Final OA | — | Pending | Mar 08, 2023 |
| 18179503 | Ceramic Pedestal Shaft with Heated/Cooled Gas Tube | BENNETT, CHARLEE | 1718 | §103§112 | Non-Final OA | — | Pending | Mar 07, 2023 |
| 18108391 | PLASMA PROCESSING APPARATUS | SWEELY, KURT D | 1718 | §103 | Final Rejection | — | Pending | Feb 10, 2023 |
| 18161298 | DEPOSITION METHOD AND DEPOSITION APPARATUS | SLUTSKER, JULIA | 2891 | §103 | Final Rejection | 61d | Pending | Jan 30, 2023 |
| 18159865 | SUBSTRATE PROCESSING APPARATUS AND METHOD FOR PROCESSING SUBSTRATE | ZERVIGON, RUDY | 1716 | §103 | Non-Final OA | — | Pending | Jan 26, 2023 |
| 18101676 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | CROWELL, ANNA M | 1716 | §103 | Final Rejection | 40d | Pending | Jan 26, 2023 |
| 18156618 | PLASMA PROCESSING APPARATUS | CHEN, KEATH T | 1716 | §103§112 | Final Rejection | — | Pending | Jan 19, 2023 |
| 18014884 | FILM FORMING APPARATUS AND FILM FORMING METHOD | ZERVIGON, RUDY | 1716 | §102 | Final Rejection | — | Pending | Jan 06, 2023 |
| 18088870 | PLASMA PROCESSING APPARATUS AND ELECTROSTATIC CHUCK MANUFACTURING METHOD | CROWELL, ANNA M | 1716 | §102§103§112 | Final Rejection | 79d | Pending | Dec 27, 2022 |
| 18055490 | HEAT TREATMENT APPARATUS | TREMARCHE, CONNOR J. | 3762 | §103 | Non-Final OA | — | Pending | Nov 15, 2022 |
| 17983128 | UPPER ELECTRODE AND PLASMA PROCESSING APPARATUS | CHEN, KEATH T | 1716 | §103 | Non-Final OA | — | Pending | Nov 08, 2022 |
| 17997558 | REPLACING APPARATUS AND REPLACING METHOD | CADUGAN, ERICA E | 3722 | §103§112 | Non-Final OA | 2d overdue | Pending | Oct 31, 2022 |
| 17996524 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD | LEE, AIDEN Y | 1718 | §103§112 | Non-Final OA | 12d | Pending | Oct 19, 2022 |
| 17950685 | HIGH RESOLUTION LATENT IMAGE PROCESSING, CONTRAST ENHANCEMENT AND THERMAL DEVELOPMENT | CHU, JOHN S Y | 1737 | §103Other | Non-Final OA | — | Pending | Sep 22, 2022 |
| 17943729 | Hybrid Development of EUV Resists | CHACKO DAVIS, DABORAH | 1737 | §103§112 | Non-Final OA | — | Pending | Sep 13, 2022 |
| 17943926 | PATTERNING A SEMICONDUCTOR WORKPIECE | CHACKO DAVIS, DABORAH | 1737 | §103 | Non-Final OA | — | Pending | Sep 13, 2022 |
| 17894296 | ELECTROSTATIC CHUCK, SUBSTRATE SUPPORT, PLASMA PROCESSING APPARATUS, AND METHOD OF MANUFACTURING ELECTROSTATIC CHUCK | CROWELL, ANNA M | 1716 | §103 | Final Rejection | 12d | Pending | Aug 24, 2022 |
| 17893736 | METHOD OF MAKING A PLURALITY OF 3D SEMICONDUCTOR DEVICES WITH ENHANCED MOBILITY AND CONDUCTIVITY | BAIG, ANEESA RIAZ | 2814 | §112 | Final Rejection | 145d overdue | Pending | Aug 23, 2022 |
| 17890766 | METHOD TO ENHANCE LITHOGRAPHY PATTERN CREATION USING SEMICONDUCTOR STRESS FILM TUNING | CLEVELAND, MICHAEL B | 1712 | §102§103Other | Non-Final OA | — | Pending | Aug 18, 2022 |
| 17817091 | ACCOMMODATION CONTAINER AND CHARGING METHOD FOR SUBSTRATE-SHAPED SENSOR | KOTOWSKI, LISA MICHELLE | 2859 | §103Other | Non-Final OA | 5d overdue | Pending | Aug 03, 2022 |
| 17759648 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | BAREFORD, KATHERINE A | 1718 | §103§112 | Final Rejection | — | Pending | Jul 28, 2022 |
| 17862889 | SEMICONDUCTOR MANUFACTURING APPARATUS, CONDITION COMPENSATION METHOD, AND PROGRAM | BAND, MICHAEL A | 1794 | §103 | Non-Final OA | — | Pending | Jul 12, 2022 |
| 17850250 | SUBSTRATE SUPPORT, SUBSTRATE SUPPORT ASSEMBLY, AND PLASMA PROCESSING APPARATUS | BALDWIN, GORDON | 1718 | §103 | Final Rejection | — | Pending | Jun 27, 2022 |
| 17848596 | PLASMA PROCESSING APPARATUS AND SUBSTRATE SUPPORT | REYES, JOSHUA NATHANIEL PI | 1718 | §103§112 | Final Rejection | — | Pending | Jun 24, 2022 |
| 17757781 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | REYES, JOSHUA NATHANIEL PI | 1718 | §103 | Final Rejection | 51d overdue | Pending | Jun 21, 2022 |
| 17845354 | SHOWER HEAD AND PLASMA PROCESSING APPARATUS | ZERVIGON, RUDY | 1718 | §103 | Final Rejection | 91d overdue | Pending | Jun 21, 2022 |
| 17786745 | FILM FORMING METHOD AND FILM FORMING SYSTEM | ZHU, SHENG-BAI | 2897 | §103 | Final Rejection | 26d | Pending | Jun 17, 2022 |
| 17756980 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | NUCKOLS, TIFFANY Z | 1716 | §103 | Non-Final OA | — | Pending | Jun 07, 2022 |
| 17756373 | INFERENCE DEVICE, INFERENCE METHOD AND INFERENCE PROGRAM FOR ANALYZING MANUFACTURING TIME-SERIES DATA USING A PLURALITY OF NETWORK SECTIONS | AGRAWAL, SHISHIR | 2123 | §101§103 | Final Rejection | 60d overdue | Pending | May 24, 2022 |
| 17747861 | PLASMA PROCESSING APPARATUS | KENDALL, BENJAMIN R | 2896 | §103 | Non-Final OA | 31d overdue | Pending | May 18, 2022 |
| 17736048 | SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS | FORD, NATHAN K | 1716 | §103§112 | Non-Final OA | — | Pending | May 03, 2022 |
| 17753886 | GAS SUPPLY DEVICE AND GAS SUPPLY METHOD | TUROCY, DAVID P | 1718 | §103 | Non-Final OA | — | Pending | Mar 17, 2022 |
| 17542874 | PLASMA PROCESSING APPARATUS | MOORE, KARLA A | 1716 | §112 | Final Rejection | — | Pending | Dec 06, 2021 |
| 17456609 | METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS | CRAMER, HALEE PAIGE | 2891 | §103 | Final Rejection | — | Pending | Nov 26, 2021 |
| 17501889 | PLASMA PROCESSING APPARATUS | MOORE, KARLA A | 1716 | §103§112 | Final Rejection | 57d | Pending | Oct 14, 2021 |
| 17598339 | SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD | FERDOUSI, FAHMIDA NMN | 3761 | §103 | Non-Final OA | 3d overdue | Pending | Sep 27, 2021 |
| 17428597 | FILM FORMING APPARATUS AND FILM FORMING METHOD | BAND, MICHAEL A | 1794 | §103Other | Non-Final OA | 33d | Pending | Aug 04, 2021 |
| 17310258 | FILM-FORMING METHOD, FILM-FORMING APPARATUS, AND OXIDATION METHOD | HRNJIC, ADIN | 2817 | §103 | Non-Final OA | — | Pending | Jul 27, 2021 |
| 17347824 | DRESSING APPARATUS AND DRESSING METHOD FOR SUBSTRATE REAR SURFACE POLISHING MEMBER | POON, DANA LEE | 3723 | §103 | Non-Final OA | — | Pending | Jun 15, 2021 |
| 17183138 | SENSOR TECHNOLOGY INTEGRATION INTO COATING TRACK | MELLOTT, JAMES M | 1759 | §103 | Final Rejection | 71d | Pending | Feb 23, 2021 |
| 17118158 | PART FOR SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING SYSTEM | KIRKWOOD, SPENCER HAMMETT | 3761 | §103 | Final Rejection | — | Pending | Dec 10, 2020 |
| 17037087 | METHODS AND SYSTEMS TO MONITOR, CONTROL, AND SYNCHRONIZE DISPENSE SYSTEMS | LOPEZ ALVAREZ, OLVIN | 2117 | §101§103 | Final Rejection | — | Pending | Sep 29, 2020 |